• Title/Summary/Keyword: V-곡선

Search Result 773, Processing Time 0.037 seconds

Comparison of CT based-CTV plan and CT based-ICRU38 plan in brachytherapy planning of uterine cervix cancer (자궁경부암 강내조사 시 CT를 이용한 CTV에 근거한 치료계획과 ICRU 38에 근거할 치료계획의 비교)

  • Shim JinSup;Jo JungKun;Si ChangKeun;Lee KiHo;Lee DuHyun;Choi KyeSuk
    • The Journal of Korean Society for Radiation Therapy
    • /
    • v.16 no.2
    • /
    • pp.9-17
    • /
    • 2004
  • Purpose : Although Improve of CT, MRI Radio-diagnosis and Radiation Therapy Planing, but we still use ICRU38 Planning system(2D film-based) broadly. 3-Dimensional ICR plan(CT image based) is not only offer tumor and normal tissue dose but also support DVH information. On this study, we plan irradiation-goal dose on CTV(CTV plan) and irradiation-goal dose on ICRU 38 point(ICRU38 plan) by use CT image. And compare with tumor-dose, rectal-dose, bladder-dose on both planning, and analysis DVH Method and Material : Sample 11 patients who treated by Ir-192 HDR. After 40Gy external radiation therapy, ICR plan established. All the patients carry out CT-image scanned by CT-simulator. And we use PLATO(Nucletron) v.14.2 planing system. We draw CTV, rectum, bladder on the CT image. And establish plan irradiation-$100\%$ dose on CTV(CTV plan) and irradiation-$100\%$ dose on A-point(ICRU38 plan) Result : CTV volume($average{\pm}SD$) is $21.8{\pm}26.6cm^3$, rectum volume($average{\pm}SD$) is $60.9{\pm}25.0cm^3$, bladder volume($average{\pm}SD$) is $116.1{\pm}40.1cm^3$ sampled 11 patients. The volume including $100\%$ dose is $126.7{\pm}18.9cm^3$ on ICRU plan and $98.2{\pm}74.5cm^3$ on CTV plan. On ICRU planning, the other one's $22.0cm^3$ CTV volume who residual tumor size excess 4cm is not including $100\%$ isodose. 8 patient's $12.9{\pm}5.9cm^3$ tumor volume who residual tumor size belows 4cm irradiated $100\%$ dose. Bladder dose(recommended by ICRU 38) is $90.1{\pm}21.3\%$ on ICRU plan, $68.7{\pm}26.6\%$ on CTV plan, and rectal dose is $86.4{\pm}18.3\%,\;76.9{\pm}15.6\%$. Bladder and Rectum maximum dose is $137.2{\pm}50.1\%,\;101.1{\pm}41.8\%$ on ICRU plan, $107.6{\pm}47.9\%,\;86.9{\pm}30.8\%$ on CTV plan. Therefore CTV plan more less normal issue-irradiated dose than ICRU plan. But one patient case who residual tumor size excess 4cm, Normal tissue dose more higher than critical dose remarkably on CTV plan. $80\%$over-Irradiated rectal dose(V80rec) is $1.8{\pm}2.4cm^3$ on ICRU plan, $0.7{\pm}1.0cm^3$ on CTV plan. $80\%$over-Irradiated bladder dose(V80bla) is $12.2{\pm}8.9cm^3$ on ICRU plan, $3.5{\pm}4.1cm^3$ on CTV plan. Likewise, CTV plan more less irradiated normal tissue than ICRU38 plan. Conclusion : Although, prove effect and stability about previous ICRU plan, if we use CTV plan by CT image, we will reduce normal tissue dose and irradiated goal-dose at residual tumor on small residual tumor case. But bigger residual tumor case, we need more research about effective 3D-planning.

