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Effect of the Nitridation Process on the Characteristics of $SiO_2$ Films Thermally Nitrided by the Hot-Wall Process and the Cold-Wall Process (Hot-Wall 및 Cold-Wall 공정이$SiO_2$ 열적질화막의 특성에 미치는 영향)

  • 이용수;조범무;이용현;서병기
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.25 no.12
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    • pp.1649-1655
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    • 1988
  • Thermally growon SiO2 films were thermally nitrided in a hot-wall furnace and in a RF-heated cold-wall reactor and their characteristics were investigated by the AES and the C-V dmeasurements. The Auger depth profile show that 200\ulcornerSiO2 film nitrided at 1200\ulcorner, for 2hrs by the hot-wall process has a nitrogen-rich layer near the SiOxNy-Si interface. However the nitrogen-ri h layer is not observed in the case of cold-wall process. The maximum flat-band voltage for the SiO2 films nitrided by the hot-wall process is higher than by the cold-wall process, and the peak value of flat-band voltage for the hot-wall process appears the longer nitridation time than that for the cold-wall process. The SiOxNy-Si interface shift toward the Si substrate for the case of the hot-wall process is larger than that for the cold-wall process.

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Protective Metal Oxide Coatings on Zinc-sulfide-based Phosphors and their Cathodoluminescence Properties

  • Oh, Sung-Il;Lee, Hyo-Sung;Kim, Kwang-Bok;Kang, Jun-Gill
    • Bulletin of the Korean Chemical Society
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    • v.31 no.12
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    • pp.3723-3729
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    • 2010
  • We investigated the high-excitation voltage cathodoluminescence (CL) performance of blue light-emitting (ZnS:Ag,Al,Cl) and green light-emitting (ZnS:Cu,Al) phosphors coated with metal oxides ($SiO_2$, $Al_2O_3$, and MgO). Hydrolysis of the metal oxide precursors tetraethoxysilane, aluminum isopropoxide, and magnesium nitrate, with subsequent heat annealing at $400^{\circ}C$, produced $SiO_2$ nanoparticles, an $Al_2O_3$ thin film, and MgO scale-type film, respectively, on the surface of the phosphors. Effects of the phosphor surface coatings on CL intensities and aging behavior of the phosphors were assessed using an accelerating voltage of 12 kV. The MgO thick film coverage exhibited less reduction in initial CL intensity and was most effective in improving aging degradation. Phosphors treated with a low concentration of magnesium nitrate maintained their initial CL intensities without aging degradation for 2000 s. In contrast, the $SiO_2$ and the $Al_2O_3$ coverages were ineffective in improving aging degradation.

Glow discharge cleaning 법에 의한 stainless steel의 outgassing rate 감소

  • 임종연;이상균;서인용;최상철;홍승수;신용현;정광화
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.40-40
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    • 1999
  • 가속기나 토카막과 같은 거대한 진공 장치의 용기 내벽을 청정화 하기 위해서는 용기 전체의 열처리(굽기, Baking)와 글로우 방전(Glow discharge) 법을 병행하여 사용한다. Baking은 일반 기체(N2, O2, 그리고 CO2)와 물(H2O)의 탈착에 효과적이고, Glow discharge cleaning은 탄소(Carbon-based)와 산소(Oxygen-based) 화합물의 탈착에 효과적이다. 특히 Glow discharge cleaning의 경우에는 전극의 모양, 진공 용기의 재질과 모양, 전극간의 거리, 사용되는 반응 기체의 압력 등에 따라 그 효과에 큰 차이가 있으므로 다각적인 연구가 필요하다. 본 연구에서는 그림 1과 같이 시험용 스테인레스(AISI 304와 AISI 316LN) 진공 용기를 설치하고, 시험 용기의 한쪽은 배기 용기와 oriffice로, 다른 편은 불순물의 정성.정량 분석을 위해 RGA(Residual gas analyser) 용기와 oriffice로 연결하였다. 전체 시스템 중에서 배기 부분과 분석 부분은 15$0^{\circ}C$에서 24시간 가열하여 전체의 기저 진공도를 1$\times$10-8Torr로 하였다. 기저 진공도의 용기에 고순도의 반응기체 (He, Ar, Ar+He, Ar+H2, Ar+N2 등)를 주입한후, DC 전압(0.8~1.5kV)을 변화하며 글로우 방전의 최적조건을 찾았다. 방전 동안 시험용 용기에서 방출되는 반응 기체 이외의 기체를 RGA로 측정하였고 외부에 Thermocouple을 여러곳에 장착하여 온도 변화를 측정하였다. 이상의 결과로부터 진공 용기 표면적으로부터의 불순물 탈착(desorption)과 불순물 분석, 플라즈마와 내벽의 상호작용등에 대한 결론을 얻을 수 있었다. 또한 Baking과 Glow discharge cleaning을 동시에 수행하여 Baking 온도의 낮춤에 따른 영향 평가도 수행하였다.

