• Title/Summary/Keyword: UV-Laser

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Growth of Nd : YAl3(BO3)4 Single Crystal for Green Laser (녹색 레이저 발진용 NYAB 단결정 성장)

  • 최덕용;정선태;박승익;정수진
    • Journal of the Korean Ceramic Society
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    • v.32 no.2
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    • pp.270-278
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    • 1995
  • Nd : YAl3(BO3)4 (NYAB) single crystal has been developed for green laser. In this experiment, we found K2O/3MoO3/0.5B2O3 to be a suitable flux for NYAB crystal growth, and grew NYAB crystal by TSSG method using this flux. By varying the cooling rate of solution, seed orientation, and rotation speed, the effects of these growth conditions on the crystal quality and its morphology were examined. Suitable growth conditiions were a cooling rate slower than 2.4$^{\circ}C$/day, the rotation speed of 25~30 rpm, and the <001> seed orienttion. The phases of grown crystal, coexisting and volatile materials were investigated by X-ray diffraction. In addition, the possiblity of laser action was examined by UV analysis.

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Structural and Optical Properties of ZnO Thin Films Grown at Various Plume-Substrate Angles by Pulsed Laser Deposition (펄스레이저 증착법에서 기판-플룸 각 변화가 ZnO 박막의 구조 및 광학적 특성에 미치는 영향)

  • 강정석;강홍성;김재원;이상렬
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.3
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    • pp.329-332
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    • 2004
  • ZnO thin films were grown with different plume-substrate angles by pulsed laser deposition (PLD) to control the amount of ablated species arriving on a substrate per laser shot. The angles between plume propagation direction and substrate plane (P-S angle) were 0$^{\circ}$, 45$^{\circ}$ and 90$^{\circ}$. The growth time was changed in order to adjust film thickness. From the XRD pattern exhibiting a dominant (002) and a minor (101) XRD peak of ZnO, all films were found to be well oriented along c-axis. From the AFM image, it was found that the grain size of ZnO thin film was increased, as P-S angle decreased. UV intensity investigated by PL (Photoluminescence) increased as P-S angle decreased.

Effective Annealing and Crystallization of Si Film for Advanced TFT System

  • Noguchi, Takashi
    • Journal of Information Display
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    • v.11 no.1
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    • pp.12-16
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    • 2010
  • The effect of the crystallization and activated annealing of Si films using an excimer laser and the new CW blue laser are described and compared with furnace annealing for application in advanced TFTs and for future applications. Pulsed excimer laser annealing (ELA) is currently being used extensively as a low-temperature poly-silicon (LTPS) process on glass substrates as its efficiency is high in the ultra-violet (UV) region for thin Si films with thickness of 40-60 nm. ELA enables extremely low resistivity relating to high crystallinity for both the n- and p-type Si films. On the other hand, CW blue laser diode annealing (BLDA) enables the smooth Si surface to have arbitral crystal grains from micro-grains to an anisotropic huge grain structure only by controlling its power density. Both annealing techniques are expected to be applied in the future advanced TFT systems.

A study of excimer laser ablation of polymer (폴리머의 엑시머레이저 어블레이션에 관한 연구)

  • Shin, Dong-Sik;Lee, Je-Hoon;Seo, Jung;Kim, Do-Hoon
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1857-1860
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    • 2003
  • The ablative decomposition mechanism of PMMA(polymethyt methacrylate), PET(polyethylene terephthalate) and PC(polycarbonate) with KrF excimer laser(λ: 248nm, pulse duration: 5ns) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET, PC are a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET, PC are dominated by photochemical process.

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The spectroscopic study of abnormal cells for the infrared femtosecond laser cell processing

  • Harink, Bjorn;Yoo, Byung-Heon;Lim, Hee-Won;Cho, Sung-Hak;Chang, Won-Seok;Kim, Jae-Gu;Whang, Kyung-Hyun
    • Proceedings of the Korean Society of Laser Processing Conference
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    • 2006.11a
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    • pp.46-47
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    • 2006
  • This study is about the spectroscopic characterization of abnormal cells in a macro to micro approach. In the first step a commercial UV-Vis apparatus is used, which is ultimately altered to the limits to decrease detection volume. In the ultimate stage an infrared femtosecond laser setup is used to measure on individual cells.

