• 한국전기전자재료학회논문지
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• 제24권5호
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• pp.387-391
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• 2011

A uncooled infrared ray sensor used in an infrared thermal imaging detector has many advantages. But because the uncooled infrared ray sensor is made by MEMS (micro-electro-mechanical system) process variation of offset is large. In this paper, to solve process variation of offset a ROIC for uncooled infrared ray sensor that has process variation of offset compensation technique using differential delta sampling and reference signal compensation circuit was proposed. As a result of simulation that uses the proposed ROIC, it was possible to acquire compensated output characteristics without process variation of offsets.

• 제어로봇시스템학회논문지
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• 제13권2호
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• pp.128-132
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• 2007

Thermal Imaging systems are reported to be crucial for fire fighting and beginning to be used by fire fighters. The performance of thermal imaging system is determined by both the radiation of infrared from the target and the attenuation of infrared signal in the optical path by the absorption, scattering, diffraction and reflection. In the scene of fire, water drops with various sizes such as vaporized water, wafer mist from sprinkler, and wafer to suppress the fire reside with various gas generated by burning. To measure the transmission of infrared radiation in the scene of fire, fire simulating system and thermal imagers with cooled detector which detects $3{\sim}5{\mu}m$ infrared and uncooled detector fabricated by the MEMS technology which detects $8{\sim}12{\mu}m$ infrared. are made. With thermal imagers and Ire simulating system, the change of thermal image with respect to the change of visibility controlled with the burned fas was measured. It was found that the transmission of infrared was not reduced by the burned gas, which could be explained by the long wavelength of infrared ray compared with visible ray. However, the transmission of infrared ray was largely reduced by the combination of burned gas and water mist supplied by sprinkler. This is contrary to the results of calculated transmission through the pure water mist and shows that the transmission of infrared ray is mostly affected by the compounds of water mist and burned gas. In this case, it was found that the uncooled detector which detects $8{\sim}12{\mu}m$ infrared ray is better than cooled detector which detects $3{\sim}5{\mu}m$ infrared ray for fire fighting.

• 한국전기전자재료학회논문지
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• 제25권5호
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• pp.366-371
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• 2012

In this paper, fabricated by MEMS uncooled micro-bolometer detector for the study in the infrared sensitivity enhancement. Absorption layer SiOx-Metal series MDTF (metal-dielectric thin film) by high absorption rate and has a high thermal coefficient of resistance, low noise characteristics were implemented. Then MDTF were made in a vacuum deposition method. And MDTF for the analysis of the physical properties of silicon wafers were fabricated, TCR (temperature coefficient of resistance) value was made in order to measure the glass wafer and FT-IR (Fourier Transform Infrared spectroscopy) values were made in order to measure the germanium window. The analyzed results of MDTF -3 [%/K] has more characteristics of the TCR. And 8~12 um wavelength region close to 70% in the absorption characteristic.

• 한국광학회지
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• 제34권3호
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• pp.106-116
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• 2023

본 논문에서는 가시광선과 원적외선 전반의 파장대역에 걸쳐 사용 가능한 동축 듀얼카메라를 설계 및 분석하였다. 광학계는 빔 스플리터를 이용한 동축광학계 시스템으로 설계되었으며, 가시광선 광학계에서 적외선으로 인한 열 전달을 최소화하기 위해 hot mirror 타입의 빔 스플리터를 사용하였다. 원적외선 카메라는 비냉각형 검출기로 640×480의 센서 배열을 가지고, 가시광선은 1,945×1,097의 센서를 사용한다. 최적화 과정을 거친 후 최종 설계된 광학계의 정합도는 90% 이상이며, 기존에 존재하던 듀얼카메라에 비해 정합도가 향상된 효율적인 설계 결과를 얻었고, 테스트를 통해 향상된 정합도를 확인하였다.