• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.617-620
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. Is such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. We will examine the control performance and stability before manufacturing the real apparatus by using MATLAB SIMULINK based or pre-designed controller and system modeling.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.178-178
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• 2009

High-density optical information storing equipment, which is using Blu-ray, is the next generation information storing equipment that has about form six times to thirty-five times capacities. and high-density optical information storing equipment uses high NA(Numerical Aperture) aspheric glass objective lens as optical pick-up equipment to record and recognize high-density date. Generally this objective lens is developed and produced through a way of GMP(Glass Molding Press) that uses molding core that is performde by Ultra precision grinding, but grinding performing that has high-accuracy is very difficult because objective lens form is high NA. In this research, we preformed Ultra precision turning, using single crystal diamond bite, about WC(Co 0.5%), sintering brittleness material that is used molding core's material for GMP. and we confirmed aspheric glass lens compression of deformities molding core's Ultra precision turning possibility by measuring surface roughness(Ra) and processing surface's condition.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.11
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• pp.983-988
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• 2015

This paper details a new ultra-precise turning method for increasing surface quality, "Multi Point B Axis Control Method." Machined surface error is minimized by the compensation machining process, but the process leaves residual chip marks and surface roughness. This phenomenon is unavoidable in the diamond turning process using existing machining methods. However, Multi Point B axis control uses a small angle (< $1^{\circ}$) for the unused diamond edge for generation of ultra-fine surfaces; no machining chipping occurs. It is achieved by compensated surface profiling via alignment of the tool radial center on the center of the B axis rotation table. Experimental results show that a diamond turned surface using the Multi Point B axis control method achieved P-V $0.1{\mu}m$ and Ra 1.1nm and these ultra-fine surface qualities are reproducible.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.4
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• pp.44-48
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• 2006

Recently, demand the ultra precision product which is increasing rapidly is used extensively frontier industry field such as semi-conductor, computer, aerospace, precision machine. Ultra precision processing is the portion that is very needed to NT in the field of mechanical engineering. The latest date, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts those are connected with these industrial fields. Specially, require motion accuracy of high resolution of nm order in stroke of hundreds millimeters according as diameter of processing object great and processing accuracy rises. In this case ,the response speed absolute delay because inertial mass of moving part is very large. Therefore, real time motion error compensation becomes very hardly. In this paper, we used ultra precision cutting unit(UPCU) to cope such problem. a UPCU is designed and tested to obtain sub-micrometer from accuracy in diamond turning of flat surfaces. The thermal growth spindle error is compensated for real time using a UPCU driven by piezoelectric actuator along with a laser encoder displacement sensor.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.12 no.6
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• pp.44-49
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• 2003

To obtain the surface roughness with range from 10nm to 1nm we need the study of ultra-precision machine, cutting condition, and materials. In this paper, the optimal cutting conditions for getting mirror surface of aluminum alloy have been examined experimentally by using ultra-precision turning machine and sing1e crystal diamond tool. In generally, the cutting conditions such as feed rate and depth of cut have effect on the surface roughness in ultra-precision turning. The result of surface roughness was measured by the ZYGO New View 200. Therefore, The surface roughness and cutting conditions has been clarified. The smooth surface of aluminum alloy less than 1nm RMS, 1nm Rmax can be obtained by the ultra-precision cutting.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• Journal of Industrial Technology
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• v.14
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• pp.119-125
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• 1994

Ultra-precision machine tool equipped with the diamond bite tip is used to machine optical products, drums of VTR or computer hard disk. It needs nano technology in the surface roughness of workpiece. To perform the nano scale machining, ultra-precision machine tool must be designed and manufactured in consideration of the vibration characteristics. In this paper, using the finite element analysis, we investigate the modal parameters of the ultra-precision machine tool structures, which use cast iron, granite and alumina ceramic for the bed materials. To verify the numerical results, we manufacture a model of ultra-precision machine tool using granite bed and perform impulse test. Through the theoretical and experimental analyses, we could compare and estimate the vibration characteristics of the three models for the ultra-precision machine tools.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.54-59
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• 2005

Recently, the ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. The guide mechanism which consisted of flexure hinges is analyzed by Finite Element Method. And we derived the transfer function of the system in 1st order system from step responses according to the magnitude. We performed simulation for the model to tune the control gain and applied the gains to the developed system. Experimental results found that the stage can be controlled in 5 nm resolution by PID controller.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.179-179
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• 2010

본 연구에서는 무안경식 3 차원 입체영상 기술에 쓰이는 렌티큘러 렌즈의 제작공정 중 오차(Error)로 작용할 수 있는 몇 가지 변수를 가정하였고 이러한 변수의 오차에 의해 좌우되는 가장 중요한 성능인자인 광학적 상호간섭 (Cross-Talk)을 최소화하도록 연구를 수행하였다. 이를 위해서 초정밀절삭가공과 UV경화법을 사용하였고 광학적 상호간섭 (Cross-Talk)에 가장 큰 영향을 주는 피치공차 (Allowance)를 ${\pm}0.5{\mu}m$내로 줄여서 3차원 입체감을 향상시킬 수 있음을 확인하였다.