• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.85-89
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• 1999

FDE panel was successfully fabricated through the integration of a 0.7" diagonal Si-based Mo-tip FEA with 25${\times}$25 pixels, Y2O3:Eu or ZnO:Zn phosphor screen, and vacuum sealing through an exhausting glass tube, including a getter. The panel system was driven by an external driver circuit having pulse width modulation(PWM) driving scheme. Before character imaging, it was stabilized through tip aging by slowly increasing a pulse-mode emission current and phosphor aging by a coulombic charging process. After aging, luminescent characteristics such as emission uniformity, charging and arcing phenomena were shown to be improved significantly.

• Journal of the Korean Vacuum Society
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• v.11 no.2
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• pp.81-86
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• 2002

With a specific model for the Helicoflex type metal gasket expected to be used in large ports of the KSTAR vacuum vessel, a sealing curve was obtained by measuring the flange tightening properties such as the correlations of the tightening torque(or linear load), displacement to the leak rate. From the experiment results it was found that the leak rate of the Helicoflex seal in the room temperature was bellow $2\times10^{-1}\textrm{mbar\cdot L/s}$ with a tightening torque of 2500kgf . cm using Ml8 bolts.

• Korean Journal of Materials Research
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• v.8 no.12
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• pp.1121-1126
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• 1998

For vacuum seated panel, stresses and displacements in the glass plate were calculated. The geometric variables for our experiment were the thickness of glass plate, the size of panel and the width of sealing line. The fracture behaviors and displacements of its under the vacuum were measured. From the measurement of strains and fracture, it was considered that the maximum stress acted at the middle of the sides of the panel. The stresses and displacement distribution of manufactured panels were greatly dependent on the width of the sealing line in the panel. The measured values are more similar to the values which were calculated from the condition of built-in edge as the width of the sealing line is larger. The measured displacement of the panel, made of 3mm thick glass plate, with size of $80\Times120\textrm{mm}^2$ and 20mm sealing line was $57\mu\textrm{m}$. This value is similar to calculated value, $54\mu\textrm{m}$, from built- in edge condition in the finite element method.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.3
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• pp.365-369
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• 2010

Magnetic fluid seal is characterized by its simple design, low friction and being dustless. Those advantages are deduced from the fact that the sealing element is not a solid such as rubber or plastic but it is a fluid. Those are critical for application to a rotating shaft which is inserted into a vacuum chamber where high level of vacuum and cleanness are required. For the reason the magnetic fluid seal has become a standard for vacuum chambers for semiconductor and LCD processing. It should be noted that its sealing performance is sensitive to temperature. If necessary, water cooling should be considered. Thus anticipation of the temperature distribution of the magnetic fluid seal is important before applying it. In this paper an FEM analysis of the heat transfer has been executed and compared with experimental results. An overall convective heat transfer coefficient has been adopted for the analysis, which results in satisfactory consistency of the theoretical and experimental results.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.866-869
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• 2004

A carbon nanotube field emission display(CNT FED) panel with a 2 inch diagonal size was fabricated by using a screen printing of a prepared photo-sensitive CNT paste and vacuum in-line sealing technology. After a surface treatment of the patterned CNT, only the carbon nanotube tips are uniformly exposed on the surface. The diameter of the exposed CNTs are usually about 20nm. The sealing temperature of the panel was around 390 $^{\circ}C$ and the vacuum level was obtained with $1.4{\times}10^{-5}$torr at the sealing. The field emission properties of the diode type CNT FED panel were characterized Now, we are developing a triode type CNT FED with a self-aligned gate-emitter structure.

• Transactions of Materials Processing
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• v.21 no.3
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• pp.195-201
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• 2012

A vacuum ladling die casting system is suggested as a means to obtain a high vacuum level. A high vacuum of 17.8 mmHg is obtained by sealing the inner space of the mould. The sample product is a rear-head housing for an auto-compressor, and the die-casting with 6-cavities was conducted. The flow analysis shows that the filling speed during vacuum ladling is faster than for a non-vacuum system. The air holes in the sample product were too small to be seen with the naked eye in X-ray films. Density tests show that the high vacuum ladling system reduces the internal porosity as much as 57.8% when compared to the non-vacuum system. A defective rate of only 0.17% was found from leak testing. The results of this research prove that the high vacuum die-casting process is useful for manufacturing of aluminium components under high internal pressure.

• Journal of the Korean Vacuum Society
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• v.15 no.5
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• pp.475-484
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• 2006

The deformation, the stress distribution, and the contact pressure of gaskets used in sealing flanges of CF (Con-Flat) or IPD (Improved) type were calculated to investigate the possibility of analyzing and estimatimg the sealing performance under a given tightening condition for a specific flange system.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.115-115
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• 2012

반도체/디스플레이 산업분야의 발전으로 진공 공정 기술력 또한 증진되고 있다. 반도체소자의 초미세화, 진공부품의 대면적화가 진행 되면서 진공 공정 중에 발생하는 오염입자를 제어하는 것이 이슈가 되고 있다. 오염입자는 플라즈마의 물리적인 부식과 활성이 높은 화학반응에 의해 진공부품에서 부식이 진행되어 발생하며, 이는 반도체 및 디스플레이 부품의 신뢰성측면과 수율저하 등 life time의 근본적인 문제점으로 대두되고 있다. 본 연구에서는 반도체/디스플레이 장비용 코팅부품으로 많이 사용되고 있는 Al2O3 코팅막을 이용하였으며, sealing time에 따른 Anodic Aluminum Oxide (AAO) electrode의 물성특성평가 및 진공평가기술을 이용하여 life time을 예측하는 연구를 수행하였다.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.11
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• pp.49-54
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• 2000

A field emission display has spacers separating the emitting base and display face. The arrangement of the spacer is important for maintenance of required clearance, endurance of bending stresses, and efficient vacuum sealing. Topology optimization technique with material density was introduced to select the best position of the spacers from the available positions. The displacement and Von Mises stress distribution of the panels with optimal spacers were calculated by finite element method. Also the design guide for adding eliminating spacers was proposed.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.138.4-138
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• 1998