• 제목/요약/키워드: Ultra-thin multilayers

검색결과 10건 처리시간 0.021초

OBSERVATION OF THE DOMAIN STRUCTURES IN SOFT MAGNETIC ${(Fe_{97}Al_3)}_{85}N_{15}/Al_2O_3$ MULTILAYERS

  • Stobiecki, T.;Zoladz, M.;Roell, K.;Maass, W.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2002년도 동계연구발표회 논문개요집
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    • pp.14-15
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    • 2002
  • Iron nitride alloy films prepared in the form of laminated ${(Fe_{97}Al_3)}_{85}N_{15}/Al_2O_3$ multilayers (Ml's) due to excellent soft magnetic properties and high saturation magnetization [1, 2] are very promising materials for poles and shields in ultra high density thin film heads. The present work concerns the ferromagnetic (FM) coupling effect as a function of the thickness of $Al_2O_3$ spacers by analysis of the magnetic domain structure.

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건습식 혼합공정을 이용한 유연소재 상 전자파 차폐용 다층막 코팅 (Multilayer Coatings on Flexible substrate for Electromagnetic Shielding by Using Dry/Wet Hybrid Processes)

  • 이훈성;이명훈
    • 한국표면공학회지
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    • 제50권5호
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    • pp.373-379
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    • 2017
  • Dry processes like evaporation and sputtering in vacuum chamber are difficult to make a uniform, large area and high quality film on thin PET substrate because of PET degradation and bad adhesion. On the other hand, wet processes like electro or electroless plating have complex processes and require high environmental cost. In this study, we successfully prepared $2{\mu}m$ Zn/Cu/Ni multilayers coated on $12{\mu}m$ polyethylene terephthalate (PET) substrate by using dry-wet mixing processes. Their surface electric resistances were evaluated around $0.2{\Omega}$ by using 4 probe measurements. Furthermore, their corrosion resistance also evaluated by natural potential test and compared with other wet, dry and mixing process samples.

NiFe/[FeMn/Mn]80/NiFe 다층박막에서 극-초박막 Mn 삽입에 의한 교환결합세기와 열적 안정성 향상 (Enhancement of Exchange Coupling Field and Thermal Stability by an Ultra-thin Mn Inserted layer on NiFe/[FeMn/Mn]80/NiFe Multilayers)

  • 김보경;이진용;함상희;이상석;황도근
    • 한국자기학회지
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    • 제13권2호
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    • pp.53-58
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    • 2003
  • Mn층 삽입에 의한 NiFe/[FeMn/Mn]$_{80}$/NiFe 다층박막에서 열처리에 따른 교환결합세기의 변화를 조사하였다. Ta(50$\AA$)/NiFe(150 $\AA$)/[F $e_{53}$M $n_{47}$(1.25 $\AA$)/Mn(0 $\AA$, 0.11 $\AA$, 0.3 $\AA$)]$_{80}$/NiFe(90 $\AA$)/Ta(50 $\AA$) 다층박막을 이온빔 증착 스퍼터링법으로 제작하였다. 삽입한 Mn 총 두께가 0 $\AA$, 9 $\AA$, 그리고 24 $\AA$인 다층박막에 대해 조사된 fcc 결정조직의 x-선 회절세기의 비인 NiFe(111)/FeMn(111)값은 각각 0.65, 0.90, 그리고 1.5이었다. Mn이 삽입되지 않은 시료인 경우, 열처리 온도 30$0^{\circ}C$에서 상부 NiFe층의 교환결합세기는 260 Oe로 유지한 후 35$0^{\circ}C$에서 사라졌다. Mn 삽입층의 두께가 0.11 $\AA$, 0.3 $\AA$인 두개의 시료에 대해, 300 $^{\circ}C$에서 상부 NiFe층의 교환결합세기는 각각 310 Oe와 180 Oe로 유지한 후 40$0^{\circ}C$에서 모두 사라졌다. 한편 하부 NiFe층의 교환결합세기는 250 $^{\circ}C$까지 100 Oe에서 70 Oe로 감소하는 동일한 경향을 보여 주었고, 300 $^{\circ}C$ 이상부터는 증가하는 경향이 관찰되었다. 다층박막 내에 뿔뿔이 산란하여 이동하는 Mn 원자의 확산은 주로 결정 조직의 결함이 생성되고 치밀도가 약한 상부 NiFe 층에 영향을 주고 있음을 알 수 있었다. 극 초박막 형태로 Mn 원자층의 삽입에 의한 NiFe/[FeMn/Mn]80/NiFe 다층박막에서 교환결합세기와 열적 안정성 향상을 보여 주었다.

