• Journal of the Korean Society for Precision Engineering
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• v.31 no.11
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• pp.969-974
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• 2014

Previously fabricated electronic devices were used for vacuum manufacturing processes such as conventional semiconductor manufacturing. However, they are difficult to apply to continuous processes such as roll-to-roll printing, which results in very high device manufacturing and processing costs. Therefore, many developers have been interested in applying continuous processes to contact printing or noncontact printing technologies and they proposed various continuous printing techniques instead of conventional batch coating. In this paper, we proposed improved gravure offset printing process as one of the contact printing technique. We used etching pattern geometry with soft core blanket roll for printing of ultra fine line below the 10um.Using this technique we obtained flexible metal grid mesh film as transparent conductive film.

• Electrical & Electronic Materials
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• v.4 no.4
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• pp.312-321
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• 1991

본 논문은 3단배기계의 구성으로 $10^{-7}$[Torr]이하의 진공도를 얻을 수 있는 초고진공시스템을 시제작하고 이에 대한 동적 특성과 유지 및 관리방법에 대하여 기술하였다. 초고진공배기계의 구성에 있어서는 진공재료와 부품의 선정, 펌프조합, 다단식 펌프조합, 탈가스처리와 잔류기체의 성분분석이 대단히 중요함이 밝혀졌다. 또한 진공용기의 내표면의 공기중에의 노출은 배기성능을 대단히 저하시키게 된다. 본 연구결과와 관련기술은 각종 실험장치의 배기계의 최적화 설계는 물론이고 다용도로 이용될 것이다.

• Proceedings of the KSR Conference
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• 2011.10a
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• pp.1157-1161
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• 2011

Parametric study has been conducted to calculate the capacity of vacuum pump system that will be used to maintain the pressure of the tube system under atmosphere level. Recently many railroad researchers pay attention to the tube train system as one of the super high speed transportation system. To achieve the ultra super high speed, the inside of tube system should be maintained the low pressure level. In the low pressure environment, it is well known that air resistance of train is drastically decreased. Vacuum pump system will be used to make the low pressure level of tube system, exhaust the leakage air and supplement additional vacuum pumping. Qualitative and quantitative study has been conducted to review the effects of major parameters concerned with the capacity of vacuum pump system. As a results of these studies, we get the lump capacity of vacuum pump for various parameters. These results can be used to analyse the effects of the reduction of air resistance.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.347-353
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• 2006

A helium permeation type standard leak calibration system has newly developed by using dynamic gas expansion method. The measurement range was extended lower to $10^{-6}$ Pa L/s for participating CCM (Consultative Committee for Mass and Related Quantities) standard leak key comparison. For the system, pressure ratios of high and ultra-high vacuum chamber and porous plug conductance for helium gas were determined. By using the system, a permeation type standard leak of $5.6{\times}10^{-4}$ Pa L/s range was calibrated. The calibration result showed that the difference between standard commercial leak was 11.1 %.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.293-293
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• 2014

Over last decade InGaN alloy structures have become the one of the most promising materials among the numerous compound semiconductors for high efficiency light sources because of their direct band-gap and a wide spectral region (ultraviolet to infrared). The primary cause for the high quantum efficiency of the InGaN alloy in spite of high threading dislocation density caused by lattice misfit between GaN and sapphire substrate and severe built-in electric field of a few MV/cm due to the spontaneous and piezoelectric polarizations is generally known as the strong exciton localization trapped by lattice-parameter-scale In-N clusters in the random InGaN alloy. Nonetheless, violet-emitting (390 nm) conventional low-In-content InGaN/GaN multi-quantum wells (MQWs) show the degradation in internal quantum efficiency compared to blue-emitting (450 nm) MQWs owing higher In-content due to the less localization of carrier and the smaller band offset. We expected that an improvement of internal quantum efficiency in the violet region can be achieved by replacing the conventional low-In-content InGaN/GaN MQWs with ultra-thin, high-In-content (UTHI) InGaN/GaN MQWs because of better localization of carriers and smaller quantum-confined Stark effect (QCSE). We successfully obtain the UTHI InGaN/GaN MQWs grown via employing the GI technique by using the metal-organic chemical vapor deposition. In this work, 1 the optical and structural properties of the violet-light-emitting UTHI InGaN/GaN MQWs grown by employing the GI technique in comparison with conventional low-In-content InGaN/GaN MQWs were investigated. Stronger localization of carriers and smaller QCSE were observed in UTHI MQWs as a result of enlarged potential fluctuation and thinner QW thickness compared to those in conventional low-In-content MQWs. We hope that these strong carrier localization and reduced QCSE can turn the UTHI InGaN/GaN MQWs into an attractive candidate for high efficient violet emitter. Detailed structural and optical characteristics of UTHI InGaN/GaN MQWs compared to the conventional InGaN/GaN MQWs will be given.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.27 no.3
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• pp.158-168
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• 2015

To create an ultra-high vacuum state at the KSTAR, the temperature of plasma facing component and vacuum vessel should be maintained at $300^{\circ}C$ and $110^{\circ}C$ respectively at a baking phase. The purpose of this research is obtaining the target baking temperatures. Experiments were performed to investigate the temperature characteristics of PFC and VV at the baking phase. Thermal network analysis was used to find heat transfer rates among PFC, VV and other components, and this analysis was verified by using the experimental data. The required heating energy of the PFC and the heating and cooling energy of the VV for the target baking temperatures were found to be 346 kW, 28 kW, and 136 kW, respectively.

