• Title/Summary/Keyword: Ultra Precision Processing

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A Study on the Characteristics of a Wafer-Polishing Process at Various Machining and Oscillation Speed (웨이퍼 폴리싱 공정의 회전속도와 진폭속도에 따른 가공특성 연구)

  • Lee, Eun-Sang;Lee, Sang-Gyun;Kim, Sung-Hyun;Won, Jong-Koo
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.1
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    • pp.1-6
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    • 2012
  • The polishing of silicon wafers has an important role in semiconductor manufacturing. Generally, getting a flat surface such as a mirror is the purpose of the process. The wafer surface roughness is affected by many variables such as the characteristics of the carrier head unit, operation, speed, the pad and slurry temperature. Optimum process conditions for experimental temperature, pH value, down-force, slurry ratio are investigated, time is used as a fixed factor. This study carried out a series of experiments at varying platen, chuck rpm and oscillation cpm taking particular note of the difference between the rpm and the affect it has on the surface roughness. In this experiment determine the optimum conditions for polishing silicone wafers.

A Study of PCL and PET ablation by ultrashort laser (극초단 레이저를 이용한 PCL 및 PET 가공에 대한 연구)

  • Choi, Hae-Woon;Shin, Hyun-Myung
    • Laser Solutions
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    • v.11 no.4
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    • pp.1-6
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    • 2008
  • This paper describes microscale laser structuring of electrospun(ES) PCL and PET nanofiber meshes. Electrospinning produces non-woven meshes of synthetic or natural materials fibers with diameters ranging from micron down to the nanometer scales that are advantageous for the supporting the growth of the small scale structures. Ultrashort laser found to be effective on the fabrication of engineeredtissue scaffold with minimum heat affect and ultra precision ablation patterns. The affect of energy range for ablation quality was analyzed and ablation characteristics of PCL and PET were compared.

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DLC Coating Effect of WC Core Surface for Glass Molding Lens (비구면 Glass 렌즈 성형용 초경합금(WC) 코어의 DLC 코팅 효과)

  • Kim, Hyun-Uk;Jeong, Sang-Hwa;Park, Yong-Pil;Kim, Sang-Suk;Kim, Hye-Jeong;Kim, Jeong-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.11
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    • pp.1050-1054
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    • 2006
  • There have been intensive and continuous efforts in the field of DLC coating process because of their feature, like high hardness, high elasticity, abrasion resistance and chemical stability and have been applied widely the industrial areas. In this research, optimal grinding condition was investigated using Microlens Process Machine for the development of aspheric glass lens which is to be used for mobile phone module with 3 mega pixel and 2.5X optical zoom, and tungsten carbide(WC) mold cote was manufactured using high performance ultra precision machining and the effects of DLC coating on the form accuracy(PV) and surface roughness(Ra) of WC mold core was evaluated.

A Prediction of Surface Roughness on the PCD Tool Turned Al5083 by using Regression Analysis (Al5083 PCD 선삭가공에서 회귀분석에 의한 표면거칠기 예측)

  • Lee, Sun-Woo;Lee, Dong-Ju
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.6
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    • pp.69-74
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    • 2012
  • Surface roughness is widely used as an index for processing degree of accuracy. Recently, regression analysis to predict the machining results are actively used to characterize a cutting operations. In the past, diamond machining had been used for ultra precision cutting operation, but now industrial diamond tools like PCD(Polycrystalline Diamond) have been widely used in ultraprecision machining of nonferrous metals. In this study, the authors focus on the effect of PCD tool property on the surface roughness of Al5083 aluminum alloy after cutting process by CNC operated lathe. Based on the regression analysis approach on a surface roughness data obtained by experiment, predictive analysis of surface roughness is effective to achieve better surface quality.

Ultra-precision Positioning By Using Coherence of White Light (백색광의 제한 간섭성을 이용한 초정밀 위치결정)

  • Park, Hyun-Goo;Kang, Min-Gu;Kim, Seung-Woo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.21 no.6
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    • pp.995-1001
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    • 1997
  • In this paper, a new positioning method with incoherence of white light is described and practically implemented to attach VCR heads on a drum very accurately. This method utilizes the Michelson Interferometer which uses white light with short coherence length as the light source to generate interference fringes only in case the optical path difference is shorter than about 2.mu.m. The course position of VCR heads and the fine are determined by appearance and visibility of interference fringes, respectively. The appearance are detected by an image processing technique using FFT(Fast Fourier Transform).

Parameter estimation of weak space-based ADS-B signals using genetic algorithm

  • Tao, Feng;Jun, Liang
    • ETRI Journal
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    • v.43 no.2
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    • pp.324-331
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    • 2021
  • Space-based automatic dependent surveillance-broadcast (ADS-B) is an important emerging augmentation of existing ground-based ADS-B systems. In this paper, the problem of space-based ultra-long-range reception processing of ADS-B signals is described. We first introduce a header detection method for accurately determining the pulse position of a weak ADS-B signal. We designed a signal encoding method, shaping method, and fitness function. We then employed a genetic algorithm to perform high-precision frequency and phase estimations of the detected weak signal. The advantage of this algorithm is that it can simultaneously estimate the frequency and phase, meaning a direct coherent demodulation can be implemented. To address the computational complexity of the genetic algorithm, we improved the ratio algorithm for frequency estimation and raised the accuracy beyond that of the original ratio algorithm with only a slight increase in the computational complexity using relatively few sampling points.

