• Title/Summary/Keyword: Vacuum standards

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Influence of Plasma Corrosion Resistance of Y2O3 Coated Parts by Cleaning Process (세정공정에 따른 Y2O3 코팅부품의 내플라즈마성 영향)

  • Kim, Minjoong;Shin, Jae-Soo;Yun, Ju-Young
    • Journal of the Korean institute of surface engineering
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    • v.54 no.6
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    • pp.365-370
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    • 2021
  • In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y2O3 coated parts used for semiconductor and display plasma process equipment. CF4, O2, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y2O3 was exposed to CF4 plasma, the surface changed from Y2O3 to YF3 and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF3 layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

Politics through Academic Career or Academic Career for Politics Focused on the current status and conditions of Media scholars' political participation (지식을 통한 정치 혹은 정치를 위한 지식 언론학자의 정치 참여 현황과 특징 연구)

  • Kim, Sung Hae;Seo, Bo Yun;Jin, Min Jung;Kang, Kuk Jin
    • Korean journal of communication and information
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    • v.79
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    • pp.7-39
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    • 2016
  • Journalism and Mass Communication as an academic field is believed more politicized one than pure literature and natural science. With the growth of the media, there follows additional opportunities for media scholars to take a part in politics as well. Few attention was given to understand the status and mechanism of political intervention either as advisers or decision makers though. This study attempts thus to fill this vacuum. For this, first of all, it examines a various types of laws related to media politics. Total number of 164 scholars who participated in 12 councils and commissions were analyzed on the following step. Research shows that there are patterns which favor Seoul National University, U.S. trained Ph. D and geographic preference to the capital. Neither academic excellence nor commitment to public interest appear to have impact on taking those positions. Taking into account media's expansion into politics, it is inevitable for media scholars to take responsibility not only in policy making but in taking leadership. Accordingly, the question of necessity is not who but how as much as manner. The authors hope this study will be a valuable opportunity to establish a kind of ethical standards in media politics.

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Low Temperature Thermal Desorption (LTTD) Treatment of Contaminated Soil

  • Alistair Montgomery;Joo, Wan-Ho;Shin, Won-Sik
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2002.09a
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    • pp.44-52
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    • 2002
  • Low temperature thermal desorption (LTTD) has become one of the cornerstone technologies used for the treatment of contaminated soils and sediments in the United States. LTTD technology was first used in the mid-1980s for soil treatment on sites managed under the Comprehensive Environmental Respones, Compensation and Liability Act (CERCLA) or Superfund. Implementation was facilitated by CERCLA regulations that require only that spplicable regulations shall be met thus avoiding the need for protracted and expensive permit applications for thermal treatment equipment. The initial equipment designs used typically came from technology transfer sources. Asphalt manufacturing plants were converted to direct-fired LTTD systems, and conventional calciners were adapted for use as indirect-fired LTTD systems. Other innovative designs included hot sand recycle technology (initially developed for synfuels production from tar sand and oil shale), recycle sweep gas, travelling belts and batch-charged vacuum chambers, among others. These systems were used to treat soil contaminated with total petroleum hydrocarbons (TPH), polycyclic aromatic hydrocarbons (PAHs), pesticides, polychlorinated biphenyls (PCBs) and dioxin with varying degrees of success. Ultimately, performance and cost considerations established the suite of systems that are used for LTTD soil treatment applications today. This paper briefly reviews the develpoment of LTTD systems and summarizes the design, performance and cost characteristics of the equipment in use today. Designs reviewed include continuous feed direct-fired and indirect-fired equipment, batch feed systems and in-situ equipment. Performance is compared in terms of before-and-after contaminant levels in the soil and permissible emissions levels in the stack gas vented to the atmosphere. The review of air emissions standards includes a review of regulations in the U.S. and the European Union (EU). Key cost centers for the mobilization and operation of LTTD equipment are identified and compared for the different types of LTTD systems in use today. A work chart is provided for the selection of the optmum LTTD system for site-specific applications. LTTD technology continues to be a cornerstone technology for soil treatment in the U.S. and elsewhere. Examples of leading-edge LTTD technologies developed in the U.S. that are now being delivered locally in global projects are described.