• Mass Spectrometry Letters
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• v.2 no.2
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• pp.41-44
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• 2011

Molecular compositions of two types of heavy oil were studied using positive atmospheric pressure photoionization (APPI) Fourier transform ion cyclotron resonance mass spectrometry (FT-ICR MS). Vacuum gas oil (VGO) was generated from vacuum distillation of atmospheric residual oil (AR), and slurry oil (SLO) was generated from catalytic cracking of AR. These heavy oils have similar boiling point ranges in the range of 210-$650^{\circ}C$, but they showed different mass ranges and double-bond equivalent (DBE) distributions. Using DBE and carbon number distributions, aromatic ring distributions, and the extent of alkyl side chains were estimated. In addition to the main aromatic hydrocarbon compounds, those containing sulfur, nitrogen, and oxygen heteroatoms were identified using simple sample preparation and ultra-high mass resolution FT-ICR MS analysis. VGO is primarily composed of mono- and di-aromatic hydrocarbons as well as sulfur-containing hydrocarbons, whereas SLO contained mainly polyaromatic hydrocarbons and sulfur-containing hydrocarbons. Both heavy oils contain polyaromatic nitrogen components. SLO inludes shorter aromatic alkyl side chains than VGO. This study demonstrates that APPI FT-ICR MS is useful for molecular composition characterization of petroleum heavy oils obtained from different refining processes.

• Composites Research
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• v.30 no.1
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• pp.7-14
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• 2017

In this paper, the inter-lamina shear strength (ILSS) of multi-wall carbon nanotube (MWNT) reinforced carbon fiber reinforced plastics (CFRP) and thin-ply composites were verified under low earth orbit (LEO) space environment. CFRP, MWNT reinforced CFRP, thin-ply CFRP and MWNT reinforced thin-ply CFRP were tested after aging by using accelerated ground simulation equipment. The used ground simulation equipment can simulate high vacuum ($2.5{\times}10^{-6}torr$), atomic oxygen (AO, $9.15{\times}10^{14}atoms/cm^2{\cdot}s$), ultraviolet light (UV, 200 nm wave length) and thermal cycling ($-70{\sim}100^{\circ}C$) simultaneously. The duration of aging experiment was twenty hours, which is an equivalent duration to that of STS-4 space shuttle condition. After the aging experiment, ILSS were measured at room temperature ($27^{\circ}C$), high temperature ($100^{\circ}C$) and low temperature ($-100^{\circ}C$) to verify the effect of operation temperature. The MWNT and thin-ply shows good improvement of ILSS at ground condition especially with the thin-ply. And after LEO exposure large degradation of ILSS was observed at MWNT added composite due to the thermal cycle. And the degradation rate was much higher under the high temperature condition. But, at the low temperature condition, the ILSS was largely recovered due to the matrix toughening effect.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.392-392
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• 2010

In this study, high-speed chemical dry thinning process of Si wafer and evolution of surface roughness were investigated. Direct injection of NO gas into the reactor during the supply of F radicals from $NF_3$ remote plasmas was very effective in increasing the Si thinning rate due to the NO-induced enhancement of surface reaction but thinned Si surface became roughened significantly. Addition of Ar gas, together with NO gas, decreased root mean square (RMS) surface roughness of thinned Si wafer significantly. The process regime for the thinning rate enhancement with reduced surface roughness was extended at higher Ar gas flow rate. Si wafer thinning rate as high as $22.8\;{\mu}m/min$ and root-mean-squared (RMS) surface roughness as small as 0.75 nm could be obtained. It is expected that high-speed chemical dry thinning process has possibility of application to ultra-thin Si wafer thinning with no mechanical damage.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.39-39
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• 1999

The KSTAR (Korea Superconducting Tokamak Advanced Research) tokamak is a nuclear fusion experimental device for a long pulse/steady-state plasma operation, adopting fully superconducting magnets. In accordance with completion of the basic design of the torus vacuum vessel and the enclosing cryostat, the vacuum pumping and gas fueling basic design has been developed to fulfil the physics requirements. The ultra-high vacuum pumping and sophisticated gas fueling system of the machine is essential to achieve such roles for optimized plasma performance and operation. Recently the vacuum exhaust system using dedicated pumping ports for the vacuum vessel and cryostat has been modified to meet more reliable and successful performance of the KSTAR[Fig. 1].In order to achieve the required base pressure of 5 x 10-9 torr, the total impurity load to the vessel internal is limited to ~5 x 10-5 torr-1/x, while the cryostat base pressure is kept as ~5 x 105 torr to mitigate the thermal load applied to the superconducting magnets. Each KSTAR fueling system will be separately capable of fueling gas at a rate of 50 torr-1/x, consistent with the given pumping throughput. In order to initiate a plasma discharge in KSTAR, the vacuum vessel is filled to a gas pressure of few 10-6 to few 10-4 torr, and additional gas injection is required to maintain and increase the plasma density during the course of the discharge period.