A Study on the Design and Implementation of Contact Resistance Measurement System and Andoroid OS App. (접촉저항 측정 시스템 및 안드로이드 운영체제 앱 설계 및 구현에 관한 연구)

  • Boo, Ra-Yun;Choi, Jung-Hun;An, Byung-Ho;Lee, Myung-Eui
    • Proceedings of the Korea Information Processing Society Conference
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    • 2022.11a
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    • pp.188-190
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    • 2022
  • 본 연구에서는 정전류(Constant Current) 방식에 전압강하법을 이용하여 접촉저항 측정 시스템을 구현하고 측정값을 블루투스 통신을 통해 안드로이드 운영체제에서 확인할 수 있도록 앱을 개발한다. 측정가능한 범위로 0 Ω에서 10.24 Ω 사이의 접촉 저항을 MCP3424 18 bit 분해능 ADC를 사용하여 측정할 수 있도록 설계하였다. 기존에는 반고정 저항과 별도의 전류계를 이용하여 정전류를 설정하였으나, 본 연구에서는 측정의 정밀도 및 편리성 개선을 위해 0.1% 고정밀 고정저항을 병렬로 4개 연결하여 구현하였으며, 또한 1:1 Unity Gain Buffer를 구성하고 Ultra High Precision Z-Foil 방식으로 오차 0.01%, 온도 계수 0.05 ppm/℃ 저항을 사용하여 실제로 측정한 샘플 저항 값의 결과를 확인하였다.

Development of water cropping machine for slab pattern processing (석판재용 물다듬 패턴무늬 가공 전용기 개발)

  • Kim, Kyoung-Chul;Ko, Min-Hyuc;Kim, Jong-Tae;Lee, Ji-Su;Ryuh, Beom-Sahng
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.9
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    • pp.4130-4135
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    • 2013
  • This paper is a special-purpose machine studies for processing various patterns on the surface of the stone. We have developed a special-purpose machine that can be applied in various patterns upon the surface treatment of the stone with the water jet. The special-purpose machine is Configured of Transfer mechanism, motion controller, multi-nozzle mechanism, ultra high pressure water control system and S/W. We conducted a performance evaluation experiments of the pattern. We have developed a special-purpose machine with a precision of machining error ${\pm}0.5mm$ and pattern processing of various types.

Evaluation of Mass Variation of Aspheric Glass tens Using Resonant Ultrasound Spectroscopy (비구면 렌즈의 질량변화 평가를 위한 RUS의 적용)

  • Heo, Uk;Im, Kwang-Hee;Yang, In-Young;Kim, Ji-Hoon
    • Journal of the Korean Society for Nondestructive Testing
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    • v.27 no.2
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    • pp.183-189
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    • 2007
  • Ultra precise processed parts are required together with the development of optoelectronics industry. As important parts of optoelectronics industry, there are ferrule of optical connector and lens for optical devices. In particular, the lens requires high reliability with high precision without including flaws. These optical modules need ultra precise processing in order to reduce the loss of light sources and various nondestructive inspections are carried out in the finishing stage to separate good and bad quality products. Therefore, it was analyzed through the characteristics of response of amplitude and resonant frequency according to the mass variations of aspheric lens that is used currently in laser printers.

Adaptive Multi-target Estimation Algorithm in an IR-UWB Radar Environment (IR-UWB 레이더 환경에서 적응형 다중 목표물 추정 알고리즘)

  • Yeo, Bong-Gu;Lee, Byung-Jin;Kim, Sueng-Woo;Youm, Mun-Jin;Kim, Kyung-Seok
    • Journal of Satellite, Information and Communications
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    • v.11 no.4
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    • pp.81-88
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    • 2016
  • In this paper, we propose an adaptive multi-target estimation algorithm using the characteristics of signals in the IR-UWB(Impulse-Radio Ultra Wideband) radar system, which is attracting attention because it has good transparency, robustness to the indoor environment, and high precision positioning of tens of centimeters. We proposed an algorithm that estimates multiple peaks with the characteristic that the signal reflected by the target has a peak. To verify the performance of these algorithms, multiple targets were placed in front of the radar and the existing technique and the multi - target estimation algorithm were compared. The location of the targets is estimated in real time with one transmitting antenna and one receiving antenna. The number of estimates can be increased compared with the existing peak signal derivation method, and multiple targets can be derived. The conventional technique estimates only one target, which results in a mean square error of 1 while a multi - target estimation algorithm yields a result of about 0.05. The proposed method is expected to be able to apply multiple targets to the estimation and application in one IR-UWB module environment.