• Journal of the Korean Society for Precision Engineering
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• v.24 no.6
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• pp.86-95
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• 2007

This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.

• Journal of the Korean Vacuum Society
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• v.9 no.1
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.05a
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• pp.321-325
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• 2010

Supersonic ejectors are simple mechanical components, which generally perform mixing and/or recompression of two fluid streams. Ejectors have found many applications in engineering. In aerospace engineering, they are used for altitude testing of a propulsion system by reducing the pressure of a test chamber. It is composed of three major sections: a vacuum test chamber, a propulsive nozzle, and a supersonic exhaust diffuser. This paper aims at the improvement of ejector-diffuser performance by focusing attention on reducing exhaust back flow into the test chamber, since alteration of the backflow or recirculation pattern appears as one of the potential means of significantly improving low supersonic ejector-diffuser performance. The simplest backflow-reduction device was an orifice plate at the duct inlet, which would pass the jet and entrained fluid but impede the movement of fluid upstream along the wall. Results clearly showed that the performance of ejector-diffuser system was improved for certain a range of system pressure ratios, whereas the orifice plate was detrimental to the ejector performance for higher pressure ratios. It is also found that there is no change in the performance of diffuser with orifice at its inlet, in terms of its pressure recovery. Hence an appropriately sized orifice system should produce considerable improvement in the ejector-diffuser performance in the intended range of pressure ratios.

• International journal of advanced smart convergence
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• v.10 no.1
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• pp.159-165
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• 2021

Electronic devices used in the mobile environments fabricated under the plasma conditions in high vacuum system. Especially for the development of advanced electronic devices, high quality plasma as the process conditions are required. For this purpose, the variable conductance throttle valves for controllable plasma employed to the high vacuum system. In this study, we analyzed the effects of throttle valve applications on vacuum characteristics simulated to obtain the optimum design modelling for plasma conditions of high vacuum system. We used commercial simulator of vacuum system, VacSim(multi) on this study. Reliability of simulator verified by simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve schematized as the modelling of throttle valve for the constant process-pressure of below 10-3 torr. Simulation results plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably in plasma process.

• Journal of the Korean Vacuum Society
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• v.10 no.1
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• pp.9-15
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• 2001

The total pressure and partial pressure of small cavity for flat panel display have been successfully measured by using an ultra-high vacuum chamber with mass spectrometer. The total pressure in the panel was in the range of $10^{-6}$ Torr and the major partial pressure affecting increase in total pressure were those of Ar, $CH_4$and He. The baking temperature during evacuation process was very important for high-vacuum package, the total pressure and partial pressure of $CH_4$ were decreased as the increase of baking temperature.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2001.11a
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• pp.45-49
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• 2001

To maintain the freshness of produce, because of stand away between produced and consumer, we need refrigeration system that can supply to consumer at cold chain as soon as gathering. General refrigeration system consist of refrigeration chamber or low temperature store. But the vacuum technology can rapidly refrigeration without refrigerator. This precool system possible to get low precooled temperature, suitable for the fishes, the meat, the vegetables, the fruit etc. Especially get advantage that quality maintain through rapid refrigeration of ferment directly generate heat. Vacuum precool system's principle is that water saturated temperature reduce according to pressure is get to vacuum area, so product temperature reduce as water evaporation at product. In vacuum suction, unit, on early experiment period run the rotary type vacuum pump at purpose pressure, then maintain pressure by water-diven ejector. As the results, cabbage took about 60 minutes to reach from $23.2^{\circ}C$ to $4.5^{\circ}C$at 5mgHg abs.

• Journal of the Korea Institute of Military Science and Technology
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• v.7 no.4 s.19
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• pp.138-145
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• 2004

Experimental study was conducted on cylindrical supersonic diffuser in order to investigate the effects of the ratios of diffuser area to nozzle throat area (Ad/At), diffuser area to nozzle exit area (Ad/Ae), nozzle exit area to its throat area (Ae/At), and diffuser length to its diameter (L/D), the free volume of vacuum chamber, and the relative distance between nozzle exit and diffuser inlet on the diffuser performance. The study showed that the minimum diffuser starting pressure (Po/Pa)st increased monotonically with increase in (Ad/At) as predicted by the normal shock and momentum theory models and the volume of vacuum chamber affected vacuum pressure level during diffuser operation at lower value of (Ad/Ae). The results of this investigation will be utilized in the design of real-scale high-altitude simulation test facility.

