The Removal Of Voids In The Grooved Interfacial Region Of Silicon Structures Obtained With Direct Bonding Technique (홈구조 실리콘 접합 경계면에서의 Void 제거를 위한 실리콘 직접접합 방법)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2002.07a
- /
- pp.310-313
- /
- 2002