• Title/Summary/Keyword: Wet and Dry technique

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Polysilicon anti-sticking structure by grain etching technique (결정립 식각 기술을 이용한 다결정 실리콘 부착 방지 구조)

  • 이영주;박명규;전국진
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.2
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    • pp.60-69
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    • 1998
  • Polysilicon surface mdoification tecnique is developed to reduce the sticking of microstructures fabricated by micromachining. Modified anti-sticking grain holes are simply formed by two-step dry eth without additional photolithography nor deposition of thin films. Both process-induced sticking and in-use sticking are successfully reduced more than two times by adopting grain holed polysilicon substrate. A sticking model for cantilever beam is derived. This model includes bending moment stems from stress gradient along the thickness directionof structural polysilicon. Because the surface tension of rinse liquid and the surface energy of the solids to be stuk tend to decrease in recently developed anti-sticking techniques, the effect of stress gradient will play an important role to analyze the sticking phenomena. Effect of the temperature during post-release rinse and dry is modelled and verified experimentally. Based on developed anti-sticking polysilicon structure and the sticking model, sticking of microstructure, fabricated by simple wet process including sacrificial layer etch and rinse with deionized water without special equimpment for post-release rinse and dry was alleviated more than 3.5 times.

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A Novel Technoque for Characterization of Membranes

  • Webber, Ronald;Jena, Akshaya;Gupta, Krishna
    • Proceedings of the Membrane Society of Korea Conference
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    • 2001.10a
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    • pp.39-50
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    • 2001
  • The performance of membranes is governed their pore struture. Pore structures of porous materials can be determined by a number of techniques. However, The novel technique, capillary folw porometry has a number of advantages. In this technique, the sample is brought in contact with a liquid that fills the pores in the membrane spontaneously. Gas under pressure is used to force the liquid from the pores and increase gas flow. Gas flow rate measured as a function of gas pressure in wet and dry samples yield data on the largest pore size, the mean flow pore size, flow distribution and permeability. Pore characteristics of a number of membranes were measured using this technique. This technique did not require the use of any toxic material and the pressure employed was low. Capillary flow porometry is a suitable technique for measurement of the pore structure of many membranes.

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Simulation of dam inflow using a square grid and physically based distributed model (격자 기반의 물리적 분포형 모형을 이용한 댐 유입량 모의)

  • Choi, Yun Seok;Choi, Si Jung
    • Journal of Korea Water Resources Association
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    • v.57 no.4
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    • pp.289-300
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    • 2024
  • The purpose of this study is to evaluate the applicability of the GRM (Grid based rainfall-Runoff Model) to the continuous simulation by simulating the dam inflow. The GRM was previously developed for the simulation of rainfall-runoff events but has recently been improved to enable continuous simulation. The target watersheds are Chungju dam, Andong dam, Yongdam dam, and Sumjingang dam basins, and runoff models were constructed with the spatial resolution of 500 m × 500 m. The simulation period is 21 years (2001 to 2021). The simulation results were evaluated over the 17 year period (2005 to 2021), and were divided into three data periods: total duration, wet season (June to September), and dry season (October to May), and compared with the observed daily inflow of each dam. Nash-Sutcliffe efficiency (NSE), Kling-Gupta efficiency (KGE), correlation coefficient (CC), and total volume error (VE) were used to evaluate the fitness of the simulation results. As a result of evaluating the simulated dam inflow, the observed data could be well reproduced in the total duration and wet season, and the dry season also showed good simulation results considering the uncertainty of low-flow data. As a result of the study, it was found that the continuous simulation technique of the GRM model was properly implemented and the model was sufficiently applicable to the simulation of dam inflow in this study.

