• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.79-84
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• 2013

Nanoimprint lithography (NIL) is the next generation photolithography process in which the photoresist is dispensed onto the substrate in its liquid form and then imprinted and cured into a desired pattern instead of using traditional optical system. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper, with the rolling type imprinting process, a mold, placed upon the $2^{nd}$ generation TFT-LCD glass sized substrate($370{\times}470mm^2$), is rolled by a rubber roller to achieve a uniform residual layer. The prediction of residual layer thickness of the photoresist by rolling of the rubber roller is crucial to design the rolling type imprinting process, determine the rubber roller operation conditions-mpressing force & feeding speed, operate smoothly the following etching process, and so forth. First, using the elasticity theory of contact problem and the empirical equation of rubber hardness, the contact length between rubber roller and mold is calculated with consideration of the shape and hardness of rubber roller and the pressing force to rubber roller. Next, using the squeeze flow theory to photoresist flow, the residual layer thickness of the photoresist is calculated with information of the viscosity and initial layer thickness of photoresist, the shape of mold pattern, feeding speed of rubber roller, and the contact length between rubber roller and mold previously calculated. Last, the effects of rubber roller operation conditions, impressing force & feeding speed, on the residual layer thickness are analyzed with consideration of the shape and hardness of rubber roller.

• Journal of Korea Foundry Society
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• v.20 no.5
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• pp.290-299
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• 2000

A three-dimensional model was developed in order to simulate heat and fluid flow of a continuous casting billet. The model was coded with the general-purpose CFD program FIDAP, using the finite element method. The present model consists of 2 individual calculation schemes, named model 1 and model 2. Mold region only was calculated to check the pouring stream through submerged nozzle with model 1. Entire region, which consists of mold, secondary cooling, radiation cooling was calculated to predict crater end position, temperature profile and solid shell profile(model 2). Standard $k-{\bullet}\hat{A}$ turbulence model has been applied to simulate the turbulent flow induced by submerged nozzle. Enthalpy method was adopted for the latent heat of solidification. Fluid flow in mushy zone was treated using variable viscosity approach. The more casting speed and superheat increased, the more metallurgical length increased. The shell thickness at the mold exit is proved to be mainly controlled by superheat by the present simulation. It may be concluded that the present model can be successfully applied far the prediction of heat and fluid flow behavior in the continuous casting process.

• Journal of the Korean Ceramic Society
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• v.46 no.3
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• pp.229-233
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• 2009

This study has focused on manufacturing technique of powder injection molding of watch case made from zirconia powder. A series of computer simulation process was applied to prediction of the flow pattern in the inside of the mould to clarifying the change of sintering shrinkage depended on flow direction. The material properties of melted feedstock inclusive of the PVT graph and thermal viscosity flowage properties were measured for obtaining the input data in computer simulation. Also, molding experiment was conducted and the results of experiment showed that good agreement with simulation results for flow pattern and weld line location. On the other hand, gravity and inertia effect have an influence on velocity of melt front because of high density of ceramic powder particles in powder injection molding against the polymer injection molding process. In the experiment, the position of melt front was compared with upper gate and lower gate position. The gravity and inertia effect could be confirmed in the experimental results.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.80-83
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• 2003

Transcribability of pit or land groove structures in replicating an optical disk substrate greatly affects the performance of a high-density optical disk. However, a solidified layer, generated during the polymer filling, deteriorates transcribability because the solidified layer prevents the polymer melt in filling the sub-micro patterns. Therefore, the development of the solidified layer during filling stage of injection molding must be delayed. For this delay, passive heating by insulation layer has been used. In the present study, to examine the development of the solidified layer delayed by passive heating, the flow of polymer melt with passive heating was analyzed. Passive heating markedly delayed the development of the solidified layer, reduced the viscosity of the polymer melt, and increased the fluidity of the polymer melt in the vicinity of the stamper surface with the sub-micro patterns. As a result, we predict that passive heating can improve transcribability of an optical disk substrate. To verify our prediction, we fabricated an optical disk substrate by using passive heating of a mold and measured the transcribability.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.12
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• pp.1655-1666
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• 2003

It is experimentally well-known that high anisotropies of the turbulent flow field are dominant inside the tip leakage vortex, which is attributable to a substantial proportion of the total loss and constitutes one of the dominant mechanisms of the noise generation. This anisotropic nature of turbulence invalidates the use of the conventional isotropic eddy viscosity turbulence models based on the Boussinesq assumption. In this study, to check whether an anisotropic turbulence model is superior to the isotropic ones or not, the results obtained from the steady-state Reynolds averaged Navier-Stokes simulations based on the RNG k-$\varepsilon$ model and the Reynolds stress model (RSM) are compared with experimental data for two test cases: a linear compressor cascade and a forward-swept axial-flow fan. Through this comparative study of turbulence models, it is clearly shown that the RSM, which can express the production term and body-force term induced by system rotation without introducing any modeling, should be used to predict quantitatively the complex tip leakage flow, especially in the rotating environment.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.6
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• pp.823-832
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• 2002

