• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.301-301
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• 2013

구동형 부품(Actuated component)중의 하나인 LeadScrew는 이송장치를 구성하는 핵심 부품으로 소재로는 탄소강, 합금강, 스테인레스강 등이 주로 이용된다. 다양한 IT기기의 정밀 이송 및 고속 구동에 사용되며, 제품의 성능을 결정하는 중요 핵심 부품으로 사용되고 있다. IT기기용 구동 요소 부품은 정밀 가공성의 제약으로 내식성이 우수한 스테인레스강 소재보다는 일반적으로 소재비가 저렴하고 가공성이 우수한 탄소강 소재를 사용하게 되며, 위 소재를 사용하면 대기중의 수분등에 의한 부식환경에서 쉽게 부식되어 부식방지를 위한 표면처리 기술개발이 필요하다.또한, 구동형 부품은 부품 상호간의 심한 마찰 등과 같은 가혹한 조건에 노출되어, 부품의 내마모성 및 표면 경도등을 향상시켜 부품의 수명을 연장하고자 한다. 그러기 위해 선 표면경도, 내마모성, 내식성 등의 다양한 기능이 요구되며, 성능을 만족시키기 위해서 열표면처리 공정을 확인하고자 한다.본 연구에서는 냉간압조용 강선인 SWCH계열 표면에 PECVD 장치로 플라즈마 질화공정을 이용하여 동일조건(압력, Gas flow, Power)하에서 $500{\sim}550^{\circ}C$의 온도 범위 내에서 30~300 min의 시간 조건으로 실험을 진행하였다. 위 시험편으로 XRD를 통해 각 플라즈마 질화 공정 조건에 따른 상 변화를 확인하였고, 염수분무테스트를 통해 내식성을 확인하였다. 표면경도 및 단면경도를 통한 실용질화층을 확인하고, 마모테스트를 통하여 마찰계수를 확인하여 표면경도, 내마모성, 내식성을 충족하는 공정에 대한 실험을 진행하였다.

• 한국진공학회지
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• 제10권2호
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• pp.201-206
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• 2001

본 연구에서는 RF 마그네트론 스퍼터링 방법을 이용하여 저탄소강 기판에 증착시킨 Fe-Ni계 합금 박막의 집합조직 발달을 조사하였다. Fe-Ni 합금 조성은 산업적 응용을 고려하여 인바합금(Invar alloy, Fe-36.5 wt%Ni)과 퍼멀로이(Permalloy, Fe-81 wt%Ni) 두 종류로 선택하였고, 증착시간을 변수로 제작하였다. 이들 합금 박막의 집합조직은 박막에서 전형적으로 나타나는 섬유집합조직(fibre texture)의 형태로 발달하였다. 인바합금 박막에서는 증착 초기에 <110>//ND 섬유집합조직이 발달하지만 증착시간이 증가함에따라 <210>//ND 섬유집합조직으로 변화하였다. 퍼멀로이 박막은 증착초기에 <221>//ND+<311>//ND의 혼합 집합조직을 나타내며 증착시간의 증가와 함께 <210>//ND 섬유집합조직으로 변화하였다. 이러한 집합조직의 변화를 박막의 미세조직의 진화와의 연관성이란 측면에서 고찰하였다.

• 한국진공학회지
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• 제5권1호
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• pp.54-61
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• 1996

Indium-tin oxide (ITO) films were deposited on the glass substrate by the reactive -ionized cluster beam deposition(ICBD) method. In the oxygen atmosphere, indium cluster formed through the nozzle is ionized by the electron bombardment and is accelerated to be deposited on the substrate. And tin is simultaneoulsy evaporated from the boron-nitride crucible. The chracteristics of films were examined by the X-ray photoelectron spectroscopy(XPS), glancing angle X-ray diffractrion(GXRD) and the electrical properties. were measured by 4-point-probe and Hall effect measurement system . From the XPS spectrum , it was found that indium and tin atoms combined with the oxygen to form oxide$(In_2O_3, SnO_2)$. In the case of films with high tin-concentration, the GXRD spectra show that the main $In_2O_3$ peak of (222) plane, but also sub peaks((440) peak etc.) and $SnO_2$ peaks were detected. From that results, itis concluded that the heavily dopped tin component (more than 14 at. %) disturbs to form $In_2O_3$(222) phase. Four-point-probe and Hall effect measurement show that, in the most desirable case, the transmittance of the films is more then 90% in visible range and its resistivity is $$\rho$=3.55 \times10^{-4}\Omega$cm and its mobility is $\mu$=42.8 $\textrm{cm}^2$/Vsec.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.145-145
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• 2000

M-CeO2 (M : noble metal) catalysts have been widely studied as three-way catalysts and methanol synthesis catalysts. Ceria is thought to play a number of roles in these catalysts. The Ce(IV)/Ce(III) redox pair may store/release gases under oxidizing/reducing conditions, extending the operational window. Additionally, metal-ceria interactions lead to several effects, including the dispersion of the active components and promoting the activation of molecules such as CO or NO. Pd is a promising component to current TWC formulations and behaves particularly well when compared with Pt and Rh-based catalysts for low-temperature oxidation of Co and hydrocarbon. However the effect of Pd-ceria interactions on the physicochemical properties of Pd and the redox properties of Ce is not elucidated yet. In order to know exactly about the metal-ceria interactions, the model study are expecting to give a better environment, resulting in the wide use of the surface science tools. The substrate was Si(100) wafer, on which Ta metal was sputtered as a thickness of 100nm. The CeO2 thin film of 30nm was deposited by using the magnetron sputtering. Spin coating and magnetron sputtering methods were used to make the Pd thin film layer. The prepared sample was investigated by in-situ XPS, AES, SEM and AFM analysis.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.222-222
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• 2010

