• Title/Summary/Keyword: Vacuum component

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Non-Invasive Plasma Monitoring Tools and Multivariate Analysis Techniques for Sensitivity Improvement

  • Jang, Haegyu;Lee, Hak-Seung;Lee, Honyoung;Chae, Heeyeop
    • Applied Science and Convergence Technology
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    • v.23 no.6
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    • pp.328-339
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    • 2014
  • In this article, plasma monitoring tools and mulivariate analysis techniques were reviewed. Optical emission spectroscopy was reviewed for a chemical composition analysis tool and RF V-I probe for a physical analysis tool for plasma monitoring. Multivariate analysis techniques are discussed to the sensitivity improvement. Principal component analysis (PCA) is one of the widely adopted multivariate analysis techniques and its application to end-point detection of plasma etching process is discussed.

Temporal Evolution and Ablation Mechanism of Laser-induced Graphite Plume at 355 nm

  • 최영구;임훙선;정광우
    • Bulletin of the Korean Chemical Society
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    • v.20 no.12
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    • pp.1501-1505
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    • 1999
  • Expansion dynamics of C$^{+}$ ions ejected from 355-nm laser ablation of graphite target in vacuum has been investigated by pulsed-field time-of-flight (TOF) mass spectrometry. A strong nonlinear dependence of the amount of desorbed C$^{+}$ ions on laser fluence is interpreted by the mechanism that C$^{+}$ ions are produced directly from the graphite via conversion of the multiphoton energy into thermal energy. The temporal evolution of C$^{+}$ ions was measured by varying the delay time of the ion repelling pulse with respect to the laser irradiation, which provides significant information on the ablated plume characterization. The TOF distributions of ablated ions showed a bimodal shape and could be fitted by shifted Maxwell-Boltzmann distributions. The velocity of the fast component increases with the delay time, whereas the slow component (< 500 m/s) exhibits a constant velocity. Also studied were the effects of the laser fluence on the energetics of C$^{+}$ ions.

Low Noise Vacuum Cleaner Design (저소음 청소기 개발)

  • Joo, Jae-Man;Lee, Jun-Hwa;Hong, Seun-Gee;Oh, Jang-Keun;Song, Hwa-Gyu
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.11a
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    • pp.939-942
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    • 2007
  • Vacuum cleaner is a close life product that can remove various dusts from our surroundings. However well vacuum cleaner clean our environments, many people are looking away from it, due to its loud noise. Its noise causes a big trouble in the usual life, for example, catch calls, TV watching and discussing etc. To reduce these inconveniences, noise reduction methods and systematic design of low noise vacuum cleaner are studied in this paper. At first, sound quality investigation is performed to get the noise level and quality that make people TV watching and catch calls available. Based on the European and domestic customer SQ survey result, sound power, peak noise level and target sound spectrum guideline are studied and introduced. As a second, precise product sound spectrums are designed into each part based on the sound quality result. Fan-motor, brush, mainbody, cyclone spectrums are decided to get the final target sound based on the contribution level. Fan-motor is the major noise source of vacuum cleaner. Specially, its peak sound, RPM peak and BPF Peak, cause the people nervous. To reduce these peak sounds, high rotating impeller and diffuser are focused due to its interaction. A lot of experimental and numerical tests, operation points are investigated and optimization of flow path area between diffusers is performed. As a bagless device, cyclones are one of the major noise sources of vacuum cleaner. To reduce its noise, previous research is used and adopted well. Brush is the most difficult part to reduce noise. Its noise sources are all comes from aero-acoustic phenomena. Numerical analysis helps the understanding of flow structure and pattern, and a lot of experimental test are performed to reduce the noise. Gaps between the carpet and brush are optimized and flow paths are re-designed to lower the noise. Reduction is performed with keeping the cleaning efficiency and handling power together and much reduction of noise is acquired. With all above parts, main-body design is studied. To do a systematic design, configuration design developments technique is introduced from airplane design and evolved with each component design. As a first configuration, fan-motor installation position is investigated and 10 configuration ideas are developed and tested. As a second step, reduced size and compressed configuration candidates are tested and evaluated by a lot of major factor. Noise, power, mass production availability, size, flow path are evaluated together. If noise reduction configuration results in other performance degrade, the noise reduction configuration is ineffective. As a third configuration, cyclones are introduced and the size is reduced one more time and fourth, fifth, sixth, seventh configuration are evolved with size and design image with noise and other performance indexes. Finally we can get a overall much noise level reduction configuration. All above investigations are adopted into vacuum cleaner design and final customer satisfaction tests in Europe are performed. 1st grade sound quality and lowest noise level of bagless vacuum cleaner are achieved.

