• Title/Summary/Keyword: V2C

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Sputtering deposition and post-annealing of $Pb(Zr, Ti)O_3$ ferroelectric thin films ($Pb(Zr, Ti)O_3$강유전체 박막의 스퍼터링 증착과 후속열처리)

  • 장지근;박재영;윤진모;임성규;장호정
    • Journal of the Korean Vacuum Society
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    • v.6 no.1
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    • pp.36-43
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    • 1997
  • FECAPS(ferroelectric capacitors) have been fabricated by RF magnetron sputtering deposition of 3000$\AA$ PZT thin films on the Pt/Ti/$SiO_2$/Si substrates and post-annealing with the temperature of $550^{\circ}C$~$650^{\circ}C$ for 10 sec~50 sec in a RTA system. The electrical characteristics of the fabricated capacitors showed the highest dielectric constant and remanent polarization[${\varepsilon_r(1kHz)$=690, $2P_r$(-5V~5V sweep)=22$\mu$C/$ \textrm{cm}^2$] in the samples annealed at $650^{\circ}C$ for 30 sec, while the lowest tangent loss and leakage current [$tan\delta(\ge10kHz)\le0.02, \; J_i(5V)=3\mu\textrm{A}/\textrm{cm}^2$]in the samples annealed at $600^{\circ}C$ for 30 sec.

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C-V 측정을 통한 다이오드 소자의 온도 특성 분석

  • Choe, Pyeong-Ho;Kim, Sang-Seop;Choe, Byeong-Deok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.284-284
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    • 2012
  • 본 연구에서는 다이오드 소자의 온도 증가에 따른 C-V 특성을 분석하였다. 180 kHz 주파수 조건에서 온도는 300 K에서 450 K까지 50 K 간격으로 가변하였다. 측정 결과 reverse bias 영역에서는 커패시턴스의 온도 의존성이 없었으나, forward bias 영역에서는 온도가 증가함에 따라 동일 전압에서의 커패시턴스가 증가하였다. 이로부터 온도가 증가 할수록 소자가 반전(inversion) 상태에서 축적(accumulation) 상태로 빨리 전환함을 확인하였으며, 1/C2-V 그래프로부터 온도 증가에 따른 전위장벽(Built-in potential, Vbi) 감소를 확인하였다. 전위장벽은 0.63 V에서 0.31 V로 온도 상승에 따라 약 0.1 V씩 감소하였다. 이는 energy band diagram에서 p-type 영역과 n-type 영역의 energy band 차가 감소해 공핍층 영역의 폭이 좁아짐을 의미한다. 공핍층의 두께 감소로 다이오드 전류의 급격한 증가뿐 아니라 위에서 언급한 바와 같은 C-V 특성을 보였다. 이번 연구에서는 기존의 보편화 된 I-V 측정을 통한 다이오드 소자 분석과는 달리 온도 변화에 따른 C-V 분석을 통해 소자 내부의 전위 장벽 및 공핍층 폭 감소에 따른 소자 특성 변화를 분석하였다.

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Relationship between V/C and Accident Rate for Freeway Facility Sections (focused on Shingal-Ansan Freeway) (고속도로 시설물 구간의 교통혼잡도와 사고율의 관계 분석 (신갈-안산 고속도로를 중심으로))

  • Oh, Cheol;Chang, Jae-Nam;Chang, Myeong-Sun
    • Journal of Korean Society of Transportation
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    • v.17 no.2
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    • pp.21-27
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    • 1999
  • The objective of this study is to clarify the relationship between accident rate and V/C for freeway facility. The relationship can be used as a basic reference to predict and prevent traffic accident. The traffic volume and the number of accidents from 1992 to 1997 on Shingal-Ansan Freeway were analyzed in this study to clarify the relationship. Hourly accident rate and V/C were calculated for each facility sections : basic freeway section, tunnel section and toll gate section. The accident rate models consisting of an independent variable of V/C were established by repression analysis and compared with each other. The relationship between accident rates and V/C ratios represented U-shaped pattern for all sections. The result of this study indicates that accident rates are highest in the low hourly V/C range, decrease with increasing V/C ratio, and then increase as the V/C ratio increases. The accident rate of toll gate section is in general higher than that of other sections. Although the accident rate of tunnel section is higher than that of basic freeway section when V/C is above 0.67, there is no significant difference of accident rate between basic freeway and tunnel section when V/C is between 0.5 and 0.8. Basic freeway tunnel and toll gate section have the minimum accident rate when V/C is 0.78, 0.75 and 0.57 respectively.

