• Tribology and Lubricants
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• v.11 no.5
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• pp.59-65
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• 1995

Tribological behaviors of nitrogen incorporated amorphous diamond-like carbon films were experimentally measured under a vacuum ($3 \times 10^{-5}$ Torr) using a ball (AISI 52100 steel)-on-disk wear-rig. Nitrogen incorporated DLC films were deposited by r.f. plasma assisted chemical vapor deposition method. Mixtures of benzene and ammonia or nitrogen gases were used as the reaction gases for the r.f. PACVD, and Si (100) wafer was used as the substrate. In the tribo-test, effects of DLC film thickness and normal load in friction were measured and discussed. Results showed that friction of nitrogen incorporated DLC films from a mixture gas of benzene and ammonia was lower than that of 100% benzene, specially in the measurement of minimum coefficient of friction. Differences in frictional characteristics of nitrogen incorporated DLC films were explained with the changes in chemical structures of the films. Result also showed that friction of DLC films increased with the sliding contact cycle, which remarkably accompanied with roll-shaped wear debris. Mechanisms and roles of the polymer-like wear debris were presented and discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.988-992
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• 2002

Ultrasonic machining technology has been developed over recent years for the manufacture of and quality-assured precision parts for several industrial application such as optics, semiconductors, aerospace, and automobile application. The past decade has seen a tremendous in the use of ceramics in structural application. The excellent thermal, chemical and wear resistance of these material can be realized because of recent improvements in the overall strength and uniformity of advanced ceramics. Ultrasonic machining, in which abrasive particles in slurry with water are presented to the work surface in the presence of an ultrasonic-vibrating tool, is process which should be of considerable interest, as its potential is not limited by the electrical or chemical characteristics of the work material, making it suitable for application to ceramics. This paper intends to further the understanding of the basic mechanism of ultrasonic machining for brittle material and ultrasonic machining of ceramics based in the fracture-mechanic concept has been analyzed.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.857-858
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• 2006

In order to clarify the wear resistance as cutting tools, the effect of oxygen addition on oxidation behavior of the ${\beta}-Si_3N_4$ ceramics with 5 mass% $Y_2O_3$ and 2 or 4 mass% $Al_2O_3$ was investigated by performing oxidation tests in air at $1300^{\circ}$ to $1400^{\circ}C$ and cutting performance tests. From test results, we could conclude that the mechanical properties of ${\beta}-Si_3N_4$ ceramics depending on oxygen introduction are much effective on cutting performance improvements of ${\beta}-Si_3N_4$ ceramics.

• Journal of the Semiconductor & Display Technology
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• v.10 no.3
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• pp.35-42
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• 2011

This paper describes the characteristics of high speed grinding and the influence of wheel surface speed V and a grindability of the grinding materials. The various fine ceramics pieces was ground by metal and vitrified bonded diamond wheel. The surface roughness of fine ceramics(Zirconia($ZrO_2$), Silicon Carbide(SiC), Silicon Nitride($Si_3N_4$), Alumina($Al_2O_3$)) decreases from $0.05{\mu}m(R_{max})$ to $0.025{\mu}m(R_{max})$ when the wheel speed at grinding point increases the wheel speed. Relation between the temperature at grinding point and surface roughness was linear. Abrasive jet machining(AJM), a specialized from of shot blasting, is considered one of the most helpful micro machining methods for hard and brittle materials such as glasses and ceramics by constant pressure grinding.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.321-322
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• 2006

Nano-structured ceramics, which consist of structural elements with nanometer-size crystallites, are expected to show various unusual properties. We developed the novel nano-structured ceramics which consists of $Si_3N_4$ and TiN and a self-lubricant material. The ceramics was fabricated by powder metallurgy process using mechano-chemical grinding process and short-time sintering process. Each grain size of matrix and the self-lubricant particle was under about 50 nm and a few namometer. It showed high wear resistance and low friction coefficient by controlling of microstructure.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.5
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• pp.91-96
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• 2006

The friction and wear properties of ceramics are very important in the applications to engineering ceramic parts such as seal rings, pump parts, automobile meter parts, and so on. In this study, the effects of each other purity on the mechanical and tribological properties of purity zirconia ceramics were investigated. Also in order to determine the effects of sliding distance, sliding speed, contact load, friction coefficient, the amount of worn out material at a certain time, and the prepared composites were measured. Crystalline phases and microstructure were examined with XRD and SEM. The results show that we obtained the good properties of friction coefficient and wear resistance at the purity 99.5% of zirconia. than this of the purity 95% were great at the wear amount of worn out material.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.04a
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• pp.139-145
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• 1998

This paper addresses the R-curve properties, wear resistance, and erosion resistance of the two silicon carbide ceramics with different microstructures, i.e. , fine grained SiC and in situ-toughened SiC(IST SIC). Fine grained SiC exhibits a relatively flat R-curve behavior whereas the IST SiC exhibits a increasing R-curve behavior. The increasing R-curve behavior in IST SiC is attributed to relatively weak grain boundaries. The rate of material removal during wear tests and erosion tests was higher for IST SiC than that for fine grained SiC. This is attributed to the weaker grain boundaries in IST SiC than that in fine grained SiC. It is implied that fracture toughness in short crack regime should be taken into consideration in the interpretation of the microscopical material removal process. We show that the higher the strength of grain boundaries is, the higher wear and erosion resistances are.

• Tribology and Lubricants
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• v.11 no.4
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• pp.21-27
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• 1995

The effects of interface boundary strength on wear and wear transition during sliding have been investigated in silicon carbide ceramics. Three different microstructures, i.e., solid state sintered silicon carbide, liquid phase sintered silicon carbide and liquid phase sintered silicon carbide composite reinforced with TiB$_{2}$ particulates, were designed by hot pressing. Examinations of crack patterns and fracture modes indicated that interface boundaries were relatively strong between silicon carbide grains in the solid state sintered silicon carbide, intermediate in the liquid phase sintered silicon carbide and weak between silicon carbide grains and TiB$_{2}$ particles in the composite. Wear data and examinations of worn surfaces revealed that the wear behavior of these silicon carbide ceramics could be significantly affected by the interface strength. In the solid state sintered silicon carbide, the wear occurred by a grooving process. In the liquid phase sintered silicon carbide and composite, on the other hand, an abrupt transition in wear mechanism from initial grooving to grain pull-out process occurred during the test. The transition occurred significantly earlier in the composite than in the carbide.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.5
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• pp.439-445
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• 2005

The tribological properties of ceramics are very important in the application to engineering ceramic parts such as seal rings, pump parts, meter parts, and so on. In this study, the effects of each other purity on the mechanical and tribological properties of alumina and zirconia ceramics were investigated. Sliding distance, sliding speed, contact load. friction coefficient, the amount of worn out material at a certain time, and the prepared composites were measured. Crystalline phases and microstructure were examined with XRD and SEM. We obtained the good properties of friction coefficient and wear resistance at the purity 99.7$\%$ of alumina. However, The purity 95$\%$ were great at the wear amount of worn out material.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.2 s.173
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• pp.448-454
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• 2000

This study was undertaken to investigate tribological characteristics with atmospheric pressure for three alumina ceramics of different purity, such as, 85 %, 95 % and 99.7 %. The wear test was carried out using the wear test device which was designed for this study in air, $10^-2$ Torr and $10^-4$ Torr. The friction coefficient depends entirely on atmospheric pressure and alumina with lower purity than higher purity has been much affected by heat accumulation. The friction surface of ceramics have been protected in the air by the influence of the oxides transferred from STB2. However, the protective layer can not be formed due to the decrease of oxygen in vacuum.