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Fire-fighting Pump Approval Standard for Fire-fighting Trucks with an Additional Positive Displacement Pump (용적형 펌프를 추가한 소방자동차용 소방펌프의 성능 인정기준에 관한 연구)

  • Han, Yong-Taek;Sung, Ki-Chan;Min, Se-Hong
    • Fire Science and Engineering
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    • v.30 no.1
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    • pp.104-110
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    • 2016
  • Positive displacement pumps with high pressure and water capacity are used large fires in various high-rise buildings. This study provides information for a performance approval standard of fire pumps for fire trucks based on centrifugal pump standards enacted in 2012. An experiment was conducted with a positive displacement pump for three levels of performance from the approval standard (V-1, 2, and 3). The efficiency of the pump was included in the reference, which requires the approval of 65% performance, the same as a centrifugal pump. The water pressure is between 1.5 and 2.5 MPa, and the required flow rate was established as at least $0.31m^3/min$ and up to $3.0m^3/min$. A relief valve was added to adjust the shut-off pressure due to the structural characteristics of the positive displacement pump. A strainer was also installed to prevent damage to the inside of the pump due to foreign matter. However, the strainer includes a difference from the positive displacement pump to operate without a vacuum pump and the centrifugal pump. This is due to the additional approval standard portion of the positive displacement pump, which is expected to be selected for more variety of fire-fighting equipment and proactive responses to fire suppression in a high-rise buildings and large fires. In conclusion, this approval standard was enacted in January 2016.

Effect of Deodorizing Conditions on Formation of trans-Fatty Acids of Soybean Oil (대두유의 탈취과정에서 생성되는 trans 지방산의 정량)

  • Park, Choul-Soo;Yoon, Kwang-Ro
    • Korean Journal of Food Science and Technology
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    • v.30 no.1
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    • pp.6-12
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    • 1998
  • Degummed and bleached soybean oil was deodorized at a temperature range of $220{\sim}280^{\circ}C$ under the vacuum (4-5 torr) for 1 or 2 hrs. Gas chromatography with SP-2560 100 m capillary column was used to separate and quantitate fatty acid methyl esters and their isomers. Fatty acids were identified by comparing retention time with standards and GC-MS spectrum. The isomers of linoleic acid and linolenic acid in deodorized soybean oils were identified to be $C_{18:2}\;{\Delta}9-cis,\;{\Delta}12-trans,\;C_{18:2}\;{\Delta}9-trans,\;{\Delta}12-cis,\;C_{18:2}\;{\Delta}9-cis,\;{\Delta}12-cis,\;C_{18:3}\;{\Delta}9-cis,\;{\Delta}12-cis,\;{\Delta}15-trans,\;C_{18:3}\;{\Delta}9-trans,\;{\Delta}12-cis,\;{\Delta}15-cis,\;C_{18:3}\;{\Delta}9-cis,\;{\Delta}12-trans,\;{\Delta}15-cis,\;and\;C_{18:3}\;{\Delta}9-cis,\;{\Delta}12-cis,\;{\Delta}15-cis$. The formation of trans-fatty acids by deodorization at $240{\sim}280^{\circ}C$ for 2 hrs was in the range of 1.78 to 5.74%. Conclusively, the deodorizing conditions of $240^{\circ}C$ for 2 hrs or $250^{\circ}C$ for 1 hr were suggested as the best conditions which could minimize the formation of trans isomers of fatty acids in soybean oils.

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Formation of $TiN/TiSi_2$-bilayer by PVD method (PVD 방법에 의한 $TiN/TiSi_2$-bilayer 형성)

  • Choe, Chi-Gyu;Gang, Min-Seong;Kim, Deok-Su;Lee, Gwang-Man;Hwang, Chan-Yong;Seo, Gyeong-Su;Lee, Jeong-Yong;Kim, Geon-Ho
    • Korean Journal of Materials Research
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    • v.8 no.12
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    • pp.1182-1189
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    • 1998
  • High quality $TiN/TiSi_2$-bilayers were formed on the Si(100) substrate at room temperature and at $600^{\circ}C$ first by coevaporation of stoichiometric Si and Ti(Si:Ti = 2:1) fellowed by Ti reactive deposition in N, gas ambient, and in situ annealing in ultrahigh vacuum. Stoichiometric $Ti_{0.}N_{0.5}$, films with (111) texture and $C54-TiSi_2$ films were grown by annealing at temperatures above $700^{\circ}C$. $TiN/C54-TiSi_2$/Si(100) interface was clear and flat without agglomoration, and $CS4-TiSi_2$ film was epitxailly grown. The sheet resistance of the $TiN/TiSi_2$- bilayer decreased as the annealing temperature increased and about $2.5\omega/\textrm{cm}^2$ was obtained from the sample annealed over $700^{\circ}C$.

