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The Characteristics of (Ba,Sr)$TiO_3$ Thin Films Etched With The high Density $BCl_3/Cl_2$/Ar Plasma ($BCl_3/Cl_2$/Ar 고밀도 플라즈마에서 (Ba,Sr)$TiO_3$ 박막의 식각 특성에 관한 연구)

  • Kim, Seung-Bum;Kim, Chang-Il
    • Proceedings of the KIEE Conference
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    • 1999.11d
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    • pp.863-866
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    • 1999
  • (Ba,Sr)$TiO_3$ thin films have attracted groat interest as new dielectric materials of capacitors for ultra-large-scale integrated dynamic random access memories (ULSI-DRAMs) such as 1 Gbit or 4 Gbit. In this study, inductively coupled $BCl_3/Cl_2$/Ar plasmas was used to etch (Ba,Sr)$TiO_3$ thin films. RF power/dc bias voltage = 600 W/-250 V and chamber pressure was 10 mTorr. The $Cl_2/(Cl_2+Ar)$ was fixed at 0.2, the (Ba,Sr)$TiO_3$ thin films were etched adding $BCl_3$. The highest (Ba,Sr)$TiO_3$ etch rate is 480$\AA/min$ at 10 % $BCl_3$ adding to $Cl_2$/Ar. The characteristics of the plasmas were estimated using optical emission spectroscopy (OES). The change of Cl, B radical density measured by OES as a function of $BCl_3$ percentage in $Cl_2$/Ar. The highest Cl radical density was shown at the addition of 10% $BCl_3$ to $Cl_2$/Ar. To study on the surface reaction of (Ba,Sr)$TiO_3$ thin films was investigated by XPS analysis. Ion enhancement etching is necessary to break Ba-O bond and to remove $BaCl_2$. There is a little chemical reaction between Sr and Cl, but Sr is removed by physical sputtering. There is a chemical reaction between Ti and Cl, and Tic14 is removed with ease. The cross-sectional of (Ba,Sr)$TiO_3$ thin film was investigated by scanning electron microscopy (SEM), the etch slope is about $65\;{\sim}\;70$.

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The Manufacturing Mechanism of Nano-some and Method of Capsulation of Kojic Acid and Kojic Dipalmitate with Hydrogenated Lecithin and Co-emulsifiers (Hydrogenated Lecithin 과 Co-emulsifier를 사용한 Nano-some의 제조 메커니즘과 Kojic Acid 및 Kojic Dipalmitate의 캡슐화 방법)

  • Kim, In-Young;Jae, Koo-Hwan;Lee, Joo-Dong
    • Journal of the Korean Applied Science and Technology
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    • v.17 no.4
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    • pp.248-256
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    • 2000
  • We investigated the property of formation of mono-vesicle(designated nano-some) with using of the combined co-emulsifiers and phospholipid. Nano-some was prepared with hydrogenated lecithin(HL) and diethanolamine cetyl phosphate(DEA-CP) by swelling reaction. Kojic acid and kojic dipalmitate could be made stabilization by nano-some system using microfluidizer(MF). Nano-some has a good affinity to skin by means of this system. The composition was compounded by 2% of hydrogenated lecithin (phosphatidyl choline contained with 75%, 0.5% of DEA-CP and 0.5% of diglyceryl dioleate (DGDO). To make nano-some, several conditions of MF have to be considered as follows. The optimum pH was 6.0. The pressure was 10,000psi and passage temperature was at $306^{\circ}C$. The nano-some base was passed to homogenize continually 3 times through MF. The Particle size distributions of the vesicles were with in $57{\sim}75.7nm$(mean 66nm) by measuring the Zetasizer-3000. Zeta potential of vesicles with 3 times passage through MF was -24.8mV. Formations for nano-some vesicle certificated photograph by scanning electric magnification (SEM). Stability of nano-some was very good for 6months. The turbidity was very good transparency compared nano-some with liposome. It was formed the mono vesicle in the opposite direction to be formed the multi-lamellar vesicle of liposome.

