• 제목/요약/키워드: W-beam

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반응가스로 $H_2$$H_2O$를 사용한 $Co(hfac)_2$ 전구체의 플라즈마에 대한 영향 분석

  • 서경천;신재수;나정길;최재붕;김태성;윤주영;김진태;신용현;강상우
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.239-239
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    • 2010
  • Cobalt (Co) 박막은 낮은 저항과 우수한 열적 안정성에 의해 금속 배선공정에서 copper의 확산 및 산화를 방지하기 위해 사용된다. Co 박막을 증착하기 위해서는 유기화학 증착법이 많이 사용되고, 이를 위해 많은 Co 전구체들이 연구되어지고 있다. 본 연구에서는 $Co(hfac)_2$ 전구체의 플라즈마 및 반응가스에 따른 기상상태의 변화와 증착공정에서 발생되는 입자의 크기와의 상관관계를 연구하였다. 실험의 변수로 반응가스 ($H_2$, $H_2O$)와 플라즈마 파워 (0~50W)를 사용하였다. 또한 Co 전구체의 기상분해 및 반응을 분석을 위해 fourier transform infrared (FT-IR) spectroscopy를 사용하였다. 그리고 기상상태의 변화가 입자 형성에 끼치는 영향을 관찰하기 위해 저압에서 실시간으로 나노입자를 측정할 수 있는 장비인 particle beam mass spectrometer (PBMS)를 활용하였다.

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폴리머 마이크로 장치에 대한 레이저 투과 마이크로 접합 (Analysis of Transmission Infrared Laser Bonding for Polymer Micro Devices)

  • 김주한;신기훈
    • Journal of Welding and Joining
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    • 제23권5호
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    • pp.55-60
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    • 2005
  • A precise bonding technique, transmission laser bonding using energy transfer, for polymer micro devices is presented. The irradiated IR laser beam passes through the transparent part and absorbed on the opaque part. The absorbed energy is converted into heat and bonding takes place. In order to optimize the bonding quality, the temperature profile on the interface must be obtained. Using optical measurements of the both plates, the absorbed energy can be calculated. At the wavelength of 1100nm $87.5\%$ of incident laser energy was used for bonding process from the calculation. A heat transfer model was applied for obtaining the transient temperature profile. It was found that with the power of 29.5 mW, the interface begins to melt and bond each other in 3 sec and it is in a good agreement with experiment results. The transmission IR laser bonding has a potential in the local precise bonding in MEMS or Lab-on-a-chip applications.

유한요소 해석을 통한 전기 어쿠스틱 기타의 음질향상 (Improvement of Sound Quality for an Electro-Acoustic Guitar Using Finite Element Analysis)

  • 이재민;박영우;임경빈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.857-860
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    • 2005
  • A guitar pickup transforms the vibration of strings to the electric signals, and deliveres them to an amplifier. A piezo pickup has interference problem between strings. The paper aims to improve sound quality for an electro-acoustic guitar through the finite element analysis. Firstly the conventional pickup is modeled and analyzed with a commercial program called ANSYS. It is obvious that there exists interference between the strings. The structural modification of the pickup is performed, based on the beam theory The modified structures are suggested, modeled and analyzed. Then the result are compared with those in the conventional pickup. It can be concluded that the interferences with the modified structures are much less than those with the conventional structure.

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Nd-YAG 펄스레이저에 의한 실리콘 가공시 발생하는 증발반동압력 측정 및 분석 (Measurement and analysis of recoil force during Nd-YAG laser ablation of silicon)

  • 이동준;정성호
    • 한국레이저가공학회지
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    • 제6권3호
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    • pp.11-17
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    • 2003
  • Recoil force exerted on the substrate during a nanosecond laser ablation of silicon is measured. The ablation sample is placed at the end of a 400 $\mu\textrm{m}$ thick and 13 mm long silicon cantilever. The vibration amplitude of the cantilever induced by the recoil force is measured in real time with a probe beam. By comparing the deflection amplitude of the cantilever with a theoretical model, the recoil momentum is estimated. For laser irradiance in the order of 10$\^$11/ W/$\textrm{cm}^2$, the recoil pressure reached a value over 40${\times}$10$\^$9/ Pa.

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Large deflections of variable-arc-length beams under uniform self weight: Analytical and experimental

  • Pulngern, Tawich;Halling, Marvin W.;Chucheepsakul, Somchai
    • Structural Engineering and Mechanics
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    • 제19권4호
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    • pp.413-423
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    • 2005
  • This paper presents the solution of large static deflection due to uniformly distributed self weight and the critical or maximum applied uniform loading that a simply supported beam with variable-arc-length can resist. Two analytical approaches are presented and validated experimentally. The first approach is a finite-element discretization of the span length based on the variational formulation, which gives the solution of large static sag deflections for the stable equilibrium case. The second approach is the shooting method based on an elastica theory formulation. This method gives the results of the stable and unstable equilibrium configurations, and the critical uniform loading. Experimental studies were conducted to complement the analytical results for the stable equilibrium case. The measured large static configurations are found to be in good agreement with the two analytical approaches, and the critical uniform self weight obtained experimentally also shows good correlation with the shooting method.

