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InGaN/GaN Blue LED device 제조시 ALD (Atomic Layer Deposition) 방법으로 증착된 Al2O3 Film의 Passivation 효과

  • Lee, Seong-Gil;Bang, Jin-Bae;Yang, Chung-Mo;Kim, Dong-Seok;Lee, Jeong-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.211-212
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    • 2010
  • GaN 기반의 상부발광형 LED는 동작되는 동안 생기는 전기적 단락, 그리고 칩 위의 p-형 전극과 n-형 전극 사이에 생기는 누설전류 및 신뢰성 확보를 위하여 칩 표면에 passivation 층을 형성하게 된다. SiO2, Si3N4와 같은 passivation layers는 일반적으로 PECVD (Plasma Enhanced Chemical Vapor Deposition)공정을 이용한다, 하지만 이는 공정 특성상 plasma로 인한 damage가 유발되기 때문에 표면 누설 전류가 증가 한다. 이로 인해 forward voltage와 reverse leakage current의 특성이 저하된다. 본 실험에서는 원자층 단위의 박막 증착으로 인해 PECVD보다 단차 피복성이 매우 우수한 PEALD(Plasma Enhanced Atomic Layer Deposition)공정을 이용하여 Al2O3 passivation layer를 증착한 후, 표면 누설전류와 빛의 출력 특성에 대해서 조사해 보았다. PSS (patterned sapphire substrate) 위에 성장된 LED 에피구조를 사용하였고, TCP(Trancformer Copled Plasma)장비를 사용하여 에칭 공정을 진행하였다. 이때 투명전극을 증착하기 위해 e-beam evaporator를 사용하여 Ni/Au를 각각 $50\;{\AA}$씩 증착한 후 오믹 특성을 향상시키기 위하여 $500^{\circ}C$에서 열처리를 해주었다. 그리고 Ti/Au($300/4000{\AA}$) 메탈을 사용하여 p-전극과 n-전극을 형성하였다. Passivation을 하지 않은 경우에는 reverse leakage current가 -5V 에서 $-1.9{\times}10-8$ A 로 측정되었고, SiO2와 Si3N4을 passivation으로 이용한 경우에는 각각 $8.7{\times}10-9$$-2.2{\times}10-9$로 측정되었다. Fig. 1 에서 보면 알 수 있듯이 5 nm의 Al2O3 film을 passivation layer로 이용할 경우 passivation을 하지 않은 경우를 제외한 다른 passivation 경우보다 reverse leakage current가 약 2 order ($-3.46{\times}10-11$ A) 정도 낮게 측정되었다. 그 이유는 CVD 공정보다 짧은 ALD의 공정시간과 더 낮은 RF Power로 인해 plasma damage를 덜 입게 되어 나타난 것으로 생각된다. Fig. 2 에서는 Al2O3로 passivation을 한 소자의 forward voltage가 SiO2와 Si3N4로 passivation을 한 소자보다 각각 0.07 V와 0.25 V씩 낮아지는 것을 확인할 수 있었다. 또한 Fig. 3 에서는 Al2O3로 passivation을 한 소자의 output power가 SiO2와 Si3N4로 passivation을 한 소자보다 각각 2.7%와 24.6%씩 증가한 것을 볼 수 있다. Output power가 증가된 원인으로는 향상된 forward voltage 및 reverse에서의 leakage 특성과 공기보다 높은 Al2O3의 굴절률이 광출력 효율을 증가시켰기 때문인 것으로 판단된다.

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Evaluation of hazardous factors for the application of HACCP on production and transportation flow in home-delivered meals for the elderly (노인을 위한 가정배달급식의 생산 및 배송단계에 HACCP 적용을 위한 위해요인 분석 1)

  • 김혜영;류시현
    • Korean journal of food and cookery science
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    • v.19 no.2
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    • pp.195-209
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    • 2003
  • The purpose of this study was to identify the hazard analysis critical control point on food production and transportation flow, applied to home-delivered meals for the elderly. To carry out this study, 1) pan-fried oak mushroom and meat, soy sauce glazed hair tail, and roasted dodok were selected as high nutrient and preferred foods for the elderly and 2) time, temperature, and microbiological quality(standard plate count, coliform, Salmonella spp, Vibrio parahaemolyticus, Staphylococcus spp., Escherichia coli O157:H7, and Listeria monocytogenes) were measured at various phases of the home-delivered meal production and its transportation flows. The results of this experiments are as follows: The temperature measured at cooling phases during the home-delivered meal production flows was 19.2 ∼ 20.0$^{\circ}C$ for the pan- fried oak mushroom and meat and the roasted dodok and was 24.0 ∼ 25.2$^{\circ}C$ for the soy sauce glazed hair tail. These temperature were in the potentially dangerous zone. Microbiological analysis showed that S. spp. was higher in the raw ingredients, including oak mushroom, hair tail, radish, and dodok, than the standard limit. SPC was lower than the standard limit from cooking to transportation phase, but SPC increased significantly during the cooling and packaging phase. The level of coliform detected was far lower than the standard limit and was not detected at all during the transportation phase. Few S. spp. was detected in the pan-fried oak mushroom and meat, but was found in above standards limit during the wrap packaging phase in the soy sauce glazed hair tail and roasted dodok. The level decreased rapidly during the holding and transportation phase. Sal. spp., V. parahaemolyticus, S. spp., E. coli O157:H7, and L. monocytogenes were not detected. For the pan-fried oak mushroom and meat, the critical control points were during the purchasing and receiving of raw ingredients, cooling, and packaging phases. For the soy sauce glazed hair tail and roasted dodok, the critical control points were during the purchasing and receiving of raw ingredients, preparation, cooling, and packaging phases.

