• 전자공학회논문지S
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• 제35S권6호
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• pp.55-65
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• 1998

산업현장에서는 반도체 공정의 산화막(oxidation)과 소둔(annealing) 공정에서 생산성을 향상시키기 위해 기존의 확산로(furnace)보다 RTP(rapid thermal processing) 시스템을 많이 사용하고 있다. 이러한 RTP 시스템의 주요 제어대상은 정확한 웨이퍼(wafer)의 온도조절과 웨이퍼 내의 균일성이다. 본 논문에서는 RTP 시스템의 온도변화와 같은 외란에 대한 견실안정성 문제를 해결하기 위해 하중 혼합감도함수를 이용하여 $H^{\infty}$ 제어기를 설계하고, 온도추적 및 웨이퍼 내의 균일성 등의 견실성능 개선은 루프쉐이핑 방법을 이용한다. 온도에 따른 선형화된 모델은 차수문제로 인하여 실 시스템 구현시 제약조건이 있으므로 한켈(Hankel), 자승근 균형(square-root balanced) 및 슈어 균형(Schur balanced) 방법을 사용하여 모델 차수축소를 하여 제어기를 설계한다. 원래의 모델과 축소된 모델에 대해 성능을 비교하고 시뮬레이션을 통하여 설계한 제어기의 견실안정성과 성능을 확인한다.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2007년도 Proceedings of ISRS 2007
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• pp.130-133
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• 2007

In order to get high quality and high resolution image data from the space-borne camera system, the image chain from the sensor to the user in the ground-station need to be designed and controlled with extreme care. The behavior of the camera system needs to be controlled by ground commands to support on-orbit calibration and to adjust imaging parameters and to perform early stage on-orbit image correction, like gain and offset control, non-uniformity correction, etc. The operation status including the temperature of the sensor needs to be transferred to the ground-station. The preparation time of the camera system for imaging with specific parameters should be minimized. The camera controller needs to synchronize the operation of cameras for every channel and for every spectral band. Detail timing information of the image data needs to be provided for image data correction at ground-station. In this paper, the design of the camera controller for the AEISS on KOMPSAT-3 will be introduced. It will be described how the image chain is controlled and which imaging parameters are to be adjusted The camera controller will have software for the flexible operation of the camera by the ground-station operators and it can be reconfigured by ground commands. A simple concept of the camera operations and the design of the camera controller, not only with hardware but also with controller software are to be introduced in this paper.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 춘계학술발표대회
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• pp.13.1-13.1
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• 2009

Transparent electronics has attracted many interests, for it can open new applications for consumer electronics, transportation, business, and military. Among them, display backplane, thin film transistor (TFT) array would be the most attractive application. Many researchers have been investigating oxide semiconductors for transparent channel material of TFT since the report for transparent amorphous oxide semiconductor (TAOS) TFT by Hosono group and ZnO TFT by Wager group. Especially, oxide TFTs have been intensively investigated during a couple of years since the first demonstration of ZnO-TFT driving AM-OLED. Many papers regarding the fabrication and performance of oxide TFTs, and active matrix display driven by oxide TFTs have been reported. Now lots of people have confidence in the competitiveness of oxide TFTs for the backplane of AM-Display. Especially, high mobility, uniformity, fairly good stability, and low cost process make oxide TFTs applied even to a large size AM-OLED. Last year, Samsung mobile display, former SID, reported 12" AM-OLED driven by IZGO-TFT and it seems that the remained issue for the mass production is the bias temperature stability. Here, we will introduce the application of oxide TFT and important issue for oxide TFT to be used for the direct printing.

• 한국전기전자재료학회논문지
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• 제20권7호
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• pp.575-580
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• 2007

A 16 Mb 1T1C FeRAM device was integrated with BLT capacitors. But a lot of cells were failed randomly during the measuring the bit-line signal distribution of each cell. The reason was revealed that the grain size and orientation of the BLT thin film were severely non-uniform. And the grain size and orientation were severely affected by the process conditions of post heat treatment, especially nucleation step. The optimized annealing temperature at the nucleation step was $560^{\circ}C$. The microstructure of the BLT thin film was also varied by the annealing time at the step. The longer process time showed the finer grain size. Therefore, the uniformity of the grain size and orientation could be improved by changing the process conditions of the nucleation step. The FeRAM device without random bit-fail cell was successfully fabricated with the optimized BLT capacitor and the sensing margin in bit-line signal distribution of it was about 340 mV.