  • PDF

Electrochemical Characteristics of Anode-supported Solid Oxide Fuel Cells (연료극 지지형 고체산화물 연료전지의 전기화학적 특성)

  • Yoon Sung Pil;Han Jonghee;Nam Suk Woo;Lim Tae-Hoon;Hong Seong-Ahn;Hyun Sang-Hoon;Yoo Young-Sung
    • Journal of the Korean Electrochemical Society
    • /
    • v.4 no.2
    • /
    • pp.58-64
    • /
    • 2001
  • YSZ ($8mol\%$ yttria-stabilized zirconia)-modified LSM $(La_{0.85}Sr_{0.15}MnO_3)$ composite cathodes were fabricated by formation of YSZ film on triple phase boundary (TPB) of LSM/YSZ/gas. The YSZ coating film greatly enlarged electrochemical reaction sites from the increase of additional TPB. The composite cathode was formed on thin YSZ electrolyte (about 30 Um thickness) supported on an anode and then I-V characterization and AC impedance analyses were performed at temperature between $700^{\circ}C\;and\;800^{\circ}C$. As results of the impedance analysis on the cell at $800^{\circ}C$ with humidified hydrogen as the fuel and air as the oxidant, R1 around the frequency of 1000 Hz represents the anode Polarization. R2 around the frequency of 100Hz indicates the cathode polarization, and R3 below the frequency of 10 Hz is the resistance of gas phase diffusion through the anode. The cell with the composite cathode produced power density of $0.55\;W/cm^2\;and\;1W/cm^2$ at air and oxygen atmosphere, respectively. The I-V curve could be divided into two parts showing distinctive behavior. At low current density region (part I) the performance decreased steeply and at high current density region (part II) the performance decreased gradually. At the part I the performance decrease was especially resulted from the large cathode polarization, while at the part H the performance decrease related to the electrolyte polarization.

Study of Scatter Influence of kV-Conebeam CT Based Calculation for Pelvic Radiotherapy (골반 방사선 치료에서 산란이 kV-Conebeam CT 영상 기반의 선량계산에 미치는 영향에 대한 연구)

  • Yoon, KyoungJun;Kwak, Jungwon;Cho, Byungchul;Kim, YoungSeok;Lee, SangWook;Ahn, SeungDo;Nam, SangHee
    • Progress in Medical Physics
    • /
    • v.25 no.1
    • /
    • pp.37-45
    • /
    • 2014
  • The accuracy and uniformity of CT numbers are the main causes of radiation dose calculation error. Especially, for the dose calculation based on kV-Cone Beam Computed Tomography (CBCT) image, the scatter affecting the CT number is known to be quite different by the object sizes, densities, exposure conditions, and so on. In this study, the scatter impact on the CBCT based dose calculation was evaluated to provide the optimal condition minimizing the error. The CBCT images was acquired under three scatter conditions ("Under-scatter", "Over-scatter", and "Full-scatter") by adjusting amount of scatter materials around a electron density phantom (CIRS062, Tissue Simulation Technology, Norfolk, VA, USA). The CT number uniformities of CBCT images for water-equivalent materials of the phantom were assessed, and the location dependency, either "inner" or "outer" parts of the phantom, was also evaluated. The electron density correction curves were derived from CBCT images of the electron density phantom in each scatter condition. The electron density correction curves were applied to calculate the CBCT based doses, which were compared with the dose based on Fan Beam Computed Tomography (FBCT). Also, 5 prostate IMRT cases were enrolled to assess the accuracy of dose based on CBCT images using gamma index analysis and relative dose differences. As the CT number histogram of phantom CBCT images for water equivalent materials was fitted with a gaussian function, the FHWM (146 HU) for "Full-scatter" condition was the smallest among the FHWM for the three conditions (685 HU for "under scatter" and 264 HU for "over scatter"). Also, the variance of CT numbers was the smallest for the same ingredients located in the center and periphery of the phantom in the "Full-scatter" condition. The dose distributions calculated with FBCT and CBCT images compared in a gamma index evaluation of 1%/3 mm criteria and in the dose difference. With the electron density correction acquired in the same scatter condition, the CBCT based dose calculations tended to be the most accurate. In 5 prostate cases in which the mean equivalent diameter was 27.2 cm, the averaged gamma pass rate was 98% and the dose difference confirmed to be less than 2% (average 0.2%, ranged from -1.3% to 1.6%) with the electron density correction of the "Full-scatter" condition. The accuracy of CBCT based dose calculation could be confirmed that closely related to the CT number uniformity and to the similarity of the scatter conditions for the electron density correction curve and CBCT image. In pelvic cases, the most accurate dose calculation was achievable in the application of the electron density curves of the "Full-scatter" condition.