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Etching Characteristics of Gold Thin Films using Inductively Coupled CF4/CI2/Ar Plasma (CF4/CI2/Ar유도 결합 플라즈마에 의한 gold 박막의 식각특성)

  • 김창일;장윤성;김동표;장의구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.7
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    • pp.564-568
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    • 2003
  • The etching of Au thin films have been performed in an inductively coupled CF$_4$/Cl$_2$/Ar plasma. The etch rates were measured as CF$_4$ contents added from 0 to 30 % to Cl$_2$/Ar plasma, of which gas mixing ratio was fixed at 20%. Other parameters were fixed at an rf power of 700 W, a dc bias voltage of 150 V, a chamber pressure of 15 mTorr, and a substrate temperature of 3$0^{\circ}C$. The highest etch rate of the Au thin film was 3700 $\AA$m/min at a 10% additive CF$_4$ into Cl$_2$/Ar plasma. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. XPS analysis indicated that Au reacted with Cl and formed Au-Cl, which is hard to remove on the surface because of its high melting point. The etching products could be sputtered by Ar ion bombardment.

Improvement of Plasma Reactor Performance for Hydrogen Generation

  • Pavel, Kostyuk;Park, J.Y.;Kim, J.S.;Park, S.H.;Kim, Y.C.;Jeong, M.G.;Lee, H.W.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.519-520
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    • 2006
  • Research was performed to increase the efficiency of a plasma reactor for $H_2$ yield. In the preceding studies $H_2$ was increased by adding Ni as a transitional metal catalyst and $TiO_2$ as a photocatalyst. In these experiments, it was found that distilled water, discharge frequency, and electrode configuration had a significant impact on $H_2$ generation. A substantial amount of hydrogen yield was observed at 2 kHz of discharge frequency and 12 kV of applied voltage. Within this favorable discharge conditions, the weight rate of $TiO_2$ and Ni powders was investigated. Plasma phenomenon was measured by electrical, optical and acoustical devices. It was found that emitted light, electric current and acoustical signals acquired from the discharge demonstrated systematical correlation. Changing the electrode's configuration allowed discharge distribution along the perimeter of the electrode's tip, which increased the density of streamers and plasma energy loadings, as the value of inception voltage for the discharge propagation decreased.

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The Crystal and Molecular Structure of Thiamphenicol

  • Shin, Whan-chul;Kim, Sang-soo
    • Bulletin of the Korean Chemical Society
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    • v.4 no.2
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    • pp.79-83
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    • 1983
  • The structure of thiamphenicol, one of the congeners of chloramphenicol which is a well-known antibiotic, has been determined by single crystal x-ray diffraction techniques. The crystal structure was determined using diffractometer data obtained by the $2{\theta}:{\omega}$ scan technique with $MoK{\alpha}$ radiation from a crystal having space group symmetry $P2_{1}2_{1}2_{1}$, and unit cell parameters a = 5.779, b = 15.292 and c = 17.322 ${\AA}$ . The structure was solved by direct methods and refined by least squares to an R = 0.070 for the 2116 reflections. The overall V-shaped conformation of thiamphenicol revealed in this study is consistent with those from the crystallographic studies and the proposed models from the theoretical and nmr studies of chloramphenicol. However there is no intramolecular hydrogen bond and the propanediol moiety is fully extended in the thiamphenicol molecule, while the crystal structures of chloramphenicol show the existence of the hydrogen bond between the two hydroxyl groups of the propanediol moiety forming an acyclic ring. All of the thiamphenicol molecules in the crystal are linked by a threedimensional hydrogen bonding network.

Adsorption and Dissociation Reaction of Carbon Dioxide on Pt(111) and Fe(111) Surface: MO-study

  • Jo, Sang Jun;Park, Dong Ho;Heo, Do Seong
    • Bulletin of the Korean Chemical Society
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    • v.21 no.8
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    • pp.779-784
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    • 2000
  • Comparing the adsorption properties and dissociation on a Pt(111) iththat ona Fe(111) surface, we have con-sidered seven coordination modes of the adsorbed binding site: $di-${\sigma}$${\Delta}$\mu\pi/\mu$, 1-fbld,2-fold, and 3-fbld sites. On the Pt(111) surface, t he adsorbed binding site of carbon dioxide was strongestat the1-fold site and weakest at the $\pi/\mu-site.$ The adsorbed binding site on the Fe(111) surface was strongest at the di-бsite and weakest at the 3-fold site. We have found that the binding energy at each site that excepted 3-fold on the Fe(111) surface was stronger than the binding energy on the Pt(111) surface and that chemisorbed $CO_2bends$ because of metal mixing with $2\piu${\rightarrow}$6a_1CO_2orbital.$, The dissociation reaction occured in two steps, with an intermediate com-plex composed of atomic oxygen and ${\pi}bonding$ CO forming. The OCO angles of reaction intermediate com-plex structure for the dissociation reaction $were115^{\circ}Con$ the Pt(111), and $117^{\circ}C$ on the Fe(111) surface. We have found that the $CO_2dissociation$ rea11) surface proceeds easily,with an activationenergy about 0.2 eV lower than that on the Pt(111) surface.

