• 센서학회지
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• 제16권3호
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• pp.197-201
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• 2007

The magnetron reactive ion etching (RIE) characteristics of polycrystalline (poly) 3C-SiC grown on $SiO_{2}$/Si substrate by APCVD were investigated. Poly 3C-SiC was etched by $CHF_{3}$ gas, which can form a polymer as a function of side wall protective layers, with additive $O_{2}$ and Ar gases. Especially, it was performed in magnetron RIE, which can etch SiC at a lower ion energy than a commercial RIE system. Stable etching was achieved at 70 W and the poly 3C-SiC was undamaged. The etch rate could be controlled from $20\;{\AA}/min$ to $400\;{\AA}/min$ by the manipulation of gas flow rates, chamber pressure, RF power, and electrode gap. The best vertical structure was improved by the addition of 40 % $O_{2}$ and 16 % Ar with the $CHF_{3}$ reactive gas. Therefore, poly 3C-SiC etched by magnetron RIE can expect to be applied to M/NEMS applications.

• Maxillofacial Plastic and Reconstructive Surgery
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• 제35권3호
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• pp.178-183
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• 2013

Cleft lip arises from congenital underdevelopment with various degrees and patterns. Mulliken named a unilateral incomplete cleft lip with no severe cleft as a lesser-form cleft lip and categorized it into three subgroups. Anatomically categorized subgroups are minor-form, microform, and mini-microform cleft by the extent of vermilion-cutaneous dysjuntion. The vermillion cutaneous notch is more than 3 mm from the regular Cupid's bow peak for minor-form, less than 3 mm for microform, and almost no gap with discontinuity on the vermillion cutaneous border for mini-microform. The treatments are rotational advancement flap for minor-form, double unillimb Z-plasty for microform, and vertical lenticular excision for mini-microform, respectively. This article aims to present the literature review about the incomplete lesser form cleft lip classified by Mulliken and to report our experiences.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.209-212
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• 2001

Polyimide(PI) films have been considered as the interlayer dielectric materials due to low dielectric constant, low water absorption, high gap-fill and planarization capability. The PI mm Was etched with using inductively coupled plasma (ICP). The etching characteristics such as etch rate and selectivity were evaluated to gas mixing ratio. High etch rate was $8300{\AA}/min$ and vertical profile was approximately acquired $90^{\circ}$ at $CF_{4}/(CF_{4}+O_{2})$ of 0.2. The selectivies of polyimide to PR and $SiO_{2}$ were 1.2, 5.9, respectively. The etching profiles of PI films with an aluminum pattern were measured by a scanning electron microscope (SEM). The chemical states on the PI film surface were investigated by x-ray photoelectron spectroscopy (XPS). Radical densities of oxygen and fluorine in different gas mixing ratio of $O_{2}/CF_{4}$ were investigated by optical emission spectrometer (OES).

• 구강회복응용과학지
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• 제26권2호
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• pp.89-95
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• 2010

본 연구는 앞서 발표된 '교합이 악구강계 및 전신에 미치는 영향 (I), (II)'에서 연결되는 세 번째 논문으로 교합과 악구강계 및 전신 증상과의 관계를 다루고 있는 다섯 가지 주요 이론 중 두 가지인 Chirodontics, Dental Distress Syndrome and Quadrant Theorem에 관한 내용이다. 앞서 발표되었던 논문과 비슷한 방식으로 각각의 이론에 대한 역사적 배경과 정의, 기본 개념과 치료방법 및 그 한계에 대하여 보고하고자 한다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권9호
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• pp.471-475
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• 2001

ln this paper, a micromachined micromechanical switch is presented. The presented switch is operated in the vertical direction to the substrate by an electrostatic force between two parallel plates. The moving plate is pulled down to connect the bumps of the bias node$(V_{DD}/ or GND)$ to the bumps of the output node when a oltage difference exists between the moving plate and the input plate. The switch was designed to operate at a low switching voltage$(\risingdotseq5V)$ by including a large-area, narrow-gap, parallel plate capacitor A theoretical analysis of the designed switch was performed in order to determine its geometry fitting the desired pull-in voltage and release voltage. The designed switch was fabricated by surface micromachining combined with Ni electroplating. From the experimental results of the fabricated switch, its pull-in voltage came Out to be less than 5V and the measured maximum allowable current was 150mA. The measured average ON-state resistance was about 8$\Omega$, and the OFF-state resistance was too high to be measured with digital multimeter.