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Annealing Effects on Properties of ZnO Nanorods Grown by Hydrothermal Method (수열합성법으로 성장된 산화아연 나노막대의 특성 및 열처리 효과)

  • Jeon, Su-Min;Kim, Min-Su;Kim, Ghun-Sik;Cho, Min-Young;Choi, Hyun-Young;Yim, Kwang-Gug;Kim, Hyeoung-Geun;Lee, Dong-Yul;Kim, Jin-Soo;Kim, Jong-Su;Lee, Joo-In;Leem, Jae-Young
    • Journal of the Korean Vacuum Society
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    • v.19 no.4
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    • pp.293-299
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    • 2010
  • Vertically aligned ZnO nanorods on Si (111) substrate were prepared by hydrothermal method. The ZnO nanorods on spin-coated seed layer were synthesized at $140^{\circ}C$ for 6 hours in autoclave and were thermally annealed in argon atmosphere for 20 minutes at temperature of 300, 500, $700^{\circ}C$. The effects of the thermal annealing on the structural and optical properties of the grown on ZnO nanorods were investigated by X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM), photoluminescence (PL). All the ZnO nanorods show a strong ZnO (002) and weak (004) diffraction peak, indicating c-axis preferred orientation. The residual stress of the ZnO nanorods is changed from compressive to tensile by increasing annealing temperature. The hexagonal shaped ZnO nanorods are observed. The PL spectra of the ZnO nanorods show a sharp near-band-edge emission (NBE) at 3.2 eV, which is generated by the free-exciton recombination and a broad deep-level emission (DLE) at about 2.12~1.96 eV, which is caused by the defects in the ZnO nanorods. The intensity of the NBE peak is decreased and the DLE peak is red-shifted due to oxygen-related defects by thermal annealing.

Annealing Effect on Magnetic and Electrical Properties of Amorphous Ge1-xMnx Thin Films (비정질 Ge1-xMnx 박막의 전기적, 자기적 특성에 미치는 열처리 효과)

  • Lee, Byeong-Cheol;Kim, Dong-Hwi;Anh, Tran Thi Lan;Ihm, Young-Eon;Kim, Do-Jin;Kim, Hyo-Jin;Yu, Sang-Soo;Baek, Kui-Jong;Kim, Chang-Soo
    • Journal of the Korean Magnetics Society
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    • v.19 no.3
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    • pp.89-93
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    • 2009
  • Amorphous $Ge_{1-x}Mn_x$ semiconductor thin films grown by low temperature vapor deposition were annealed, and their electrical and magnetic properties have been studied. The amorphous thin films were $1,000{\sim}5,000\;{\AA}$ thick. Amorphous $Ge_{1-x}Mn_x$ thin films were annealed at $300^{\circ}C$, $400^{\circ}C$, $500^{\circ}C$, $600^{\circ}C$ and $700^{\circ}C$ for 3 minutes in high vacuum chamber. X-ray diffraction analysis reveals that as-grown $Ge_{1-x}Mn_x$ semiconductor thin films are amorphous and are crystallized by annealing. Crystallization temperature of amorphous $Ge_{1-x}Mn_x$ semiconductor thin films varies with Mn concentration. Amorphous $Ge_{1-x}Mn_x$ thin films have p-type carriers and the carrier type is not changed during annealing, but the electrical resistivity increases with annealing temperature. Magnetization characteristics show that the as-grown amorphous $Ge_{1-x}Mn_x$ thin films are ferromagnetic and the Curie temperatures are around 130 K. Curie temperature and saturation magnetization of annealed $Ge_{1-x}Mn_x$ thin films increase with annealing temperature. Magnetization behavior and X-ray analysis implies that formation of ferromagnetic $Ge_3Mn_5$ phase causes the change of magnetic and electrical properties of annealed $Ge_{1-x}Mn_x$ thin films.