Transparent semiconductor oxide thin films have been attracting considerable attention as potential channel layers in thin film transistors (TFTs) owing to their several advantageous electrical and optical characteristics such as high mobility, high stability, and transparency. TFTs with ZnO or similar metal oxide semiconductor thin films as the active layer have already been developed for use in active matrix organic light emitting diode (AMOLED). Of late, there have been several reports on TFTs fabricated with InZnO, AlZnSnO, InGaZnO, or other metal oxide semiconductor thin films as the active channel layer. These newly developed TFTs were expected to have better electrical characteristics than ZnO TFTs. In fact, results of these investigations have shown that TFTs with the new multi-component material have excellent electrical properties. In this work, we present TFTs with inverted coplanar geometry and with a novel HfInZnO active layer co-sputtered at room temperature. These TFTs are meant for use in low voltage, battery-operated mobile and flexible devices. Overall, the TFTs showed good performance: the low sub-threshold swing was low and the $I_{on/off}$ ratio was high.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.473-473
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• 2010

Plasma is widely used in various commercial etchers and chemical vapor deposition. Unfortunately, real-time plasma process monitoring is still difficult. Some methods of plasma diagnosis is improved, however, it is possible for real-time plasma diagnosis to use non-intrusive probe only. In this research, the object is to investigate the suitability of using impedance analysis and optical emission spectroscopy (OES) for real-time plasma process monitoring. It is assumed that plasma system is a equivalent circuit. Therefore, V-I probe is used for measuring impedance, which can be a new non-intrusive probe for plasma diagnosis. From impedance data, we tried to analyse physical properties of plasma. And OES, the other method of plasma diagnosis, is a typical non-intrusive probe for analyzing chemical properties. The amount of the OES data is typically large, so this poses a difficulty in extracting relevant information. To solve this problem, principal component analysis (PCA) can be used. For fundamental information, Ar plasma and $O_2$ plasma are used in this experiment. This method can be applied to real-time endpoint and fault detections.

• 한국결정성장학회지
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• 제7권3호
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• pp.514-520
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• 1997

진공급냉법을 이용하여 단성분계 $Sb_2O_3$ 유리를 제조하였다. 선형굴절율은 500-1000 nm 범위내에서 측정하였으며, 굴절율은 633 nm에서 2.0이었다. 에너지갭은 3.38 eV 이었으며, 3차 비선형 광학 감수율을 THG법을 이용하여 측정하였으며 단성분계 Silica 유리보다도 20배 큰 $5.68{\times}10^{-13}$ esu의 측정값을 얻었다.

• 한국염색가공학회지
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• 제17권1호
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• pp.7-13
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• 2005

Continuous and intense UV irradiation on PTT film using two types of UV bulbs at different irradiation power level was carried out to modify surface characteristics of the film including zeta potential, wettability, surface energy, and dyeability. ESCA analysis of the irradiated film showed higher O/C ratio than the untreated film indicating photooxidation of outer surface layer. ATR analysis showed that the ester bonds were broken and some new groups were produced such as carboxylic acid, phenolic hydroxy, and other esters, implying that ester bonds of PTT was responsible for the observed photooxidation effect. The surface of the treated PTT film became more hydrophilic and wettable to water, coupled with increased surface energy. Polar component of the surface energy increased and nonpolar component decreased with increasing irradiation energy. The treatment also decreased zeta potential of the modified surface and nanoscale roughness increased with increasing irradiation. The dyeability of the treated films to catonic dyes was significantly improved by electrostatic and polar interaction between dye molecules and the anionic film surface. The UV irradiation seems to be a viable polymer surface modification technology, which has advantages such as no vacuum requirement and continuous process unlike plasma treatment.

• 대한치과기공학회지
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• 제27권1호
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• pp.19-25
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• 2005

Ti6Al4V alloy have been mainly used as implant materials. Ti-6Al-4V alloy instead of pure Ti is being widely used as biomaterials has some characteristics such as high fatigue strength, tensile strength. But it has been reported recently that vanadium component expresses cytotoxicity and carcinogenicity and aluminium component is related with dementia of Alzheimer type. In order to overcome their detrimental effects, $\beta$-phase stabilizer Nb was chosen in the present study, in addition Ta and Hf were added to Ti-40wt.%Nb alloy to improve its mechanical properties. This paper was described the influence of heat treatment of Ti-40Nb alloys with 2wt%Ta, 2wt%Hf on the mechanical properties. Specimens of Ti alloys were melted in vacuum arc furnace and homogenized at 1050$^{\circ}C$ for 24 hr. and then were aged after solution heat treat at $\alpha+\beta$ and $\beta$ regions. The mechanical properties of Ti alloys were analysed by hardness test, tensile test, elongation test and SEM test. The results can be summarized as follows: 1. The mechanical properties Ti-40wt.%Nb were improved when 2wt.% Ta and 2wt.%Hf were added. 2. The higher tensile strength value and elongation at solution heat treat was higher than solution heat treat and then were aged.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2009년도 춘계학술대회
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• pp.703-708
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• 2009

본 논문에서는 ZnO와 $Ga_2O_3$ 분말을 1:1의 mole비로 혼합하고 여기에 Mn을 첨가하여 Ar이나 진공 분위기에서 $ZnGa_2O_4$ : Mn을 합성하였다. 제작된 $ZnGa_2O_4$ : Mn의 발광 스펙트럼, 표면 사진 및 성분비를 측정하여 산소의 성분 변화가 발광 특성에 미치는 영향을 규명하고자 하였다. 또한 저온의 Photoluminescence(PL) 스펙트럼으로부터 Mn의 site symmetry가 발광 스펙트럼에 미치는 영향을 설명하였다.