Mechanical Anisotropy of Pocheon Granite under Uniaxial Compression (일축압축하에서 포천화강암의 역학적 이방성)

  • Park Deok-Won
    • The Journal of Engineering Geology
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    • v.15 no.3
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    • pp.337-348
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    • 2005
  • Jurassic granite from Pocheon area were tested to investigate the effect of microcracks on mechanical properties of the granite. Three oriented core specimens were used for uniaxial compressive tests and each core specimen are perpendicular to the axes'R'(rift plane),'c'(grain plane) and'H'(hardway plane), respectively Among vacious elastic constants, the variation of Poisson's ratio as function of the directions was examined. From the related chart between ratio of failure strength and Poisson's ratio, H-specimen shows the highest range in Poisson's ratio and Poisson's ratio decreases in the order of C-specimen and R-specimen. The curve pattern is nearly linear in stage $I\simIII$ but the slope increases abruptly in stage H-3. As shown in the related chart, diverging point of a curve is formed when ratio of failure strength is $0.92\sim0.96$ Stage IV -3 is out of elastic region. The behaviour of rock in the four fracturing stages was analyzed in term of the stress-volumetric strain me. From the stress increment-volumetric strain equations governing the behaviour of rock, characteristic material constants, a, n, Q, m and $\varepsilon_v^{mcf}$, were determined. Among these, inherent microcrack porosity$(a, 10^{-3})$ and compaction exponent(n) in the microcrack closure region(stage I ) show an order of $a^R(3.82)>a^G(3.38)>a^H(2.32)\;and\;n^R(3.69)>n^G(2.79)>n^H(1.99)4, respectively. Especially, critical volumetric microcrack strain($\varepsilon_v^{mcf}$) in the stage W is highest in the H-specimen, normal to the hardway plane. These results indicate a strong correlation between two major sets of microcracks and mechanical properties such as Poisson's ratio and material constants. Correlation of strength anisotropy with microcrack orientation can have important application in rock fracture studies.

Effect of Oxygen Pressure on the Electrical Properties of ZnO Transparent Thin Films on Flexible Teflon Substrate (산소압력이 테프론 휨성 기판위에 형성된 ZRO 투명박막의 전기적 특성에 미치는 영향)

  • Suh Kwang Jong;Chang Ho Jung
    • Korean Journal of Materials Research
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    • v.15 no.4
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    • pp.271-274
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    • 2005
  • We investigated the crystalline and electrical properties of ZnO thin films for transparent electrode as a function of the oxygen pressures during the deposition. The ZnO thin films were deposited on a flexible teflon substrates by the pulsed laser deposition. From the X-ray diffraction, ZnO films showed c axis oriented ZnO(0002) crystal structure. The FWHM (full width at half maximum) values decreased from $0.51^{\circ}\;to\;0.34^{\circ}$ as the oxygen pressure increased from 0.1 mTorr to 10.0 mTorr showing the improvement of crystallinity. The resistivity and hall mobility of ZnO film deposited at the oxgen pressure of 0.1 mTorr at $200^{\circ}C$ was about $5\times10^{-4}\Omega{\cdot}cm\;and\;20cm^2/V{\cdot}s$, respectively. The optical transmittance of the ZnO films on flexible teflon substrate was found to be above $85\%$.

고온 및 고온고습 가속시험에 의한 CIGS PV 모듈의 열화거동

  • Lee, Dong-Won;Nam, Song-Min;Kim, Yong-Nam
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.421-421
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    • 2012
  • Cu(In,Ga)$Se_2$ (CIGS) 화합물은 직접천이형 반도체로 열적으로 매우 안정하고 에너지밴드갭이 1.04 eV로 이상적인 값에 가깝고, 특히 높은 광흡수계수를 가지기 때문에 박막 태양전지로서 커다란 응용 잠재력을 갖고 있는 광흡수층 재료이다. CIGS 화합물 박막 태양전지의 효율은 연구실에서는 ~20%를 높은 효율을 보고하고 있으며, 모듈급에서도 ~13%의 효율을 보이고 있다. 그러나 CIGS 박막 태양전지를 대면적 또는 양산화에 적용하기 위해서는 20년 이상의 장기적인 수명을 보장할 수 있는 내구성을 갖추어야 한다. 본 연구에서는 CIGS 모듈의 장기적인 신뢰성을 평가하기 위해 CIGS PV 모듈을 대상으로 대표적인 고온 고습 조건인 IEC-61646 규격을 이용하여 $85^{\circ}C$/85% RH에서 1000시간 동안 가속시험이 수행되었고, 고온 환경하에서 모듈의 성능 저하에 미치는 영향을 고찰하기 위해 모듈을 $85^{\circ}C$에서 1000시간 노출시켰다. 두 종류의 가속 스트레스시험 후에 모듈들의 외형적인 노화현상 및 전기적 열화 성능을 분석하였다. 또한 모듈의 효율저하의 원인을 규명하기 위해 모듈 구성 재료 중 충진재료로 사용하는 EVA sheet와 투명전극 AZO를 대상으로 고장분석을 수행하였다. AZO의 미세구조 관찰, 결정상 분석, XPS 분석 및 전기적 분석과 EVA sheet의 FT-IR 분석과 TG-DSC 분석들을 종합하여 CIGS PV 모듈의 성능저하의 원인을 규명하였다.

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