Energy-band model on photoresponse transitions in biased asymmetric dot-in-double-quantum-well infrared detector

  • Sin, Hyeon-Uk;Choe, Jeong-U;Kim, Jun-O;Lee, Sang-Jun;No, Sam-Gyu;Lee, Gyu-Seok;Krishna, S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.234-234
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    • 2010
  • The PR transitions in asymmetric dot-in-double-quantum-well (DdWELL) photodetector is identified by bias-dependent spectral behaviors. Discrete n-i-n infrared photodetectors were fabricated on a 30-period asymmetric InAs-QD/[InGaAs/GaAs]/AlGaAs DdWELL wafer that was prepared by MBE technique. A 2.0-monolayer (ML) InAs QD ensemble was embedded in upper combined well of InGaAs/GaAs and each stack is separated by a 50-nm AlGaAs barrier. Each pixel has circular aperture of 300 um in diameter, and the mesa cell ($410{\times}410\;{\mu}m^2$) was defined by shallow etching. PR measurements were performed in the spectral range of $3{\sim}13\;{\mu}m$ (~ 100-400 meV) by using a Fourier-transform infrared (FTIR) spectrometer and a low-noise preamplifier. The asymmetric photodetector exhibits unique transition behaviors that near-/far-infrared (NIR/FIR) photoresponse (PR) bands are blue/red shifted by the electric field, contrasted to mid-infrared (MIR) with no dependence. In addition, the MIR-FIR dual-band spectra change into single-band feature by the polarity. A four-level energy band model is proposed for the transition scheme, and the field dependence of FIR bands numerically calculated by a simplified DdWELL structure is in good agreement with that of the PR spectra. The wavelength shift by the field strength and the spectral change by the polarity are discussed on the basis of four-level transition.

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Studies on the Synthesis of Cyclitol derivatives -Part 5. Synthesis of O-(p-hydroxybenzoyl)-inositols and their test for food industry- (Cyclitol 유도체(誘導體) 합성(合成)에 관(關)한 연구(硏究) -제(第)5보(報) O-(p-hydroxybenzoyl)-inositol류(類)의 합성(合成)과 식품공업상(食品工業上) 응용(應用)을 위한 시험(試驗)-)

  • Sohn, Joo-Hwan
    • Korean Journal of Food Science and Technology
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    • v.5 no.4
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    • pp.240-248
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    • 1973
  • Reduction of penta-O-acetyl-myo-inosose-2 by catalytic hydrogenation and with sodium-amalgam was carried out in alcohol solution of pH $3{\sim}4$. The former reduction product was axial-alcohol, and the latter equatorial-alcohol. On reduction of penta-O-acetyl-DL-epi-inosose-2 with sodium borohydride and sodium-amalgam in the previous condition, ax.-alcohol and eq.-alcrhol have been obtained. The synthesis of various inositol-p-hydroxybezoate are described. The esters have been characterized by paper chromatography and saponification, and their antimicrobial activities on some microbes were tested for the application of food industry. As the result, it was found that the antimicrobiol activity of epi-inositol ester was superior to its analogues.

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Effect of Bismuth Excess on Piezoelectric and Dielectric Properties of BiFeO3-BaTiO3 Ceramics (Bi 과잉에 따른 BiFeO3-BaTiO3 세라믹스의 압전 및 유전특성)

  • Lee, Jae Hong;Lee, Myang Hwan;Song, Tae Kwon;Kim, Won-Jeong;Sung, Yeon Soo;Kim, Myong-Ho
    • Korean Journal of Materials Research
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    • v.27 no.3
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    • pp.144-148
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    • 2017
  • The effects of an excess of Bi on the piezoelectric and dielectric properties of $0.60Bi_{1+x}FeO_3-0.40BaTiO_3$ (x = 0, 0.01, 0.03, 0.05, 0.07) were investigated. The ceramics were processed through a conventional solid state reaction method and then quenched after sintering at different temperatures in the range of $980{\sim}1070^{\circ}C$. A single perovskite structure without any secondary phase was confirmed for all compositions and temperatures. It was found that excess Bi reduced the sintering temperatures, acted as a sintering aid and enhanced the properties in combination with quenching. Curie temperature ($T_C$) was found to slightly increase due to the presence of excess Bi; electrical properties were also improved by quenching. At x = 0.03 and $1030^{\circ}C$, remnant polarization ($2P_r$) was as high as $45.4{\mu}C/cm^2$ and strain at 40 kV/cm was up to 0.176 %.

