• Title/Summary/Keyword: Vacuum component

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Fabrication of Organic-Inorganic Hybrid Thin Film by Molecular Layer Deposition

  • Han, Gyu-Seok;Kim, Su-Hwan;Han, Gi-Bok;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.251-251
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    • 2010
  • Organic-inorganic hybrid materials have attracted because of its combined properties, such as flexibility and high electrical performance. In addition, the hybrid materials are expected to have synergic effect which are not shown in just one component. Here, we fabricated organic-inorganic hybrid thin film. Organic-inorganic hybrid thin film have been deposited from diethyl zinc and 1, 2, 4-trihydroxybenzene (THB) by molecular layer deposition (MLD). UV-VIS, Using Infrared spectrum and X-ray photoelectron spectroscopy confirm that Zinc and THB hybrid film (ZnTHB) consist of Zn-O and THB - oxide units and the micro structure and composition of hybrid film. hat the sequential surface reactions of diethyl zinc and ethylene glycol are sufficiently self-limiting and saturating to enable well-controlled MLD growth. Transmission electron microscopy image shows lamination growth of ZnTHB film according to cycle.

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Adsorption Kinetic Studies of 5-fluorouracil Molecules on Hydroxyapatite Surface

  • Yoon, Jiseol;Kwon, Ki-Young;Woo, Dong Kyun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.432.1-432.1
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    • 2014
  • Hydroxyapatite (Ca10(PO4)6(OH)2) is known as the main inorganic component of mature mammalian bones and teeth. Because of its biocompatibility, hydroxyapatite has attracted much attention due to its potential applications in many biomedical researches. Here, we tested a therapeutic potential for the use of hydroxyapatite as an anticancer drug delivery vector. We prepared various types of hydroxyapatite having different chemical contents and morphologies using hydrothermal synthesis. The capability of hydroxyapatite as drug delivery materials was examined by adsorption kinetics of 5-fluorouracil molecules, a common anticancer drug, in phosphate buffered saline. We find that hydroxyapatite with smaller crystal size and higher phosphate contents shows improved adsorption property. Given that hydroxyapatite provides a scaffold for bone regeneration, these results highlight a potential use of hydroxyapatite in therapies aimed at osteosarcoma.

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Spin-polarized energy-gap opening in asymmetric bilayer graphene nanoribbons

  • Kim, Gyu-Bong;Ji, Seung-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.442-442
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    • 2011
  • Electronic and magnetic properties of bilayer zigzag graphene nanoribbon (bZGNR) are studied using pseudopotential density functional method. The edge atoms in the top and bottom layers of bZGNR make a weak hybridization, which leads to electronic structures different from monolayer ZGNR. For asymmetric bZGNR, where the top and bottom layers have different widths, one edge is pinched by the interlayer bonding and the other sustains antiferromagnetic ordering. A small amount of charge transfer occurs from narrower to wider layer, producing spin-polarized electron and hole pockets. External electric field produces asymmetric energy-gap opening for each spin component, inducing half-metallicity in bZGNR.

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Laser Micromachining of Submicron Aperture for Electronbeam Microcolumn Application using Piezo Q-Switched Nd:YAG Laser

  • S.J. Ahn;Kim, D.W.;Park, S.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.78-78
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    • 1999
  • Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1 $\mu$m misalignment would lead to ~1.3 nm coma. In order to reduce aberration, assembling the microcolumn component followed by laser drilling should be very beneficial. In this report, we will address the preliminary report of laser micromachining on Mo substrate using piezo Q-switched Nd:YAG laser. The geometrical figures, such as the diameter and the depth of the frilled aperture are dependent upon the total energy of the laser pulse train, laser pulsewidth, and the diameter of laser beam in addition to the materials-dependent parameters.

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Duplex Surface Modification with Micro-arc Discharge Oxidation and Magnetron Sputtering for Aluminum Alloys

  • Tong, Honghui;Jin, Fanya;He, Heng
    • Journal of the Korean Vacuum Society
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    • v.12 no.S1
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    • pp.21-27
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    • 2003
  • Micro-arc discharge oxidation (MDO) is a cost-effective plasma electrolytic process which can be used to improve the wear and corrosion resistance of Al-alloy parts by forming a alumina coating on the component surface. However, the MDO coated Al-alloy components often exhibit relatively high friction coefficients and low wear resistance fitted with many counterface materials, additionally, the pitting corrosion for the MDO coated AI-alloy components, especially for a thinner alumina coating, often occurs in atmosphere circumstance due to the porous alumina coats. Therefore, a duplex treatment, combining a MDO coated ahumina thin layer with a TiN coating, prepared by magnetron sputtering (MS), has been investigated. The Vicker's microhardness, pin-on-disc, electrochemical measurement, salt spray, XRD and SEM tests were used to characterize and analyze the treated samples. The work demonstrates that the MDO/MS coated samples have a combination of a very low friction coefficient and good wear resistance as well as corrosion since the micro-holes on alumina coating are partly or fully covered by TiN material.