Effect of DP Finishing Conditions on the Mechanical Properties and Hand of Cotton Fabrics (DP 가공조건이 면직물의 역학적 성질과 태에 미치는 영향)

  • 신윤숙
    • Journal of the Korean Society of Clothing and Textiles
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    • v.24 no.3
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    • pp.440-447
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    • 2000
  • The effects of DP finishing conditions including process technique and finishing agent on the mechanical properties and hand of cotton fabrics were investigated. 100% cotton fabrics were treated with NMA/DMDHEU and NMA/YF using wet-fixation and steam-fixation process. For comparison, conventional pad-dry-cure process was used with DMDHEU. After DP finishing, tensile and compressional resilience increased and bending hysteresis decreased, resulting in the improvement of dimensional stability of cotton fabric. WF and SF process rendered fabrics better shear properties, tensile energy, and compressional linearity and energy than PDC process. However, SF process produced fabrics with higher geometrical roughness than WF process. After DP finishing, primary hand values except Koshi increased, resulting in the increase of total hand value of cotton fabric.

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Optimization of Reverse Engineering Processes for Cu Interconnected Devices

  • Koh, Jin Won;Yang, Jun Mo;Lee, Hyung Gyoo;Park, Keun Hyung
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.6
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    • pp.304-307
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    • 2013
  • Reverse engineering of semiconductor devices utilizes delayering processes, in order to identify how the interconnection lines are stacked over transistor gates. Cu metal has been used in recent fabrication technologies, and de-processes becomes more difficult with the shrinking device dimensions. In this article, reverse engineering technologies to reveal the Cu interconnection lines and Cu via-plugs embedded in dielectric layers are investigated. Stacked dielectric layers are removed by $CF_4$ plasma etching, then the exposed planar Cu metal lines and via-plugs are selectively delineated by wet chemical solution, instead of the commonly used plasma-based dry etch. As a result, we have been successful in extracting the layouts of multiple layers within a system IC, and this technique can be applicable to other logic IC, analog IC, and CMOS IC, etc.

A Study on the Simulation of Daily Precipitation Considering Spatial Probability Characteristics (공간적(空間的) 확률구조(確率構造)를 고려(考慮)한 일강수량(日降水量)의 모의발생(模擬發生)에 관한 연구(硏究))

  • Lee, Jae Joon;Lee, Won Hwan
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.6 no.3
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    • pp.31-42
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    • 1986
  • The probabilistic model was developed to give a spatial simlation of precipitation series to solve the problem of future need of water resources. The simulation of daily precipitation series at the sub-base stations was induced from the spatial structure of rainfall occurrence probability between the base station and the sub-base stations in the watershed. In this study Hadong was chosen as the base station in Seomjin river basin and Imsil, Boseong, Soonchang, Dongbok, and Gurye were also selected as the sub-base stations. The results of this study are as follows; 1) The separation technique of spatial precipitation state showed effectiveness in the spatial simulation method because the occurrence probability by each precipitation state (Wet-Wet, Dry-Wet, Wet-Dry, and Dry- Dry system) represented the stable value. 2) The daily precipitation series of the sub-base stations which were simulated from those of the base station showed that the simulated annual mean precipitations were similar to the observed data, but the precipitations in summer were decreased slightly. 3) The correlogram and power spectrum of the simulated monthly precipitation for the sub-base stations showed those of the observed sample with good agreement.

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A Study of Thermal insulation method using extruded and expanded Poly-ethylene panel contacted to the bathroom inner wall facing on the outside (외기와 면하는 욕실 내측벽에 압출 발포폴리스티렌 패널을 사용한 단열시공기술에 관한 연구)

  • Lee Jong-Jin;Oh Chang-Won;Yeo Sung-Yi
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2005.11a
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    • pp.11-16
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    • 2005
  • This study is for the insulation construction of inner wall in a bathroom facing on the outside in the housings. This new dry construction method can be constructed by a dry panel which is bonded tiles on the extruded and expanded poly-ethylene panel in stead of the existing wet construction method. Compared to the existing method, this panel is light movably and is constructed simply. These representative construction merits are getting wide span in a bath due to reducing wall thickness and saving construction period.

