• Journal of the Korea Institute of Information and Communication Engineering
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• v.13 no.7
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• pp.1393-1398
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• 2009

Conventionally, etching is first considered for microelectronics fabrication process and is specially important in process of a-Si:H thin film transistor for LCD. In this paper, we stabilize properties of device by development of wet and dry etching process. The a-Si:H TFTs of this paper is inverted staggered type. The gate electrode is lower part. The gate electrode is formed by patterning with length of 8 ${\mu}$m${\sim}$16 ${\mu}$m and width of 80${\sim}$200 ${\mu}$m after depositing with gate electrode (Cr) 1500 ${\AA}$under coming 7059 glass substrate. We have fabricated a-SiN:H, conductor, etch-stopper and photo resistor on gate electrode in sequence, respectively. The thickness of these thin films is formed with a-SiN:H (2000 ${\mu}$m), a-Si:H(2000 ${\mu}$m) and n+a-Si:H (500 ${\mu}$m), We have deposited n-a-Si:H, NPR(Negative Photo Resister) layer after forming pattern of Cr gate electrode by etch-stopper pattern. The NPR layer by inverting pattern of upper gate electrode is patterned and the n+a-Si:H layer is etched by the NPR pattern. The NPR layer is removed. After Cr layer is deposited and patterned, the source-drain electrode is formed. In the fabricated TFT, the most frequent problems are over and under etching in etching process. We were able to improve properties of device by strict criterion on wet, dry etching and cleaning process.

• 한국해양학회지
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• v.30 no.4
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• pp.279-287
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• 1995

The vertical profiles of natural ²¹⁰Pb, ²¹⁰Po and ²³⁴Th activities were measured for the upper 100 m of water column at three stations in the middle region of the Korean East Sea during May 1992. And the distribution of these radionuclides was discussed associated with the formation of warm eddy or water mass. The main thermocline was maintained between the depth of 50 and 100 m at the southern station (Sta. A1), and between the depth of 10 to 50 m at the coastal station of Sockcho (Sta. B10). Contrastingly, a main thermocline at Sta. A10, which locates near the center of warm eddy, was observed below 230 m depth. Between 50 and 220 m depth of Sta. A10 is there a relatively homogeneous water mass of 10.1${\pm}$0.5$^{\circ}C$, which is significantly higher in temperature and lower in nutrient than the other two stations. It seems to be due to sinking of the warm surface water in which nutrients were completely consumed. Both ²¹⁰Pb and ²¹⁰Po show the highest concentration at Sta. A1 and the lowest at Sta. B10 among the three stations. Also, the ²¹⁰Pb activity is generally higher in the upper layer than in the lower layer, while ²¹⁰Po activity represents the reversed pattern at all three stations. At Sta. A1 and Sta. B10, the activities of ²¹⁰Po relative to its parent ²¹⁰Pb were deficient in the water column above the main thermocline, but were excess below the thermocline. However, the station near the center of warm eddy(Sta. A10), shows no excess of ²¹⁰Po in the depths below 50 m, although its defficiency is found in the upper layer like the other stations. At Sta. A1 and b10. ²³⁴Th activities are slightly lower in the surface mixed layer than in the deeper region However, at Sta. A10, ²³⁴Th activity in the upper 30 m is higher than below 50 m or in the same depth of the other stations, probably because of the high concentration of particulate matter. The residence time of ²¹⁰Po in the surface mixed layer at Sta. A10 is 0.4 year, much shorter than at the other two stations(about one year). Above 100 m depth, the residence times of ²³⁴Th range from 18 to 30 other two stations(about on year). Above 100 m depth, the residence times of ²³⁴Th range from 18 to 30 days at all stations, without significant regional variation. The percentages of recycled ²¹⁰Po within the thermocline are 39% and 92% at Sta. A1 and Sta. B10, respectively. Much higher value at Sta. B10 may be due to a thin thickness of the mixed layer as well as the slower recycling rate of ²¹⁰Po in the main thermocline.

• Journal of Conservation Science
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• v.34 no.1
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• pp.11-21
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• 2018

The result of the study on the origin and preservation status of the 'Gongju Junghakdong old missionary house', the Registered Cultural Property No. 233, reveals that the building was approved on October 23, 1921, and missionary Alice H. Sharp was living in the building until her retirement from her missionary life of 39 years in Korea in 1939. In order to review internal and external preservation status of the building, condition of wood material, the composition of the window, the damage of the wall, and the leaning of the building were examined. In particular, in the case of window facilities, it is necessary to restore it to the original upper and lower sliding window. As a result of investigation of the preservation status of the external facilities, it is necessary to restore the original shape of the staircase and a deck of the building on south western side and the well. In addition, the results of the non-destructive diagnosis of the ground revealed that the building was built on uneven surface layer of 2-5 m thickness and the boundary between the surface layer and the upper part of the weathered rock is inclined following geomorphology. This phenomenon shows that when the water content of the ground increases in the rainy season, the bearing capacity of the ground is lowered, and there is a possibility of uneven subsidence. Especially, landslides may occur in case of heavy rain. Therefore, it is desirable to install a masonry facility at the southwest boundary of the site, and it is recommended to install a drainage facility to ensure rapid drainage.