Studies on the Procedures of Accelerating Generation Advancement in Wheat and Barley Breeding IV. Advancement of Two Generations of Wheat Materials a Year at Suweon by Growing a Summer Generation (맥류의 세대촉진방법에 관한 연구 IV. 수원지역에서 소맥 1년 2기작 세대촉진재배)

  • Seong, B.Y.;Cho, C.H.;Park, M.W.;Hong, B.H.;Ahn, W.S.;Nam, J.H.
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.25 no.4
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    • pp.35-42
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    • 1980
  • To establish a generation acceleration technique, two crops a year at field condition of Suweon, 10 varieties different in their spring growth habit were tested with 6 different seeding time after harvesting. These materials were harvested on June 10, 19, 79 and tested for their seed production ability at varions seeding time from July I I to August 15 with a week interval. An immatured seed germination technique and green vernalization methods were applied in cycling generations and the results obtained were summarized as follows. 1. In summer growing, seedlings establishment after transplanting was better in earlier transplanting. 2. Heading time was remarkably enhanced by earlier transplanting. Considering the results of two years early or mid of July was the suitable time to plant the second summer crop. 3. Those varieties of spring growth habit expressed little variations in plant height among the varieties. In 1978 which is referred as warm year produced plant height as tall as 8-16cm and poor crop but produced good crop with 25-65cm plant height in 1979. 4. No definit tendency in the length of spike was. observed among the cultivars but longer spike was found in winter wheat compared to the spring. 5. Number of spikes per plant was ranged from 1 to 3 regardless the transplanting time in 1979. However, more spikes per plant were produced in early or mid of July transplanting and those varieties of higher growth habit than V did not produces any spikes. 6. Higher number of grains per spike was found at earlier transplanted varieties. Therefore, it is concluded that those materials of I-IV growth habit with mid or early July transplanting would be suitable in practical sense considering their ability of seed production. 7. Two-year results indicated that wheat crop can not tolerate the temperature level higher than average 32$^{\circ}C$ C at Suweon. In this regard, the cultivation schedule was established assuming average temperature condition like the year of 1979 which was possible to grow wheats.

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Luminescence and Photostimulated Luminescence of $Eu^{2+}$ in Alkaline Earth Chlorides (염화알칼리토금속 화합물에 도핑된 $Eu^{2+}$ 이온의 광발광 및 광자극발광특성)

  • Kim, Sung-Hwan;Kim, Sun-Chil
    • Journal of radiological science and technology
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    • v.29 no.3
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    • pp.141-145
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    • 2006
  • In this study, $Eu^{2+}$ ion was used as an activator in order to enhance the PL(photoluminescene) and PSL(photostimulated luminescence) intensity of $MCl_2:Eu^{2+}$(M = Ca, Sr, Ba)phosphors and the chracteristics of PL and PSL of the phosphors were investigated. The emission of $MCl_2:Eu^{2+}$(M = Ca, Sr, Ba) phosphors shows a shift wavelength when the host caution changes. The optimal preparing conditions of $CaCl_2:Eu^{2+}$ phosphor were 0.5 mol% of $EuCl_2$ and the sintering temperature were $745^{\circ}C$, 45 min. in $H_2$ atmosphere. The PL and PSL spectra of $CaCl_2:Eu^{2+}$ locate in the range of $365{\sim}388\;nm$, peaking at 370 and 380 nm. The optimal preparing conditions of $BaCl_2:Eu^{2+}$ phosphor were 0.5 mol% of $EuCl_2$ and the sintering temperature were $905^{\circ}C$, 45 min. in $H_2$ atmosphere. The PL and PSL spectra of $BaCl_2:Eu^{2+}$ locate in the range of $370{\sim}460\;nm$, peaking at 398 nm. The optimal preparing conditions of $SrCl_2:Eu^{2+}$ phosphor were 0.5mol% of $EuCl_2$ and the sintering temperature were $840^{\circ}C$, 45min. in $H_2$ atmosphere. The PL and PSL spectra of $SrCl_2:Eu^{2+}$ locate in the range of $380{\sim}440\;nm$, peaking at 407 nm. The dose response of the $MCl_2:Eu^{2+}$(0.5 mol%)(M = Ba, Sr) phosphors were linear within $0.25{\sim}200\;mGy$ of 100 kV X-ray and the PSL intensity of the $SrCl_2:Eu^{2+}$ and $BaCl_2:Eu^{2+}$ phosphors faded to approximately 60 and 40% respectively after 120 min at room temperature.

