• 한국기계가공학회지
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• 제17권1호
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• pp.63-68
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• 2018

At present, ultra-precision cutting technology has been studied in Korean research institutes, focusing on development of ultra-precision cutting tool technology and ultra-precision control engineering. However, the developed technologies are still far behind advanced countries. It focuses on metals including aluminum, copper and nickel, and nonmetals including plastics, silicone and germanium which require high precision while using a lathe. It is hard to implement high precision by grinding the aforementioned materials. To address the issue, the ultra-precision cutting technology has been developing by using ultra-precision machine tools very accurate and strong, and diamond tools highly abrasion-resistant. To address this issue, this study aims to conduct ultra-precision cutting by using ECTS (Error Compensation Tool Servo) to improve motion precision of elements and components, and compensate for motion errors in real time. An IR camera is used for analyzing cutting accuracy differences depending on the heat generated in diamond tools in cutting to examine the heat generated in cutting to study cutting accuracy depending on generated heat.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.223-226
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• 2002

Appropriate design/manufacturing conditions, to give outstanding material properties to the $Si_3$$N_4$-BN and AIN-BN based composite materials, will be investigated using the experimental design methods. Ultra-precision machinability of the developed ceramics will be systematically studied in the viewpoint of microstructure and material properties. Also, finite element methods will be applied to define basic principles to significantly improve machinability and various properties. Basic experiments will be performed to develop optimum ultra-precision machining technologies for the developed ceramics. For ultra-precision lapping machining, need to develop a ultra-precision lapping system, suitable metal bonded diamond wheel, and appropriate condition of ultra-precision lapping machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.75-76
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• 2012

• 천문학회보
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• 제28권2호
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• pp.51-51
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• 2003

• 한국정밀공학회지
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• 제32권11호
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• pp.983-988
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• 2015

This paper details a new ultra-precise turning method for increasing surface quality, "Multi Point B Axis Control Method." Machined surface error is minimized by the compensation machining process, but the process leaves residual chip marks and surface roughness. This phenomenon is unavoidable in the diamond turning process using existing machining methods. However, Multi Point B axis control uses a small angle (< $1^{\circ}$) for the unused diamond edge for generation of ultra-fine surfaces; no machining chipping occurs. It is achieved by compensated surface profiling via alignment of the tool radial center on the center of the B axis rotation table. Experimental results show that a diamond turned surface using the Multi Point B axis control method achieved P-V $0.1{\mu}m$ and Ra 1.1nm and these ultra-fine surface qualities are reproducible.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.617-620
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. Is such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. We will examine the control performance and stability before manufacturing the real apparatus by using MATLAB SIMULINK based or pre-designed controller and system modeling.

• Tribology and Lubricants
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• 제27권1호
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• pp.13-18
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• 2011

The ultra-precision products which recently experienced high in demands had included the large areas of most updated technologies, for example, the semiconductor, the computer, the aerospace, the media information, the precision machining. For early 21st century, it was expected that the ultra-precision technologies would be distributed more throughout the market and required securing more nation-wise advancements. Furthermore, there seemed to be increasing in demand of the single crystal diamond tool which was capable of the ultra-precision machining for parts requiring a high degree of complicated details which were more than just simple wrapping and policing. Moreover, the highest degree of precision is currently at 50 nm for some precision parts but not in all. The machining system and technology should be at very high performed level in order to accomplish this degree of the ultra-precision.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.179-180
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• 2007

• 한국정밀공학회지
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• 제23권6호
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• pp.14-21
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• 2006