• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.6 no.3
• /
• pp.53-57
• /
• 2007

This paper presents a geometrical error compensation of tool alignment for B axis controlled machine. In precision machining, tool alignment is crucial parameter for machined surface. To decrease tool alignment error, plus tilted tool from B axis center is touched to reference work piece and checked the deviation from original position. Same process is performed in minus tilt. Comparing these 2 touch positions, wheel alignment error in X axis and Z axis can be calculated on B axis center. Experimental results show that this compensation method is efficient to correct tool alignment.

• Proceedings of the KIEE Conference
• /
• 2002.11c
• /
• pp.309-312
• /
• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2003.11a
• /
• pp.649-654
• /
• 2003

This paper is focused on the research of the ultra precision linear motor by using piezo stack actuators. The development of linear motor which can be controlled nano or micro scale is necessary for the precision manufacturing. Self-moving-cell principle is used for the design of linear motor Self-moving-cell linear motor is consisted of three cell structures, and each cell has two shells and one piezo-stack actuator. Each cell can do clamping and moving by two shell structures. The shell structure deformation by piezo stack actuator can move the linear motor by losing the clamping between the shall and guideway. This paper presents the design, manufacturing and test of the motor.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1994.10a
• /
• pp.92-97
• /
• 1994

The there axis CNC grinding machine tool for ultra-precison mirror surface grinding of advanced materials such as ceramics and other hard and brittle materials was designed and manufactured. The grinding machine is composed of the air spindle, the high damping resin concrete bed, and the three axis CNC controller with the high resolution AC servo motor. To investigate the dynamic properties of the grinding machine, the natural frequencies of the spindle and the headstock were experimentally measured. The truing method using the break truer to revise the shape of the metal bonded diamond wheel was developed. Form the results of the machining using the prototype three axis CNC grinding machine manufactured, the mirror surface were achieved.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.151-152
• /
• 2006

Nowadays, great attention has been shown to the question of ultrasonic linear motor for accomplishing the high positioning accuracy and high driving force in the semiconductor and optical industry. Ultrasonic linear motors have many advantages such as simple structure, quick response, ability to maintain position without energy consumption, and electromagnetic effect. And BLT has attracted attention to accomplish large vibration amplitude and large mechanical force. Authors designed and developed the new type of ultra sonic linear motor with multi support mechanism, achieved 75N of output force and 0.45m/s of velocity.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.13 no.6
• /
• pp.15-22
• /
• 2014

With a conventional positioning apparatus, it is very difficult simultaneously to achieve desired driving ranges and precision levels at the sub-micrometer level. Generally, a lead screw and friction drive have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• Journal of the Korean Society for Precision Engineering
• /
• v.29 no.12
• /
• pp.1267-1271
• /
• 2012

Demand for optical glass device used for lighting could increase rapidly because of LED lighting market growth. The optical glass devices that have been formed by hot press molding process the desired optical performance without being subjected to mechanical processing such as curve generation or grinding. EL-Max material has been used for many engineering applications because of their high wear resistance, high compressive strength, corrosion resistant and very good dimensional stability. EL-Max is very useful for a glass lens mold especially at high temperature and pressure. The performance and reliability of optical components are strongly influenced by the surface damage of EL-Max during grinding process. Therefore, the severe process condition optimization shall be necessary for the highly qualified EL-Max glass lens mold. To get the required qualified surface of EL-Max, the selection of type of the diamond wheel is also important. In this paper, we report best grinding conditions of ultra-precision grinding machining. The grinding machining results of the form accuracy and surface roughness have been analyzed by using Form Talysurf and NanoScan.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.599-603
• /
• 2003

This paper present an error compensation system and On-Machine Measurement(OMM) system for improving the machining accuracy of ultra-precision lathe. The Fast-Tool-Servo(FTS) driven by a piezoelectric actuator is applied for error compensation system. The controller is implemented on the 32bit DSP for feedback control of piezoelectric actuator. The control system is designed to compensates three kinds of machining errors such as the straightness error of X-axis slide, the thermal growth error of the spindle. and the squareness between spindle and X-axis slide. OMM is preposed to measure the finished profile of workpiece on the machine-tool using capacitive sensor with highly accurate ruby tip probe guided by air bearing. The data acquisition system is linked to the CNC controller to get the position of each axis in real-time. Through the experiments, it is founded that the thermal growth of spindle and tile squareness error between spindle and X-axis slide influenced to machining error more than straightness error of X-axis slide in small travel length. These errors were simulated as a sinusoidal signal which has very low frequency and the FTS could compensate the signal less than 30 m. The implemented OMM system has been tested by measuring flat surface of 50 mm diameter and shows measurement error less than 400 mm

• Journal of the Korean Society for Precision Engineering
• /
• v.29 no.3
• /
• pp.253-260
• /
• 2012

In nowadays, the infrared optics is frequently employed to various fields such as military, aerospace, industry and medical. To develop the infrared optics, special glasses which can transmit infrared wave are required. Ge(Germanium), Si(silicon), and fluoride glasses are typically used for material of the infrared optics. Compared with Ge and Si glasses, fluoride glasses have high transmittance in infrared wavelength range. Additionally, UV(ultraviolet) and visible light can be transmitted through fluoride glasses. There characteristics of fluoride glasses makes it possible to evaluate optical performance with generally used visible testing equipment. In this paper, we used design of experiment to find ultra precision machining characteristic of Ge and fluoride glasses and optimized machining process to obtain required form accuracy of PV(Peak to Valley) $0.2\;{\mu}m$.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.11 s.176
• /
• pp.135-141
• /
• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.