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A Study on the Effects of the La Concentration on the Frequency Dependence of Dynamic Pyroelectric Properties of PLT Thin Films (PLT 박막에서 조성에 따른 동적 초전특성의 주파수 의존성에 관한 연구)

  • 차대은;장동훈;강성준;윤영섭
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.39 no.10
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    • pp.35-42
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    • 2002
  • Modulation frequency dependences of the pyroelectric properties of PLT (P $b_{1-x}$ L $a_{x}$ $Ti_{1-x}$ 4/ $O_3$) thin films with La concentrations of 5, 10 and 15㏖% have been investigated by using the dynamic method. The PLT thin film with 10㏖% of the La concentration (PLT(10) thin film) shows the most excellent pyroelectric properties among the films. For PLT(10) thin film, the pyroelectric coefficient shows the maximum value of 6.6$\times$10$^{-9}$ C/$\textrm{cm}^2$ㆍK without frequency dependence. The figure of merits for the voltage responsivity and specific detectivity are 1.03$\times$10$^{-11}$ Cㆍcm/J and 1.46$\times$10$^{-9}$ Cㆍcm/J, respectively. Voltage responsivity corresponding to the pyroelectric voltage is almost constant at low modulation frequency and decreases in proportional to frequency at high modulation frequency. Voltage responsivity is 5.15 V/W at 8Hz. Noise equivalent power (NEP) and specific detectivity ( $D^{*}$) of the PLT(10) thin film are 9.93$\times$10$^{-8}$ W/H $z^{1}$2/ and 1.81$\times$10$^{6}$ cmH $z^{1}$2/W at the frequency of 100Hz, respectively. The results indicate that PLT(10) thin film is very suitable for pyroelectric IR sensors.s.s.

The Surface and Electrical Properties of BST Thin Films Prepared by Sol-Gel Method (Sol-Gel 방법에 의한 BST 박막의 표면 및 전기적 특성)

  • 홍경진;조재철
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.6
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    • pp.504-510
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    • 2002
  • Recently, thin film capacitors of high dielectric constant and low leakage current are applied to integrated devices. In this study, (Ba, Sr)$TiO_3$ (BST) thin films for low cost were prepared by Sol-Gel method. BST solution was spin-coated on Pt/$SiO_2$/Si substrate at 4,000 rpm for 10 seconds. Coating process was repeated 3 times and then sintered at $700^{\circ}C$ for 30 minutes. Structural and electrical characteristics of each specimen were analyzed by TG-DTA, SEM, fractal phenomenon, voltage-current and dielectric factor. Thickness of BST ceramics thin films are about 2,600~2,800 ${\AA}$ at depositing 3 times. Dielectric constant of thin films was decreased in 1 kHz~1 MHz. Dielectric constant and loss to frequency were 250 and 0.02 in $(Ba_{0.7}Sr_{0.3})TiO_3$ (BST3). Leakage current of BST3 was $10^{-9}\sim10^{-11}$/ A under 3 V.

A Study on the Effect of Heat Input on the Microstructure and Toughness of Weldments Made by Domestic Flux Cored Wires. (국산 플럭스 코어드 와이어 용접에서 입열량이 용접부의 미세조직과 인성에 미치는 영향)

  • 고진현;국정한
    • Journal of Welding and Joining
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    • v.11 no.4
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    • pp.57-69
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    • 1993
  • In the present study, the microstructure and Charpy V notch toughness of multipass $CO_2$ FCA weldment in three different heat inputs(1-3KJ/mm)were investigated. The weldments using two different domestic FCAW wires(AWS E71T-1 and E71T-5 equivalent) in C-Mn steel were chemically analysed. The following conclusions can be inferred. 1. T-1 wire Showed a stable arc transfer, less spatter and harsh, a better bead spreading and easy slag removal, whereas T-5 wire suffered from the arc stability, which tended to increase spatter and produce a more convex bead. 2.The microsturctures of the top beads of the weldments in three different heat inputs consisted of coarse-grained boundary ferrite and Widmanstatten ferrite side plate with increasing heat inputs. The modest fraction of acicular ferrite in the two wire weldments was observed in the 2KJ/mm heat input. 3.The fine-grained reheated zones of both welds consisted of a duplex microstructure of polygonal ferrite and second phases. 4. The basic flux weldment of T-5wires showed a higher Charpy impact property than that of T-1 wires because of a higher fraction of acicular ferrite in the weld microstructure.

