• 한국정밀공학회지
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• 제19권1호
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• pp.99-106
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• 2002

For the development of a ultra-precision CNC polishing system including on-machine measurement system, we study a corrective polishing algorithm. We calculated unit removal profiles for various flat type polishing tools and polishing tool positions. Using these results we simulate the corrective polishing process based on dwell time control. We calculate dwell time distributions and residual error of the polishing simulation method and the FFT calculation method. We test corrective polishing algorithm with an optical glass. The target removal shape is a sine wave that has amplitude 0.3 micro meters. We find this polishing process has a machining resolution of nanometer order and is effective for sub-micrometer order machining. This result will be used for the software development of the CNC polishing system.

• 한국기계가공학회지
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• 제11권5호
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• pp.76-81
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• 2012

The continuing demand for increasingly slimmer and brighter liquid crystal display(LCD) panels has led to an increased focus on the role of the light guide panels(LGPs) or optical films that are used to obtain diffuse, uniform light from the backlight unit(BLU). And the most basic process in the production of such BLU components is the micromachining. LCD BLUs comprise various optical elements such as a LGP, diffuser sheet, prism sheet, and protector sheet with micro patterns. High aspect ratio patterns are required to reduce the number of sheets and enhance light efficiency, but there is a limit to the aspect ratio achievable for a given material and cutting tool. Therefore, this study comprised a series of experimental evaluations conducted to determine the machining feasibility in microcutting various aspect ratio patterns on electroless nickel plated die materials when using single-crystal diamond tools. Cutting performance was evaluated at various cutting speeds and depths of cut using different machining methods and machine tools.

• 한국공작기계학회논문집
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• 제17권2호
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• pp.71-76
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• 2008

Micro end-milling is one of effective technology that is able to do ultra-precision machining while increasing the productivity and has wide application field. But selection of machining condition is very difficult because of complicated machining mechanism. Therefore this study was carried out to select working factors to get the optimum surface roughness. Machining condition are depth of cut, feed rate and spindle revolution. The result of this study showed that Surface roughness was affected, in the other of depth of cut, spindle revolution, feed rate. And this study provided an regression equation relating surface roughness to working factors through Regression Analysis and determination coefficient of regression equation had a satisfactory reliability of 79%.

• 한국광학회:학술대회논문집
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• 한국광학회 2007년도 하계학술발표회 논문집
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• pp.57-58
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• 2007

• 한국산학기술학회논문지
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• 제20권1호
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• pp.290-296
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• 2019

차량용 HUD는 자동차 전면 유리창에 안전 운전과 편의 운전 관련 다양한 정보를 표시해 주는 장치로 중요한 역할을 수행한다. 본 논문에서는 증강현실 기술에 적용이 가능한 대면적 비구면 자유형상 미러를 가공하기 위해 초정밀 가공기를 이용하여 가공을 실시하였고 그 결과를 측정하였다. 초정밀 다이아몬드 절삭은 정밀도가 높을 뿐만 아니라 표면 거칠기와 잔류 응력을 낮게 할 수 있어서 우수한 표면 무결성을 갖는 고급 부품의 생산에 유리하다. 또한 비구면 자유 형상의 몰드를 사용함으로써 광학 전달 함수의 개선, 왜곡 경로의 감소 및 특수 이미지 필드 곡률의 실현과 같은 장점을 얻을 수 있다. 이와 같은 비구면 자유형상 금형을 가공하기 위한 방법으로는 초정밀가공기를 이용한 다이아몬드 절삭 방법을 사용하였으며, 제작된 비구면 자유형상 미러 금형의 평가는 비구면 형상 측정기를 이용하여 실시하였다. 이러한 방법에 의해 $1{\mu}m$ 이하의 형상 정밀도(PV)와 $0.02{\mu}m$ 이하의 표면 거칠기(Ra)를 갖는 비구면 자유형상 금형을 제작할 수 있었다.

• 대한기계학회논문집A
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• 제27권12호
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• pp.2085-2091
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• 2003

An ultrasonic machining process has been known as efficient and economical means fer precision machining of glass or ceramic materials. However, because of its complexity, the mechanism of the machining process is still not well understood. Therefore, it is hard to optimize the process parameters effectively. The conventional ultrasonic machining which uses the abrasive slurry only, furthermore, is time-consuming and gives the relatively rough surface. In order to increase the material removal rate and improve the integrity of the machined surface, we have introduced the novel ultrasonic machining technique, Chemical-assisted UltraSonic Machining(CUSM). The desktop-style micro ultrasonic machine has been developed and the z-axis feed is controlled by the constant load control algorithm. To obtain the chemical effects, the low concentration HF(hydrofluoric acid) solution, which erodes glass, added to alumina slurry. Through various experiments and comparison with conventional results, the superiority of CUSM is verified. MRR increases over 200%, the surface roughness is improved and the machining load decreases dramatically.

• 한국생산제조학회지
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• 제22권4호
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• pp.747-754
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• 2013

This study introduces a recently designed desktop-sized NC turning system and its components. This machine is designed for the ultra-precise turning of parts with a diameter of 0.5-20 mm with minimum space usage for the machine. This study aims to achieve submicron-level accuracy of movements and good rigidity of the machine for precision machining using the desktop-sized machine. The components such as the main machine structure, air bearing servo spindle, and XZ stage with needle roller guides are designed, and the designed machine is built with a PC-based CNC controller. Its static and dynamic stiffness performances and positioning resolutions are tested. Through machining tests with single-crystal diamond tools, a form error less than $0.8{\mu}m$ and surface roughness (Ra) of $0.03{\mu}m$ for workpieces are obtained.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1265-1268
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• 2005

Due to the increase of the need for reliable high density information storage devices, the demand for precise machining of the slider in HDD is rapidly growing. The present fabrication process of slider bears some serious problems such as low yield ratio in mass production, which is mainly caused by inefficient machining processes in shaping camber and crown on the slider. In order to increase slider yield ratio in HDD, a new systematic machining process is proposed and developed in this work. This new machining process includes the use of magnetorheological (MR) fluid, a smart polishing material generally used for ultra-fine surface finishing of micro structures. It is shown that the process proposed in this work enables to make camber and crown pattern in the scale of few tens of nanometers. Experiment results shows that the MR polishing can be also used for shaping process of micro structures.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.233-234
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• 2013