• Proceedings of the Korean Vacuum Society Conference
• /
• 2003.02a
• /
• pp.68-68
• /
• 2003

• Proceedings of the Korean Magnestics Society Conference
• /
• 2008.12a
• /
• pp.256.2-256.2
• /
• 2008

• Applied Science and Convergence Technology
• /
• v.24 no.5
• /
• pp.162-166
• /
• 2015

Linear ion beams have been introduced for the ion beam treatments of flexible substrates in roll-to-roll web coating systems. Anode layer linear ion sources (300 mm width) were used to make the linear ion beams. Oxygen ion beams having an ion energy from 200 eV to 800 eV used for the adhesion improvement of Cu thin films on PET substrates. The Cu thin films deposited by a conventional magnetron sputtering on the oxygen ion beam treated PET substrates showed Class 5 adhesion defined by ASTM D3359-97 (tape test). Argon ion beams with 1~3 keV used for the ion beam sputtering deposition process, which aims to control the initial layer before the magnetron sputtering deposition. When the discharge power of the linear ion source is 1.2 kW, static deposition rate of Cu and Ni were 7.4 and $3.5{\AA}/sec$, respectively.

• Journal of Power System Engineering
• /
• v.9 no.2
• /
• pp.65-72
• /
• 2005

A new approach is presented to design a robust sampled-data controller for an experimental flexible beam carrying an unknown payload at its free end. The purpose of this paper is to move the free end of the beam to a desired position in the specified time under vibration suppression. We derive a transfer function nominal model for the beam and quantitative description of model uncertainties based on experimentally obtained frequency response data. Robust controllers are designed by applying the sampled-data $H_{\infty}$ control and ${\mu}m-theory$, in which two types of uncertainties, structured and unstructured uncertainties, are adopted for satisfactory performance in terms of hinge position regulation and vibration damping, besides obviously asymptotic stability. The effectiveness of the proposed method is confirmed through simulation and experimentation.

• Proceedings of the Optical Society of Korea Conference
• /
• 1990.02a
• /
• pp.162-166
• /
• 1990

Photoinduced anisotropy (PIA) in amorphous As2S3 (a-As2S3 ) thin film, deposited by vacuum evaporation, is investigated. PIA is induced by linearly polarized Ar+ laser beam (λ=514.5nm) and probed by weak Ar+ laser (λ=514.5nm) and He-Ne laser (λ=632.8nm) beam through the crossed analyzer. Keeping pump beam intensity constantly, rotation of pump beam polarization direction induces reorientation phenomina of anisotropic axis. Introducing directional factor into simplified 3-level system, which is used to analyze photodarkening phenomina, an analytical expression of PIA is derived. Temporal behavior of PIAand its reorientation phenomina are investigated andcompared with theory. In the experiment pump beam intensity is 100mW/$\textrm{cm}^2$ and thickness of a-As2S3 thin film is 3${\mu}{\textrm}{m}$. In those condition, time constant of photoinduced anisotropy obtained by method of least square curve fitting is 4.0$\times$10-2sec-1. The time constant of PIA we obtained is larger than that of photodarkening, 2.8$\times$10-2sec-1.

• Proceedings of the KWS Conference
• /
• v.43
• /
• pp.79-81
• /
• 2004

In this study EB(Electron Beam) welder was modified to apply Ef welder to micro-joining for soldering and micro-brazing. The power and beam current of EB welder is 6kW, 100mA(60kV) and the minimum current was 1mA. The minimum current of EB welder was modified to decrease the amount of beam current to 0.0lmA and the monitoring system to observe materials was made up. The system is developed including teaching function for generating patterns. The control system and CAD/CAM software for EB direct writing was developed and the deflection beam was controlled without moving workpieces. the possibility of applying EB welder to micro-joining for soldering and brazing was studied through this experiments.

• Journal of Astronomy and Space Sciences
• /
• v.5 no.1
• /
• pp.1-8
• /
• 1988

Electron beam propagation in a fully ionized plasma has been studied using a one-dimensional particle simulation model. We compare the results of electrostatic simulations to those of electromagnetic simulations. The electrostatic results show the essential features of beam-plasma interactions. It is found that the return currents are enhanced by the beam-plasma instability which accelerates ambinet plasmas. The results also show the heating of ambient plasmas and the trapping of plasmas due to the locally generated electric field. The electromagnetic simulations show much the same results as the electrostatic simulations do. The level of the radiation generated by the same non-relativistic beam is slightly higher than the noise level. We discuss the results in context in context of the heating of coronal plasma during solar flares.

• Proceedings of the KIEE Conference
• /
• 1993.11a
• /
• pp.356-358
• /
• 1993

With a focused laser beam, we make a microscopic change on a thin film, and organize the overall system that can observe the change with a microscope. This system utilizes the energy of a laser beam which is focused by a simple lense system. That is a laser beam which has its waist at working distance of a lense. The microscopic change induced by the energy of laser beam focused through a lense can be observed in real time. The experiment with this system shows that the 10mW He-Ne 632.8nm laser can change the black vinyl instantaneously.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.24 no.4
• /
• pp.428-433
• /
• 2015

A non-symmetric laser beam was used for cutting a thin glass substrate and its effect was investigated. In laser cutting of brittle materials, controlling crack initiation on the surface is crucial; however, it is difficult to ensure that crack propagation occurs according to a designed laser path. A lot of deviation in crack propagation, especially at the edge of the substrate, is usually observed. A non-symmetric laser beam generates a non-uniform energy distribution, which enhances directional crack propagation. A 20-W pulsed YAG laser was used for cutting a thin glass substrate. Parametric analysis was carried out and the crack control of the non-symmetric laser beam was improved. A theoretical model was presented and the limitations of the proposed process were also discussed.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.154.1-154.1
• /
• 2014

Indium gallium zinc oxide (IGZO)는 차세대 디스플레이 평판 패널에 사용되는 반도체 화합물의 일종으로 최근 주목받고 있는 물질의 하나이다. 기존의 IGZO를 사용하여 박막을 증착한 뒤 표면 처리를 통해 박막의 특성 변화에 대한 연구들이 진행되어 왔으며, 기존의 연구들은 plasma 환경에 노출을 시켜 간접적인 plasma treatment를 통해 박막의 특성을 향상시켜 왔다. 본 연구에서는 기존의 plasma treatment에서 발견된 방식인 ion beam treatment를 통해 플라즈마를 직접적으로 표면에 조사하여 박막의 특성 변화를 알아보았다. 한국표준과학연구원에서 자체 제작한 chamber를 이용하여 RF sputter로 Si wafer 위에 IGZO 박막을 증착하고 수소 ion beam treatment를 한 뒤, SEM과 XPS를 사용하여 박막 표면의 물성 변화를 분석하였다. 실험에 사용된 chamber에는 sputter gun과 ion beam이 함께 장착되어 있으며, scroll pump와 TMP를 사용하여 pressure를 유지하였다. 실험 시 base pressure는 $1.4{\times}10^{-6}Torr$였다. RF power 150 W. ion beam power 2,000 V에서 실험을 진행하였다.