Study on residual stress characteristics according to the substrate type and V/III ratio during GaN growth by HVPE (HVPE 법을 통한 GaN 성장 시 기판 종류 및 V/III 비에 따른 잔류 stress 특성 연구)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.30 no.2
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- pp.41-46
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- 2020