• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2007년도 하계학술대회 논문집
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• pp.321-324
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• 2007

The actuators of anti-vibration system(AVS) can be separated into several types: piezoelectric actuators, pneumatic springs, cylinders, rotating motor and linear motor. The last one has some advantages, such as low noise, low vibration, simpler configuration and possibility of direct drive. The voice coil motor(VCM) is one type of linear motor, originally used in speaker system. VCM actuators are usually used in occasions that rapid and controlled motion of devices are required. In this paper, a controller which satisfies system specification(e.g. current controller bandwidth) within whole operation range is designed. For that objective, parameters as position were initially obtained with 3D FEM analysis and motor modeling was performed. A current controller in 2-axis VCM drive system was designed and then performance of the proposed controller was verified with simulation using Simplorer and an experimental result.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.424-429
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• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Journal of Mechanical Science and Technology
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• 제17권11호
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• pp.1616-1627
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• 2003

This paper describes a mini linear optical pickup actuator. To reduce the size, inner yokes are designed to guide the mover and outer yokes of permanent magnets are removed. Magnetic circuit method is used to determine the thrust force. Virtual path method is proposed to analyze the open magnetic circuit analysis. The magnetic circuit of the proposed actuator can be a closed circuit due to the virtual path model of the outer magnetic flux. The validity of virtual path method is evaluated by comparing to the FEM analysis. Structural vibration is investigated using FEM and the design of the mover is modified to improve the vibration characteristic. Dynamic characteristic experiments shows that the performance of the proposed actuator is enough to be used as a coarse and fine seeking actuator simultaneously and the thrust force margin for loading a focusing actuator is guaranteed.

• 한국정밀공학회지
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• 제18권8호
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• pp.174-181
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• 2001

Nowadays, the improvement and development of Multi-media and information & communication technology is rapidly processed. They need large data storage capacity. So that, many studies and researches in data storage have been carried out. According to them, the data storage capacity has been increased. But the limitation of storage capacity is happened for several problems. One of them is spot & pit size in optical and magnetic data storage and another is the resolution of actuators. The problems in spot & pit size are covered by new data storage methods-- for examples, AFM(Atomic Force Microscopy), MO(Magneto-optical) system, and NFR(Near-Field decoding) system etc. But the resolution limit of an actuator was not developed and doesn\`t follow up the development of spot & pit size. Because of them, we should improve a resolution of an actuator. Especially, in this paper an actuator if studied and designed for NFR (in using SIL(Solid Immersion Lens) system. It is a dual stage actuator, which consists of a Fine actuator and a Coarse actuator. and should desire 100nm accuracy. Its actuating force generation method is VCM(Voice Coil Motor). The Fine actuator is composed of 4-leaf springs and a bobbin wrapped by coil. The Coarse actuator has Coils and 3-Roller bearings. Also, The Characteristics of designed actuator for NFR system is estimated by Sine-Swept mode and LDV(Laser Doppler Vibro-meter).

• 한국항공우주학회지
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• 제47권1호
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• pp.59-65
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• 2019

본 연구에서는 직구동방식의 보이스 코일 모터를 이용한 유도무기 날개 작동기의 최적 설계를 진행하였다. ANSYS Maxwell 상용프로그램으로 전자기장 해석을 수행하여 토크 성능 및 보이스 코일 모터의 특성을 예측하였으며, 운용 각도 범위에서 날개에 작용하는 공력부하가 가장 큰 구간인 양끝단에 해당되는 각도에서 최적화 설계를 수행하였다. 또한, 작동기의 주요 설계 변수를 선정하고, 최적화 설계를 위하여 반응면 기법(Response Surface Method)을 사용하였다. 반응면은 2차 함수로 구성하였고 2차 반응면 구성에 널리 쓰이는 중심합성법을 바탕으로 수치실험점들을 선정하였다. 구성된 반응면의 적합성은 수정결정계수로 판단하였으며, 최종적으로 최적화로 구해진 토크값은 전자기장 해석을 통한 토크값과 거의 동일함을 확인하였다.

• 제어로봇시스템학회논문지
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• 제7권5호
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• pp.399-406
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• 2001

This paper presents a dynamic modeling and a sliding mode controller for the high-speed/high-accuracy position control system. The selected target system is the wire bonder assembly which is used in the semiconductor assembly process. This system is a reciprocating one around the pivot point that consists of VCM(voice coil motor) as an actuator and transducer horn as a bonding tool. For the modeling elements, the sys-tem is divided into electrical circuit, magnetic circuit and mechanical system. Each system is modeled using the bond graph method and united into the full system. Two major aims are considered in the design of the controller. The first one is that the horn must track the given reference trajectory. The second one is that the controller must be realizable by using the DSP board. Computer simulation and experimental results show that the designed sliding mode controller provides better performance than the PID controller.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 추계학술대회논문집 - 한국공작기계학회
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• pp.83-89
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• 2000

This paper presents a dynamic modeling and a sliding mode controller for the high-speed / high-accuracy position control system. Selected target system is the wire bonder head assembly which is used in semiconductor assembly process. This system is a reciprocating one around the pivot point that consists of VCM(voice coil motor) as a actuator and transducer horn as a bonding tool. For the modeling elements, the system is divided into electrical circuit, magnetic circuit and mechanical system. Each system is modeled by using the bond graph method and united into the full system. Two major aims are considered in the design of the controller. The first one is that the horn must track the given reference trajectory. The second one is that the controller must be realizable by using the DSP board. Computer simulation and experimental results show that the designed sliding mode controller provides better performance than the PID controller.

• 정보저장시스템학회논문집
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• 제5권1호
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• pp.14-18
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• 2009

This paper proposed an optimal plate spring design for the optical image stabilizer in mobile phones. The voice-coil motor (VCM) with plate spring is the smallest, lowest-cost solution for auto focus on the market today and it is also the simplest to implement. The VCM is selected in this paper for auto focusing. However, the design process is complex due to the many design variables coupled to each other and some constraints of each directional motion caused by the characteristics of plate spring. Because of the complex formulation of the design objective, a plate spring design is proposed through the design of experiments to find the optimal design satisfying design constraints.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 I
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• pp.46-51
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• 2001

To reach high areal density, less track pitch is expected and more servo bandwidth is required. One approach to overcoming the problem is by using dual stage servo system. In this system, a voice coil motor (VCM) is used as the primary stage while a milliactuator is used as the secondary stage. We have suggested new milliactuator based on the shear mode of piezoelectric elements to drive the head suspension assembly. In this paper, we introduce controller design method, PQ method. PQ method reduces the controller design problem for DISO(dual-input/single-output) systems to two standard controller design problems for SISO(single-input/single-output) problems. The first part of PQ method directly address the issue of actuator output contribution, and the second part allows the use of traditional loop shaping to achieve the overall system performance. This paper shows how to employ the PQ method to meet aggressive close-loop performance specifications for a disk drive system with a VCM and piezoelectric milliactuator.