• 대한기계학회논문집B
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• 제36권11호
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• pp.1135-1140
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• 2012

마스크를 이용하여 니켈 시드층의 형성 후 실버 도금을 통해 태양전지 상부전극을 형성하는 2 단계 전극형성 공정이 태양전지의 고효율화 방안으로 제안되었다. 본 연구에서는, 자외선 경화형 혹은 상변화 잉크를 고비용의 인쇄공정을 통해 마스크를 형성하는 방법을 대신하여, 코팅과 레이저의 복합공정을 통해 마스크를 형성하는 방법에 대해 제안하도록 한다. 마스크를 형성하는 물질로서 저비용의 저융점 왁스 혹은 플루오르카본 용액을 태양전지 웨이퍼 상에 코팅 후 레이저로 선택적으로 제거하여 전극패턴을 형성하였으며, 플루오르카본 용액 코팅이 왁스 코팅보다 패턴 균일도 측면에서 우수할 뿐만 아니라 통계적으로 0.16% 태양전지 효율증대를 유발한다는 점이 발견되었다.

• Journal of Radiation Protection and Research
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• 제41권2호
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• pp.81-86
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• 2016

Background: For positron emission tomography (PET) application, cadmium zinc telluride (CZT) has been investigated by several institutes to replace detectors from a conventional system using photomultipliers or Silicon-photomultipliers (SiPMs). The spatial and energy resolution in using CZT can be superior to current scintillator-based state-of-the-art PET detectors. CZT has been under development for several years at the Korea Atomic Energy Research Institute (KAERI) to provide a high performance gamma ray detection, which needs a single crystallinity, a good uniformity, a high stopping power, and a wide band gap. Materials and Methods: Before applying our own grown CZT detectors in the prototype PET system, we investigated preliminary research with a developed discrete type data acquisition (DAQ) system for coincident events at 128 anode pixels and two common cathodes of two CZT detectors from Redlen. Each detector has a $19.4{\times}19.4{\times}6mm^3$ volume size with a 2.2 mm anode pixel pitch. Discrete amplifiers consist of a preamplifier with a gain of $8mV{\cdot}fC^{-1}$ and noise of 55 equivalent noise charge (ENC), a $CR-RC^4$ shaping amplifier with a $5{\mu}s$ peak time, and an analog-to-digital converter (ADC) driver. The DAQ system has 65 mega-sample per second flash ADC, a self and external trigger, and a USB 3.0 interface. Results and Discussion: Characteristics such as the current-to-voltage curve, energy resolution, and electron mobility life-time products for CZT detectors are investigated. In addition, preliminary results of gamma ray imaging using 511 keV of a $^{22}Na$ gamma ray source were obtained. Conclusion: In this study, the DAQ system with a CZT radiation sensor was successfully developed and a PET image was acquired by two sets of the developed DAQ system.

• 한국기계가공학회지
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• 제18권11호
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• pp.103-108
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• 2019

The cooling rate and the uniformity of mold temperature, in the injection molding process, possess great influences on the productivity and quality of replications. The conformal cooling channel, which is of a uniform spacing from the mold cavity by the metal additive manufacturing process, receives much attention recently. The purpose of this study is to develop a mold core with a curved conformal cooling channel for a pottery-shaped thick-wall cosmetic container through the hybrid method of direct metal tooling (DMT) process. In this study, we design a mold core that contains the curved cooling channel for the container. A method that divides the cavity is proposed and the DMT process is carried out to form the curved cooling channel. The test mold core, with the curved conformal cooling channel, has been fabricated by the proposed method to confirm the feasibility of the design concept. We show that no leakage is observed for the additive manufactured test mold core, and its physical properties demonstrate that it can be sufficiently used as the injection mold core.