Radium Isotope Ratio as a Tracer for Estimating the Influence of Changjiang Outflow to the Northern Part of the East China Sea (라듐 동위원소 방사능비를 추적자로 사용한 동중국해 북부 해역에서 장강 유출수의 영향 추정)

  • Kim, Kee-Hyun;Kim, Seung-Soo
    • Journal of the Korean Society for Marine Environment & Energy
    • /
    • v.12 no.3
    • /
    • pp.133-142
    • /
    • 2009
  • In order to understand the present environmental condition and future impingement of Changjiang(Yangtze River) outflow upon the adjacent seas after the scheduled completion of the Sanxia (Three Gorges) Dam in 2009, we tried to estimate the mixing ratios among surface waters of three end-members: Changjiang Water (CW), Kuroshio Water (KW), and East China Sea Water (ECSW) using $^{228}Ra/^{226}Ra$ activity ratio and salinity as tracers. Water samples were collected from 32 stations in November 2005 (R/V Tamgu 3), from 20 stations in July 2006 (R/V Ocean 2000) and from 17 stations in August 2006 (R/V Ieodo) in the northern part of the East China Sea. Radium isotopes in ~300 liters of surface seawater were extracted onboard by filtering through manganese impregnated acrylic fibers and following coprecipitation as $Ba(Ra)SO_4$. Activities of radium isotopes were determined by a high purity germanium detector. Results show that the fraction of CW was in the range of 1-23% in the study area, while KW was in the range of 0-30 % and ECSW 58-100 %. The eastward plume of Changjiang outflow, commonly observed in satellite images during summer and also displayed by the eastward-decreasing CW fraction in this study, could be attributed to Ekman transport caused by the SE monsoon prevailing in this region during summer. Results of this study showed that in the drought season, there was a little or no fraction of CW in the study area. Concentration of dissolved inorganic nitrogen (DIN) showed strong positive relationship with the fraction of CW, suggesting Changjiang as the major source of nitrogen. The mixing curve of DIN indicates the removal of nitrate by biological uptake during the mixing of CW with ambient seawater in the study area.

  • PDF

Properties of the interfacial oxide and high-k dielectrics in $HfO_2/Si$ system ($HfO_2/Si$시스템의 계면산화막 및 고유전박막의 특성연구)

  • 남서은;남석우;유정호;고대홍
    • Proceedings of the Korea Crystallographic Association Conference
    • /
    • 2002.11a
    • /
    • pp.45-47
    • /
    • 2002
  • 반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2~7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10~15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

  • PDF

Comparison of Kinetic Parameters, pH and Thermal Properties of Soluble and Immobilized Transglucosidase from Aspergillus niger (Aspergillus niger 유래의 Soluble과 고정화 Transglucosidase의 속도상수, pH 및 열 특성 비교)

  • Ahn, Jang-Woo;Park, Kwan-Hwa;Seo, Jin-Ho
    • Korean Journal of Food Science and Technology
    • /
    • v.30 no.3
    • /
    • pp.630-637
    • /
    • 1998
  • Enzymatic properties of immobilized transglucosidase (TG) from Aspergillus niger was characterized and compared with soluble TG. Michaelis-Menten constant $(K_m)$ and maximum velocity $(V_{max})$ of immobilized TG were $122\;mM,\;3.9{\times}10^{-2}\;mM/min$ and in case of soluble TG, 21 mM, 0.4 mM/min. The optimum pH of immobilized TG was pH 5.0 like soluble TG but immobilized TG showed 16% and 45% higher activity than soluble TG at pH 5.0 and pH 6.0. Both of immobilized TG and soluble TG were stable from pH 2.0 to pH 9.0, and therefore their activities in these pH ranges were remained more than 90%. The temperature was optimal at $60{\sim}70^{\circ}C\;and\;70{\sim}80^{\circ}C$ for soluble TG and immobilized TG, respectively. The thermal stability of immobilized TG was significantly improved than that of soluble TG, and immobilized TG retained $32{\sim}40%$ higher activity than soluble TG. D-values from thermal inactivation of immobilized TG were 7690 sec at $65^{\circ}C$, 83 sec at $75^{\circ}C$, 7.2 sec at $80^{\circ}C$. Z-values of soluble and immobilized TG were $6.4^{\circ}C\;and\;5.3^{\circ}C$, respectively. The little difference of activation energies of soluble TG and immobilized TG supposed that there was little difference in mass transfer limitation during the reaction of soluble TG and immobilized TG.