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Reasonable Design Method of Vertical Drain Depending on the Depth of Soft Ground (연약지반의 심도에 따른 연직 배수재의 합리적 설계 방안)

  • Lim, Chang-Su;Lee, Dal-Won
    • Korean Journal of Agricultural Science
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    • v.28 no.2
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    • pp.108-115
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    • 2001
  • In this study, to propose the reasonable evaluation method of degree of consolidation considering the depth of soft ground, the two soft ground areas were chosen and analyzed for the consolidation degree. One was a western coast area in which depth of soft ground was low, and the other was a southern coast area in which depth of soft ground was deep. At the area in which depth of soft ground was low, Barron's and Yoshikuni's methods showed that the evaluation of consolidation degree was large, and it is reasonable that $C_h=C_v$ be recommended to apply the Hansbo's and the Onoue's methods. At the area in which depth of soft ground was deep, it is reasonable that $C_h=C_v$ be recommended to apply the Barron's and the Yoshikuni's methods, and $C_h=(2{\sim}3)C_v$ to apply the Hansbo's and the Onoue's methods. According to the Hansbo's and Onoue's methods, degree of consolidation proved to be applicable with measured data when using the $k_s=(1/3)k_v$ at the area which depth of soft ground was low and using the $k_s=(1{\sim}1/2)k_v$ at the area which depth of soft ground was deep. According to the Hansbo's and Onoue's methods, degree of consolidation was proved to be applicable with measured data when using ds=(3~5)dm at the area which depth of soft ground was low and using ds=2dm at the area which depth of soft ground was deep.

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Assembly of Six-Membered Vanadium Borophosphate Cluster Anions: Synthesis and Structures of (NH4)2(C2H10N2)6[BaH2O)5]2[V2P2BO12]6.8H2O and (NH4)8(C3H12N2)4[Ba(H2O)7][V2P2BO12]6.17H2O

  • Yun, Ho-Seop;Do, Jung-Hwan
    • Bulletin of the Korean Chemical Society
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    • v.26 no.1
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    • pp.146-150
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    • 2005
  • Two new barium vanadium borophosphate compounds, $(NH_4)_2(C_2H_{10}N_2)_6[Ba(H_2O)_5]_2[V_2P_2BO_{12}]_6{\cdot}8H_2O$, Ba- VBPO1 and $(NH_4)_8(C_3H_{12}N_2)_4[Ba(H_2O)_7][V_2P_2BO_{12}]_6{\cdot}17H_2O$, Ba-VBPO2 have been synthesized by interdiffusion methods in the presence of diprotonated ethylenediamine and 1,3-diaminopropane. Compound Ba-VBPO1 has an infinite chain anion (${[BaH_2O)_5]_2[V_2P_2BO_{12}]_6}$$^{14-}$, whereas Ba-VBPO2 has a discrete cluster anion {[$Ba(H_2O)_7][V_2P_2BO_{12}]_6$}$^{16-}$. Crystal Data: $(NH_4)_2(C_2H_{10}N_2)_6[Ba(H_2O)_5]_2[V_2P_2BO_{12}]_6{\cdot}8H_2O$, triclinic, space group P$\overline{1}$ (no. 2), a = 13.7252(7) $\AA$, b = 15.7548(8) $\AA$, c = 15.8609(8) $\AA$, α = 63.278(1)$^{\circ}$, $\beta$ = 75.707(1)$^{\circ}$, $\gamma$ = 65.881(1)$^{\circ}$, Z = 1; $(NH_4)_8(C_3H_{12}N_2)_4[Ba(H_2O)_7][V_2P_2BO_{12}]_6{\cdot}17H_2O$, monoclinic, space group C2/c (no. 15), a = 31.347(2) $\AA$, b = 17.1221(9) $\AA$, c = 22.3058(1) $\AA$, $\beta$ = 99.303(1)$^{\circ}$, Z = 4.

