• 제목/요약/키워드: Uncertainty measurement

검색결과 931건 처리시간 0.043초

Single-configuration FPP method에 의한 실리콘 웨이퍼의 비저항 정밀측정 (Precision Measurement of Silicon Wafer Resistivity Using Single-Configuration Four-Point Probe Method)

  • 강전홍;유광민;구경완;한상옥
    • 전기학회논문지
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    • 제60권7호
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    • pp.1434-1437
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    • 2011

  • Precision measurement of silicon wafer resistivity has been using single-configuration Four-Point Probe(FPP) method. This FPP method have to applying sample size, shape and thickness correction factor for a probe pin spacing to precision measurement of silicon wafer. The deference for resistivity measurement values applied correction factor and not applied correction factor was about 1.0 % deviation. The sample size, shape and thickness correction factor for a probe pin spacing have an effects on precision measurement for resistivity of silicon wafer.

  • https://doi.org/10.5370/KIEE.2011.60.7.1434 인용 PDF KSCI

Cross Capacitance 측정법을 이용한 유전상수 정밀측정 (Precise Measurement of Dielectric Constant Using Cross Capacitance Measurement Method)

  • 김한준;강전홍;유광민;이세현;구경완;한상옥
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1287-1288
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    • 2007

  • The cross capacitor electrode system applied Thompson-Lampard theorem for precise and accurate measurement of dielectric constants is studied in this study. The capacitance derived from cross capacitor is calculated by the equation of ($C=\frac{{\epsilon}ln2}{\pi}{\cdot}$ effectivelength of electrode) which is very different from the equation of capacitance derived from parallel plate capacitor. From above mentioned reason, the capacitance measurement uncertainty of cross capacitor can be reduced then that of the parallel plate capacitor. the measurement dielectric constant measured by cross capacitor electrode method is one order more accurate and precise than that of 3-electrode method.

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