• International Journal of Internet, Broadcasting and Communication
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• v.7 no.2
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• pp.28-35
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• 2015

Thin film electronic devices which brought the current mobile environment could be fabricated only under the high quality vacuum conditions provided by high vacuum systems. Especially for the development of advanced thin film devices, constant high quality vacuum as the deposition pressure is definitely needed. For this purpose, the variable conductance throttle valves were employed to the high vacuum system. In this study, the effects of throttle valve applications on vacuum characteristics were simulated to obtain the optimum design modelling of variable conductance of high vacuum system. Commercial simulator of vacuum system, $VacSim^{(multi)}$, was used on this investigation. Reliability of employed simulator was verified by the simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure of below $10^{-3}torr$. Simulation results were plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.11
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• pp.1008-1015
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• 2015

Thermal vacuum test should be performed prior to launch to verify satellites' functionality in extremely cold/hot temperatures and vacuum conditions. A thermal vacuum chamber used to perform the thermal vacuum tests of a satellite system and its components. A cryogenic blower is a core component of the gaseous nitrogen (GN2) closed loop thermal control system for thermal vacuum chambers. A final goal of this research is development of cryogenic blower. Design requirements of a blower are 150 CFM flow rate, 0.5 bara pressure difference, hot and cold temperatures. This paper describes the performance analysis of impeller by 1D, CFD commercial software, the design of the thermal protection interface between the driving part and the fluid part. The performance of the cryogenic blower is confirmed by test at the standard air condition and is verified by on the thermal vacuum chamber at the real operating condition.

• Analytical Science and Technology
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• v.34 no.1
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• pp.23-35
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• 2021

In order to measure the volatile organic compounds (VOCs) of a sample which is too large to use commercially available chamber, a stainless steel vacuum chamber (VC) (with an internal diameter of 205 mm and a height of 50 mm) was manufactured and the temperature of the chamber was controlled using an oven. After concentrating the volatiles of the sample in the chamber by helium gas, it was made possible to remove residual volatile substances present in the chamber under reduced pressure ((2 ± 1) × 10-2 mmHg). The chamber was connected to a purge & trap (P&T) using a 6 port valve to concentrate the VOCs, which were analyzed by gas chromatography-mass spectrometry (GC-MS) after thermal desorption (VC-P&T-GC-MS). Using toluene, the toluene recovery rate of this device was 85 ± 2 %, reproducibility was 5 ± 2 %, and the detection limit was 0.01 ng L-1. The method of removing VOCs remaining in the chamber with helium and the method of removing those with reduced pressure was compared using Korean drinking water regulation (KDWR) VOC Mix A (5 μL of 100 ㎍ mL-1) and butylated hydroxytoluene (BHT, 2 μL of 500 ㎍ mL-1). In case of using helium, which requires a large amount of gas and time, reduced pressure ((2 ± 1) × 10-2 mmHg) only during the GC-MS running time, could remove VOCs and BHT to less than 0.1 % of the original injection concentration. As a result of analyzing volatile substances using VC-P&T-GC-MS of six types of cell phone case, BHT was detected in four types and quantitatively analyzed. Maintaining the chamber at reduced pressure during the GC-MS analysis time eliminated memory effect and did not affect the next sample analysis. The volatile substances in a cell phone case were also analyzed by dynamic headspace (HT3) and GC-MS, and the results of the analysis were compared with those of VC-P&T-GC-MS. Considering the chamber volume and sample weight, the VC-P&T configuration was able to collect volatile substances more efficiently than the HT3. The VC-P&T-GC-MS system is believed to be useful for VOCs measurement of inhomogeneous large sample or devices used inside clean rooms.