A modified $textsc{k}$-$\varepsilon$model is proposed for calculation of transitional boundary-layer flows with changing pressure gradient. In order to develop the model for this problem, the flow is divided into three regions; pre-transition region, transition region and fully turbulent region. The effect of pressure gradient is taken into account in stream-wise intermittency factor, which bridges the eddy-viscosity models in the pre-transition region and the fully turbulent region. From intermittency data in various flows, Narashima＇s intermittency function, F(${\gamma}$), has been found to be proportional to $\chi$$^{n}$ according to the extent of pressure gradient. Three empirical correlations of intermittency factor being analyzed, the best one was chosen to calculate three benchmark cases of bypass transition flows with different free-stream turbulence intensity under arbitrary pressure gradient. It was found that the variations of skin friction and shape factor as well as the profiles of mean velocity in the transition region were very satisfactorily predicted.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.9
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• pp.1172-1177
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• 1999

Comparisons of measured turbulence properties in the unburned gas region of turbulent premixed flame stabilized by pilot flame, in cases of combusting and non-combusting flow conditions, are presented. Methane-air premixed jet at fuel equivalence ratio of 0.6 and 1.0 and Reynolds number of 7,000 was diagnosed using two-color laser velocimeter to obtain turbulence statistics. Same set of measurements was repeated at 21 locations within the unburned gas region of both combusting and non-combusting conditions. Velocity data were analyzed to evaluate the spatial distribution of turbulence properties including Reynolds stress, probability densities, joint probability densities and auto correlations. Contrary to assumptions of current theoretical models, significant influence of flame was observed in every property that was studied in the present investigation. The effective viscosity increased ten-fold when flame was on from cold flow values. The effect of mixing on joint probability as well as in turbulence intensity was suppressed by the flame. The measurements suggest that common assumptions of premixed flame model may result in sizable error in prediction of flame length and temperature distribution in near-field.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.848-851
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• 2009

석탄슬래그는 회분의 조성에 따라 고온에서 매우 상이한 슬래그 거동을 보여준다. 국내 가스화 대상탄으로 검토된 탄 중, 산성 산화물의 함량이 높아 고용융점을 갖는 7종의 석탄 회분을 가스화 조건인 고온, 환원분위기에서 점도 측정을 실시하였다. 4종의 탄에 대해서는 높은 점도를 낮추기 위하여 염기성 산화물인 CaO를 3가지 비율로 혼합하여 점도 측정을 실시하였다. 또한, flux의 혼합으로 인해 발생할 수 있는 결정체 형성을 FactSage 평형계산 프로그램과 CaO-SiO2-Al2O3 3성분계 상평형도를 이용하여 예측하였다. CaO가 첨가된 시료 모두에서 낮은 CaO 첨가비에서는 원래의 시료보다 낮은 점도를 보였으나, CaO첨가비가 20% 이상일 때는 anorthite이 형성되어 $T_{cv}$를 갖는 결정슬래그로 점도 거동이 변화하면서 실제조업 가능한 온도를 증가시켰다. 점도 측정 후 냉각된 시료의 SEM/EDX 분석을 통해 형성된 결정체를 관찰한 결과, FactSage와 상평형도에서 예측된 결정체와 유사하게 나타나 CaO-SiO2-Al2O3 3성분계 상평형도가 결정체 예측에 유용함을 확인하였다.

• Nuclear Engineering and Technology
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• v.26 no.3
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• pp.345-354
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• 1994

Numerical Predictions including secondary flows have been Performed for fully developed turbulent single-phase rod bundle flows. The k-$\varepsilon$ turbulence model(two equation model) for the isotropic eddy viscosity, together with an algebraic stress model for generating secondary velocities, enabled the prediction of mean axial velocities, secondary velocities, and turbulent kinetic energy and turbulent stresses. Comparisons with experiment hate shown that the influence of secondary motion on mean flow and turbulence is dearly evident. The convective transport effects of secondary flow on the velocity field have been identified.

• Fibers and Polymers
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• v.2 no.4
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• pp.203-211
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• 2001

Residual stresses were predicted by a flow analysis in the mold cavity and residual stress distribution in the injection molded product was measured. Flow field was analyzed by the hybrid FEM/FDM method, using the Hele Shaw approximation. The Modified Cross model was used to determine the dependence of the viscosity on the temperature and the shear rate. The specific volume of the polymer melt which varies with the pressure and temperature fields was calculated by the Tait\`s state equation. Flow analysis results such as pressure, temperature, and the location of the liquid-solid interface were used as the input of the stress analysis. In order to calculate more accurate gap-wise temperature field, a coordinate transformation technique was used. The residual stress distribution in the gap-wise temperature field, a coordinate transformation technique was used. The residual stress distribution in the gap-wise direction was predicted in two cases, the free quenching, under the assumption that the shrinkage of the injection molded product occurs within the mold cavity and that the solid polymer is elastic. Effects of the initial flow rate, packing pressure, and mold temperature on the residual stress distribution was discussed. Experimental results were also obtained by the layer removal method for molded polypropylene.