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The Study on Wafer Cleaning Using Excimer Laser (엑사이머 레이저를 이용한 웨이퍼 크리닝에 관한 고찰)

  • 윤경구;김재구;이성국;최두선;신보성;황경현;정재경
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.05a
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    • pp.743-746
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    • 2000
  • The removal of contaminants of silicon wafers has been investigated by various methods. Laser cleaning is the new dry cleaning technique to replace wafer wet cleaning in the near future. A dry laser cleaning uses inert gas jet to remove contaminant particles lifted off by the action of a KrF excimer laser. A laser cleaning model is developed to simulate the cleaning process and analyze the influence of contaminant particles and experimental parameters on laser cleaning efficiency. The model demonstrates that various types of submicrometer-sized particles from the front sides of silicon wafer can be efficiently removed by laser cleaning. The laser cleaning is explained by a particle adhesion model. including van der Waals forces and hydrogen bonding, and a particle removal model involving rapid thermal expansion of the substrate due to the thermoelastic effect. In addition, the experiment of wafer laser cleaning using KrF excimer laser was conducted to remove various contaminant particles.

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THE EFFECT OF THE REMOVAL OF CHONDROITIN SULFATE ON BOND STRENGTH OF DENTIN ADHESIVES AND COLLAGEN ARCHITECTURE (비교원성 단백질이 상아질 접착제의 결합강도와 교원질의 형태에 미치는 영향)

  • Kim, Jong-Ryul;Park, Sang-Jin;Choi, Gi-Woon;Choi, Kyoung-Kyu
    • Restorative Dentistry and Endodontics
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    • v.35 no.3
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    • pp.211-221
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    • 2010
  • Proteoglycan is highly hydrophilic and negatively charged which enable them attract the water. The objective of study was to investigate the effects of Proteoglycan on microtensile bond strength of dentin adhesives and on architecture of dentin collagen matrix of acid etched dentin by removing the chondroitin sulphate attached on Proteoglycan. A flat dentin surface in mid-coronal portion of tooth was prepared. After acid etching, half of the specimens were immersed in 0.1 U/mL chondroitinase ABC (C-ABC) for 48 h at $37^{\circ}C$, while the other half were stored in distilled water. Specimens were bonded with the dentin adhesive using three different bonding techniques (wet, dry and re-wet) followed by microtensile bond strength test. SEM examination was done with debonded specimen, resin-dentin interface and acid-etched dentin surface with/without C-ABC treatment. For the subgroups using wet-bonding or dry-bonding technique, microtensile bond strength showed no significant difference after C-ABC treatment (p > 0.05). Nevertheless, the subgroup using rewetting technique after air dry in the Single Bond 2 group demonstrated a significant decrease of microtensile bond strength after C-ABC treatment. Collagen architecture is loosely packed and some fibrils are aggregated together and relatively collapsed compared with normal acid-etched wet dentin after C-ABC treatment. Further studies are necessary for the contribution to the collagen architecture of noncollagenous protein under the various clinical situations and several dentin conditioners and are also needed about long-term effect on bond strength of dentin adhesive.

DURABILITY TESTING OF MARINE REINFORCED CONCRETE UNDER FATIGUE LOADING, PART I AND II (피로하중을 받는 해양 콘크리트의 내구성 연구)

  • ;D. V. Reddy
    • Proceedings of the Korea Concrete Institute Conference
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    • 1996.04a
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    • pp.348-353
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    • 1996
  • This study addresses the evaluation of the durability of reinforced concrete marine structures subjected to fatigue loading. The laboratory investigation was carried out on full and half size reinforced concrete specimens with three different water cement ratios (0.3, 0.4, and 0.56), static and fatigue loading conditions, and epoxy-coated and regular black steel reinforcements. The marine tidal zone was simulated by alternate filling and draining of the tank (wet and dry cycled), and a galvanostatic corrosion technique to accelerate corrosion of reinforcement was used. Half-cell potentials and changes of crack width were measured periodically during the exposure and followed by ultimate strength testing. The significant findings include adverse effect of fatigue loading, existence of an explicit size effect, poor performance of epoxy coated steel, and negative effect of increasing water/cement ratio.

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