• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.109.4-109
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• 2001

We have developed a laser ultrasonic system for visualization of elastic waves propagating on a solid surface, in order to visualize ultrasonic waves propagating on opaque media. This system can produce a series of successive images as an animation of wave propagation, because of scanning an optical heterodyne probe to measure surface transient displacements. Using this visualization technique, we observed the scattering and diffraction of ultrasonic waves around various shapes of artificial defects, and examined its application to nondestructive inspection. This imaging system provides various kinds of visualization images such as propagation image, amplitude image, arrival time image and velocity image. We have been confident that this technique is available for nondestructive inspection and materials ...

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.9
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• pp.781-785
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• 2000

Chalcogenide glasses are suggested as a candidate for optical recording. In this study, we have investigated the holography recording and reconstruction of the polarization state in chalcogenide As$_{40}$ Ge$_{10}$Se$_{15}$ S$_{35}$ thin films. We have used a He-Ne laser light(633nm) to probe and record of the grating. Also the polarization state of object beam was modulated with a λ/4 wave plate. The polarization state of the +1st order diffracted beam was generated by readout of the grating with a linearly polarized reference beam. It was the same-handed polarization state as the polarization state of the recording beam. The result is shown that the diffraction efficiency of circularly polarized recording represents higher than other polarization state.ate.e.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04b
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• pp.377-382
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• 1995

Conventional measurement methods using ultrasonic wave or x-ray, eddy current for non-destructive testing(NDT) in nuclear power plants and other industrial plants have been performed as the method of contact with objects to be inspected. With this reason these methods have been taken relatively much time and the inspected area is limited by the location of probe or film. But holographic interferometry which is a non-contact optical measurement method using a coherent light source has an advantage that the quantitative measurement can be performed at a time. In this paper a new method using holographic interferometry and image processing for detecting internal flaws of pressure vessels is presented.

• Journal of the Korean institute of surface engineering
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• v.32 no.6
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• pp.658-664
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• 1999

Helicon sources are attractive for plasma processing because they provide high plasma density in low magnetic fields. Helicon waves were excited by a Nagoya type III antenna in a magnetized plasma column. Plasma parameters were measured with a double probe, and the structure and adsorption of the helicon wave fields were determined with the probes. Argon is fed through a MFC (mass flow controller) for operation pressure of 10~110 mtorr. A 13.56 MHz r.f. power of 50~450 W is induced through the antenna. The plasma density and electron temperature are measured as functions of external magnetic field, r.f. power and pressure. The plasma density as functions of r.f. power and magnetic field at a constant pressure increased linearly, and the electron temperature did not change largely with various operation parameters and the value was around 5~7 eV.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.41 no.5
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• pp.492-501
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• 1992

In this paper, an ion analyzer is used in conjunction with a Langmuir probe to study the chracteristics of ECR plasma such as the ion temperature, ion current density and electron temperature as the operating pressure, ${\mu}$-wave power and axial position change, Silicon etching has been performed with RF-biasing and its etching chracteristics have been discussed in terms of the ion energy distribution function. The maximum value of ion current density appears in the range of 10S0-3T mbar and the broadening of ion energy distribution function increases as pressure increases. Therefore, as pressure decreases, anisotropy increases but selectivity to photoresist decreases.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.312-315
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• 2000

In this study, we have investigated the holography recording and reconstruction of the polarization state in chalcogenide $A_{s40}Ge_{10}Se_{15}S_{35}4 thin films using a He-Ne laser light(633nm). The thickness of thin films is a 8677${\AA}$ and 9093${\AA}$. A He-Ne laser used to probe and record of the grating. Also the polarization state of object beam modulated with a $\lambda/4$ wave plate. The polarization state of the +lst order diffracted beam generated by readout of the grating with a linearly polarized reference beam. It was the same-handed polarization state as the polarization state of the recording beam. The diffraction efficiency of circularly polarized recording represented higher than other polarization state.

• Journal of the Korean institute of surface engineering
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• v.50 no.5
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• pp.373-379
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• 2017

Dry processes like evaporation and sputtering in vacuum chamber are difficult to make a uniform, large area and high quality film on thin PET substrate because of PET degradation and bad adhesion. On the other hand, wet processes like electro or electroless plating have complex processes and require high environmental cost. In this study, we successfully prepared $2{\mu}m$ Zn/Cu/Ni multilayers coated on $12{\mu}m$ polyethylene terephthalate (PET) substrate by using dry-wet mixing processes. Their surface electric resistances were evaluated around $0.2{\Omega}$ by using 4 probe measurements. Furthermore, their corrosion resistance also evaluated by natural potential test and compared with other wet, dry and mixing process samples.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.820-823
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• 2000

In this study, we have investigated the holography recording and reconstruction of the polarization state in chalcogenide $As_{40}$$Ge_{10}$$Se_{15}$$S_{35}$ thin films using a He-Ne laser light(633nm). The thickness of thin films is a 8677${\AA}$ and 9093${\AA}$. A He-Ne laser used to probe and record of the grating. Also the, polarization state of object beam modulated with a $\lambda/4$ wave plate. The polarization state of the +1st order diffracted beam generated by readout of the grating with a linearly polarized reference beam. It was the same-handed polarization state as the polarization state of the recording beam. The diffraction efficiency of circularly polarized recording represented higher than other polarization state.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.471-471
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• 2010

대면적 디스플레이나 태양전지를 만들기 위해 식각 공정에 주로 이용되는 capacitively coupled plasma 장비의 크기에 대한 관심이 높아지고 있다. 특히, RF power를 사용함에 따라 높은 주파수로 올라갈수록 전극에 발생하는 standing wave effect로 인해 챔버 안의 전자기장의 세기가 균일하지 않고 그로 인해 plasma의 밀도 역시 균일하지 않다.[1] 이러한 plasma의 non-uniformity를 전극에 들어가는 power의 feeding 방법을 바꿔 가면서 해결해 보려고 하였다. ($0.48\;m\;{\times}\;0.48\;m$)크기의 사각전극과 50 MHz의 RF power를 사용하였다. plasma의 분포는 ion probe를 통해 살펴 보았다.

• 한국가시화정보학회:학술대회논문집
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• 2002.11a
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• pp.31-34
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• 2002

Imaging techniques using x-ray beam at high energies (>6KeV) such as contact radiography, projection microscopy, and tomography have been used to nondestructively discern internal structure of objects in material science, biology, and medicine. This paper introduces the x-ray micro-imaging method using 1B2 micro-probe line of PAL (Pohang Accelerator Laboratory). Cross-sectional information on low electron density materials can be obtained by probing a sample with coherent synchrotron x-ray beam in an in-line holography setup. Living organism such as plants, insects are practically transparent to high energy x-rays and create phase shift images of x-ray wave front. X-ray micro-images of micro-bubbles of $20\~120\;{\mu}m$ diameter in an opaque tube were recorded. Clear phase contrast images were obtained at Interfaces between bubbles and surrounding liquid due to different decrements of refractive index.