• Title/Summary/Keyword: Uniform Film

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An Aerosol CVD Method Using Internal Jet for Optical Fiber Synthesis (내부제트 분사를 이용한 새로운 광섬유제조 화학증착 방법에 관한 연구)

  • Hong, Choon-Keun;Choi, Man-Soo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.4
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    • pp.608-613
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    • 2000
  • The present study has proposed a novel aerosol CVD utilizing an internal jet in the conventional MCVD reactor for the purpose of enhancing the deposition efficiency(and rate) and the uniformity of deposited film. The use of impingement of high temperature jet through a thin inner tube ensures the reduction of non-uniform particle deposition zone as well as higher thermophoretic particle deposition. It is shown that significant improvements have been achieved for both aspects of deposition efficiency and uniformity. As jet temperatures increase, the tapered length is reduced and deposition efficiency is significantly increased.

Three Dimensional Direct Monte Carlo Simulation on OLED Evaporation Process (유기EL 증착 공정에 대한 3차원 Monte Carlo 해석)

  • Lee, Eung-Ki
    • Journal of the Semiconductor & Display Technology
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    • v.8 no.4
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    • pp.37-42
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    • 2009
  • The performance of an OLED(organic luminescent emitting device) fabrication system strongly depends on the design of the evaporation cell-source. Trends in display sizes have hauled the enlargement of mother glass substrates. The enlargement of substrates requires the improvement and the enlargement of the effusion cell-source for OLED evaporation process. The deposited layers should be as uniform as possible, and therefore it is important to know the effusion profile of the molecules emitted from the cell-source. Conventional 2D DSMC algorithm cannot be used for simulating the new concept cell-source design, such as a linear source. This work concerns the development of 3D DSMC (direct simulation Monte Carlo) analysis for simulating the behavior of the evaporation cell-sources. In this paper, the 3D DSMC algorithm was developed and the film thickness profiles were obtained by the numerical analysis.

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Comparison of Warm Deep Drawability of Stainless Sheet Between Crank Press and Hydraulic Press (크랭크 프레스와 유압 프레스에서 스테인리스 강판의 온간 드로잉성 비교)

  • 김종호;최치수;나경환
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 1995.03a
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    • pp.178-185
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    • 1995
  • Warm deep drawing for optimum forming conditions to give the maximum drawing depth is investigated and compared with the results at room temperature. Experiments which draw square cups of STS 304 stainless steel sheet under the constant lubrication condition of teflon film made both in a crank and hydrqulic press for two kinds of specimens . The maximum drawing depth at warm forming condition reaches 1.4 times the drawing depth at room temperature in a crank press, whereas 1.6 times in a hydrqulic press, and also more uniform distribution of thickness in case of warm deep drawn cup is observed. The effects of other factors on formability , such as forming temperature, speed of press and cooling of punch are examinnied and discussed.

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Characteristics of directly-coupled single -layer second-order high Tc SQUID gradiometer

  • Hwang, Yun-Seok;Moon, Sunk-Yung;Ahn, Jong-Rok;Lee, Soon-Gul;Kim, Jin-Tae
    • 한국초전도학회:학술대회논문집
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    • v.10
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    • pp.184-188
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    • 2000
  • We have fabricated directly-coupled single-layer second-order high-Tc SQUID gradiometer. The gradiometer consisted of 3 parallel-connected square pickup loops, and each loop was directly coupled to SQUID. YBCO thin film was deposited by pulsed laser deposition and patterned by photolithography with ion milling technique. Optimum balancing condition was achieved by varying the outer diameter of the center loop. We have investigated nearly zero response of the SQUID to uniform and 1 st-order field gradient.

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The Effect of Nitric Acid Catalyst on the Properties of Lead Titanate Thin Films by Sol Gel Spin Coating (졸겔 스핀 코팅에서 질산촉매가 티탄산연 박막의 물성에 미치는 영향)

  • 이전국;정형진;김종희
    • Journal of the Korean Ceramic Society
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    • v.28 no.11
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    • pp.859-864
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    • 1991
  • High quality lead titanate thin films were fabricated by spin coating on a silicon substrate. The resulting dried gel layers were uniform in thickness through 2$\times$2 $\textrm{cm}^2$ area, and polycrystalline perovskite structures developed almost crack free with a heat treatment above 50$0^{\circ}C$ in films with thickness above 360 nm. Metastable pyrochlore structures were observed in films with thickness of 160 nm when heat treated at 500 and $600^{\circ}C$, but these structure did not appear in films with thickness of 360 nm. The thickness dependence in crystal structure of films was studied. by varying the substrate condition and analyzing the interface between the film and substrate. In native oxide films on silicon stbstrates, amorphous dried gel layers were heterogeneously nucleated. Metastable cubic pyrochlore structure could be crystallized in amorphous native oxide.

