• Title/Summary/Keyword: Ultra Precision Metrology

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Ultrafast Femtosecond Lasers: Fundamentals and Applications (펨토초 레이저의 원리 및 응용)

  • Kim, Young-Jin;Kim, Yun-Seok;Kim, Seung-Man;Kim, Seung-Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.6
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    • pp.7-16
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    • 2010
  • Physical fundamentals of ultrashort femtosecond lasers are addressed along with emerging applications for precision manufacturing and metrology. Femtosecond lasers emit short pulses whose temporal width is in the range of less than a picosecond to a few femtoseconds, thereby enabling extremely high peak-power machining with less thermal damages. Besides, the broad spectral bandwidth of femtosecond lasers constructed in the form of frequency comb permits absolute distance measurements leading to ultraprecision positioning control and dimensional metrology.

The Study of the Fabrication of the Ultra-Precision Cylinder by the Compensation Process (보정 가공을 통한 초정밀 원통 가공에 대한 연구)

  • Lee, Jung-Chul
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.5
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    • pp.122-128
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    • 2013
  • This paper describes the on-machine surface form evaluation of an ultra-precision cylinder for the fabrication by the compensation process. In this study, the surface form error of an ultra-precision cylinder, which was fabricated by the ultra-precision diamond turning machine with a single diamond cutting tool, was evaluated by using two capacitance-type displacement probes. Based on the measurement results, the compensation process was conducted. Since the measurement was carried out on the machine without re-mounting of the workpiece, additional fabrication for compensation process can be conducted precisely.

A New Full-Aperture Reflective Null Measuring Method for Conformal Dome

  • Yan, Xudong;Wang, Junhua;Xu, Min
    • Journal of the Optical Society of Korea
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    • v.20 no.1
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    • pp.174-179
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    • 2016
  • In this paper, a novel full-aperture reflective null measuring method is proposed to detect the transmission wavefront of a conformal dome surface. An aspheric compensator is designed and placed behind the dome to reflect the aspheric testing wave back to the same path. To ensure the feasibility of this method, tolerance analysis is conducted, and guidance to assembly is given accordingly. The accuracy of this method is verified to be λ/30 (λ =3.39 μm) by Monte Carlo algorithm. In addition, the influence of different error factors, including the thickness error and decenter error of the dome, on the testing wavefront is analyzed. Simulation and experiment indicate that this method is practical and simple, and can measure the conformal domes precisely and comprehensively.

Unequal-path Low-coherence Interferometry Using Femtosecond Pulse Lasers for Surface-profile Metrology (펨토초 레이저를 이용한 형상 측정용 비동일 광경로 저결 맞음 간섭계)

  • Oh, Jeong-Seok;Kim, Seung-Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.9 s.186
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    • pp.102-110
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    • 2006
  • We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

Absolute Distance Measurement using Synthetic Wavelength of Femto-second Laser (펨토초 레이저의 합성파를 이용한 절대거리 측정)

  • Kim Yun-Seok;Jin Jong-Han;Joo Ki-Nam;Kim Seung-Woo
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.569-572
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    • 2005
  • Technological feasibility of using recently-available femtosecond ultra short pulse lasers for advanced precision length metrology is investigated with emphasis on absolute distance measurements with $10{\mu}m$ ??resolution over extensive ranges. The idea of using femtosecond lasers for the measurement of absolute distances is based on the fact that a short pulse train is a mode-locked combination of discrete monochromatic light components spanning a wide spectral bandwidth. The synthetic wavelength is created from the repetition frequency, $f_r$ of the femtosecond laser and for more precise resolution, higher-order harmonics of the repetition frequency may be selected as the synthetic wavelength by using appropriate electronic filters.

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Unequal-path Low-coherence Interferometry Using Femtosecond Pulse Lasers (펨토초 레이저를 이용한 비동일 광경로 저결맞음 간섭계)

  • Oh J.S.;Kim S.W.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.204-207
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    • 2005
  • We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source fer enhanced precision surface profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows performing unequal-path scanning interferometry that is not feasible with white light. Second, high spatial coherence of femtosecond pulse lasers enables to test large size optics in non-symmetric configurations with relatively small size reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

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