• International Journal of Precision Engineering and Manufacturing
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• 제6권2호
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• 한국정밀공학회지
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• 제26권5호
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• pp.64-71
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• 2009

Cylindrical lens core for optical transceiver was designed and machined. With the lens design data, WC asymmetric core surface data were generated for non-revolutional ultra-precision grinding. Grinding process for optimum machining conditions of target surface was studied in terms of surface roughness and form profile. We used experimental results to optimize turbine speed, feed-rate and depth of cut with durable grinding wheel wear. Ground WC cores were measured contact type profilers and verified.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.561-562
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• 2006

To enhance the precision and productivity of ultra precision aspheric surface micro lens, the development of ultra-precision grinding system and process for the aspheric surface micro lens are described. In the work reported in this paper, an ultra-precision grinding system for manufacturing the aspheric surface micro lens was developed by considering the factors affecting the grinding surface roughness and profile accuracy. This paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. The optimization of grinding conditions on ground surface roughness and profiles accuracy is investigated using the design of experiments.

• 한국정밀공학회지
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• 제15권9호
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• pp.152-157
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• 1998

Since early 1960s, the high precision machining technology, so called ultra-precision technology or nano technology, has been developed in many Held based on single point diamond turning technology. The major application of this technology is the optical components with aspherical surfaces. Now a days, customer requires the smaller and lighter optical elements, such as camera video and etc., with higher performance for convenience. So, the manufacturer focuses on the ultra-precision technology. Thus, this technology becomes the major target to challenge the advanced barrier for the next machining technology.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.118-122
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

• 한국정밀공학회지
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• 제33권11호
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• pp.893-898
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• 2016

Plastic array lens are cheap to manufacture; however, plastic is not resistant to high temperatures and moisture. Optical glass represents a better solution but is a more-expensive alternative. Glass array lens can be produced using lithography or precision-molding techniques. The lithography process is commonly used, for instance, in the semiconductor industry; however, the manufacturing costs are high, the processing time is quite long, and spherical aberration is a problem. To obtain high-order aspherical shapes, mold-core manufacturing is conducted through ultra-precision grinding machining. In this paper, a $4{\times}1$ mold core was manufactured using an ultra-precision machine with a jig for the injection molding of an aspherical array lens. The machined mold core was measured using the Form TalySurf PGI 2+ contact-stylus profilometer. The measurement data of the mold core are suitable for the design criterion of below 0.5 um.

• 한국기계가공학회지
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• 제16권6호
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• pp.69-74
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• 2017

In the current machining industry, machining precision is necessary and machining is being carried out. In this ultra-precision machining industry, the fixation of the workpiece is very important and the degree of machining depends on the degree of fixation of the workpiece. In ultra-precision machining, various methods, such as using a vise chuck or the like and using bolt nut coupling, are used for fixing a workpiece to an existing machine tool. In particular, when the precision gripping force of the jig is insufficient during machining of the ultra-precision mold parts, the machining material shakes due to the vibration or friction, and the machining precision is lowered. In the ultra-precision machining of power transmission parts, such as gears, the accuracy of the product is then determined. In addition, the amount of heat generated during machining has a significant effect on the machining accuracy. This is because the vibration value changes according to the grasp force of the jig that fixes the workpiece, and the change in the calorific value due to the change in the main shaft rotation speed of the ultra-precision machining. The increase in the spindle rotation speed during machining decreased the heat generation during machining, and the machining accuracy was also good, and it was confirmed that the machining heat changed according to the fixed state of the workpiece and the machining accuracy also changed. In this study, we try to optimize the driving part of the power vise by using structural analysis, rather than the power vise, using the basic mechanical-type power unit.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.185-186
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.247-248
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• 2013

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.627-628
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• 2010