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RF Power dependence in $YMnO_3$/Si(100) Structures ($YMnO_3$/Si(100) 구조의 RF Power 의존성)

  • 김진규;정순원;김용성;이남열;정상현;김광호;유병곤;이원재;유인규
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.755-758
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    • 2000
  • YMnO$_3$films have been deposited with different Rf powers of 60W, 80W, 100W, and 120W. The structural properties of YMnO$_3$films on Si(100) were analysed by XRD(X-ray diffraction). The c-axis oriented peaks of YMnO$_3$were observed deposited in YMnO$_3$/Si(100) structure of RF power at 87$0^{\circ}C$ in oxygen ambient, and the peaks were enlarged by increasing The RF powers. The dielectric constant of the film deposited at 100W and 120W of RF power were about 19, 20 respectively.

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Studies on the Microencapsulation of ${\omega}-3$ Polyunsaturated Fatty Acid (${\omega}-3$계 지방산의 미세캡슬화에 관한 연구)

  • Kim, Chul-Hyun;Lee, Kyung-Wook;Baick, Seung-Chun;Kwak, Hae-Soo;Kang, Jong-Ok
    • Korean Journal of Food Science and Technology
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    • v.28 no.4
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    • pp.743-749
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    • 1996
  • This study was carried out to investigate the microencapsulatuion of ${\omega}-3$ fatty acid isolated from fish oil and to obtain fundamental information on the utilization of the ${\omega}-3$ fatty acid in the dairy foods field. To obtain the desirable microencapsulation efficiency, 1.5% agar and 0.5% gelatin were used as coating materials, and 0.5% SFAN 60 (HLB 4.5 value) was used to maintain the emulsion stability. The optimal mixing ratio of coating material to core material was 8:2 (w/w). The thermostability of microencapsulated product was not maintained above $60^{\circ}C$. Microencapsulation efficiency was kept at about 90% at $4^{\circ}C$ and $10^{\circ}C$ for 7 days storage at various temperatures. At $20^{\circ}C$ and $30^{\circ}C$, however, about 80% microencapsulatuion efficiency was obtained for 3 days storage. About 80.57% microcapsule was destroyed by 1%> pepsin solution at $37^{\circ}C$ for 10 min.

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Effect of Current Density on the Crystal Structure of Ni-W Alloys Prepared by Electrodeposition (Ni-W 합금도금의 결정구조에 미치는 전류밀도의 영향)

  • Kim, Won-Baek;Lee, Cheol-Gyeong;Lee, Jae-Cheon;Seo, Chang-Yeol
    • Korean Journal of Materials Research
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    • v.8 no.10
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    • pp.898-904
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    • 1998
  • Ni-W alloys containing 10 to 50wt% W were prepared by electrodeposition. Tungsten content in the alloy increased with current density. X-ray diffraction analysis revealed that the alloy was crystalline phase when deposited at current densities lower than 50mA/${cm}^2$. Their crystal structure transformed to amorphous at higher current densities. In terms of tungsten content, the crystal -+ amorphous transition occurred at 40-46wt% which was identified by the 3 fold increase in the width of a diffraction peak. The lattice parameter of crystalline phase increased with W upto 40wt% which is higher than the solubility limit of W (about 30wt%) in Ni. Therefore, the alloys are considered to be Ni solid solution supersaturated with W. The amorphous Ni-W alloys were recrystallized by annealing them at temperatures over $400^{\circ}C$. This was evidenced by the appearance a strong [ 11 11 annealing texture. The supersaturated W was precipitated during the annealing at over $800^{\circ}C$. The current-density dependence of W content and crystallinity was utilized to produce alternating layers of crystalline (30wt% W) and amorphous (50wt%) phases which may exhibit unique mechanical and corrosion properties.

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Reliability Measurements and Thermal Stabilities of W-C-N Thin Films Using Nanoindenter (Nanoindenter를 이용한 W-C-N 박막의 신뢰도 측정과 열적 안정성 연구)

  • Kim, Joo-Young;Oh, Hwan-Won;Kim, Soo-In;Choi, Sung-Ho;Lee, Chang-Woo
    • Journal of the Korean Vacuum Society
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    • v.20 no.3
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    • pp.200-204
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    • 2011
  • In this paper, we deposited the tungsten carbon nitride (W-C-N; nitrogen gas flow of 2 sccm) and tungsten carbon (W-C) thin film on silicon substrate using rf magnetron sputter. Then the thin films annealed at $800^{\circ}C$ during 30 minute ($N_2$ gas ambient) for thermal damage. Nano-indenter was executed 16 points on thin film surface to measure the thermal stability, and we also propose the elastic modulus and the Weibull distribution, respectively. This nanotribology method provides statistically reliable information. From these results, the W-C-N thin film included nitrogen gas flow is more stable for film uniformities, physical properties and crystallinities than that of not included nitrogen gas flow.

