• 대한기계학회논문집A
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• 제20권10호
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• pp.3079-3094
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• 1996

Recently, the high-precision vibration attenuation technology becomes the essence fo the seccessful development of high-integrated and ultra-precision industries, and is expected to continue playing a key role in the enhancement of manufacturing technology. Vibration isolation system using an air-spring is widely employed owing to its excellent isolation characteristics in a wide frequency range. It has, however, some drawbacks such as low-stiffness and low-damping features and can be easily excited by exogenous disturbances, and then vibration of table is remained for a long time. Consequently, the need for active vibration control for an air-spring vibration isolation system becomes inevitable. Furthermore, for an air-spring isolation table to be successfully employed in a variety of manufacturing sites, it should have a guaranteed robust performance not only to exogenous disturbances but also to uncertainties due to various equipments which might be put on the table. In this study, an active vibration suppression control system using H.inf. theory is designed and experiments are performed to verify its robust performance. An air-spring vibration isolation table with voice-coil-motors as its actuators is designed and built. The table is modeled as 3 degree-of-freedom system. An active control system is designed based on $H_\infty$control theory using frequency-shaped weighting functions. Analysis on its performance and frequency responce properties are done through numerical simulations. Robust characteristics of$H_\infty$ control on disturbances and model uncertainties are experimentally verified through (i) the transient response to the impact excitation of the table, (ii) the steady-state response to the harmonic excitation, and (iii) the response to the mass change of the table itself. An LQG controller is also designed and its performance is compared with the $H_\infty$ controller.

• 반도체디스플레이기술학회지
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• 제5권4호
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• pp.41-45
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• 반도체디스플레이기술학회지
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• 제6권4호
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• pp.17-22
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• 2007

Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation equipments, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, we used Takagi-Sugeno fuzzy method to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.

• 대한기계학회논문집
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• 제18권7호
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• pp.1605-1617
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• 1994

Air-spring is widely used in vibration isolation to reduce the table vibration. When a disturbance is applied to a table, however, it starts virbrating with a low frequency, but has a large displacement due to the reacting force of air-spring. In this study, to solve the table vibration problem, an active vibration control device based on state feedback control using air-spring and proportional control valves was designed. This device can suppress the displacement of the isolation table within allowable range, even any kind of disturbances are applied to the table. Firstly, theoretical analysis of an air-spring isolator was done. Secondly, characteristics of the isolator was investigated via computer simulation and experiment. Finally, active control of air-spring isolator was tested using optimal(LQG) and fuzzy control algorithms was performed to show the effectiveness of the control schems.

• 한국안전학회지
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• 제37권3호
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• pp.45-51
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• 2022

This paper focuses on a recently proposed asymmetric base-isolation coupling control system (ABiCS) for the vibration control of adjacent twin buildings. The ABiCS consists of inter-story diagonal dampers, a connecting damper between the two buildings, and a seismic isolation device at the base floor of one building. To investigate the control characteristics of ABiCS, a parametric study was performed by numerically simulating the 20-story twin buildings. In the parametric study, the control capacities of the inter-story diagonal dampers, connecting damper, and seismic isolation device were considered as varying parameters. The parametric study results indicate that the connecting damper between the two buildings reduces the responses of both buildings only at optimal or near-optimal capacity. In addition, adjusting the stiffness of the base isolation is found to be the most effective method for improving seismic performance and achieving cost-effectiveness. Accordingly, we presented a scenario-based performance improvement approach in which reducing the stiffness of the base isolation device could be an effective technique to improve the seismic performance of both buildings. However, note that checking the maximum allowable displacement of the base isolation device is essential.

• 국제초고층학회논문집
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• 제11권3호
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• pp.207-219
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• 2022

During the structural design of urban over-track high-rise buildings, two problems are most likely encountered: the abrupt change of story stiffness between the podium and the upper towers, as well as the demand for train-induced vibration control. Traditional earthquake-resistant structures have to be particularly designed with transfer stories to meet the requirement of seismic control under earthquakes, and thus horizontal seismic isolation techniques are recommended to solve the transfer problem. The function of mitigating the vertical subway-induced vibration can be integrated into the isolation system including thick rubber bearings and 3D composite vibration control devices. Engineering project cases are presented in this paper for a more comprehensive understanding of the engineering practice and research frontiers of urban over-track high-rise buildings in China.

• 한국소음진동공학회논문집
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• 제26권4호
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• pp.391-397
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• 2016

Vibration disturbances induced by the reaction wheels can severely degrade the performance of high precision payloads on board satellites with high pointing stability requirements. The unwanted disturbances produced by the reaction wheels are composed of fundamental harmonic disturbances due to the flywheel imbalance and sub/higher harmonic disturbances due to bearing irregularities, motor imperfections and so on. Because the wheel speed is constantly changed during the operation of a reaction wheel, the vibration disturbance induced by the reaction wheels can magnify the satellite vibration when the rotating frequency of wheel meets the natural frequency of satellite structure. In order to provide an effective isolation of the reaction wheel disturbances, isolation performance of a hybrid vibration isolator is investigated. In this paper, hybrid vibration isolator that combines passive and active components is developed and its hybrid isolation performance using notch filter control is evaluated in single-axis. The hybrid isolation performance using notch filter control show additional performance improvement compared to the results using only passive components.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.150-153
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system as analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.647-650
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• 2004

The modeling of an active vibration isolation system is accomplished by using the equivalent spring constant, mass and rotational Inertia of each component. The detailed model of the actuation module is successful for describing its frequency-domain performance but also too complicated to implement it to actual system for control so that the order of the model is reduced up to the degree that preserves its characteristic in the low frequency range. The reduced model is suitable for identifying the unknown system parameters such as damping constants of components. The overall isolation system is described by using the reduced model of the actuation module. The accurate model ing and system parameter identification that is essential for the control of the active vibration isolation system is attained successfully.

• 한국소음진동공학회논문집
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• 제17권7호
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• pp.565-571
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• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.