  • PDF

Spatial Variation Analysis of Soil Characteristics and Crop Growth across the Land-partitioned Boundary II. Spatial Variation of Soil Chemical Properties (구획경계선(區劃境界線)의 횡단면(橫斷面)에 따른 토양특성(土壤特性)과 작물생육(作物生育)에 관한 공간변이성(空間變異性) 분석연구 II. 토양(土壤) 화학성(化學性)의 공간변이성(空間變異性))

  • Park, Moo-Eon;Yoo, Sun-Ho
    • Korean Journal of Soil Science and Fertilizer
    • /
    • v.22 no.4
    • /
    • pp.257-264
    • /
    • 1989
  • In order to study spatial variability of soil chemical properties across the land-partitioned boundary on Hwadong silt clay loam soil (Fine clayey, mixed, mesic family of Aquic Hapludalfs) in the experimental fie ld of the wheat and Barley Research Institute in Suwon, all measured data were analyzed by means of kriging, fractile diagram, smooth frequency distribution, and autocorrelation. Sampling for soil chemical property analysis was made at 225 intersections of 15x 15 grid with 10m interval from three soil depths (0-10cm, 25-35cm, 50-60cm) in the seven patitioned fields. 1. The coefficient of variance (CV) of various chemical properties varied from 5.4 to 72.7%. Soil pH was classified into the low variation group with CV smaller than 10%, while the other chemical properties belonged to the medium variation group with C.V. between 10 and 100% 2. The approximate number of soil samples for the determination of various chemical properties with error smaller than 10% were two for pH, ten for CEC, 15 for exchangeable Ca, 32 for total nitrogen content, 39 for exchangeable Mg, 40 for exchangeable K, 61 for exchangeable Na, 82 for organic matter content, 212 for available phosphate,. 3. Smooth frequency distribution and fractile diagram showed that available phosphate was in log-normal distribution while others were in normal distribution. 4. Serial correlation analysis revaled that the soil chemical properties had spatial dependence between two nearest neighbouring grid points. Autocorrelation analysis of chemcial properties measured between the serial grid points in the direction of south to north following land-partitioned boundary showed that the zone of influence showing stationarity ranged from 20 to 50m. In the direction of east to west accross land-partitioned boundary, the autocorrelogram of many chemical properies showed peaks with the periodic interval of 30m, which were similar to the partitioned land width. This reveals that the land-partitioned boundary causes soil variability.

  • PDF

The Effect of Increase in Length and Volume of Source in Radioactive Iodine Thyroid Uptake Rate (갑상선 섭취율 측정에서 선원의 길이와 부피 증가에 따른 영향)

  • Hwang, Dong Hun;Oh, Shin Hyun;Kim, Jung Yul;Kang, Chun Koo;Kim, Jae Sam
    • The Korean Journal of Nuclear Medicine Technology
    • /
    • v.21 no.1
    • /
    • pp.70-75
    • /
    • 2017
  • Purpose Radioactive iodine thyroid uptake (RAIU) rate is an examination which determines and seeks about general functions of thyroid gland. The size of thyroid gland is normally different between each person, also patients having thyroid diseases have had a variety of size of thyroid gland compared with others. The purpose of this study will investigate about the counting rate which is effected by the geometric factors through the length and volume changes of the source in RAIU rate. Materials and Methods I-131 185 kBq ($5{\mu}Ci$) were placed in a cylindrical phantom of 0.5 cm, 1 cm, 1.5 cm, and 3 cm in diameter, respectively, and saline was added to gradually increase the length by 1 cm in the horizontal and vertical directions to give a change in volume. The source was measured 20 times for 20 seconds from a distance of 25 cm to $364.4keV{\pm}20%$ energy ROI with Captus 3000 thyroid uptake system (Capintec, NJ, USA). Results When the source was located in the transverse direction of the detector, the consequence of one-way ANOVA is that even though the length of source is increased each diameter, there is mostly no significant difference. When the source was located in the longitudinal direction and the counting rate of length 1 cm at all diameter is set to 100%, the average is 92.57% for length 2 cm, 86.1% for 3 cm, 80.69% for 4 cm, 74.82% for 5 cm, and 69.68% at 6 cm. Conclusion According to this study, it is expected that the gap of RAIU rate has been depended on the thickness of thyroid gland as well as the diameter of the beaker. We know that the change of the volume with the increase of the length of the source had less effect on the change of the counting rate. Thus, in order to reduce the error in the measurement of the counting rate with the thyroid uptake rate equipment, an accurate counting rate can be relatively measured if the counting rate which is measured is corrected by thickness or the distance between the thyroid and the thyroid uptake rate equipment is changed.