• Journal of the Korean Geotechnical Society
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• v.15 no.6
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• pp.29-44
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• 1999

This paper shows the results of model tests on the lateral behavior of single rigid pile, which was constructed by driving, in homogeneous and non-homogeneous (two layered) NakDong River sands. The purpose of the present paper is to investigate the effect of ratio of lower layer thickness to embedded pile length, relative density of sand and pile construction conditions (Driven & Embedded piles) on the characteristics of lateral behavior of single pile. These effects can be quantified only by the results of model tests. As a model result, the lateral behavior depends upon the pile construction condition in loose-density soil more than in high-density soil. If the pile construction depends upon driving construction, the decrease of deflection remarkably increases for both loose homogeneous sand and non-homogeneous soil$(E_{h1}/E_{h2}/=0.18)$ with high thickness of upper layer but the decrease of maximum bending moment shows the opposite result to the decrease of deflection. And, with respect to deflection, it was found that the deflection ratio $(y_{Driven}y_{Embedded})$ of embedded to driven piles has the ranges of 0.65 - 0.88 $(D_r=90%)$0.38 - 0.65 $(D_r=61.8%)$ for each relative density of homogeneous soil and the range of 0.6 - 0.88 for non-homogeneous soil. Also, in this study, the experimental equation for the effects of drop height (DH) and H/L on the ratios of $y_D/y_E\; and MBM_D/MBM_ E$ is suggested from model tests.

• Journal of the Korean GEO-environmental Society
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• v.12 no.5
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• pp.51-57
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• 2011

Generally, ready-mixed concrete(RMC) gets hardened by time, so the remaining concrete in the drum should be cleaned. But if the RMC waste water generated from this is discharged to soil without any treatment, the strong alkaline elements and heavy metals affect water and ecosystem pollution. Although about 10 to 15% of water used for cleaning in the RMC factory is discharged to soil or river, the concrete report of this affecting soil pollution has not been sufficient. Hence, in this study it was analyzed the extraction of cleaning water from RMC factories all over the country and heavy metal and pH components remaining in soil when this is penetrated to various soils having water permeability. The specimens used for the experiment are weathering soil and soils having different particle size, and it is made to be penetrated to those for 24 hours while fixed thickness of the layer is maintained. Cleaning water is divided into that before deposition treatment(sludge water) and that after deposition treatment(upper water) to be penetrated into soil, and according to the result of penetrating sludge water to soil, Cu and Mn, Fe, and Zn were found to be remained over 23 to 90%. However, it is analyzed that in upper water having deposition treatment, Cu and Mn remain as 60% or more only in weathering soil.

• Journal of radiological science and technology
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• v.28 no.4
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• pp.293-299
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• 2005

In the present investigation, we analyzed the data of 1,318 patients (2,636 images) who underwent mammographic examinations and obtained the distribution of the patient age and compressed breast thickness. We measured also average glandular doses (AGD) as function of compressed breast thickness. In order to obtain the values of AGD, we measured half value layer (HVL) and tube output (mR/mAs) for each kVp and target/filter combination. Entrance surface air kerma (ESAK) was calculated from the tube output as measured for each voltage used under clinical conditions and from the tube loading (mAs). AGD per exposure were calculated by multiplying the ESAK values by the conversion factors tabulated by Dance. We obtained in this study the following conclusions. The mean value of compressed breast thickness for cranio-caudal (CC) view was 35.8mm and that for medio-lateral oblique (MLO) view was 43.3 mm. The mean value of AGD for CC view was 1.55 mGy and that for MLO view was 1.70 mGy. The AGD for MLO view was 0.15 mGy (10%) higher than that for CC view because the thickness for MLO view was on average 4.8 mm higher than that for CC view. The values of AGD increased with increasing compressed brest thickness. The increased AGD value was on average 0.34 mGy per 10 mm in the thickness ranges $10{\sim}80\;mm$, therefore differences between the AGD values of each thickness were relative large. Thus, it is considered to need limited doses for mammography with the upper end of exposure range at several different compressed brest thickness.