Determining Factors of Intention to Actual Use of Charged Long-term Care Services for the Aged (유료노인장기요양보호서비스 이용의사 결정요인)

  • Yoo, Jin-Yeong;Chun, Jin-Ho
    • Journal of Preventive Medicine and Public Health
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    • v.38 no.1
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    • pp.16-24
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    • 2005
  • Objectives : To help develop strategies to cope with the changes arising from the rapid aging process by predicting the determining factors of intention to actual use of the charged long-term care services for elderly as perceived by the middle aged who play the major role of supports. Methods : Subjects were the parents (men 177, women 507) in their 40s of the students selected from a university of Busan city. A questionnaire survey was conducted for 4 weeks in October 2003 about the knowledge for long-term care service, the intention of actual use, and the preferences about the type of service suppliers. Data analysis was performed with frequency, chi-square test, and t-test using SPSS program (ver 10.0K), along with data mining using decision tree of Enterprise Miner V8.2 by SAS. Results : About half of the subjects (53.7%) had the actual experiences of elderly supports. Intentions to use the charged services were relatively high in home visiting nursing care service (40.1%) and long-term care facilities service (40.4%), and were influenced by previous knowledge about the services. The intentions were stronger in women, those with higher education, and those with greater income levels. Actual elderly supports were mostly (80%) done by women, and the perceived burdens for the supports were bigger in women and those of lower socioeconomic level. Desired charges were about 10,000 won for the bath service, 20,000 won for the rests services per day, and about 500,000 won for the long-term care facilities service per month. From the result of decision tree analysis, the job professionalism was the most important determining factor of intention to actual use of the services with validation as $63{\sim}71%$. Health and welfare mixed type facilities were preferred, and the most important consideration was the level of professionalism. Conclusions : Intention to actual use of the charged services was largely determined by the aspects of time and cost. Polices to increase the number of service suppliers and to decrease the burdens perceived by actual supporters were strongly recommended.

Studies on the Comparison of Antibacterial Activity by Catechin Concentration in Green Tea Extract (녹차 추출물 중 카테킨 성분 농도에 따른 항균활성 비교 연구)

  • Choi Kyung-Min;Yun Young-Gab;Jiang Jing-Hua;Oh Sung-Su;Yang Hwan-Deok;Kim Hyoung-Jun;Jeon Byung-Hun;Park Hyun
    • Journal of Physiology & Pathology in Korean Medicine
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    • v.19 no.5
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    • pp.1233-1237
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    • 2005
  • Catechin products in green tea extract was prepared to investigate antibacterial activity on the pathogenic bacteria. Survival of pathogenic bacteria (MASA - methicillin resistant Staphylocouus aureus, E.coli O157 and S. typhimurium Sal-13) in tryptic soy agar(TSA) containing Catechin products powder incubated at various concentration was evaluated. TSA containing $0{\sim}2%(w/v)$ of Catechin products was inoculated approximately $10^4\;CFU/ml$ of pathogenic bacteria and incubated at $37^{\circ}C$ for 24 hours. The plate counting technique and clear zoon test were used to test survival effect of the Catechin products. Minimum inhibitory concentration (MIC) and minimum bactericidal concentration (MBC) was derived from the survival curves of pathogenic bacteria. S. typhimurium Sal-13 was the most sensitive strain to Catechin products. This result suggested that Catechin products can be used as an effective natural antibacterial agent.

