• Journal of the Korean Crystal Growth and Crystal Technology
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• v.11 no.3
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• pp.111-114
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• 2001

(Ba,Sr) $RuO_3$ thin films were fabricated on Si(100) wafer by metal organic chemical vapor deposition using ultrasonic spraying. When the substrate temperature was varied, the BSR thin films showed good crystallinity above 50$0^{\circ}C$ and showed (110) preferred orientation by X-ray diffraction measurements. The surface morphology, determined by atomic force microscopy, indicated that the grain size of BSR thin films depended strongly on the Ba/Sr ratio. With the increase in the amount of Sr relative to Ba, the resistivity of BSR films decreased fro m415 to 261 $\mu$$\Omega$${\cdot}$cm.

• Journal of the Korean institute of surface engineering
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• v.37 no.6
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• pp.344-349
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• 2004

Emulsions were formed through putting small quantity of nickel electroplating solution into supercritical carbon dioxide, and then electroplating in the $sc-CO_2$ emulsions was conducted. It is an environmental-friendly technology that can solve the treatment of a large quantity of toxic plating wastewater, which is a big problem in the existing wet plating, and also can reduce secondary waste generation fundamentally. Supercritical carbon dioxide emulsions enhanced by ultrasonic horn were formed by non-ionic surfactant and nickel solution. Plating condition within emulsions was set up as 120bar and $55^{\circ}C$ through measurement of electrical conductivity following the pressure change. Experiments were conducted respectively against supercritical carbon dioxide emulsions electroplating and general chemical electroplating, and then their results were compared and analyzed. As the experiment result utilizing emulsions, plating surface was formed very evenly even with a small quantity of electroplating solution, and fine particles were plated compactly without any pinhole or crack due to hydrogenation, which occurs in general electroplating. Used electroplating solution can be reused through recovery process. Therefore, this technology will be able to be applied as new clean technology in electro-plating.

• Journal of the Korean Vacuum Society
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• v.22 no.4
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• pp.175-180
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• 2013

We developed the contamination prevention module of an optical window for an In-Situ Particle Monitor (ISPM) system. the core part of the module is the generator of an ultrasonic wave and the module is to remove particles stuck to the window by the transfer of the wave force to the window surface. In order to enhance transfer efficiency of the waves the frequency of the ultrasonic wave was optimized and a low impedance material (plexiglass) and a soft sealing material (Si rubber) were used. The ISPM with the developed module was installed at the exhaust line of a BPSG CVD equipment and the effect of the module was verified.

• Journal of the Korean Society for Nondestructive Testing
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• v.28 no.2
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• pp.131-136
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• 2008

Using ultrasonic standing waves, micro particles submerged or flowing in fluid can be manipulated. Due to acoustic radiation force of ultrasound, particles are forced to move to pressure nodal or antinodal lines. In this work, we propose a method to control the position of micro particle in a flow by adjusting the frequency of the standing wave. To this end, standing wave field generation system including a few millimeter thick micro channel was established using an immersible ultrasonic transducer. The present generation system works valid in a frequency range between 2.0 MHz and 2.5 MHz. We observed the SiC particles in water moved to pressure nodal lines by the standing wave. The effect of the channel thickness and operating frequency was also investigated. Interestingly, it was shown that the operating frequency have a close relation with the location of the pressure nodal line. Consequently, it fan be said that the position of particle movement rail be controlled by adjusting the ultrasound frequency. The maximum range of the controllable position was about 261 micrometers under the given condition. The resulted observations reveal the possibility of various applications of the ultrasonic standing wave to the manipulation of particles submerged in a fluid.

• Journal of the Korean Institute of Intelligent Systems
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• v.19 no.4
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• pp.451-456
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• 2009

In this paper, a virtual force is generated and fed back to the operator to make the teleoperation more reliable, which reflects the relationship between a slave robot and an uncertain remote environment as a form of an impedance. In general, for the teleoperation, the teleoperated mobile robot takes pictures of the remote environment and sends the visual information back to the operator over the Internet. Because of the limitations of communication bandwidth and narrow view-angles of camera, it is not possible to watch certain regions, for examples, the shadow and curved areas. To overcome this problem, a virtual force is generated according to both the distance between the obstacle and the robot and the approaching velocity of the obstacle w.r.t the collision vector based on the ultrasonic sensor data. This virtual force is transferred back to the master (two degrees of freedom joystick) over the Internet to enable a human operator to estimate the position of obstacle at the remote site. By holding this master, in spite of limited visual information, the operator can feel the spatial sense against the remote environment. It is demonstrated by experiments that this collision vector based haptic reflection improves the performance of teleoperated mobile robot significantly.