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An Overview of Techniques in Enzyme Immobilization

  • Nguyen, Hoang Hiep;Kim, Moonil
    • Applied Science and Convergence Technology
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    • v.26 no.6
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    • pp.157-163
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    • 2017
  • Immobilized enzymes have become the subject of considerable interest due to their excellent functional properties such as reusability, cost-effectiveness, and optimality during the past decades. Enzyme immobilization technology is not only used in industrial processes, but also a component technology of products for medical diagnostics, therapy, food industry, bio energy, and biomaterial detection. In this review, new methods for enzyme immobilization are introduced, and the advantages and disadvantages of a variety of techniques in enzyme immobilization will be also discussed.

Residual Liquid Behavior Calculation for Vacuum Distillation of Multi-component Chloride System (다성분 염화물계 진공 증류의 잔류 액체 거동 계산)

  • Park, Byung Heung
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.12 no.3
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    • pp.179-189
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    • 2014
  • Pyroprocessing has been developed for the purpose of resolving the current spent nuclear fuel management issue and enhancing the recycle of valuable resources. An electrolytic reduction of the pyroprocessing is a process to reduce oxides into metals using LiCl as an electrolyte and requires a post-treatment process due to the inclusion of residual salt in porous metal products. A vacuum distillation has been adopted for various molten salt systems and could be applied to the post-treatment process of the electrolytic reduction. The residual salt in the metal products includes LiCl, alkali chlorides, and alkaline earth chlorides. In this paper, vapor pressures of chlorides have been estimated and the composition changes on the residual liquid during the vacuum distillation process have been calculated. A model combining a material balance and vapor-liquid equilibrium relations has been proposed under a constant vapor discharging flow rate and liquid composition changes have been calculated using the vapor pressures with respect to a dimensionless time. The behaviors have been compared with temperature and molten salt composition changes to simulate the process condition variation. The distillation of the residual salt has been dominated by LiCl which is the main component of the salt and CsCl of which vapor pressure is higher than that of LiCl would be readily removed. RbCl exhibits similar vapor pressure with LiCl and maintains its composition. However, $SrCl_2$ and $BaCl_2$ of which vapor pressures are much lower than that of LiCl are concentrated with time and expected to be possibly precipitated during the distillation when the initial compositions are increased.

A Study on the Magnetic Properties of Ion Irradiated Cu/Co Multilayer System

  • Kim, T.Y.;Chang, G.S.;Son, J.H.;Kim, S.H.;Shin, S.W.;Chae, K.H.;Sung, M.C.;Lee, J.;Jeong, K.;Lee, Y.P.;;Whang, C.N
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.163-163
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    • 2000
  • In this research, we used the ion irradiation technique which has an advantae in improving intentionally the properties of surface and interface in a non-equilibrium, instead of the conventional annealing method which has been known to improve the material properties in the equilibrium stat. Cu/Co multilayered films were prepared on SiN4/SiO2/Si substrates by the electron-beam evaporation for the Co layers and the thermal evaporation for the Cu layers in a high vacuum. The ion irradiation with a 80keV Ar+ was carried out at various ion doses in a high vacuum. Hysteresis loops of the films were investigated by magneto-optical polar Kerr spectroscopy at various experimental conditions. The change of atomic structure of the films before and after the ion irradiation was studied by glancing angle x-ray diffraction, and the intermixing between Co and Cu sublayers was confirmed by Rutherford backscattering spectroscopy. The surface roughness and magneto-resistance were measured by atomic force microscopy and with a four-point probe system, respectively. During the magneto-resistance measurement, we changed temperature and the direction of magnetization. From the results of experiments, we found that the change at the interfaces of the Cu/Co multilayered film induced by ion irradiation cause the change of magnetic properties. According to the change in hysteresis loop, the surface inplane component of magnetic easy axis was isotropic before the ion irradiation, but became anisotropic upon irradiation. It was confirmed that this change influences the axial behavior of magneto-resistance. Especially, the magneto-resistance varied in accordance with an external magnetic field and the direction of current, which means that magneto-resistance also shows the uniaxial behavior.

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Physicochemical effects of different processing temperatures on 5-hydroxymethyl-2-furaldehyde and the volatile flavor of domestic honey

  • Suk-Ho, Choi;Myoung Soo, Nam
    • Korean Journal of Agricultural Science
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    • v.48 no.4
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    • pp.899-910
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    • 2021
  • This study was performed to suggest concentration methods leading to the production ofhoney with an excellent flavor by examining the effects of the concentration temperature and method on changes in 5-hydroxymethyl-2-furaldehyde (5-HMF) levels and the flavor components of honey. The 5-HMF contents of honey samples concentrated in a tray concentrator at 45, 50, 60, and 70℃ were 2.1, 2.3, 2.5, and 3.1 mg·kg-1, respectively, demonstrating that the 5-HMF contents increased as the concentration temperatures were increased. The honey vacuum-concentrated at 70℃ showed a higher 5-HMF content than that at 60℃, similar to the tray-concentrated honey at different temperatures. The main and other minor flavor components of the honey were volatilized and significantly reduced after vacuum concentration. In the tray concentration, all of the honey samples concentrated at 40, 50, 60, and 70℃ showed flavor component patterns similar to each other, and most of the main and other minor flavor components in the honey were volatilized and significantly reduced after tray concentration. As such, most of the main and other minor flavor components of the honey were mostly removed at 70℃ after both the vacuum concentration and tray concentration processes. The effects of the concentration method and temperature on the viscosity, 5-HMF level, and flavor components of the honey were found to be significant in this study. Given that the components of honey were shown to undergo significant physicochemical changes depending on the concentration method used and temperature during laboratory-scale production, the concentration methods devised in this study can be applied industrially.

