• 한국진공학회지
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• 제20권5호
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• pp.313-321
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• 2011

한국표준과학연구원(Korea Research Institute of Standards and Science, KRISS)에는 초음파간섭 수은주압력계(ultrasonic interferometer manometer, UIM), 정적형표준기(static volume expansion system, SVES), 오리피스형 정압표준기(orifice-type dynamic expansion system, ODES) 등 세 개의 주요한 국가 진공표준기가 있다. 이 장치들의 불확도 평가를 위해 각각 변수들의 측정 및 계산 모델을 개발하였다. 국제표준화기구(International Organization for Standardization, ISO) 지침에 따라 표준기들의 확장불확도(expanded uncertainty, U)를 계산하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2002년도 제23회 학술발표회 초록집
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• pp.136-136
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• 2002

• Applied Science and Convergence Technology
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• 제25권2호
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• pp.25-27
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• 2016

The surface flatness of metal meshes in a deflector of particle beam mass spectrometer (PBMS) required ideally flat, and this can specify the particle trajectories which goes through the detector. In this research, charged particle current was measured using the different surface roughness deflectors. NaCl particles were generated monodispersed in its size by using differential mobility analyzer and the whole processes were followed the way calibrating PBMS. The results indicate that the mesh surface morphology in the deflector can affect to the particle size and the concentration errors, and sensitivity of PBMS.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.152-152
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• 2012

In this work we measured electron temperature and electron density of a microplasma by optical emission spectroscopy. The plasma is generated from a small discharge gap of a microwave parallel stripline resonator (MPSR) in Helium at atmospheric pressure. The microwave power supplied for this plasma source from 0.5 to 5 watts at a frequency close to 800 MHz. The electron temperature and electron density were estimated through Collisional-radiative model combined with Corona-equilibrium model. The results show that the electron density and temperature of this plasma in the case small discharge gap width are higher than that in larger gap width. The diagnostic techniques and associated challenges will be presented and discussed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.180-180
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• 2012

A microplasma system source based on microwave parallel stripline resonator (MPSR) was developed for the generation of microplasmas in a wide range of pressure from some torr to 760 torr. This source was operated at its resonance frequency that much depends upon not only its discharge gap size but also operated pressure. This paper applied a simple circuit model to analyze the effects of discharge gap size and pressure to resonance frequency and impedance of MPSR in the cases with and without plasma exist inside the discharge gap. In the process of calculating, the conformal mapping method was used to estimate the capacitance of the MPSR. The calculating results by using circuit model agree well with the simulation results that using commercial CST microwave studio software.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.151-151
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• 2011

Atmospheric-pressure plasmas are used in a variety of materials processes. The lifetime of most atmospheric-pressure plasma sources is limits by electrode erosion due to energetic ion bombardment. These drawbacks were solved recently by several microplasma sources based on microstrip structure, which are more efficient and less prone to perturbations than other microplasma sources. In this work, we propose microplasma sources based on strip line and microstrip line, developed for the generation of microplasmas even in atmospheric air and analyzes these systems with microwave field simulation via comparative study with two previous microwave sources (Microstrip Spit Ring Resonator (MSRR), Microstrip Structure Source (MSS)).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.203-203
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• 2013

Low pressure plasmas play a key role in many areas including electronic, aerospace, automotive, biomedical, and toxic waste management industries, and the advantages of the plasma are well known the processing procedure is established. However, the insight behavior of the discharges remains a mystery, even though a simple geometry as capacitive discharges. In this work, we measured RF power dissipation in capacitively coupled plasma (CCP) at various experiment conditions with potential probe and RF current probe. Through the results, we will have a clearer view of the inner nature of the CCP.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2007년도 제33회 하계학술대회 초록집
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• pp.163-163
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• 2007

• 한국진공학회지
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• 제14권4호
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• pp.186-194
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• 2005

정적법 고진공 표준기를 이용하여 스피닝 로터 게이지를 $4.04\times10^{-3}$ $Pa\~1.11\times10^{-2}$Pa에서 교정하였으며, 그 결과를 국제표준화기구에서 권고한 측정불확도 표현지침에 따라 불확도를 계산 및 평가하였다. 평가 결과 기준압력 $7.5488\times10^{-3}$ Pa에서 교정된 SRG의 합성표준불확도는 $95\%$ 신뢰수준, 포함인자 k = 1에서 $3.0035\times10^{-5}$ Pa로 나타났다.

• 한국진공학회지
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• 제16권6호
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• pp.397-404
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• 2007

국제표준화기구 (International Organization for Standardization, ISO)의 기술위원회의 하나인 ISO/TC 112 (진공기술위원회)에서는 진공펌프, 진공장치, 진공부품 분야의 진공기술의 표준화를 하고 있다. 본 논문에서는 국제표준화기구에 대한 간략한 소개와 함께 진공기술위원회 ISO/TC 112의 조직과 표준화 규격제정절차나 방법 등을 요약하였으며, 또한 국내에서 최근에 제안한 "열음극 진공게이지 사양"과 "진공밸브시험절차" 핵심내용도 간략히 소개하였다. 국제표준화에 대한이해를 돕고 최근 상황을 소개함으로서 한국에서 더 활발히 진공기술이 발전하고 국제표준화를 선도하는데 도움이 되고자 한다.