• Journal of the Mineralogical Society of Korea
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• v.15 no.2
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• pp.95-103
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• 2002

The object of this study was to interpret the ralationship between expandability (% $S_{XRD}$), MacEwan crystallite thickness ( $N_{CSD}$), and mean fundamental particle thickness ( $N_{F}$ ) in illite-semctite mixed layer (I-S), quantitatively. This interpretation was extracted from comparison of two structural models (MacEwan crystallite model and fundamental particle model) of I-S mixed layers. In I-S structure, % $S_{XRD}$, $N_{CSD}$, and $N_{F}$ are not independent parameters but are related to each others by particular geometric relations. % $S_{XRD}$ is dependent on $N_{CSD}$ by short-stack effect, whereas, % $S_{XRD}$ and $N_{F}$ have relation to smectite interlayer number (Ns)=( $N_{F-}$1)/(100%/% $S_{XRD-}$ $N_{F}$ . Therefore, % $S_{XRD}$ and $N_{F}$ should satisfy a specific physical condition, 1< $N_{F}$ <100%/% $S_{XRD}$, because $N_{s}$ is positive. Based on this condition, this study suggested % $S_{XRD}$ vs $N_{F}$ diagram which can be used to interpret % $S_{XRD}$, $N_{F}$ , $N_{S}$ , and ordering, quantitatively. The diagram was examined by XRD data for I-S samples from Ceumseongsan volcanic complex, Korea. I-S samples showed that $N_{F}$ departs from the physical upper-limit ( $N_{F}$ =100%/% $S_{XRD}$) with decrease in % $S_{XRD}$. This phenomenon may happen due to decrease of stacking-capability of fundamental particles with their thickening.g.s with their thickening.g.

• Geotechnical Engineering
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• v.11 no.2
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• pp.139-156
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• 1995

A set of field investigations was performed to estimate accurately the predominant periods of seismic 8round motions and the attenuation characteristics of the seismic ground vibration. Predominant periods of ground motions were estimated from the measurement of the continuous microseismic vibratins of certain periods, inherent in the ground and in the buildings, utilizing the high sensitivity digital velocity seismometer consisting of 3-component geophones and a digital seismograph. Estimated predominant periods of microseismic vibraion of the ground(measured on'the ground surface) and the building (measured on the second floor) were in the range of 0.18~0.235 sec. and 0.26~0.31 sec. respectively. The subsurface structure of the site ground was surveyed by the seismic refraction method utilizing the digital seismicwave probing system. The ground structure was found to be a two-layered system : an upper top soil layer of 7m in thickness with the P-wave velocity of 662m1sec and a lower layer of silty-clayey soils with the P -wave velocity of 2210m1 sec. The attenuation characteristics of the seismic ground vibrations were determined by the amplitude decay measurement method us;ng the Seisgun, which produces strong artificial seismic energy. Measured spatial attenuation coefficients of the ground vibration in vertical(Z) longitudinal(X), transverse(Y) direction were 0.1137, 0.0025, and 0.0290 respectively. Estimated Spartial QP's (inverse of the specific dissipation constant w.r.t. shear waved of X, Y, and Z directions were in the range of 5.913~7.575, 32.371~41.452, 2.794~3.579 re spectively. This indicates that aseimic design of the structures on the site should take stronger consideration regarding the earthquake resistance characteristics of the structures against longitudinal ground motion.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1196-1200
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• 2004

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. In this study, a bubble-powered micropump was fabricated and tested. The micropump consists of two-parallel micro line heaters, a pair of nozzle-diffuser flow controller and a 1 mm in diameter, 400 ${\mu}m$ in depth pumping chamber. The two-parallel micro line heaters with 20 ${\mu}m-width$ and 200 ${\mu}m-length$ were fabricated to be embedded in the silicon dioxide layer of a wafer which serves as a base plate for the micropump. The pumping chamber, the pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer (thickness of $525{\pm}15$ ${\mu}m$) having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. Finally the silicon wafer of the base plate, the silicon wafer of pumping chamber and the glass wafer were aligned and bonded (Si-Si bonding and anodic bonding). A sequential photograph of bubble nucleation, growth and collapse was visualized by CCD camera. Clearly liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the end of collapsing period can be seen. The mass flow rate was found to be dependent on the duty ratio and the operation frequency. As duty ratio increases, flow rate decreases gradually when the duty ratio exceeds 60%. Also as the operation frequency increases, the flow rate of the micropump decreases slightly.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.1
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• pp.42-49
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• 2016

This study was analyed V-bending in order to analyze the spring-back phenomenon in the roll forming process. The material of forming sheet used in the roll forming process is high tension steel and the product name of sheet material is POSTEN 60. The most important variable is the number of roll passes (3-Pass, 4-Pass, 5-Pass, 6-Pass and 10-Pass) and other roll forming process variables were fixed. To determine the characteristics of the tension and compression, the forming sheet was analyzed by dividing the layer (Upper and Bottom) in the thickness direction from the center line. The results of FEM simulation analysis was derived to von-mises stress equivalent strain, and the spring-back value was calculated according to the final forming shape. The more number of the roll pass, von-mises stress and equivalent strain value of forming sheet were lowed. Also, spring-back values tended to decrease. The results of this study can be utilized for prediction and trend of spring-back value in the roll forming process applied to high tension steel sheet. So, development time and cost of the roll forming process is expected to be reduced.