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IN VITRO STUDY ON MARGINAL LEAKAGE OF COMPOSITE RESIN INLAY RESTORATIONS (광중합 복합레진 INLAY 수복물의 변연누출에 관한 실험적 연구)

  • Yoo, Je-Kug;Bae, Jeong-Sik;Lee, Ho-Yong
    • The Journal of Korean Academy of Prosthodontics
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    • v.26 no.1
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    • pp.85-98
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    • 1988
  • The primary aim of this study was to access the degree of marginal leakage in composite resin inlay restorations. Class V cavities were prepared on sixty extracted premolars. They were classified as control group and experimental group 1, 2 and each group was filled with BIS-FIL $I^{(R)}$ and $Silux^{(R)}$ composite resins. In the control group, the composite resin was inserted directly, the experimental group 2 was inserted as composite resin inlay after heat treatment on $125^{\circ}C$, 10 minutes. Then thermocycling was performed 1000 times. After staining with 1% Basic Fuchsin, they were cut in Buccolingual direction and the degree of penetration of the dye was examined under L/M. The following results were obtained : 1. In occlusal margin area, difference in marginal leakage was not observed in all groups. 2. In gingival margin area, cavities filled with composite resin inlay was less marginal leakage than filled directly in BIS-FIL $I^{(R)}$ group, and statistical significant difference was not existed in $Silux^{(R)}$ group. 3. The statistical significance was not existed between composite resin inlay and composite resin inlay heated secondarily. 4. In all groups, gingival margin area reveals more marginal leakage than occlusal margin area and statistical significance was existed.

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Hyperoside Protects Cells against Gamma Ray Radiation-Induced Apoptosis in Hamster Lung Fibroblast

  • Piao, Mei Jing;Kim, Ki Cheon;Cho, Suk Ju;Chae, Sungwook;Kang, Sam Sik;Hyun, Jin Won
    • Natural Product Sciences
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    • v.19 no.2
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    • pp.127-136
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    • 2013
  • Ionizing radiation, including that evoked by gamma (${\gamma}$)-rays, induces oxidative stress through the generation of reactive oxygen species, resulting in apoptosis, or programmed cell death. This study aimed to elucidate the radioprotective effects of hyperoside (quercetin-3-O-galactoside) against ${\gamma}$-ray radiation-induced apoptosis in Chinese hamster lung fibroblasts, V79-4 and demonstrated that the compound reduced levels of intracellular reactive oxygen species in ${\gamma}$-ray-irradiated cells. Hyperoside also protected irradiated cells against DNA damage (evidenced by pronounced DNA tails and elevated phospho-histone H2AX and 8-oxoguanine content) and membrane lipid peroxidation. Furthermore, hyperoside prevented the ${\gamma}$-ray-provoked reduction in cell viability via the inhibition of apoptosis through the increased levels of Bcl-2, the decreased levels of Bax and cytosolic cytochrome c, and the decrease of the active caspase 9 and caspase 3 expression. Taken together, these results suggest that hyperoside defend cells against ${\gamma}$-ray radiation-induced apoptosis by inhibiting oxidative stress.

Clinical Study of the Mediastinal Tumors -72 Cases Report- (종격동(縱隔洞) 종양(腫瘍)의 임상적(臨床的) 고찰(考察) -72례(例) 보고(報告)-)

  • Lee, Jung-Ho;Yoo, Young-Sun;Yoo, Hoe-Sung
    • Journal of Chest Surgery
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    • v.9 no.2
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    • pp.315-322
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    • 1976
  • This report is a analysis of 72 cases of mediastinal tumors which are originated in mediastinum or probably metastasized from other organs, and classified on the basis of histopathological types. And all are experienced in the Depart. Thoracic and cardiovascular Surgery, National Medical Center from 1959 to April 1976. Among these cases, 58 cases were confirmed by histopathologically, and remained 14 cases were considered as mediastinal tumor by clinically and roentgenologically. In this series, dermoid cyst and teratoma was most frequent tumor among histopathologically confirmed cases(27.6%), and thymoma 20.7%, neurogenic tumors 17.2%, carcinoma 19%, lymphoid tumor 8.6% and others was 5.9%. The cases of not verified histopathologically were 14 cases. The main clinical symptoms were dyspnea on exertion or orthopnea (62.55%), productive or irritative cough (59.77%), decreased breathing sound (43. 09%). S.V.C syndromes was seen in 25.02%, and there were no definitive symptom in 4.2% of all cases. The main treatment method was surgical removal and irradiation therapy.

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