• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.41-41
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• 2011

Flash memory에서 tunnel oxide film은 electron tunnelling 현상을 이용하여 gate에 전하를 전달하는 통로로 사용되고 있다. 특히, tunnel oxide film 내부의 charge trap 현상과 불순물이 소자 특성에 직접적인 영향을 주고 있어, 후속 N2O/NO 열처리 공정에서 SiO2/Si 계면에 nitrogen을 주입하여 tunnel oxide film 특성을 개선하고 있다. 따라서 N2O/NO 열처리 공정 최적화를 위해서는 tunnel oxide film 내 N 농도와 분포에 대한 정확한 평가가 필수적이다[1]. 본 실험에서는 low energy magnetic SIMS를 이용하여 N2O로 열처리된 tunnel oxide film 내의 N농도를 보다 정확하게 평가하고자 하였다. 사용된 시료는 Si substrate에 oxidation 이후 N2O 열처리를 진행하여 tunnel oxide를 형성시켰으며, 분석 impact energy는 surface effect최소화와 최상의 depth resolution 확보를 위해 250eV를 사용하였으며, matrix effect와 mass interference를 방지하기 위해 MCs+ cluster mode[2]로 CsN signal를 검출하였다. 실험 결과, 특정 primary beam 입사각도에서 nitrogen depth resolution 저하 현상이 발생하였고, SIMS crater 표면이 매우 거칠게 나타났다. 이에, Depth resolution 저하 현상을 개선하기 위해 극한의 glancing 입사각 조건으로 secondary extraction voltage 변화를 통해 depth resolution이 개선되는 최적의 impact energy와 primary beam 입사각 조건을 확보하였다. 그 결과 nitrogen의 depth resolution은 1.6nm의 depth resolution을 확보하였으며, 보다 정확한 N 농도와 분포를 평가할 수 있게 되었다.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.28 no.3
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• pp.323-327
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• 1983

The intercellular material was extracted from rice leaf tissue. The quantitative tests of protein and soluble carbohydrate, and activity of peroxidase, showed differences between tissue extract and intercellular material. Also electrophoretic patterns of peroxidase and esterase isozymes were not similar between them. It indicated that the intercellular material which was extracted, was not the mixture of cellular materials.

• 한국생물공학회:학술대회논문집
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• 2001.11a
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• pp.855-858
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• 2001

Antimicrobial activities, extraction yields and chemical compositions of the extracts from the powder of vacuum dried Houttuynia cordata root on various solvents were investigated. Antimicrobial activity was investigated by disc diffusion method against several microorganisms, nine species of Gram positive and thirteen Gram negative bacteria. Ethanol, ethylacetate and butanol extracts exhibited potent antimicrobial activities against B. megaterium C. xerosis, S. aureus, S. epidermidis and E.coli. Chloroform and aqueous extracts from H. cordata showed weak antimicrobial activity against the tested bacteria. Ethylacetate and butanol extracts exhibited strong antimicrobial activity against the tested microorganisms. The extraction yields were 15.7%, 3.7%, 0.13%, 0.5% and 5.9% in ethanol, chloroform, ethylacetate, butanol and aqueous fractions, respectively. To further elucidate the effective components, solvent extracts was analyzed by GC/MSD.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2003.09a
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• pp.426-430
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• 2003

Subsurface biobarrier technology has potential applications to contain contaminated groundwater and/or to degrade toxic pollutants in groundwater. Effective biobarrier formation is need to assess of hydrogeologic characteristics and to conduct practical operation strategies and design based on this prior to design biobarrier. Thus, in this study, we examined hydrogeologic characteristics in biobarrier construction site. Hydraulic conductivities which calculated from slug test data have shown difference with each well as 1.20$\times$10$^{-3}$ -6.00$\times$10$^{-5}$ cm/sec. Tracer test is a method in which concentration of tracer solution during withdrawal in each well by vacuum extraction system is measured with time. Tracer solution was continuously injected by constant head tank. Measured tracer concentration versus time data were fitted to analytical solution of convection dispersion equation (CDE). The fitting data of CDE to the measured data at each extraction well yielded were 0.61cm/min(pore velocity), 5.38$\textrm{cm}^2$/min(dispersion coefficient) for discharge rate of 0.47 1/min and 1.75cm/min(pore velocity), 36.34$\textrm{cm}^2$/min(dispersion coefficient) for discharge rate of 0.93 1/min. As a result, we acquired fundamental parameters which need to design biobarrier and operation strategies.

• Bulletin of the Korean Chemical Society
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• v.23 no.4
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• pp.575-579
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• 2002

Two-dimensionally cross-linked ultrathin films of poly(maleic acid-alt-methyl vinyl ether) (MA-MVE) and poly(allylamine) (PAA) were produced by using sodium dioctadecyl sulfate (2C18S) as the monolayer template for Langmuir-Blodgett (LB) depositio n. The template molecules were subsequently removed by thermal treatment followed by extraction. The polyion-complexed monolayers of three components, i.e., template 2C18S, co-spread PAA, and subphase MA-MVE, were formed at the air-water interface. Their monolayer properties were studied by the surface pressure-area isotherm. The monolayers were transferred on solid substrates as Y type. The polyion-complexed LB films and the resulting network films were characterized by FT-IR spectroscopy, X-ray photoelectron spectroscopy (XPS), and scanning electron microscopy (SEM). The cross-linking to form a polymer network was achieved by amide or imide formation through heat treatment under a vacuum. SEM observation of the film on a porous fluorocarbon membrane filter (pore diameter 0.1 ㎛) showed covering of the pores by four layers in the polyion complex state. Extraction by chloroform followed by heat treatment produced hole defects in the film.