Electrical Characteristics of Self-Assembled Organic Thin Films Using Ultra-High Vacuum Scanning Tunneling Microscopy (UHV STM을 이용한 유기 초박막의 전기적 특성 연구)

  • Kim, Seung-Un;Shin, Hoon-Kyu;Kwon, Young-Soo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.108-111
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    • 2003
  • Currently, molecular devices are reported utilizing active self-assembled monolayers containing the nitro group as the active component, which has active redox centers[1]. We confirm the electrical properties of 4,4-di(ethynylphenyl)-2'-nitro-1-benzenethiolate. To deposit the SAM layer onto gold electrode, we transfer the prefabricated Au(111) substrates into a 1mM self-assembly molecules in THF solution. Au(111) substrates were prepared by ion beam sputtering method of gold onto the silicon wafer. As a result, we measured current-voltage curve using ultra high vacuum scanning tunneling microscopy (UHV STM), I-V curve also clearly shows several current peaks between the negative bias region (-0.3958V) and the positive bias region (0.4658V), respectively.

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Characterization of In-Situ Film Thickness and Chamber Condition of Low-K PECVD Process with Impedance Analysis

  • Kim, Dae Kyoung;Jang, Hae-Gyu;Kim, Yong-Tae;Kim, Hoon-Bae;Chae, Hee-Yeop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.461-461
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    • 2010
  • For a low dielectric constant inter-metal dielectric application, the low-k SiCOH film with a dielectric constant of 2.8-3.2 has been deposited by plasma-enhanced chemical vapor deposition with decamethylcyclopentasiloxane, cyclohexane, and helium which is carrier gas. In this work, we investigated chemical deposition rate, dielectric constant, characterization of plasma polymer films according to temperature(25C-200C) of substrate and change of component concentration. We measured impedance by using V-I prove during process. From experimental result, deposition rate decrease with increasing temperature. Through real time impedance analysis of chamber, we find corelation between film thickness and impedance by assuming equivalent circuit.

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DSSC광전극의 나노구조 제어 및 투명전극 소재 개발

  • Jung, Hyun-Suk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.28-28
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    • 2010
  • Photoelectrochemical solar cells such as dye-sensitized cells (DSSCs), which exhibit high performance and are cost-effective, provide an alternative to conventional p-n junction photovoltaic devices. However, the efficiency of such cells plateaus at 11-12%, in contrast to their theoretical value of 33%. Improvements in efficiency can only occur through a fundamental understanding of the underlying physics, materials, and device designs of DSSCs. A photoelectrode consisting of semiconducting oxide nanoparticles and a transparent conducting oxide electrode (TCO) is a key component of DSSC and design of photoelectrode materials is one of promising strategies to improving energy conversion efficiency. We introduce monodisperesed $TiO_2$ nanoparticles prepared by forced hydrolysis method and their superiority as photoelectrode materials was characterized with aids of optical and electrochemical analysis. Multi-layered TCO materials are also introduced and their feasibility for use as photoelectrodes is discussed in terms of optical absorption and charge collecting properties.

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Room-temperature Ferromagnetism in Fe-doped Reduced TiO2-δ (산소 결핍에 따른 Fe가 도핑된 TiO2-δ의 상온 강자성 현상에 관한 연구)

  • Lee, H.M.;Kim, C.S.;Uhm, Y.R.;Rhee, C.K.
    • Journal of Powder Materials
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    • v.13 no.6 s.59
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    • pp.401-407
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    • 2006
  • Effects of oxygen deficiency on the room temperature ferromagnetism in Fe-doped reduced $TiO_2$ have been investigated by comparing the air-annealed $Ti_{0.97}Fe_{0.03}O_2$ compound with secondly post-annealed one in vacuum ambience. The air-annealed sample showed a paramagnetic behavior at room temperature. However, when the sample was further annealed in vacuum, a strongly enhanced ferromagnetic behavior was observed at same temperature. $M{\"{o}}ssbauer$ spectra of air-annealed sample at 295K showed a single doublet of $Fe^{3+}$, suggesting that the Fe ions are paramagnetic. On the other hand, the absorption spectra after vacuum-annealing exhibited two doublets, in which one is the same component with air-annealed sample and the other is new doublet corresponding to $Fe^{2+}$ state. This result suggests that the occurrence of ferromagnetism in reduced sample may be interpreted as the contribution of unquenched orbital moment of $Fe^{2+}$ ions.

Process Simulation of Investment Casting for Large Gas Turbine Component (대형 가스터빈 부품의 정밀주조 응고해석)

  • Seo, Seong-Mun;Jo, Chang-Yong;Lee, Jae-Hyeon;Choe, Seung-Ju
    • 연구논문집
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    • s.29
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    • pp.173-183
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    • 1999
  • The vacuum investment casting process for a large gas turbine component, Inner Preswirl Support (IPS), was simulated by using commercial FEM package ProCAST(TM) with view factor radiation method. The solid fraction in mushy zone was directly measured by Differential thermal analysis(DTA-DSC mode). Three types gating design. considering liquid flow and heat release through it. were proposed. Solidification had begun at the ribs or thin sections of the IPS casting and advanced further through the upper and lower gates. The computed temperature gradient G and G/R values at 70% solidified temperature were used for prediction of microshrinkage formation during casting. The effect of mold preheat on the thermal history of the casting displayed minute effect on the microshrinkage formation.

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