• Proceedings of the KIEE Conference
• /
• 2003.10a
• /
• pp.293-296
• /
• 2003

We report on the fabrication and field emission of carbon nanotube field emitters for mass spectrometer. Due to its high aspect ratio and mechanical strength, we use vertically aligned multi-wall carbon nanotubes prepared by thermal chemical vapour deposition as cathodes, Electrons emitted from a CNT are to ionize some sample molecules. We have successfully attained patterned carbon nanotubes grown on two-dimensional 0.7 mm by 0.7 mm Ni square blocks on Si. The emission characteristics show that the field emission initiates at 200 V.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.07a
• /
• pp.131-134
• /
• 2001

Vertically aligned carbon nanotubes are grown on iron-deposited silicon oxide substrates by thermal chemical vapor deposition of acetylene gas at the temperature range 750∼950$^{\circ}C$. As the growth temperature increases from 750 to 950$^{\circ}C$, the growth rate increases by 4 times and the average diameter also increases from 30 nm to 130 nm while the density increases progresively with the growth temperature and a higher degree of crystalline perfection can be achieved at 950$^{\circ}C$. This result demonstrates that the growth rate, diameter, density, and crystallinity of carbon nanotubes can be controlled with the growth temperature.

• Korean Journal of Materials Research
• /
• v.20 no.1
• /
• pp.25-30
• /
• 2010

Si nanowire/multiwalled carbon nanotube nanocomposite arrays were synthesized. Vertically aligned Si nanowire arrays were fabricated by Ag nanodendrite-assisted wet chemical etching of n-type wafers using $HF/AgNO_3$ solution. The composite structure was synthesized by formation of a sheath of carbon multilayers on a Si nanowire template surface through a thermal CVD process under various conditions. The results of Raman spectroscopy, scanning electron microscopy, and high resolution transmission electron microcopy demonstrate that the obtained nanocomposite has a Si nanowire core/carbon nanotube shell structure. The remarkable feature of the proposed method is that the vertically aligned Si nanowire was encapsulated with a multiwalled carbon nanotube without metal catalysts, which is important for nanodevice fabrication. It can be expected that the introduction of Si nanowires into multiwalled carbon nanotubes may significantly alter their electronic and mechanical properties, and may even result in some unexpected material properties. The proposed method possesses great potential for fabricating other semiconductor/CNT nanocomposites.

• Proceedings of the KIEE Conference
• /
• 2000.07c
• /
• pp.1628-1630
• /
• 2000

Vertically aligned multiwalled carbon nanotubes are grown on silicon oxide substrate at 950$^{\circ}C$ by thermal chemical vapor deposition using $C_{2}H_2$. Three catalytic metals such as iron(Fe), cobalt (Co), and nickel(Ni) are used as catalyst, we found that the growth rate of carbon nanotubes for three catalyst particles are in an order of Fe > Ni > Co. All carbon nanotubes are revealed to have bamboo structure with no encapsulated catalytic particles, the diameter of carbon nanotubes depend on the catalyst, the tip and the compartment sheets of bamboo structure also depend on the shape of catalytic particles.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.04b
• /
• pp.60-63
• /
• 2004

Recently, carbon nanotubes(CNTs) have been demonstrated to possess remarkable mechanical and electronic properties, in particular, for field emission applications. Its high aspect ratio and extremely small diameter, hollowness, together with high mechanical strength and high chemical stability, are advantages for use in field emitter. In this paper, we demonstrate electrical discharge properties from carbon nanotube cathode electrodes to use as an emitter electrode of vacuum gauges. Vertically aligned $2{\times}2mm^2$ CNT arrays on the silicon substrate were synthesized by the thermal CVD method on Fe catalytic metal, and a glass patterning by the sand blast method and the silicon/glass anodic bonding processes were applied to make samples with 2 electrodes. The field emission was examined under the vacuum range of $10^{-3}$ Torr.