TOF-MEIS 나노분석법 (NanoAnalysis with TOF-MEIS)

  • 유규상;문대원
    • 진공이야기
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    • 제2권2호
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    • pp.17-23
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    • 2015
  • Medium Energy Ion Scattering (MEIS) has been successfully used for ultrathin film analysis such as gate oxides and multilayers due to its single atomic depth resolution in compostional and structural depth profiling. Recently, we developed a time-of-flight (TOF) MEIS for the first time, which can analyze a $10{\mu}m$ small spot. Small spot analysis would be useful for test pattern analysis in semiconductor industry and various thin film technology. The ion beam damage problem is minimized due to its improved collection efficiency by orders of magnitude and the ion beam neutralization problem is removed completely for quantitative analysis. Newly developed TOF-MEIS has been applied for gate oxides, ultra shallow junctions, nanoparticles, FINFET structures to provide compositional and structural profiles. Further development for submicron spot analysis and applications for functional nano thin films and nanostructured materials are expected for various nanotechnology and biotehnology.

${[Co/Fe/Cu]}_20$ 다층박막의 자기저항 특성 (Magnetoresistance of ${[Co/Fe/Cu]}_20$ Multilayers)

  • 이장로
    • 한국자기학회지
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    • 제6권6호
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    • pp.411-416
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    • 1996
  • 본 연구에서는 dc magnetron sputtering 방법으로 Corning glass 위에 자성층 Co와 비자성층 Cu의 계면에 얇은 Fe 자성층을 삽입하여 다층박막 $Fe(50\;{\AA})/[Co(17\;{\AA})/Fe(t\;{\AA})/Cu(24\;{\AA})]_{20}$을 제작하고 Fe 두께와 열처리 온도에 따른 자기저항 변화를 관찰하였다. 시료진동형자기계로 자기이력곡선을 측정하여 자기적 성질을 조사하였고 구조 및 표면 분석을 위해 각각 X-선 회절장치와 AFM(Atomic Force Microscope)을 이용하였다. 얇은 Fe 사이층을 삽입하지 않은 Co/Cu 다층박막에서 자기저항비가 22%인데 비해 얇은 Fe층을 삽입하였을때는 자기저항비가 26%까지 증가하였고 Fe 사이층의 두께가 점차 두꺼워짐에 따라 자기저항비는 다시 감소함을 나타냈다. $300^{\circ}C$ 까지 열처리한 결과 자기저항비는 증가하였으나 그 이상의 온도에서는 감소하였다.

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Moving wall형 LB법에 의하여 제작된 DLPC 지질막의 누적특성 (The Deposition Characterization of DLPC Lipid Membrane Fabricated by Moving wall Type LB Method)

  • 이우선;최창주;정용호;김남오;이경섭;장의구;김태성
    • E2M - 전기 전자와 첨단 소재
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    • 제10권6호
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    • pp.548-554
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    • 1997
  • We fabricated the sample of ultra thin lipid membrane(L-$\alpha$-DLPC) by LB method. The $\pi$-A isotherm of the DLPC was measured at the air-water interface varying with the compressing speed and amounts of solutions for spreading. For the good property of lipid monolayer film, it was necessary to prepare at the lower speed of compressing, with an appropriate volume of solutions for spreading. Absorption, transmitance and intensity with the UV spectrophotometer were measured. The Z-type multilayers showed good characteristics better than Y-type. So we found building-up of structurally high quality LB films is essential to study properties of the films and to get reproducible data.

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나노구조 유기초박막의 광자격 변위특성 (Photo Stimulus Displacement Properties of Nano structure Organic Ultra Thin Films)

  • 송진원;조수영;최영일;이경섭
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.209-211
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    • 2004
  • In the Langmuir-Boldgett(LB) technique, a monolayer on the water surface is transferred on to a substrate, which is raised and dipped through the surface, and one can obtain multilayers in which constituent molecules periodically are arranged in layer. The LB technique has attracted considerable interest in the fabrication of electrical and electronic device, e.g.. Many researchers have investigated the electrical properties of monolayer and multiplayer films. Dendrimers represent a new class of synthetic macromolecules sharacterized by a regularly branched treelike structure. Multiple branching yields a large number of chain ends, which distinguishes dendrimers from conventional starlike polymers and microgels. Azobenzene dendrimer is one of the dendritic macromolecules that includes the azo-group which exhibits a photochromic character. Due to the presence of the charge transfer part, the azo-group, and having a rod-shaped structure, these compounds are expected to have the potential interest in electronics and ptoelectronics, especially in nonlinear optics. In the present paper, we give a pressure stimulation into organic thin films and detect the induced displacement current.