Design a XML DBMS using RDBMS Based on XML Schema (관계형 DBMS를 이용한 XML 스키마 기반에 XML DBMS 설계)

  • Lee Sang-Tae;Lim Jong-Seon;Joo Kyung-Soo
    • Journal of the Korea Society of Computer and Information
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    • v.9 no.4 s.32
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    • pp.19-26
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    • 2004
  • XML DTD is defining expression of simple form for XML document, there is much difficulties to define structure of XML document. Solving XML DTD's problem, W3C was select XML schema by standard in 2001. This paper proposes a design to XML DBMS using Relational Database based on XML schema to be selected by standard from W3C to overcome XML DBMS's shortcoming using XML DTD.

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An Experimental Study on the Microstructure Characteristics of Cementitious Composites by MIP (MIP를 통한 혼합 시멘트계 재료의 미세구조 특성에 관한 실험적 연구)

  • Kim, Tae-Sang;Jung, Sang-Hwa;Chae, Seong-Tae;Lee, Bong-Chun;Woo, Young-Je;Song, Ha-Won
    • Proceedings of the Korea Concrete Institute Conference
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    • 2008.04a
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    • pp.533-536
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    • 2008
  • Recently, in Korea, there has been an increasing number of research papers published which are to improve durability of concrete, particularly by analyzing correlation between diffusivity of chloride and porosity/pore size distribution. In these studies, such test methods as mercury intrusion porosimetry(MIP), gas adsorption or image analysis method are used to analyze the microstructure of materials while MIP is most widely used for concrete. This study analyzes the results of porosity and pore size distribution of paste and concrete adding fly ash or blast furnace slag by using MIP equipment which is widely used for determining micro-porosity structure of cementitious materials. A variation in porosity and pore size distribution at the curing day 3, 7 and 28 has been observed by using MIP equipment for cement paste 35%, 40%, 45%, 50%, 55%, 60% of W/C when using $300kg/m^3$ of cement, 35%, 45%, 55% of W/C when replaced 60% with blast-furnace slag, and 35%, 45%, 55% of W/C when replaced 30% with fly ash. For long-term water cured normal OPC concrete and mixed concrete replaced 60% with blast-furnace slag powder, micro-structure of the sample has been analyzed by using MIP equipment when W/C indicated 40%, 45%, 50% respectively and the binder varied $300kg/m^3$, $350kg/m^3$, $400kg/m^3$, and $450kg/m^3$.

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Effects of Oxide Additions on Mechanical Properties and Microstructures of AlN Ceramics Prepared from Al-isopropoxide (Al-isopropoxide로부터 제조한 AlN 세라믹스의 기계적 성질과 미세구조에 미치는 산화물 첨가제의 영향)

  • 이홍림;황해진
    • Journal of the Korean Ceramic Society
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    • v.27 no.6
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    • pp.799-807
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    • 1990
  • In this study, effects of oxide additives on mechanical properties and microstructure of A1N and A1N polytype ceramics were investigated. Fine A1N powder was synthesized by nitriding alumiuim hydroxide prepared from Al-isopropoxide, at 1350$^{\circ}C$ for 10h in N2 atmosphere. By adding 3w/o Y2O3, 0.56w/o CaO, and 10w/o SiO2 to AlN powder, AlN and AlN polytype ceramics were prepared by hot-pressing under the pressure of 30 MPa at 1800$^{\circ}C$ for 1h. AlN ceramics with no additives formed considerable amount of AlON phase, while AlN ceramics doped with Y2O3 or CaO decreased AlON phase and formed Y-Al or Ca-Al oxide compound. AlN+10w/o SiO2(+3w/o Y2O3) composition produced AlON and AlN polytype compound having 21R as a major phase. Room temperature flexural strength of AlN ceramics with no additive was 246MPa, and room temperature flexural strength and critical temperature difference by thermal shock(ΔTc) of AlN ceramics dooped with Y2O3 or CaO were 532MPa/340$^{\circ}C$ and 423MPa/300$^{\circ}C$, respectively. Y2O3 and CaO used as sintering agent played roles of densification and oxygen removal of AlN ceramics, and affected grain growth/grain morphologies of AlN ceramics.

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W-B-C-N 확산방지막에서 질소농도에 따른 Stress 에 대한 연구

  • So, Ji-Seop;Lee, Channg-U
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.72-73
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    • 2005
  • Stress behavior was studied to investigate the internal behaviors of boron, carbon, and nitrogen in the 1000${\AA}$-thick tungsten boron carbon nitride (W-B-C-N) thin films. The impurities in the W-B-C-N thin films provide stuffing effects that were very effective for preventing the interdiffusion between interconnection metal and silicon substrate during the subsequent high temperature annealing process. The resistivity of W-B-C-N thin film decreases as an annealing temperature increase. The W-B-C-N thin films have compressive stress, and the stress value decreased up to $4.11\times10^{10}dyne/cm^2$ as an $N_2$ flow rate increases up to 3 sccm.