NH3 분위기 후열처리에 따른 SiC 기판 위에 성장된 HfO2 박막의 계면 변화 연구

  • Gwon, Se-Ra;Park, Hyeon-U;Choe, Min-Jun;Jeong, Gwon-Beom
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.299-299
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    • 2016
  • SiC는 넓은 에너지갭 (Eg=~3.4 eV)을 갖는 반도체로써, 고전압, 고온에서 동작이 가능하여 기존의 Si기반의 파워디바이스를 대체하기 위한 물질로 많은 연구가 이루어지고 있다. 파워 디바이스의 성능 향상을 위해서는 기판과 절연체 사이의 계면에 생성되는 계면 결함을 감소시켜야 한다. 따라서 본 연구에서는 SiC 기판에 high-k 물질인 HfO2를 증착하여 HfO2/SiC 계면에 유도된 결함을 분석하고 이를 감소시킬 수 있는 방법에 대한 연구를 수행하였다. HfO2 박막은 atomic-layer-deposition (ALD) 방법을 이용하여 SiC 기판 위에 $200^{\circ}C$에서 증착하였다. HfO2 박막 증착 후 NH3 분위기에서 rapid thermal annealing 방법을 이용하여 $600^{\circ}C$에서 1분 동안 열처리 진행하였다. Current-voltage (I-V) 측정을 통해 열처리 전 HfO2/SiC의 절연파괴 전압이 약 8.3 V 임을 확인하였다. NH3 열처리 후 HfO2/SiC의 절연파괴 전압이 10 V로 증가하였으며 누설 전류가 크게 감소하는 것을 확인하였다. 또한 capacitance-voltage (C-V) 측정을 통해 열처리 후 flat band voltage가 negative 방향에서 positive 방향으로 이동함을 확인하였고, 이를 통해 NH3 열처리 방법이 HfO2/SiC 계면에 존재하는 결함을 감소시킬 수 있음을 확인하였다. 전자 구조상의 conduction band edge에 존재하는 결함 준위를 분석하기 위해 x-ray absorption spectroscopy (XAS) 분석을 실시하였고, 열처리 전 HfO2/SiC 계면에 많은 결함 준위가 존재함을 확인하였으며, x-ray photoelectron spectroscopy (XPS) 분석을 통해 이 결함 준위가 oxygen deficiency state과 관련됨을 알 수 있었다. NH3 열처리 후 결과와 비교해보면, oxygen deficiency state가 감소함을 확인하였으며 이로 인해 conduction band edge에 존재하는 결함 준위가 감소함을 알 수 있었다. 따라서, NH3 열처리 방법을 이용하여 HfO2/SiC 계면에 존재하는 결함을 감소시킬 수 있으며, HfO2/SiC의 물리적, 전기적 특성을 향상시킬 수 있다는 결과를 도출하였다.

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A study on the growth and characteristics of $AgGaS_2$ single crystal thin film by hot wall epitaxy (HWE 방법에 의한 $AgGaS_2$단결정 박막성장과 특성에 관한 연구)

  • 홍광준;정준우
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.2
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    • pp.211-220
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    • 1998
  • The stochiometric composition of $AgGaS_2$polycrystal source materials for the single crystal thin films were prepared from horizontal furnace. From the extrapolation method of X-ray diffraction patterns, it was found that the polycrystal $AgGaS_2$has tetragonal structure of which lattice constant $a_0\;and \;c_0$ were 5.756 $\AA$ and 10.305 $\AA$, respectively. $AgGaS_2$single crystal thin film was deposited on throughly etched GaAs(100) substrate from mixed crystal $AgGaS_2$by the Hot Wall Epitaxy (HWE) system. The source and substrate temperature were $590^{\circ}C$ and $440^{\circ}C$ respectively, and the growth rate of the single crystal thin films was about 0.5 $mu \textrm{m}$/h. The crystallinity of the grown single crystal thin films was investigated by the DCRC (double crystal X-ray diffraction rocking curve). The optical energy gaps were found to be 2.61 eV for $AgGaS_2$single crystal thin films at room temperature. The temperature dependence of the photocurrent peak energy is well explained by the Varshni equation, then the constants in the Varshni equation are given by${\Alpha};=;8.695{\times}10^{-4};eV/K,and;{\beta};=;332;K$. from the photocurrent spectra by illumination of polarized light of the $AgGaS_2$single crystal thin film, we have found that crystal field splitting $\Delta$Cr was 0.28 eV at 20 K. From the PL spectra at 20 K, the peaks corresponding to free and bound excitons and a broad emission band due to D-A pairs are identified. The binding energy of the free excitons are determined to be 0.2676 eV and 0.2430 eV and the dissociation energy of the bound excitons to be 0.4695 eV.