• Bulletin of the Korean Chemical Society
• /
• v.24 no.12
• /
• pp.1827-1831
• /
• 2003

Field emission of carbon nanotubes (CNTs) fabricated by disproportionation of CO has been studied. CNTs fabricated on well-ordered Co nanowire arrays formed on the porous anodic aluminum oxide templates were well graphitized, uniform in diameter and aligned vertically with respect to the plane of the template, and showed a good field emission property. Very uniform emissions were observed from the CNTs fabricated at relatively low temperature, $500-600^{\circ}C$. Low fabrication temperature such as $500^{\circ}C$ could make it possible to fabricate CNTs on soda lime glass, a low-cost substrate, for display panel.

• Bulletin of the Korean Chemical Society
• /
• v.31 no.10
• /
• pp.2819-2822
• /
• 2010

Forest of single-walled carbon nanotubes (SWNTs) was grown at $450^{\circ}C$ by water-plasma chemical vapor deposition using ultrathin iron on alumina supporting film. The growth rate of the SWNT forest is ${\sim}0.9\;{\mu}m/min$, and the diameters of nanotubes are mainly in a range of 3.0 ~ 3.5 nm. The low intensity ratio of D- to G-band ($I_D/I_G$ ~ 0.098) in Raman spectra indicates that our SWNT forest grown at $450^{\circ}C$ is fairly pure and crystalline. This low temperature growth of SWNT forest may enable variable applications requiring the vertically-aligned nanotubes to obtain large surface area.

• Journal of the Korean Society for Precision Engineering
• /
• v.24 no.6
• /
• pp.113-120
• /
• 2007

Chemical vapor deposition (CVD) is one of the various synthesis methods that have been employed for carbon nanotube (CNT) growth. In particular, Ren et al reported that large areas of vertically aligned multi-wall carbon nanotubes could be grown using a direct current (dc) PECVD system. The synthesis of CNT requires a metal catalyst layer, etchant gas, and a carbon source. In this work, the substrates consists of Si wafers with Ni-deposited film. Ammonia $NH_3$) and acetylene ($C_2H_2$) were used as the etchant gases and carbon source, respectively. Pretreated conditions had an influence on vertical growth and density of CNTs. And patterned growth of CNTs could be achieved by lithographical defining the Ni catalyst prior to growth. The length of single CNT was increased as niclel dot size increased, but the growth rate was reduced when nickel dot size was more than 200 nm due to the synthesis of several CNTs on single Ni dot. The morphology of the carbon nanotubes by TEM showed that vertical CNTs were multi-wall and tip-type growth mode structure in which a Ni cap was at the end of the CNT.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2009.05a
• /
• pp.261-261
• /
• 2009

탄소나노튜브(CNT)는 우수한 기계적, 화학적, 전기적 특성 때문에 전자방출원, 가스저장매체, 약물전달시스템 그리고 전기화학적 소자 등의 응용으로 주목받고 있다 [1-3]. 이러한 응용을 위하여 플라즈마 이온조사법을 이용하여 열화학증기증착법(TCVD)으로 성장된 수직배향 탄소나노튜브(VCNT)의 구조변화를 도모하고, 그 메커니즘을 연구하였다.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2005.07b
• /
• pp.1096-1099
• /
• 2005

Multi-walled carbon nanotubes (CNTs) grown on catalyst dots by thermal chemical vapor deposition were vertically aligned with a high population density. Such densely populated CNTs showed poor field emission characteristics due to the electrical screening effect. We reduced the number density of CNTs using an adhesive tape treatment. For dotpatterned CNTs, the tape treatment decreased the CNT density by three orders of magnitude, drastically improved the turn-on electric field from 4.8 to $1.8V/{\mu}m$, and changed the emission image from spotty to uniform luminescence. We also report long-term emission stability of dot-patterned CNTs by measuring the emission currents with time at different duty ratios.