• Title/Summary/Keyword: Ultra-precision Grinding

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Evaluation of Grinding Characteristics in Radial Direction of Silicon Wafer (실리콘 웨이퍼의 반경 방향에 따른 연삭 특성 평가)

  • Kim, Sang-Chul;Lee, Sang-Jik;Jeong, Hae-Do;Lee, Seok-Woo;Choi, Heon-Jong
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.980-986
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    • 2003
  • As the ultra precision grinding can be applied to wafering process by the refinement of the abrasive, the development of high stiffness equipment and grinding skill, the conventional wafering process which consists of lapping, etching, Ist, 2nd and 3rd polishing could be exchanged to the new process which consists of precision surface grinding, final polishing and post cleaning. Especially, the ultra precision grinding of wafer improves the flatness of wafer and the efficiency of production. Futhermore, it has been not only used in bare wafer grinding, but also applied to wafer back grinding and SOI wafer grinding. This paper focused on the effect of the wheel path density and relative velocity on the characteristic of ground wafer in in-feed grinding with cup-wheel. It seems that the variation of the parameters in radial direction of wafer results in the non-uniform surface quality over the wafer. So, in this paper, the geometric analysis on grinding process is carried out, and then, the effect of the parameters on wafer surface quality is evaluated

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Effect of workpiece speed in ultra high speed cylindrical plunge grinding (초고속 원통 플런지연삭에서 공작물속도의 영향)

  • 주종길;박규열
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.961-964
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    • 1997
  • In this paper, grinding characteristics of ultra high speed cylindrical plunge grinding was investigated by use of vitrified CBN wheel. From the experimental result, it was convinced that grinding power is decreased according to the increase of wheel and workpiece speed due to changing of grinding mechanism which decreases depth of cut and length of contact curve according to increment of wheel speed. And also, stock removal reduction of each gram lead to improvement of surface roughness by increasing the wheel speed.

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Analysis on Surface Characteristics of the Workpiece in the Grinding by CBN Wheel (CBN 숫돌을 이용한 연삭에서 공작물의 표면성상 분석)

  • Lee, Y. S.;Kwak, J. S.;Ha, M. K.;Koo, Y.;Yoon, M. C.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2001.04a
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    • pp.1105-1108
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    • 2001
  • In these days, according s the increase of technological development the part demension goes up for ultra-precision. It is grinding behavior that is important processing which directly influences by machining accuracy at product quality with the net shape manufacturing. In this study, by using CBN wheel an analysis carried out for workpiece's profiles and its characteristics by measuring grinding force and surface roughness. Workpiece materials were used STD11, SUS304 and STB2 varing condition of feedrate and depth of cut.

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Research on Ultra-precision Grinding Work of Silicon Carbide (실리콘 카바이드의 초정밀 연삭 가공에 관한 연구)

  • Park, Soon-Sub;Won, Jong-Ho
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.9
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    • pp.58-63
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    • 2009
  • Silicon carbide (SiC) has been used for many engineering applications because of their high strength at high temperatures and high resistances to chemical degradation. SiC is very useful especially for a glass lens mold whose components demanded to the machining with good surface finish and low surface damage. The performance and reliability of optical components are strongly influenced by the surface damage of SiC during grinding process. Therefore, the severe process condition optimization shall be necessary for the highly qualified SiC glass lens mold. Usually the major form of damage in grinding of SiC is a crack occurs at surface and subsurface. The energy introduced in the layers close to the surface leads to the formation of these cracks. The experimental studies have been carried out to get optimum conditions for grinding of silicon carbide. To get the required qualified surface finish in grinding of SiC, the selection of type of the wheel is also important. Grinding processes of sintered SiC work-pieces is carried out with varying wheel type, depth of cut and feed using diamond wheel. The machining result of the surface roughness and the number of flaws, have been analyzed by use of surface profilers and SEM.

A Study on the Internal Grinding with High Quality Using Interval Type Electrolytic Dressing Method (전해 드레싱을 이용한 고품의 내면 연삭 가공에 관한연구)

  • 강재훈
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.9 no.2
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    • pp.138-143
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    • 2000
  • The establishment of a practical ultra-precision grinding technique using Diamond and CBN wheels is one of the major key technolo-gies to improve production techniques for machine-to-difficult materials without finishing process such as lapping and polishing. But the special efficient dressing technique for ultra-fine grit type grinding wheels to stabilize the grinding ability was not developed. Recently electrolytic in-process dressing technique is proposed to ultra-fine grit type metal bonded diamond wheels to protrude abra-sives continuously from the tool surface. This technology can be widely used to surface grinding and cylindrical grinding but cannot be used efficiently to internal grinding because of the electrode attachment trouble. This paper describes the effect of interval type electrolytic dressing as proposed newly to cast iron bonded diamond wheel for efficient internal grinding with mirror type high quality ground surface.