  • PDF

NEAR-INFRARED VARIABILITY OF OPTICALLY BRIGHT TYPE 1 AGN (가시광에서 밝은 1형 활동은하핵의 근적외선 변광)

  • JEON, WOOYEOL;SHIM, HYUNJIN;KIM, MINJIN
    • Publications of The Korean Astronomical Society
    • /
    • v.36 no.3
    • /
    • pp.47-63
    • /
    • 2021
  • Variability is one of the major characteristics of Active Galactic Nuclei (AGN), and it is used for understanding the energy generation mechanism in the center of AGN and/or related physical phenomena. It it known that there exists a time lag between AGN light curves simultaneously observed at different wavelengths, which can be used as a tool to estimate the size of the area that produce the radiation. In this paper, We present long term near-infrared variability of optically bright type 1 AGN using the Wide-field Infrared Survey Explorer data. From the Milliquas catalogue v6.4, 73 type 1 QSOs/AGN and 140 quasar candidates are selected that are brighter than 18 mag in optical and located within 5 degree around the ecliptic poles. Light curves in the W1 band (3.4 ㎛) and W2 band (4.6 ㎛) during the period of 2010-2019 were constructed for these objects by extracting multi-epoch photometry data from WISE and NEOWISE all sky survey database. Variability was analyzed based on the excess variance and the probability Pvar. Applying both criteria, the numbers of variable objects are 19 (i.e., 26%) for confirmed AGN and 12 (i.e., 9%) for AGN candidates. The characteristic time scale of the variability (τ) and the variability amplitude (σ) were derived by fitting the DRW model to W1 and W2 light curves. No significant correlation is found between the W1/W2 magnitude and the derived variability parameters. Based on the subsample that are identified in the X-ray source catalog, there exists little correlation between the X-ray luminosity and the variability parameters. We also found four AGN with changing W1-W2 color.

Interface study of ion irradiated Cu/Ni/Cu(001)/Si thin film by X-ray reflectivity (이온 조사된 Cu/Ni/Cu(001)/Si 자성박막에 있어서 X-ray reflectivity를 이용한 계면 연구)

  • Kim, T.G.;Song, J.H.;Lee, T.H.;Chae, K.H.;Hwang, H.M.;Jeon, G.Y.;Lee, J;Jeong, K.;Whang, C.N.;Lee, J.S.;Lee, K.B.
    • Journal of the Korean Magnetics Society
    • /
    • v.12 no.5
    • /
    • pp.184-188
    • /
    • 2002
  • The Cu/Ni/Cu(002)/Si(100) films which have perpendicular magnetic anisotropy were deposited by e-beam evaporation methods. From the reflection high energy electron diffraction pattern, the films were confirmed to be grown epitaxially on silicon. After 2X lots ions/$\textrm{cm}^2$ C+ irradiation, magnetic easy-axis was changed from surface normal to in-plane as shown in the hysteresis loop of magneto-optical Kerr effects. It became manifest from analysis of X-ray reflectivity and grazing incident X-ray diffraction that even though interface between top Cu layer and Ni layer became rougher, the contrast of Cu and Ni's electron density became manifest after ion irradiation. In addition, the strain after deposition of the films was relaxed after ion irradiation. Strain relaxation related with change of magnetic properties and mechanism of intermixed layer's formation was explained by thermo-chemical driving force due to elastic and inelastic collision of ions.