Temperature-dependent Characteristics of Nucleation Layers for GaN Nanorods (질화갈륨 나노 막대 형성을 위한 핵화층의 성장 온도에 따른 물성 연구)

  • Lee Sang-Hwa;Choe Hyeok-Min;Kim Chin-Kyo
    • Journal of the Korean Vacuum Society
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    • v.15 no.2
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    • pp.168-172
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    • 2006
  • GaN nucleation layers were grown by hydride vapor phase epitaxy (HVPE) and the effect of growth temperature on the structural properties of GaN nucleation layers for nanorods was investigated by synchrotron x-ray scattering and Atomic Force Microscopy (AFM). For the samples grown at different temperatures, two-component rocking profiles of (002) GaN Bragg peaks for the GaN nucleation layers were observed with one very sharp and the other broad. It was shown that the two-component rocking profile could be qualitatively explained by surface morphology, which was in good agreement with AFM result, from which we could conclude that relatively low temperature is favorable for GaN nanorods formation.

Temperature-dependent Sb-induced facetting of Si(5 5 12)-$2{\times}1$ from (225)/(112) to (113)/(335): Role of Sb-inserted 5-7-5 rings of Si surfaces.

  • Dugerjav, Otgonbayar;Kim, Hi-Dong;Duvjir, Ganbat;Li, Huiting;Seo, Jae-M.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.89-89
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    • 2010
  • The atomic structure of Sb/Si(5 5 12)-$2{\times}1$ surface, deposited at room temperature (RT) and post-annealed, has been identified by scanning tunneling microscopy and the corresponding interface has been studied by synchrotron core-level photoemission spectroscopy. With 0.3-nm Sb deposition at RT and postannealing at $600^{\circ}C$, the surface has been facetted to (225)-$2{\times}1$ and (112)-$1{\times}1$, and its Si 2p has shown that all the Si 2p surface components have disappeared, while the single Sb-Si interfacial component has appeared. Such results indicate that all of surface Si atoms are replaced by Sb atoms and the charge is transferred from Si to passivating Sb-atoms at the top layer. With subsequent postannealing up to $700^{\circ}C$, the surface has been facetted to (113)-$2{\times}2$ and (335)-$4{\times}2$, still having Sb-Si interfacial component and partially re-exposed Si surface components. From the present study, the role of surfactant atom, Sb, as well as the thermal-stabilization of Sb-passivated high-index Si surface will be exposed. Especially, the key role of the Sb/Si(113)-$2{\times}2$, composed of Rebonded-Dimer-Rebonded atom 1D structures, for stabilization will be discussed.

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Effect of in-Plane Magnetic Field on Rashba Spin-Orbit Interaction

  • Choi, Won Young;Kwon, Jae Hyun;Chang, Joonyeon;Han, Suk Hee;Koo, Hyun Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.394-394
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    • 2013
  • The spin-orbit interaction has received great attention in the field of spintronics, because of its property and applicability. For instance, the spin-orbit interaction induces spin precession which is the key element of spin transistor proposed by Datta and Das, since frequency of precession can be controlled by electric field. The spin-orbit interaction is classified according to its origin, Dresselhaus and Rashba spin-orbit interaction. In particular, the Rashba spin-orbit interaction is induced by inversion asymmetry of quantum well structure and the slope of conduction band represents the strength of Rashba spin-orbit interaction. The strength of spin-orbit interaction is experimentally obtained from the Shubnikov de Hass (SdH) oscillation. The SdH oscillation is resistance change of channel for perpendicular magnetic field as a result of Zeeman spin splitting of Landau level, quantization of cyclotron motion by applied magnetic field. The frequency of oscillation is different for spin up and down due to the Rashba spin-orbit interaction. Consequently, the SdH oscillation shows the beat patterns. In many research studies, the spin-orbit interaction was treated as a tool for electrical manipulation of spin. On the other hands, it can be considered that the Rashba field, effective magnetic field induced by Rashba effect, may interact with external magnetic field. In order to investigate this issue, we utilized InAs quantum well layer, sandwiched by InGaAs/InAlAs as cladding layer. Then, the SdH oscillation was observed with tilted magnetic field in y-z plane. The y-component (longitudinal term) of applied magnetic field will interact with the Rashba field and the z-component (perpendicular term) will induce the Zeeman effect. As a result, the strength of spin-orbit interaction was increased (decreased), when applied magnetic field is parallel (anti-parallel) to the Rashba field. We found a possibility to control the spin precession with magnetic field.

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