• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.33.2-33.2
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• 2011

CMP (Chemical-Mechanical Planarization) 공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 CMP 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 CMP 공정의 중요성은 더욱 강조되고 있다. CMP 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리, 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. CMP 공정에서, 폴리우레탄 패드는 많은 기공들을 포함한 그루브(groove)를 형성하고 있어 웨이퍼와 직접적으로 접촉을 하며 공정 중 유입된 슬러리가 효과적으로 연마를 할 수 있도록 도와주는 역할을 한다. 하지만, 공정이 진행 될수록 그루브는 손상이 되어 제 역할을 하지 못하게 된다. 패드 컨디셔닝이란 컨디셔너가 CMP 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 CMP 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 scratch 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 연마 잔여물 흡착을 억제하고, 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 소수성 자기조립 단분자막(SAM: Self-assembled monolayer)을 증착하여 특성을 평가하였다. SAM은 2가지 전구체(FOTS, Dodecanethiol를 사용하여 Vapor SAM 방법으로 증착하였고, 접촉각 측정을 통하여 단분자막의 증착 여부를 평가하였다. 또한 표면부식 특성은 Potentiodynamic polarization와 Electrochemical Impedance Spectroscopy (EIS) 등의 전기화학 분석법을 사용하여 평가되었다. SAM 표면은 정접촉각 측정기(Phoenix 300, SEO)를 사용하여 $90^{\circ}$ 이상의 소수성 접촉각으로써 증착여부를 확인하였다. 또한, 표면에너지 감소로 인하여 슬러리 내의 연마입자 및 연마잔여물 흡착이 감소하는 것을 확인 하였다. Potentiodynamic polarization과 EIS의 결과 분석으로부터 SAM이 증착된 표면의 부식전위와 부식전류밀도가 감소하며, 임피던스 값이 증가하는 것을 확인하였다. 본 연구에서는 컨디셔너 표면에 SAM을 증착 하였고, CMP 공정 중 발생하는 오염물의 흡착을 감소시킴으로써 CMP 연마 효율을 증가하는 동시에 컨디셔너 금속표면의 부식을 방지함으로써 내구성이 증가될 수 있음을 확인 하였다.

• Journal of Astronomy and Space Sciences
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• v.27 no.2
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• pp.81-88
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• 2010

A total of 583 observations (193 in ${\Delta}b$, 190 in ${\Delta}v$, 200 in ${\Delta}r$) for V523 Cas was made on 9 nights from September to December in 2008 using the 100 cm telescope with 2K CCD camera of the Chungbuk National University Observatory. With our data BVR light curves were constructed and 9 times of minimum light were determined. We also obtained physical parameters of the V523 Cas system by analysis of the BVR light curves using the Wilson-Devinney code.

• Bulletin of the Korean Chemical Society
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• v.25 no.1
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• pp.106-108
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• 2004

In this paper we have determined the thermodynamic parameters for the isomerization between the ${\alpha}$-cis and the ${\beta}$-cis isomers in vanadium(V)-propylenediaminetetraacetate complex in water by $^{51}V$ NMR spectroscopy. In addition, the effects of organic solvents (methanol, formamide and dimethylsulfoxide) and inorganic salts (NaCl, $NaClO_4\;and\;NH_4Cl$) on the isomerization in solution have been investigated.

• Proceedings of the KWS Conference
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• 2004.05a
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• pp.321-323
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• 2004

전자 제품에 사용되는 부품 ㆍ소재의 신뢰성 품질 평가를 위해 정밀한 모터의 제어기술, 첨단신호처리 기술, 압전소자 기술의 발달로 미세변화 계측의 재현성, 고분해능, 표면과 내부의 이미지관찰, 또한 미소부위에서 재료의 누설탄성표면파의 음속측정이 가능한 초음파현미경에 대한 연구가 최근 들어 활발히 진행되고 있다. (중략)

• The Journal of the Korean dental association
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• v.13 no.5
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• pp.415-416
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• 1975

1. The author have had a case of class V and class Ⅲ combined carious lesion extended on to root surface of upper right lateral incisor. 2. The patient was 40 years old female. 3. After routine root canal treatment of the tooth, the gingival flap was made by vertical incision on gingival tissue between distal surface of upper right lateral incisor and mesial surface of upper right canine. 4. Cavity preparation and amalgam filling on the carious lesion were performed and the flap was sutured.

