• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.25-29
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified and the system performance for practical use is evaluated.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.792-796
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• 2006

In recent years, the semiconductor industry and the optical industry is developed rapidly. The recent demand has expanded for optical components such as a optical lens, a optical semiconductor and a measuring instrument. Object transport systems are driven typically by the magnetic field and the conveyer belt. Recent industry requires more faster and efficient transport system. However, conventional transport systems are not adequate for transportation of optical elements and semiconductors. Because conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. This transport system is using 2-mode ultrasonic wave excitation and flexural beam modes shapes are evaluated. It compared simulation results with experimental results

• Journal of the Korean Society for Nondestructive Testing
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• v.15 no.2
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• pp.364-370
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• 1995

The purpose of this paper was to develop a nondestructive evaluation method of sintered material by ultrasonic method. The density distribution of sintered material becomes inhomogeneous partially because of the friction between the powder and the die during compaction. The inhomogeneity was investigated by measurement of the energy attenuation coefficient and the shift of the center frequency in the frequency spectrum of the ultrasonic reflection echo. The experimental results showed that the center frequency of reflection wave depended linearly on the density of sintered materials. However, the attenuation coefficient decreased inversely as the density increased. This study shows that the shift of the center frequency in the frequency spectrum of reflection wave can be used to a nondestructive evaluation of sintered materials.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.2
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• pp.145-152
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• 2010

This study evaluated the fatigue degradation in a SUS316L specimen using the nonlinear ultrasonic method. The nonlinearity of the ultrasonic wave was estimated by a relative nonlinear parameter defined as the ratio of the amplitudes for the fundamental wave to the second harmonic wave. In the experiment, a measurement system with contact transducers was constructed; reliable measurements were assured by keeping measurement conditions consistent and reducing extra harmonics generated in the measurement system. Two types of SUS316L specimen were used in experiments; a rotating bar fatigue specimen and a tensile fatigue specimen. The fatigue condition used was high cycle fatigue. The former specimen had a cylindrical shape and was used to observe the change in the nonlinear parameter after fatigue accumulation in a specimen. The latter was a plate-shaped specimen and was used to confirm the change in the nonlinear parameter at the position where the fatigue stress was concentrated. The measured nonlinear parameter showed a strong correlation to the damage level in both fatigue tests.

• Journal of Biomedical Engineering Research
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• v.16 no.4
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• pp.525-532
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• 1995

In this paper, a new try to measure nonlinear propagation characteristics of the pulse along blood vessel by using bispectral analysis is introduced, and the possibility of its application to the medical diagnosis is shown. In this method, the waveforms of pulse motion of blood vessel at two separated measuring points on the wall were detected from Doppler frequency modulation of transmitted probing ultrasonic waves. Then the auto- and crossbispectrum of detected waveforms are calculated to estimate the quadratic NTF (nonlinear transfer function) between the two measuring positions. In order to show relationships between the NTF and the nonlinear propagation characteristics, computer simulations have been performed. As the propagation distance increases, harmonic frequency components in NTF increases broadly due to the nonlinear effect in the propagation of blood pulse. In order to represent this phenomena quantitatively, we propose a new parameter, dispersion ratio of WTF. Basic experimental system was constructed by using 3.5MHz probing ultrasonic waves and the preliminary experiments were carried out on ague phantom and human body. Experimental results showed the validity of the measurement system enoughly.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.421-426
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• 2006

In examining particulate deposits in the pipes of a chemical vapor deposition (CVD) system, vibration diagnostics is compared and studied against ultrasonic diagnostics, The latter method involves pulsing the outer wall of pipes with an ultrasonic sensor and analyzing the resulting echo to observe particulate deposits inside pipes. Vibration diagnostics examines the existence of particulate deposits by analyzing the difference in the frequencies generated when a vibrator is adhered to the outer wall of pipes. With ultrasonic diagnostics, good test results were obtained only when particulate deposits were attached to the inner wall of the pipes, After some time, however, particulate deposits were not detected properly, as the ultrasonic wave failed to cross the fine gaps created between the inner wall of the pipe and the deposits. The ultrasonic wave bounced back because of the dried particulate deposits on the wall. Thus, it has been proven that the ultrasonic diagnostics is not an appropriate means of examining the particulate deposits in a vacuum, On the other hand, vibration diagnostics succeeded in detecting the particulate deposits regardless of the lapsed time. In conclusion, the vibration diagnostics is being expected as the effective method in monitoring the particulate deposits inside pipes in the CVD system where the desired behavior is reduced frequency along with the particulate deposits in comparison to the case where the pipe is clean.