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The improvement of discharge characteristics and lifetime of PDP by MgO deposition on the phosphor

  • Ha, Chang-Hoon;Kim, Jae-Sung;Jeong, Dong-Cheol;Whang, Ki-Woong
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.232-235
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    • 2002
  • An alternate application of MgO film for the improvement of discharge characteristics and life time in an ac plasma display panel (PDP) is suggested. In this research, we deposited MgO on the phosphor to get the same address characteristics irrespective of each phosphor. To avoid the luminance and efficiency degradation by MgO deposition on the phosphor, we optimized the MgO thickness through experiments. The results showed that PDP with MgO coated phosphor has a uniform formative delay in address discharge and improved degradation characteristics.

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A Fabrication and ferroelectric properties of BLT Thin Films for FRAM (FRAM 응용을 위한 BLT 박막의 제작 및 특성)

  • Kim, Kyoung-Tae;Kwon, Ji-Woon;Shim, Il-Wun;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.565-568
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    • 2001
  • We have fabricated $Bi_{3.25}La_{0.75}Ti_{3}O_{12}(BLT)$ thin(200nm) films on the $Pt/Ti/SiO_{2}/Si$ substrates using a MOD(Metalorganic decomposition) method with annealing temperature from $550^{\circ}C$ to $750^{\circ}C$. The structural properties of the films examined by x-ray diffraction. The layered-perovskite phase obtained above $600^{\circ}C$. Scanning electron micrographs showed uniform surface composed of rodlike grains. The grain size increased with increasing annealing temperature. The BLT thin films showed little polarization fatigue test up to $3.5{\times}10^{9}$ bipolar cycling at a 5V and 100kHz.

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Electro-optical characteristics of TN-LCD on a Polyimide Surface Exposed to an Ion Beam (고분자 막을 이용한 이온빔 배향 TN-LCD의 전기광학특성)

  • Kim, Sang-Hoon;Hwang, Jeoung-Yeon;Kang, Hyung-Ku;Bae, Yu-Han;Lee, Whee-Won;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.271-272
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    • 2005
  • We studied liquid crystal (LC) alignment with ion beam (IB) on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the polyimide surface using obliquely ion beam exposure. A good uniform alignment of the nematic liquid crystal (NLC) alignment with the ion beam exposure on the polyimide surface was observed. In addition, it can be achieved the good EO properties, and residual DC property of the ion-beam-aligned TN-LCD on polyimide surface.

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A study on the structure and properties of Cr and Cr$_2$O$_3$ films deposited by the vacuum evaporation method (진공 증발법으로 증착한 Cr, Cr$_2$O$_3$ 박막의 조직 및 특성에 관한 연구)

  • 이종민;이정중
    • Journal of Surface Science and Engineering
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    • v.27 no.2
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    • pp.74-82
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    • 1994
  • The structure and properties such as adhesion and corrosion resistance of Cr and $Cr_2O_3$ films, deposited on steel plates by the vacuum evaporation method, were investigated. According to the ESCA and AES analy-sis, it could be concluded that chromium oxide with uniform composition could be formed on the steel sub-strate. The deposited Cr and $Cr_2O_3$ films had high adhesion strength, and they did not peeled off by the tape test. The adhesion property, however, was deteriorated as the film thciknes increased. After bending of the deposited specimen many cracks were observed by SEM, and they were assumed to have propagated along co-lumnar boundaries by the bending test. The corrosion resistance of the films was not generally good, which in-dicates that the films had a porous structure with a large number of defects such as pin holes and voids.

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Flow Analysis in a Slipper Bearing for Swash Plate Type Axial Piston Pump (사판식 유압 피스톤 펌프용 Slipper Bearing내의 유동해석)

  • Park, Tae-Jo;Yoo, Jae-Chan
    • Tribology and Lubricants
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    • v.24 no.6
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    • pp.343-348
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    • 2008
  • In this paper, a CFD (Computational fluid dynamics) code, FLUENT is adopted to investigate accurate flow characteristics for a slipper bearing which is used swash plate type hydraulic axial piston pump. Static pressure and velocity distributions, and velocity vectors are plotted for different film thickness and slipper rotational velocity. In recess region, there exists a doughnut shaped vortex ring. The static pressure distributions are non-uniform and the flow fields are highly asymmetrical under bearing rotation. Therefore the numerical method adopted in this paper can be use in design of hydrostatic components and further studies are required.