• Mass Spectrometry Letters
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• v.2 no.1
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• pp.24-27
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• 2011

Hyperthermal ion/surface collisions of bromotoluene radical cations were studied using perfluorinated (F-SAM) and hydroxyl-terminated (OH-SAM) self-assembled monolayer surfaces in a tandem mass spectrometer with BEEQ geometry. The isomers were differentiated by ion abundance ratios taken from surface-induced dissociation (SID). The dissociation rate followed the order of ortho > meta > para isomers. The peak abundance ratio of m/z 51 to m/z 65 showed the best result to discern the isomers. A dissociation channel leading to tolylium ion was suggested to be responsible for the pronounced isomeric differences. The capability of SID to provide high-energy activation with narrow internal energy distribution may have channeled the reaction into the specific dissociation pathway, also facilitating small differences in reaction rates to be effective in the spectral time window of this experiment. All of the molecular ions experiencing reactive collisions with the F-SAM surface undergo transhalogenation, in which a fluorine atom on the surface replaces the bromine in the incoming ions. This reactive collision was dependent on the laboratory collision energy occurring in ca. 40.75 eV range.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.450-450
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• 2007

Indium tin oxide (ITO), which is used as an electrode in organic thin film transistors (OTFT), was modified with a self-assembled monolayer (SAM) by wet chemical surface modification. The surface of the ITO was treated by dipping method in a solution of 2-chloroethane phosphonic acid (2-CEPA) at room temperature. The work function in the ITO which was modified with the SAM in the 2-CEPA had 5.43eV. A surface energy and a transmittance were unchanged in an error range. On this study, therefore, possibility of ohmic contact is showed in the interface between the ITO and the organic semiconductors. These results suggest that the treatment of the ITO with the SAM can greatly enhance the performance of the OTFT.

• Proceedings of the Ginseng society Conference
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• 1993.09a
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• pp.206-214
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• 1993

Ginseng saponins have been known as main active principles and analyzed as the index components in ginseng and its products for quality control. But it is generally difficult to analyze the saponins in crude drug preparations. Saponins, Prosapogenins and sapogenins of crude drug preparation were identified by TLC and determined quantitatively by HPLC. $Prosapogemins-Rg_3\;-Rg_2\;and\;{\Delta}^{20}-prosapogenin$ were extracted with ethyl acetate from $50\%$ acetic acid hydrolyzates of saponin fractions and identified by TLC with lower phase of $CHCl_3/MeOH/H_2$ O\65:35:10. v/v)on silica gel plate, and quantified by HPLC on $Lichrosorb-NH_2$ column with $CH_3CN/H_2O(90:10,\;v/v).$ Sapogenins. panaxadiol and panaxatriol. were extracted with ethyl ether from $7\%-sulfuric$ acid hydrolyzates of saponin fractions and identified by TLC with chloroform/acetone(1 : 1 v/v) on silica gel plate. and quantified by HPLC on u - Bondapak $C^{18}$ column with $CH_3CN/MeOH/CHCl_3(83:10:7.\;v/v).$ These analyses of prosapogenins and sapogenins are more useful for quality control than those of saponins in crude drug preparations such as So - Shi - Ho - Tang(소시호탕), Sa - Kun - Ja - Tang(사군자탕), Yook - Kun - Ja - Tang(육군자탕), and In - Sam -Tang(인삼탕)

• Korean Journal of Fisheries and Aquatic Sciences
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• v.52 no.6
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• pp.625-630
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• 2019

The pathogenic Vibrio genus contains halophilic bacteria that are distributed in marine and freshwater environments. Vibrio cholerae, Vibrio vulnificus, and Vibrio parahaemolyticus are potent human pathogens and leading causes of septicemia, wound infection, and seafood-borne gastroenteritis. The aim of this study was to investigate the presence of pathogenic Vibrio species in seawater off the west coast of Korea. Sixty-four seawater samples were obtained from different sites in Gomso Bay and Byeonsan from April 2018 to November 2018. Pathogenic Vibrio species were detected using a combination of most probable number (MPN)-polymerase chain reaction methods. V. cholerae, V. vulnificus, and V. parahaemolyticus were found in 0.0%, 20.3%, and 65.6% of seawater samples, respectively. Quantitative results revealed 3.6-23 MPN/100 mL of V. vulnificus, and 3.6-930 MPN/100 mL of V. parahaemolyticus in the samples. Overall, these results provide new insight into the necessity for seawater sanitation in Gomso Bay and Byunsan; they also provide evidence that will help reduce outbreaks of seafood-borne illness caused by pathogenic Vibrio species.

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.5
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• pp.291-296
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• 2006

The residual stress in shot-peened Al 7075 alloy was evaluated using surface acoustic wave (SAW). Shot peening was conducted to produce a variation in the residual stress with the depth below the surface under a shot velocity of 30 m/s. The SAW velocity was measured from the V(z) curve using a scanning acoustic microscopy (SAM). The Vickers hardness profile from the surface showed a significant work hardening near the surface layer with a thickness of about 0.25 mm. As the residual stress became more compressive, the SAW velocity increased, whereas as the residual stress became more tensile, the SAW velocity decreased. The variation in the SAW velocity through the shot peened surface layer was in good agreement with the distribution of the residual stress measured by X-ray diffraction technique.