• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.422-428
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.465-468
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• 2001

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aerostatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured, aiming at investigating positioning characteristic of ultra-precision stage. We confirm, this ceramic aerostatic stage has a 10nm micro resolution, and can be reduced mean of position error by compensation of numeric control command. By means of analyzing relationship of position error and change of temperature, we build a on-line compensation algorithm of position error from the measured temperature data. So we can improve repeatability of ultra-precision stage up to 34%($0.095{\mu}$) of the normal condition.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.314-317
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• 2005

As demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. The ultra precision stage wasn't yet applied in the optical alignment and the optical element alignment was taken too many times. In this paper, the optical element alignment of ultra precision positioning stage was studied. The alignment algorithm is comprised of field search and peak search algorithms. The procedure of the alignment algorithms applied to the ultra precision positioning stage are developed by LabView programming.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.342-347
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• 2002

After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.345-346
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• 2007

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.1
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• pp.39-44
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• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.