• Journal of Biomedical Engineering Research
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• v.18 no.4
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• pp.447-456
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• 1997

When the disabled is operating a rehabilitation assisting system with a joystick by himself, unlike in the case of a normal person, tremor with joystick control or instant miscontrol can often occur. If these misoperations should be directly relayed to the system, shaking or malfunction of the mobile rehabilitation assisting system might be the result. The safety of the disabled is of prime concern. To solve this problem, that is, to prevent the miscontrol of the disabled operator and avoid crashes into his or her surroundings, we propose the force-reflection locomotion algorithm with the joystick. This method uses ultrasonic sensors to measure the distance between the object and mobile robot. Based on the reception of sensory data, the necessary torque is applied via the joystick to the attatched motor. To confirm the effectiveness of the proposed method, the subjects on the reflected force by the dynamic characteristics of the joystick and the reflected force by the distance information are tested Even though there are some differences in human dexterity, we confirmed the fact that the information from the obstacles was relayed to the operator via the joystick and resulted in an improved operational performance and safety level with regard to those obstacles.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.388-393
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• 2001

An experimental study is conducted to investigate the interaction of vortices over a delta wing with leading edge extension(LEX) through the off-surface flow visualization and the 5-hole probe measurements of the wing wake region. Especially, the application of a new visualization technique is employed by ultrasonic humidifier water droplet and laser beam sheet. The results, both the off-surface visualization and the 5-hole probe, show that LEX tends to stabilize the vortices of the delta wing up to the high angle of attack even though the model is yawed. With increasing yaw, the windward leading edge vortex moves inward, and closer to the wing surface, while the leeward vortex moves outwards and away from the wing surface. The vortex interaction is promoted in the windward side, and is delayed in the leeward side.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1402-1405
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• 2003

The main object of this study was evaluated by the delamination damage for fiber stacking angle. Therefore, this work need to compare the shape of delamination for a different fiber stacking angie. So this study uses a method of fatigue test which was created [0]$_2$,[+45]$_2$[90]$_2$. The extension of the delamination zone formed between aluminium alloy and glass fiber-adhesive layer were measured by an ultrasonic C-scan image. As a result, the shapes of delamination zone don't depend upon the crack propagation. We could know that the delamination zone grew interaction between stress flow of fiber layer and crack driving force. Hence, the existing study were applied to the stress transfer, fiber bridging effect, delaminantion growth rate should need to the develop useful factor because of change of fiber stacking angle.

• Journal of the Korean Ceramic Society
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• v.32 no.10
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• pp.1147-1161
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• 1995

When ceramic membrance was made from metal salt solution in place of metal akoxide solution, crack free and good adhesion to supporter was optimized for sol stability and good adhesion force. A starting sol was prepared from aluminum oxychloride aqueous solutjion in order to inhibit the grain growthof Al2O3 during heat treatment. The crack free dip coating can't be achieved in 1mol/ι zirconium oxychloride solution because of the high viscosity which interferes with the hydration copolymerization between Al3+ ion and Zr4+ ion. Thus Al2O3-ZrO2 sol stability and viscosity for dip coating was effective when 0.01 mol/ι zirconium oxychloride was added. The minimizing of crack and achieving better adhesion to the supporter wa obtained by microwave drying, surfactant addition and ultrasonic dip coating in wet atmosphere. The result seems to minimize the capillary force and improve the adhesive ability to supporter during the process. Where the average pore size of Al2O3-ZrO2 ultrafilter ceramic membrane measured 17 Å by the BET method and observed γ-Al2O3 phase with tetragonal zirconia after firing at 700℃.

• The Journal of Korea Robotics Society
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• v.6 no.2
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• pp.108-117
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• 2011

This paper proposes an optimal ARS control of a two-wheel mobile inverted pendulum robot. Conventional researches are highly concentrated on the robust control of a mobile inverted pendulum on the flat ground, $i.e.$, mostly focus on the compensation of gyroscope signals. This newly proposed algorithm deals with a climbing control of a slanted surface based on the dynamic modeling using the conventional structure. During the climbing control of the robot, unexpected disturbance forces are essentially caused by the irregular contact force which comes from the irregular contact angle between the wheel and the terrain. The disturbances have effects on the optimal posture of the mobile robot to compensate the slanted angle. Therefore the dynamics equations through physical interpretation are derived for the selection of optimum climbing posture through ARS. Also using the ultrasonic sensor the slope information is obtained to compensate for the force of gravity. The control inputs are dynamically adjusted to climb up the slanted surface effectively. The proposed algorithm is demonstrated through the real experiments.