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Optical Properties of Aspheric Glass Lens using DLC Coated Molding Core (성형용 코어면 DLC 코팅에 의한 비구면 Glass렌즈 광학적 특성에 관한 연구)

  • Kim, Hyun-Uk;Cha, Du-Hwan;Lee, Dong-Gil;Kim, Sang-Suk;Kim, Hye-Jeong;Kim, Jeong-Ho;Jeong, Sang-Hwa
    • Korean Journal of Optics and Photonics
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    • v.18 no.5
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    • pp.362-366
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    • 2007
  • In this research, the optimal grinding condition has been obtained by design of experiment (DOE) fur the development of aspheric lens for the 3 Mega Pixel, 2.5x optical zoom camera-phone module. Also, the tungsten carbide (WC) mold was processed by the method of ultra precision grinding under this optimal grinding condition. The influence of diamond-liked carbon (DLC) coating on form accuracy (PV) and surface roughness (Ra) of the mold was evaluated through measurements after DCL coating using ion plating on the ground mold. Also, aspheric glass lenses were molded, some before DLC coating of the mold and some after the DLC coating. The optical characteristics of each sample, molded by the different molds, were compared with each other.

A Study on Grinding Characteristics of Aspherical Glass Lens core of High-pixel Digital Camera in Diamond Grinding Process (고화소 디지털 카메라 비구면 Glass렌즈 초정밀연삭 특성에 관한 연구)

  • 현동훈;이승준
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.12 no.2
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    • pp.31-36
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    • 2003
  • Electronic or measuring instruments equipped with aspherical lens have recently been used since aspherical lens is more effective than spherical one. for the mass production of aspherical lenses, specific molds with precisely machined cores should be prepared. Some researches on the aspherical lens machining have been carried out to date. However, ultra-precise finding of aspherical or mold core has not been fully studied. In this study, the ultra-precise grinding and evaluating system were established to investigate the finding characteristics of aspherical lenses. Unlike conventional grinding process, since a highly-precise lathe were operated in a clean room without vibration the experimental results can be very useful for further studies on ultra-precise grinding process.

Study on Ultra-precision Grinding of EL-Max Material for Hot Press Molding (핫 프레스 성형용 EL-Max 소재 초정밀 연삭 가공에 관한 연구)

  • Park, Soon Sub;Ko, Myeong Jin;Kim, Geon Hee;Won, Jong Ho
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.12
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    • pp.1267-1271
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    • 2012
  • Demand for optical glass device used for lighting could increase rapidly because of LED lighting market growth. The optical glass devices that have been formed by hot press molding process the desired optical performance without being subjected to mechanical processing such as curve generation or grinding. EL-Max material has been used for many engineering applications because of their high wear resistance, high compressive strength, corrosion resistant and very good dimensional stability. EL-Max is very useful for a glass lens mold especially at high temperature and pressure. The performance and reliability of optical components are strongly influenced by the surface damage of EL-Max during grinding process. Therefore, the severe process condition optimization shall be necessary for the highly qualified EL-Max glass lens mold. To get the required qualified surface of EL-Max, the selection of type of the diamond wheel is also important. In this paper, we report best grinding conditions of ultra-precision grinding machining. The grinding machining results of the form accuracy and surface roughness have been analyzed by using Form Talysurf and NanoScan.

Ultra-precision finishing characteristics of Coated Chrome steel (크롬 도금 강의 초정밀 연마 가공특성)

  • 배명일
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.7 no.6
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    • pp.97-101
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    • 1998
  • In this study, The ultra-precision finishing system is applicable to all kind of the cylnderical workpiece products fast and easy. This system was applied to chrome coated steel to investigate the characteristic of grinding; (1) 3$mu extrm{m}$ of abrasive film is not use for grinding performance. (2) Grinding condition of coated chrome steel would set up differently, in 30~12${\mu}{\textrm}{m}$, in 9~5${\mu}{\textrm}{m}$. (3) The surface roughness of chrome coated steel was about Ra 0.0009${\mu}{\textrm}{m}$ in abrasive grain size 5${\mu}{\textrm}{m}$.

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