Influence of high energy electron beam treatment on the photocatalytic activity of $TiO_2$ nanoaparticles on carbon fiber

  • Sim, Chae-Won;Kim, Myeong-Ju;Seo, Hyeon-Uk;Kim, Gwang-Dae;;Kim, Dong-Un;Nam, Jong-Won;Jeong, Myeong-Geun;Lee, Byeong-Cheol;Park, Ji-Hyeon;Kim, Yeong-Dok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.441-441
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    • 2011
  • $TiO_2$ nanoparticles were grown on carbon fiber by atomic later deposition (ALD) with TTIP $(Ti(OCH(CH_3)_2)_4$ and $H_2O$ precusors. After sampe surfaces were treated by electron beam (1 MeV, 5 KGy), an improvement in the photocatalytic reacitivity of $TiO_2$ nanoparticles on carbon fiber was observed. An increase in the population of hydroxyl group on $TiO_2$ particles and the oxidation of carbon fiber were found upon e-beam exposure, whereas there was no noticeable changes of their morphology. It implies that those changes in O and C 1s state of $TiO_2$ particles/carbon fiber induced by e-beam treatment could be related to the enhancement of the photocatalytic activity. In contrast, when carbon fiber fully covered with $TiO_2$ thick films was treated with high-energy electron beam under same conditions, the improvement of photocatalytic activity as well as any changes in XPS spectra (Ti 2p, O 1s and C 1s) could not be found.

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Modulation of Defect States in Co- and Fe-implanted Silicon by Rapid Thermal Annealing

  • Lee, Dong-Uk;Lee, Kyoung-Su;Pak, Sang-Woo;Suh, Joo-Young;Kim, Eun-Kyu;Lee, Jae-Sang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.314-314
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    • 2012
  • The dilute magnetic semiconductors (DMS) have been developed to multi-functional electro-magnetic devices. Specially, the Si based DMS formed by ion implantation have strong advantages to improve magnetic properties because of the controllable effects of carrier concentration on ferromagnetism. In this study, we investigated the deep level states of Fe- and Co-ions implanted Si wafer during rapid thermal annealing (RTA) process. The p-type Si (100) wafers with hole concentration of $1{\times}10^{16}cm^{-3}$ were uniformly implanted by Fe and Co ions at a dose of $1{\times}10^{16}cm^{-2}$ with an energy of 60 keV. After RTA process at temperature ranges of $500{\sim}900^{\circ}C$ for 5 min in nitrogen ambient, the Au electrodes with thickness of 100 nm were deposited to fabricate a Schottky contact by thermal evaporator. The surface morphology, the crystal structure, and the defect state for Fe- and Co- ion implanted p-type Si wafers were investigated by an atomic force microscopy, a x-ray diffraction, and a deep level transient spectroscopy, respectively. Finally, we will discuss the physical relationship between the electrical properties and the variation of defect states for Fe- and Co-ions implanted Si wafer after RTA.

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Structural and Optical Properties of Copper Indium Gallium Selenide Thin Films Prepared by RF Magnetron Sputtering

  • Kong, Seon-Mi;Fan, Rong;Kim, Dong-Chan;Chung, Chee-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.158-158
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    • 2011
  • $Cu(In_xGa_{1-x})Se_2$ (CIGS) thin film solar cell is one of the most promising solar cells in photovoltaic devices. CIGS has a direct band gap which varied from 1.0 to 1.26 eV, depending on the Ga to In ratio. Also, CIGS has been studying for an absorber in thin film solar cells due to their highest absorption coefficient which is $1{\times}10^5cm^{-1}$ and good stability for deposition process at high temperature of $450{\sim}590^{\circ}C$. Currently, the highest efficiency of CIGS thin film solar cell is approximately 20.3%, which is closely approaching to the efficiency of poly-silicon solar cell. The deposition technique is one of the most important points in preparing CIGS thin film solar cells. Among the various deposition techniques, the sputtering is known to be very effective and feasible process for mass production. In this study, CIGS thin films have been prepared by rf magnetron sputtering method using a single target. The optical and structural properties of CIGS films are generally dependent on deposition parameters. Therefore, we will explore the influence of deposition power on the properties of CIGS films and the films will be deposited by rf magnetron sputtering using CIGS single target on Mo coated soda lime glass at $500^{\circ}C$. The thickness of CIGS films will be measured by Tencor-P1 profiler. The optical properties will be measured by UV-visible spectroscopy. The crystal structure will be analyzed using X-ray diffraction (XRD). Finally the optimal deposition conditions for CIGS thin films will be developed.

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