• 한국산학기술학회논문지
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• 제20권1호
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• pp.470-476
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• 2019

일반적으로 열차 제동을 위한 제동력은 압축공기를 활용하여 제공된다. 열차에 상황별로 적절 제동력을 가하기 위해 사용하는 압력밸브 시스템은 복잡한 유동 회로를 가진다. 이를 일반적인 기계가공으로 제작 시, 유로형상 설계에 제약이 있는 반면, 3D 프린팅 기법으로 제작시 유동 효율을 증대할 수 있는 유로형상 제작이 가능하다. 따라서 이번 연구에서는 기존의 제작 방식으로 유로를 제작하는 경우와, 3D프린팅의 장점을 살려, 자유로운 형상의 유로를 제작하는 경우를 비교하여, 압력 밸브 시스템 내의 압축공기 유동의 현상을 해석적으로 분석하였다. 해석을 위한 조건으로는, 유로 방향이 바뀔 때 유로의 곡률 크기, 유로의 직경, 입구 및 저장소 압력의 크기, 그리고 압축공기의 초기 온도로 구분하였다. 압력손실의 최소화 및 유동 특성의 균일성이 제동 효율 개선에 영향을 주는 요인이므로, 수치해석을 통한 연구를 통해 일반적인 기계가공을 통한 직각 유로 형상보다는 3D 프린팅을 통한 곡률 유로의 경우가 제동효율 개선에 유리함을 확인하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.55-55
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• 2018

Recently, amorphous oxides such as InGaZnO (IGZO) and InZnO (IZO) as a channel layer of an oxide TFT have been attracted by advantages such as high mobility, good uniformity, and high transparency. In order to apply such an amorphous oxide TFTs to a display, the stability in various environments must be ensured. In the InGaZnO which has been studied in the past, Ga elements act as a suppressor of oxygen vacancy and result in a decreased mobility at the same time. Previous studies have been showed that the InZnO, which does not contain Ga, can achieve high mobility, but has relatively poor stability under various instability environments. In this study, the TFTs using $IZO/Al_2O_3$ double layer structure were studied. The introduction of an $Al_2O_3$ interlayer between source/drain and channel causes superior electrical characteristics and electrical stability as well as reduced contact resistance with optimally perfect ohmic contact. For the IZO and $Al_2O_3$ bilayer structures, the IZO 30nm IZO channels were prepared at $Ar:O_2=30:1$ by sputtering and the $Al_2O_3$ interlayer were depostied with various thickness by ALD at $150^{\circ}C$. The optimal sample exhibits considerably good TFT performance with $V_{th}$ of -3.3V and field effect mobility of $19.25cm^2/Vs$, and reduced $V_{th}$ shift under positive bias stress stability, compared to conventional IZO TFT. The enhanced TFT performances are closely related to the nice ohmic contact properties coming from the defect passivation of the IZO surface inducing charge traps, and we will provide the detail mechanism and model via electrical analysis and transmission line method.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.292-292
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• 2007

To apply PDP panel, Soda lime glass(SLG) is cheeper than Non-alkali glass and PD-200 glass but has problems such as low strain temperature and ion diffusion by alkali metal oxide. In this paper suggest the methode that prohibits ion diffusion by deposing barrier layer on SLG. Indium thin oxide(ITO) thin films and barrier layers were prepared on SLG substrate by Rf-magnetron sputtering. These films show a high electrical resistivity and rough uniformity as compared with PD-200 glass due to the alkali ion from the SLG on diffuse to the ITO film by the heat treatment. However these properties can be improved by introducing a barrier layer of $SiO_2\;or\;Al_2O_3$ between ITO film and SLG substrate. The characteristics of films were examined by the 4-point probe, SEM, UV-VIS spectrometer, and X-ray diffraction. GDS analysis confirmed that barrier layer inhibited Na and Ka ion diffusion from SLG. Especially ITO films deposited on the $Al_2O_3$ barrier layer had higher properties than those deposited on the $SiO_2$ barrier layer.