• 유공압시스템학회논문집
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• 제7권4호
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• pp.32-38
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• 2010

A semi-active suspension is an automotive technology that controls the vertical movement of the vehicle while the car is driving. The system therefore virtually eliminates body roll and pitch variation in many driving situations including cornering, accelerating, and braking. This technology allows car manufacturers to achieve a higher degree of both ride quality and car handling by keeping the tires perpendicular to the road in corners, allowing for much higher levels of grip and control. An onboard computer detects body movement from sensors located throughout the vehicle and, using data calculated by opportune control techniques, controls the action of the suspension. Semi-active systems can change the viscous damping coefficient of the shock absorber, and do not add energy to the suspension system. Though limited in their intervention (for example, the control force can never have different direction than that of the current speed of the suspension), semi-active suspensions are less expensive to design and consume far less energy. In recent time, the research in semi-active suspensions has continued to advance with respect to their capabilities, narrowing the gap between semi-active and fully active suspension systems. In this paper we are studied the characteristics of vehicle movement during the field test with conventional and semi-active suspension system.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.845-846
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• 2006

In this paper, we describe a capacitive position sensing and motion control scheme of a MEMS scanner used for laser display application. The laser displays can be made by scanning laser beams much the same way a CRT scans electron beams. So the accuracy of the scanner motion determines the quality of the displayed image. The MEMS scanner under consideration is composed of electrostatic comb electrodes with initial gap and requires large driving voltage. Due to the under-damping and nonlinear driving characteristics, the scanner motion is subject to be an unwanted oscillation. For the linear scanner motion, we devise a differential charge amplifier and phase compensator. The experimental results show that the implemented feedback control system provides sufficient electrical damping and improves the dynamic performance of the scanner.

• 한국전기전자재료학회논문지
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• 제15권5호
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• pp.393-397
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• 2002

Polyimide (PI) films have been studied widely as the interlayer dielectric materials due to a low dielectric constant, low water absorption, high gap-fill and planarization capability. The polyimide film was etched using inductively coupled plasma system. The etcying characteristics such as etch rate and selectivity were evaluated at different $CF_4/(CF_4+O_2)$chemistry. The maximum etch rate was 8300 ${\AA}/min$ and the selectivity of polyimide to SiO$_2$was 5.9 at $CF_4/(CF_4+O_2)$ of 0.2. Etch profile of polyimide film with an aluminum pattern was measured by a scanning electron microscopy. The vertical profile was approximately $90^{\circ}$ at $CF_4/(CF_4+O_2)$ of 0.2. As 20% $CF_4$ were added into $O_2$ plasma from the results of the optical emission spectroscopy, the radical densities of fluorine and oxygen increased with increasing $CF_4$ concentration in $CF_4/O_2$ from 0 to 20%, resulting in the increased etch rate. The surface reaction of etched PI films was investigated using x-ray photoelectron spectroscopy.

• 국제초고층학회논문집
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• 제12권1호
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• pp.35-47
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• 2023

The transport system and its infrastructure are not only the fundamental means of sustaining the operation of contemporary cities, but also important drivers for the evolution of urban form. Rail transit, critical to improving the operational efficiency and optimizing the spatial layout in cities, is one of the critical conditions for high-density areas with limited land and concentrated resources to be compact to take on complex challenges. As a node element of infrastructure, rail transit entrances are the most important points connecting the rail transit system with urban space. Although influenced by urban form, their quantity and location also influence and shape the evolution of urban space form. Based on the development gap of high-density areas in various contexts, focusing on various rail transit stations in Asia, this research analyzes the correlation between rail transit entrances and peripheral high-density urban form in a delicate, dynamic and granular way. The research considers both horizontal and vertical perspectives, in combination with the urban evolution process in time series, to explore the development trend of high-density urban form in Asia from the aspect of correlation, and building a new foundation for research on urban form, suitable for different types of cities.

• Structural Engineering and Mechanics
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• 제88권4호
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• pp.379-387
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• 2023

Wind and earthquake loads may cause strong vibrations in large-span cable-stayed bridges, leading to the inability of the bridge to operate normally. An improved Pounding Tuned Mass Damper (PTMD) system was designed to improve the safety of the large-span cable-stayed bridge. The vibration control effect of the improved PTMD system on the large-span cablestayed bridge under the combined action of earthquake-wind-traffic was studied. Furthermore, the impact of different parameters on the vibration suppression performance of the improved PTMD system was analyzed. The numerical results indicate that the PTMD system is very effective in suppressing the displacements of the bridge caused by both the traffic-wind coupling and traffic-earthquake coupling. Moreover, the number, mass ratio, pounding stiffness, and gap values have a significant influence on the vibration suppression performance of the improved PTMD system. When the number of PTMD is increased from 3 to 9, the vibration reduction ratio of the vertical displacement is increased from 25.39% to 48.05%. As the mass ratio changes from 0.5% to 2%, the vibration reduction ratio increases significantly from 22.23% to 53.30%.