• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.525-525
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• 2013

Low temperature plasma diagnosis is one of the big issues in laboratory scale or processing industry. One of the most powerful techniques of plasma diagnostics is the use of the scattering of electromagnetic radiation from the plasma. Electron temperature and density are important parameters for understanding the information of plasmas in the plasma processing industry. Laser scattering experiments on plasma can provide a substantial amount of information about plasma parameters such as the electron density ne, the electron temperature Te, and the neutral density nn and temperature Tn. Thomson scattering spectroscopy is used several method, in accordance with detector type. Commonly, Thomson scattering is used several notch filter to separate expanded wavelength. Since using a spectrometer with surface relief grating or notch filter, the system of the measurement will be complicated and bigger. In this study, using VPHG (Volume Phase Holographic Grating) in order to install the simple and cheap system. VPHG has the advantage of the system installation, because it can be Transmission Type. The diffraction efficiency and dispersion angle of VPHG is higher than the surface relief grating relatively. For a wavelength and bandwidth selection, Using a slit or mask to select a rejection wavelength instead of notch filter.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.154.1-154.1
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• 2011

IGRINS (Immersion Grating Infrared Spectrometer) is a cross-dispersed high resolution near-infrared spectrograph whose primary disperser is a silicon immersion grating (SIG) and cross-dispersers are two volume phase holographic gratings (VPHG). IGRINS covers the full ranges of H and K astronomical wavelength bands at a single exposure with the spectral resolution of 40,000. The overall layout of the IGRINS Cryostat is a $960{\times}600{\times}380$ cubic millimeter rectangular box and the whole optical train is sitting on an $880{\times}520{\times}50\;mm^3$ rectangular Optical Bench. The total volume of the instrument has been revolutionarily reduced and remained compact for the spectral coverage and sensitivity of a high resolution spectrograph in infrared. We, in this presentation, introduce the design models, the structural and thermal analysis results of the mechanics and cryogenics of IGRINS.