Problems with a popular thick plate element and the development of an improved thick plate element

  • Cheng, Y.M.;Law, C.W.
    • Structural Engineering and Mechanics
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    • 제29권3호
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    • pp.327-349
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    • 2008
  • Some unreasonable results from the use of a popular thick plate element are discovered from the analysis of a raft foundation and a pile cap in Hong Kong. To overcome the problems, the authors have developed a new shear deformable beam which can be extended to a general quadrilateral shear deformable plate. The behaviour of this new element under several interesting cases is investigated, and it is demonstrated that the new element possesses very high accuracy under different depth/span ratios, and the results from this new element are good even for a coarse mesh.

Performance of an InAs/GaSb Type-II Superlattice Photodiode with Si3N4 Surface Passivation

  • Kim, Ha Sul
    • Current Optics and Photonics
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    • 제5권2호
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    • pp.129-133
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    • 2021
  • This study observed the performance of an InAs/GaSb type-II superlattice photodiode with a p-i-n structure for mid-wavelength infrared detection. The 10 ML InAs/10 ML GaSb type-II superlattice photodiode was grown using molecular beam epitaxy. The cutoff wavelength of the manufactured photodiode with Si3N4 passivation on the mesa sidewall was determined to be approximately 5.4 and 5.5 ㎛ at 30 K and 77 K, respectively. At a bias of -50 mV, the dark-current density for the Si3N4-passivated diode was measured to be 7.9 × 10-5 and 1.1 × 10-4 A/㎠ at 77 K and 100 K, respectively. The differential resistance-area product RdA at a bias of -0.15 V was 1481 and 1056 Ω ㎠ at 77 K and 100 K, respectively. The measured detectivity from a blackbody source at 800 K was calculated to be 1.1 × 1010 cm Hz1/2/W at zero bias and 77 K.

Effective Low-Level Laser Therapy Including Laser Acupuncture Treatment Conditions for Non-Specific Chronic Low Back Pain: Systematic Review and Meta-Analysis

  • Yeum, Hyewon;Hong, Yejin;Nam, Dongwoo
    • Journal of Acupuncture Research
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    • 제38권2호
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    • pp.85-95
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    • 2021
  • Low-level laser therapy including laser acupuncture has been widely used for non-specific chronic low back pain in primary Korean medical clinics. However, there is no critically appraised data regarding which treatment conditions are most effective. A systematic review and meta-analysis was conducted to determine effective treatment conditions using 12 databases (PubMed, Ovid, CENTRAL, KoreaMed, KMBASE, KISS, NDSL, KISTI, OASIS, CNKI, CiNII, and J-STAGE). There were 1,019 studies retrieved and 13 studies included in this review. It was determined that when the power output was ≥ 50 mW, the beam size was increased to ≥ cm2, the energy dose was increased to ≥ 4 J per point, the treatment interval was increased to ≥ 3 times a week, and the number of treatment sessions was increased to ≥ 10 treatments, these conditions appeared to increased treatment effectiveness.

Ultrahigh supercapacitance in cobalt oxide nanorod film grown by oblique angle deposition technique

  • Kannan, V.;Choi, Jong-Hyeok;Park, Hyun-Chang;Kim, Hyun-Seok
    • Current Applied Physics
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    • 제18권11호
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    • pp.1399-1402
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    • 2018
  • Nanorod films of cobalt oxide ($Co_3O_4$) have been grown by a unique oblique angle deposition (OAD) technique in an e-beam evaporator for supercapacitor electrode applications. This technique offers a non-chemical route to achieve large aspect ratio nanorods. The fabricated electrodes at OAD $80^{\circ}$ exhibited a specific capacitance of 2875 F/g. The electrochemically active surface area was $1397cm^{-2}$, estimated from the non-Faradaic capacitive current region. Peak energy and power densities obtained for $Co_3O_4$ nanorods were 57.7 Wh/Kg and 9.5 kW/kg, respectively. The $Co_3O_4$ nanorod electrode showed a good endurance of 2000 charge-discharge cycles with 62% retention. The OAD approach for fabricating supercapacitor nanostructured electrodes can be exploited for the fabrication of a broad range of metal oxide materials.

Development of Four-Way Analog Beamforming Front-End Module for Hybrid Beamforming System

  • Cho, Young Seek
    • Journal of information and communication convergence engineering
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    • 제18권4호
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    • pp.254-259
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    • 2020
  • Phased-array antennas comprise a demanding antenna design methodology for commercial wireless communication systems or military radar systems. In addition to these two important applications, the phased-array antennas can be used in beamforming for wireless charging. In this study, a four-way analog beamforming front-end module (FEM) for a hybrid beamforming system is developed for 2.4 GHz operation. In a hybrid beamforming scheme, an analog beamforming FEM in which the phase and amplitude of RF signal can be adjusted between the RF chain and phased-array antenna is required. With the beamforming and beam steering capability of the phased-array antennas, wireless RF power can be transmitted with high directivity to a designated receiver for wireless charging. The four-way analog beamforming FEM has a 32 dB gain dynamic range and a phase shifting range greater than 360°. The maximum output RF power of the four-way analog beamforming FEM is 40 dBm (=10 W) when combined the four individual RF paths are combined.