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Microstructure and Mechanical Properties of Cr-Mo Steels for Nuclear Industry Applications

  • Kim, Sung-Ho;Ryu, Woo-Seong;Kuk, Il-Hiun
    • Nuclear Engineering and Technology
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    • v.31 no.6
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    • pp.561-571
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    • 1999
  • Microstructure and mechanical properties of five Cr-Mo steels for nuclear industry applications have been investigated. Transmission electron microscopy, energy dispersive spectrometer, differential scanning calorimeter, hardness, tensile, and impact test were used to evaluate the Cr and W effect on the microstructure and mechanical properties. Microstructures of Cr-Mo steels after tempering are classified into three types : bainitic 2.25Cr-lMo steel, martensitic Mod.9Cr-lMo, HT9M, and HT9W steels, and dual phase HT9 steel. The majority of the precipitates were found to be M$_{23}$C$_{6}$ carbides. As minor phases, fine needle-like V(C,N), spherical NbC, fine needle-like Cr-rich Cr$_2$N, and Cr-rich M$_{7}$C$_3$were also found. Addition of 2wt.% W in Cr-Mo steels retarded the formation of subgrain and dissolution of Cr$_2$N precipitates. Hardness and ultimate tensile strength increased with increasing Cr content. Though Cr content of HT9W steel was lower than that of HT9 steel, the hardness of HT9W was higher due to the higher W content. W added HT9W steel had the highest ultimate tensile strength above $600^{\circ}C$. But impact toughness of W added steel (HT9W) and high Cr steel (HT9) was low.w.w.

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Low-k plasma polymerized methyl-cyclohexane thin films deposited by inductively coupled plasma chemical vapor deposition

  • 조현욱;권영춘;양재영;정동근
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.98-98
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    • 2000
  • 초고집적(ULSI) 반도체 소자의 multilevel metalization을 위한 중간 유저네로서 저 유전상수(k<)와 높은 열적안정성(>45$0^{\circ}C$)을 갖는 새로운 물질을 도입하는 것이 필요하다. 중합체 박막은 낮은 유전상수와 높은 열적 안정성으로 인하여 low-k 물질로 적당하다고 여겨진다. PECVD에 의한 plasma polymer 박막의 증착은 많이 보고되어 왔으마 고밀도 플라즈마 형성이 가능하고 기판으로 유입되는 ion의 energy 조절이 가능한 inductively coupled plasma(ICP) CVD에 의한 plasma polymer 박막에 대한 연구는 보고된 바 없다. 본 연구에서는 Mtehyl-cyclohexane precusor를 사용하여 substrate에 bias를 주면서 inductively coupled plasma(ICP)를 이용하여 플라즈마 폴리머 박막(plasma polymerized methyl-cyclohexane : 이하^g , pp MCH라 칭함)을 증착하였으며 ICP power와 substrate bias(SB) power가 증착된 박막의 특성에 어떠한 영향을 미치는지 알아보았다. 증착된 박막의 유전상 수 및 열적 안정성은 ICP power의 변화에 비해 SB power의 변화에 더 크게 영향을 받았다.^g , pp MCH 박막은 platinum(Pt) 기판과 silicon 기판위에서 같이 증착되었다. Methyl-cyclohexane precursor는 4$0^{\circ}C$로 유지된 bubbler에 담겨지고 carrier 가스 (H2:10%, He:90%)에 의해 reactor 내부로 유입된다.^g , pp MCH 박막은 증착압력 350 mTorr, 증착온도 6$0^{\circ}C$에서 \circled1SB power를 10W에 고정시키고 ICP power를 5W부터 70W까지, \circled2ICP power를 10W에 고정시키고 SB power를 5W부터 70W까지 변화하면서 증착하였다. 유전 상수 및 절연성은 Al/PPMCH//Pt 구조의 capacitor를 만들어서 측정하였으며, 열적 안정성은 Ar 분위기에서 30분간의 열처리 전후의 두께 변화를 측정함으로써 분석하였다. SB power 10W에서 ICP power가 5W에서 70w로 증가함에 따라 유전상수는 2.65에서 3.14로 증가하였다. 열적 안정성은 ICP power의 증가에 따라서는 크게 향상되지 않은 것으로 나타났다. ICP power 10W에서 SB power가 5W에서 70W로 증가함에 따라 유전상수는 2.63에서 3.46으로 증가하였다. 열적 안정성은 SB power의 증가에 따라 현저하게 향상되었으며 30W 이상에서 증착된 박막은 45$0^{\circ}C$까지 안정하였고, 70W에서 증착된 박막은 50$0^{\circ}C$까지 안정하였다. 열적 안정성은 ICP power의 증가에 따라서는 현저하게 향상되었다. 그 원인은 SB power의 인가에 의해 활성화된 precursor 분자들이 큰 에너지를 가지고 기판에 유입되어 치밀한 박막이 형성되었기 때문으로 사료된다.

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