• Journal of the Korean Wood Science and Technology
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• v.36 no.5
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• pp.49-55
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• 2008

This study was carried to investigate the effects of steaming and four different drying methods on the longitudinal liquid permeability of Korean pine (Pinus koraiensis Sieb.et Zucc.) board. Four drying methods were air drying, conventional kiln drying, microwave-vacuum drying and high temperature drying. Darcy equation was used for calculating the specific permeability of the small sapwood specimens taken from the treated boards while capillary rising method was used for the heartwood specimens. The sapwood specimens were extracted with water and benzene-alcohol solution to examine the mechanism of liquid flow in treated wood. No significant correlation was found between specific permeability and the number of resin canals of the sapwood specimens. Extraction decreased the differences of specific permeabilities of the sapwood specimens between the five treatment methods. The effects of extraction on the longitudinal permeability are different between five treatments. The fluid path in heartwood was observed by dynamic observation method.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.5
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• pp.402-410
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• 2008

Single-walled carbon nanotubes (SWCNTs) were currently produced together with some contaminants such as a metallic catalyst, amorphous carbon, and graphitic nanoparticles, which should be sometimes purified for their applications. This study aimed to develop efficient, scalable purification processes but less harmful to SWCNTs. We designed three-step purification processes: acidic treatment, surface functionalization and soxhlet extraction, and heat treatment. During the soxhlet extraction using tetrahydrofuran, specifically, carbon impurities could be easily expelled through a glass thimble filter without any significant loss of CNTs. Finally, SWCNTs were left as a bulky paper on the filter through membrane filtration. Vertically aligned SWCNTs on one side of bulky paper were well developed in a speparation from the filter paper, which were formed by being sucked through the filter pores during the pressurized filtration. The bucky paper showed a very high peak current density of field emission up to $200\;mA/cm^2$ and uniform field emission images on phosphor, which seems very promising to be applied to vacuum microelectronics such as microwave power amplifiers and x-ray sources.

• Journal of agriculture & life science
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• v.43 no.6
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• pp.105-109
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• 2009

Kyungsan nursery complex which has a vast area for the production of various species of fruit tree stocks is in a high demand of virus-free saplings. Apple tree stocks, the most important products, urgently need more rapid and reliable viral diagnosis. In this study, a bead beater was tested because of convenience in dealing with large number of samples. Also, industrial glass bead abrasive (0.4 mm in diameter) at very low cost was used in a disposable way. For bead beater-aided RNA extraction from apple stem tissues, the guanidine thiocyanate method was confirmed to be very reliable. Silca membrane filter tube in connection to vacuum filtering device was strongly suggested for simplifying RNA capture and washing steps. Apple virus detection was confirmed by RT-PCR.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.345-346
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• 2013

InGaN material is being studied increasingly as a prospective material for solar cells. One of the merits for solar cell applications is that the band gap energy can be engineered from 0.7 eV for InN to 3.4 eV for GaN by varying of indium composition, which covers almost of solar spectrum from UV to IR. It is essential for better cell efficiency to improve not only the crystalline quality of the epitaxial layers but also fabrication of the solar cells. Fabrication includes transparent top electrodes and surface texturing which will improve the carrier extraction. Surface texturing is one of the most employed methods to enhance the extraction efficiency in LED fabrication and can be formed on a p-GaN surface, on an N-face of GaN, and even on an indium tin oxide (ITO) layer. Surface texturing method has also been adopted in InGaN-based solar cells and proved to enhance the efficiency. Since the texturing by direct etching of p-GaN, however, was known to induce the damage and result in degraded electrical properties, texturing has been studied widely on ITO layers. However, it is important to optimize the ITO thickness in Solar Cells applications since the reflectance is fluctuated by ITO thickness variation resulting in reduced light extraction at target wavelength. ITO texturing made by wet etching or dry etching was also revealed to increased series resistance in ITO film. In this work, we report a new way of texturing by deposition of thickness-optimized ITO films on ITO nano dots, which can further reduce the reflectance as well as electrical degradation originated from the ITO etching process.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.240-240
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• 2011

The first neutral beam injector (NBI-1) has been developed for the Korea Superconducting Tokamak Advanced Research (KSTAR) tokamak. A first long pulse ion source (LPIS-1) has been installed on the NBI-1 for an auxiliary heating and current drive of KSTAR core plasmas. Performance of ion and neutral beam extractions in the LPIS-1 was investigated initially on the KSTAR NBI-1 system, prior to the neutral beam injection into the main plasmas. The ion source consists of a JAEA magnetic bucket plasma generator with multi-pole cusp fields and a set of KAERI prototype-III tetrode accelerators with circular apertures. The inner volume of plasma generator and accelerator column in the LPIS-1 is approximately 123 liters. Final design requirements for the ion source were a 120 kV/ 65 A deuterium beam and a 300 s pulse length. The extraction of ion beams was initiated by the formation of arc plasmas in the LPIS-1, called as an arc-beam extraction method. A stable ion beam extraction of LPIS-1 has been achieved up to an 100 kV/42 A for a 4 s pulse length and an 80 kV/25 A for a 14 s pulse length. Optimum beam perveance of 1.21 microperv has been found at an accelerating voltage of 80 kV. Neutralization efficiency has been measured by using a water flow calorimetry (WFC) method of calorimeter and an operation of bending magnet. The full-energy species of ion beams have been detected by using the diagnostic method of optical multichannel analyzer (OMA). An arc efficiency of the LPIS was 0.6~1.1 A/kW depending on the operating conditions of arc discharge.