Sputtering deposition and post-annealing of $Pb(Zr, Ti)O_3$ ferroelectric thin films
($Pb(Zr, Ti)O_3$ 강유전체 박막의 스퍼터링 증착과 후속열처리)
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- Journal of the Korean Vacuum Society
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- v.6 no.1
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- pp.36-43
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- 1997