• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• Journal of the Korean Magnetics Society
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• v.20 no.6
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• pp.234-238
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• 2010

Solenoid diaphragm fuel pump, which to replace mechanical fuel pump system by utilizing cam-shaft driving force, is in the spotlight for being a high efficient green car component. However, there is a drawback in power consumption as a solenoid diaphragm fuel pump only relies on solenoid for its flux needed in reciprocating motion. Therefore, this research proposes permanent magnet type VCM (Voice Coil Motor) fuel pump system to minimized power consumption. Furthermore, the study compares and analyzes power consumption and dynamic performance between the current and the former solenoid diaphragm pump by conducting finite element analysis with the commercial electromagnetic solver, MAXWELL.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.53 no.10
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• pp.671-677
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• 2004

This paper presents the design of a now controller for the read/write head of a hard disk drive. The general controller for seeking is the time-optimal control. However if we use only the time optimal control law, this could be vulnerable to chattering effect. To solve this problem, we propose a modified controller design algorithm in this paper. The proposed controller consists of bang-bang control for seeking and sliding-mode control for tracking. Moreover, to test the robustness and stability of control system, a bounded disturbance is selected to maximize a severity index. Simulation results show the superiority of the proposed controller through comparison with time optimal VSC(variable structure control).

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.37.3-37
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• 2001

The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.375-378
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• 2005

Voice Coil Motor is used linear motion actuator system that require precision positioning control. In order to control precision positioning of voice coil motor, Mathematical model of voice coil motor is needed. Mathematical model is obtained by combining voice coil motor's equation of motion with the equation of circuit and characteristic of voice coil motor. The induced model can predict output displacement according to duty ratio and amplitude. The model is verified by experimental test. Simulated results have tracking errors of less than 10 percent of experimental results.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.12
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• pp.965-971
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• 2003

To reach high areal density, less track pitch is expected and more servo bandwidth is required. One approach to overcoming the problem is by using dual stage servo system. For this system. we have suggested new milliactuator based on the shear mode of piezoelectric elements to drive the head suspension assembly. In this paper, we introduce milliactuator and controller design method, PQ method. PQ method reduces the controller design problem for DISO (dual-input/single-output) systems to two standard controller design problems for SISO ( single-input/single-output) problems. The first part of PQ method directly addresses the issue of actuator output contribution, and the second part allows the use of traditional loop shaping to achieve the overall system performance. This paper shows how to employ the PQ method to meet aggressive close-loop performance specifications for a disk drive system with a VCM and piezoelectric milliactuator.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.2
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• pp.153-160
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• 1999

Dual-stage servo system for super-high density HDD has the chances of being composed of the coarse actuator(VCM) for track-seeking control and the fine actuator(microactuator) for-following control in near future. This paper presents the concept design of dual-stage servo system and the track-following control using an electrostatic microactuator for super-high density HDD. The electrostatic microactuator is designed and fabricated by MEMS(micro-electro-mechanical system) process. Both the nonlinear plant(voltage/displacement-to-electrostatic force) and the linear plant(electrostatic force-to-displacement) of the microactuator are established. Inverse function of the nonlinear plant is employed for a feedforward nonlinear compensator design. And feedforward control effect of this compensator is shown by time-domain experiments. A track-following feedback controller is designed using the feedback nonlinear compensator which is derived from the feedforward nonlinear compensator. The track-following control experiment is done to show the control efficiency of the proposed control system. And, excellent track-following control performance(2.21kHz servo-bandwidth, 7.51dB gain margin, $50.98^{\circ}$phase margin) is achieved by the proposed control system.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.4
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• pp.1453-1459
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• 2012

The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage will exacerbate the positioning accuracy. This paper presents an approach to model the dual stage system by using bond graph theory. And the state space equations can be derived through the bond graph straightforwardly, which can be used in computing simulations. Through designing the compensators for the dual stage system and simulating, the dual stage performs better dynamics characteristic than the single actuator system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.754-758
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• 2000

In recent years, the LDM(Linear DC Motor) is widely used, because it has more merits than other rotary motors. First, if system requires linear motion, LDM realizes direct linear motion as rotary motor does not. Second, system is simple and easy to control, and so on. In optical disc drive, a tracking system consists of two parts. One is fine actuating and the other is coarse actuating. For coarse actuating VCM(Voice Coil Motor) actuator is used as a basic drive mechanism. In this paper, MC(Moving Coil) type LDM is designed, manufactured and controlled. System is composed of mechanical-electromagnetic component, therefore mechanical loss and electromagnetic loss exist. The dominent mechanical loss is friction which results from sliding between guide shaft and hole. Therefore, this paper shows the friction compensation control. High speed and accurate position is not gained only PID control, therefore other control method is applied to the system.

• Journal of Mechanical Science and Technology
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• v.20 no.9
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• pp.1371-1381
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• 2006

This paper deals with the active vibration control of a simply-supported beam traversed by a moving mass using fuzzy control. Governing equations for dynamic responses of a beam under a moving mass are derived by Galerkin's mode summation method, and the effect of forces (gravity force, Coliolis force, inertia force caused by the slope of the beam, transverse inertia force of the beam) due to the moving mass on the dynamic response of a beam is discussed. For the active control of dynamic deflection and vibration of a beam under the moving mass, the controller based on fuzzy logic is used and the experiments are conducted by VCM (voice coil motor) actuator to suppress the vibration of a beam. Through the numerical and experimental studies, the following conclusions were obtained. With increasing mass ratio y at a fixed velocity of the moving mass under the critical velocity, the position of moving mass at the maximum dynamic deflection moves to the right end of the beam. With increasing velocity of the moving mass at a fixed mass ratio ${\gamma}$, the position of moving mass at the maximum dynamic deflection moves to the right end of the beam too. The numerical predictions of dynamic deflection of the beam have a good agreement with the experimental results. With the fuzzy control, more than 50% reductions of dynamic deflection and residual vibration of the tested beam under the moving mass are obtained.