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Fabrication and Stability of V/YSZ Cermet Membrane for Hydrogen Separation (수소 분리를 위한 V/YSZ cermet 분리막의 제조 및 안정성)

  • Jeon, Sung-Il;Park, Jung-Hoon;Lee, Sang-Jin;Choi, Soo-Hyun
    • Membrane Journal
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    • v.20 no.1
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    • pp.62-68
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    • 2010
  • The powder mixture for fabricating the cermet membranes was prepared by mechanically mixing 60 vol.% vanadium with $Y_2O_3$-stabilized $ZrO_2$ (YSZ). The powder mixture was pressed into disks, which were then sintered in vacuum at $1600^{\circ}C$ for 2 h. As-sintered membrane was dense and mounted to a stainless steel ring with brazing filler. Hydrogen fluxes of V/YSZ membrane have been measured in the range of $200{\sim}350^{\circ}C$ with 100% $H_2$. The crack was formed in the both sides of membrane at $350^{\circ}C$ and pressure of 0.5 bar. During permeation experiment, vanadium of V/YSZ membrane reacted with hydrogen to form $V_2H$ which was the origin of crack formation.

A Study on the Carbothermic Reduction and Refining of V, Ta and B Oxides by Ar/Ar-H2 Plasma (Ar/Ar-H2 플라즈마에 의한 V, Ta, B 산화물의 탄소용융환원 및 정련)

  • Chung, Yong-Sug;Park, Byung-Sam;Hong, Jin-Seok;Bae, Jung-Chan;Kim, Moon-Chul;Baik, Hong-Koo
    • Journal of Hydrogen and New Energy
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    • v.7 no.1
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    • pp.81-92
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    • 1996
  • The Ar/Ar-$H_2$ plasma method was applied to reduce oxides and refine metals of V, Ta and B. In addition, the high temperature chemical reaction in Ar plasma and of the refining reaction in the Ar-(20%)$H_2$ plasma were analyzed. The crude V of 96wt% purity was obtained at the ratio of $C/V_{2}O_{5}=4.50$ by the Ar plasma reduction grade and the maximum reduction was obtained at $C/V_{2}O_{5}=4.50$ due to the $O_{2}$ loss from the thermal decomposition of vanadium oxide. In the Ar-(20%)$H_2$ plasma refining, the metallic V of 99.2wt% was produced at the ratio of $C/V_{2}O_{5}=4.40$. It was considered that a main refining reaction resulted from the chemical reaction between the residual carbon and residual oxygen. The metallic Ta of 99.8wt% was obtained at the ratio of $C/Ta_{2}O_{5}=5.10$ in a Ar plasma reduction and the Oz loss from the thermal decomposition of tantalum pentoxide did not take place. The deoxidation reaction was more significant than the decarburization reaction in the Ar-(20%)$H_2$ plasma refining and the metallic Ta of 99.9wt% was produced within the range of $C/Ta_{2}O_{5}$ ratio of 4.50 to 5.10. The Vickers hardness of Ta in the above mentioned range was about 220Hv due to the decrease in a residual oxygen by the deoxidation reaction. On the other hand, C is no suitable agent for the reduction of $B_{2}O_{3}$ by the Ar and Ar-$H_2$ plasma. But Fe-B-Si alloy was produced with the reduction of $B_{2}O_{3}$ in the melt when Fe, C, $B_{2}O_{3}$, and ferroboron mixtures were melted by the high frequency induction melting.

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Studies of Magnetic Properties of Ni-Zn-Cu Ferrite with Low Loss and High Permeability (저손질, 고투자율을 갖는 Ni-Zn-Cu ferrite의 자기적 특성 연구)

  • 김용복;고재귀
    • Journal of the Korean Magnetics Society
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    • v.8 no.2
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    • pp.62-66
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    • 1998
  • We have studied on the magnetic properties of the specimen with additives Bi$_2$O$_3$and$V_2O_5$ that sintered at 900 $^{\circ}C$ for 4 hours for sybthesizing optimal Ni-Zn-Cu ferrite. Curie temperature rises from 240 $^{\circ}C$ to 270 $^{\circ}C$ as Ni contents increase. Magentic maximum induction$(B_m)$ increases from 2650 G to 3300 G, 3500 G in the specimens with $V_2O_5$ and Bi$_2$O$_3$resectively. On the contrary coercive force $(H_c)$ lowers to 2.05 Oe~1.05 Oe. Permeability all increase in the specimen with additives. In the specimen with additive Bi$_2$O$_3$, we have obtained the low relative loss factor of $6.3{\times}10^{-5}~7.84{\times}10^{-5}$ in the range of 1MHz due to increase of resistivity in grain boundary. In the specimen with additive $V_2O_5$ in spite of increase permeability relative loss factor increase of due to decrease of Q-value.

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