• Transactions on Electrical and Electronic Materials
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• v.11 no.2
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• pp.65-68
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• 2010

The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately $595\;{\mu}L/min$ and the highest back pressure was 0.88 kPa at an input voltage of $130\;V_{rms}$. We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.91-91
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• 2009

Piezoelectric micro-pump should contain the physical running parts like check valves for acquiring the unilateral motion of fluid from the alternating motion of actuators. But the check valves raise many problems such as abrasion or exhaustive destruction by the recursive mechanical displacement To solve these problems, we propose a novle type piezoelectric valveless micro-pump using peristaltic motion due to the traveling wave excitation. Proposed pump model is consisted of two piezoelectric ceramic plates, elastic metal body, caps for covering flow path, rubber rings for sealing tightly and disk springs for the pressurization of pump body.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.322-322
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• 2010

In this paper, we propose a novel type valveless micro-pump that uses extensional vibration mode of traveling wave as a volume transporting means for solving some problems about check valves, essential parts of usual pumps. The proposed pump consists of two piezoelectric ceramic rings and a metal body located in the middle of them respectively. Because the drift of bended surface that results from the traveling wave excitation controls the fluid flow, check valves are not needed in this pump model. In accordance with the variation of the pump body dimension, we analyzed the vibration displacement characteristics of pump model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its efficiency.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1824-1827
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• 2005

For application to micro fluid control systems such as ${\mu}TAS$ (Micro Total Analysis Systems) and DDS (Drug Delivery Systems), it is very significant to handle precise and minute flow rates with low pressure pulsation. In this study, a novel valveless piezoelectric pump using peristaltic motion with three disk type PZT actuators is presented. The newly devised pump with an effective size of $70mm{\times}60mm{\times}55mm$ has three actuator layers connected in series from inlet to outlet. The PZT actuator has a maximum displacement of 240 ${\mu}m$ and a maximum force of 1.6 N. When the driving voltage for PZT actuators is sequentially applied with a certain phase shift, the pumping is performed by peristaltic motion of liquid volume. The working fluid is shut off without the driving voltage. Three methods for sequential driving are proposed and experimentally investigated. First and second methods utilize an intermittent sinusoidal waveform with phase shift of $90{\circ}\;and\;120^{\circ}$, respectively. Third method uses a rectangular waveform with phase shift of $90^{\circ}$. A controller with multi-phase shifter is designed and fabricated. Then, frequency and voltage-flow rate characteristics and load pressure-flow rate characteristics are experimentally investigated to verify the validity of the developed pump.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1301_1302
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• 2009

Recently, there has been increased incessantly an interest in research area on micro-fluidic pump for electronic and biological applications. The proposed pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving valves. And, this piezopump makes up a panel type design. The ATILA simulation was performed to estimate the operating frequency of the vibrating wave mode, to optimize the design conditions of piezopump such as structure, elastic body material, piezoelectric ceramics, and to analyze the distribution of vibration displacement. The best measured value of the pumping rate is about $118{\mu}l$/min under the following parameters : 4-wave mode, 50kHz operating frequency, $200V_p$.

• The KSFM Journal of Fluid Machinery
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• v.11 no.1
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• pp.40-45
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• 2008

This paper proposes a tube pump composed of small-sized cams and followers for an implantable intrathecal drug infusion device. Each followers is driven by a cam and liquid is discharged by a sequential reciprocal motion of the followers. The advantage of this structure is that it allows the pump to be clean and valveless. To design a small-sized, low power pump some analysis were performed to determine the design parameters of the cam, follower and the tube. To verify the feasibility of the experiment, a prototype was manufactured and its operating characteristics were investigated. Experimental results were in accordance with the expected results obtained from analysis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1275_1276
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein.

• Proceedings of the KIEE Conference
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• 2008.10a
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• pp.119-120
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• 2008

Using the extensional vibration mode of PZT bar, a piezopump is successfully made. The traveling extensional wave along the circumference of the bar is obtained by dividing standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic bar.