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기능성 유기 초박막을 이용한 $NO_2$ 가스센서 개발을 위한 기초 연구 (Basic Studies for the Development of the $NO_2$ Gas Sensor Using Functional Organic Ultrathin Film)

  • 손병청;임병오;김용인;손태원;신동명;주재백;정귀영;김영관;강우형;이병호
    • 한국응용과학기술학회지
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    • 제12권1호
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    • pp.125-131
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    • 1995
  • Ultra thin films of Tetra-3-hexadecylsulphamoylcopperphthalocyanine(HDSM-CuPc) were formed on various substrates by Langmuir-Blodgett method, where HDSM-CuPc was synthesized by attaching long-chain alkylamine(hexa-decylamine) to CuPc. The reaction product was identified with FT-IR, UV-visible absorption spectroscopies, elemental analysis and thin layer chromatography. The formation of Ultrathin Langmuir-Blodgett(LB) films of HDSM-CuPc was confirmed by FT-IR and UV-visible spectroscopies. A quartz piezoelectric crystal coated with LB films of HDSM-CuPc was examined as a gas sensor for $N0_2$ gas. HDSM-CuPc LB films were transferred to a quartz crystal microbalance(QCM) in the form of Z-type multilayers. Response characteristics of film-coated QCM to $NO_2$ gas concentrations over a range of $100{\sim}600ppm$ have been tested with a thickness of $5{\sim}20$ layers of HDSM-CuPc. Changes in frequency by adsorption of $NO_2$ were increased With the number of LB layers and $NO_2$ concentration, but the response time was slow.

Ni80Fe20/[Ir22/Mn78-Mn]/Co75Fe25 다층박막에서 Mn 함유량에 의존하는 교환결합력과 열적안정성 (Exchange Coupling Field and Thermal Stability of Ni80Fe20/[Ir22/Mn78-Mn]/Co75Fe25 Multilayer Depending on Mn Content)

  • 김보경;이진용;김순섭;황도근;이상석;황재연;김미양;이장로
    • 한국자기학회지
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    • 제13권5호
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    • pp.187-192
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    • 2003
  • IrMn에 Mn을 첨가시킨 N $i_{80}$F $e_{20}$/[I $r_{22}$M $n_{78}$-Mn] $Co_{75}$F $e_{25}$ 다층박막을 상온에서 이온빔 증착(ion beam deposition: IBD)법으로 제작하여 그 자기적 및 열적 특성을 연구하였다. Mn이 첨가된 NiFe/[IrMn-Mn]/CoFe다층박막은 Mn이 첨가되지 않은 순수 합금 IrMn 박막 위의 CoFe 고정층 보다 큰 교환결합력( $H_{ex}$)과 방해온도(blocking temperature: $T_{b}$)을 가지고 있었다. Mn이 첨가되지 않는 I $r_{22}$M $n_{78}$ 와 CoFe 사이의 $H_{ex}$는 상온에서 거의 없었으나, 25$0^{\circ}C$ 열처리 후 100 Oe로 나타났다. IrMn 내에서 76.8-78.1 vol% Mn일 때, $H_{ex}$$T_{b}$는 크게 향상되었고, Mn이 0.6 vol%씩 증가함에 따라 크게 줄어들었다. NiFe/[IrMn-Mn]/CoFe 다층박막 구조에서 [(111)CoFe, NiFe]/(111)IrM $n_3$인 x-선 회절 피크비 평균값은 75.5, 77.5, 79.3 vol% Mn일 때 각각 1.4, 0.8, 0.6였다. 특히, 열처리 전 77.5과 78.7 vol% Mn일 때, $H_{ex}$는 각각 259와 150 Oe였다. 77.5 vol% Mn인 경우, $H_{ex}$가 열처리 온도 35$0^{\circ}C$까지 475 Oe였으며, 450 $^{\circ}C$에서는 200 Oe로 크게 감소하였다. 따라서 합금형 반강자성체 IrMn에서 높은 $H_{ex}$$T_{b}$을 얻을 수 있는 최적의 Mn 함유량의 존재를 확인하였다.다.다. 확인하였다.다.하였다.다.