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Laser Ablation of a ZnO:P2O5 Target under the Presence of a Transverse Magnetic Field

  • Alauddin, Md.;Park, Jin-Jae;Gwak, Doc-Yong;Song, Jae-Kyu;Park, Seung-Min
    • Bulletin of the Korean Chemical Society
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    • v.31 no.4
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    • pp.798-802
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    • 2010
  • From time-resolved optical emission spectra, we have investigated the effects of a transverse magnetic field on the expansion of a plasma plume produced by laser ablation of a ZnO:$P_2O_5$ ceramic target in oxygen active atmosphere. The emission spectra of $Zn^{+*}$, $P^{+*}$, and $Zn^*$ neutrals in the presence of magnetic field turn out to be considerably different from those without magnetic field. The characteristics of the deposited films grown on amorphous fused silica substrates by pulsed laser deposition (PLD) are examined by analyzing their photoluminescence (PL), X-ray diffraction (XRD), and UV-visible spectra.

Study of Nano-scale Fullerene (C60) Clusters Formed in Micro-sized Droplet by UV Irradiation

  • Yeo, Seung-Jun;Ahn, Jeung-Sun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.571-571
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    • 2012
  • We discovered the formation of C60 aggregates in solution by means of photoluminescence spectroscopic study on C60 in solutions. From the in-depth investigation of temperature dependence of the luminescence of C60 in toluene, benzene and CS2 solutions, we reported that the C60 aggregates are formed during cooling at the freezing temperature of these solvents. Furthermore, the C60 aggregates can be changed to stable structures by irradiating with UV pulse-laser (Nd:YAG laser, 355nm). As a consequence, we could obtain nano-scale photo-polymerized C60 clusters, which appear as round-shaped nano- scale particles in high resolution transmission electron-microscopy (HRTEM) images. However, the yield of the nano-scale C60 clusters obtained by this method is too small. So we designed and developed a system to obtain C60 cluster of macroscopic quantity by using ultrasonic nebulizer. In this system, C60 solution was vaporized to several micro-sized droplets in vacuum, resulting in the formation of C60 aggregates by evaporating solvent (toluene). The system was invented to produce nano-scale carbon clusters by the irradiation of UV light upon C60 aggregates in vacuum. We have characterized the products, C60 cluster, obtained from the system by using UV absorption spectra and HPLC spectra. Although the products have a possibility of inclusion various forms of C60 cluster, results support that the product formed from the system by using vaporizer method establishes a new method to obtain C60 cluster in macroscopic quantity. In the presentation, the details of the system and the results of characterization are reported.

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The Effect of Annealing Methods on Dopant Activation and Damage Recovery of Phosphorous ion Shower Doped Poly-Si (다결정 실리콘 박막 위에 P이온 샤워 도핑 후 열처리 방법에 따르는 도펀트 활성화 및 결함 회복에 관한 효과)

  • Kim, Dong-Min;Ro, Jae-Sang;Lee, Ki-Yong
    • Journal of the Korean Electrochemical Society
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    • v.8 no.1
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    • pp.24-31
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    • 2005
  • Ion shower doping with a main ion source of $P_2H_x$ using a source gas mixture of $PH_3/H_2$ was conducted on excimer-laser-annealed (ELA) poly-Si.The crystallinity of the as-implanted samples was measured using a UV-transmittance. The measured value using UV-transmittance was found to correlate well with the one measured using Raman Spectroscopy. The sheet resistance decreases as the acceleration voltage increases from 1kV to 15kV at the moderate doping conditions. It, however, increases as the acceleration voltage increases under the severe doping conditions. The reduction in carrier concentration due to electron trapping at uncured damage after activation annealing seems to be responsible for the rise in sheet resistance. Three different annealing methods were investigated in terms of dopant-activation and damage-recovery, such as furnace annealing, excimer laser annealing, and rapid thermal annealing, respectively.

Fabrication of diffractive optical element for objective lens of small form factor data storage device (초소형 광정보저장기기용 웨이퍼 스케일 대물렌즈 제작을 위한 회절광학소자 성형기술 개발)

  • Bae H.;Lim J.;Jeong K.;Han J.;Yoo J.;Park N.;Kang S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.09a
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    • pp.35-40
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    • 2005
  • The demand for small and high-capacity optical data storage devices has rapidly increased. The areal density of optical disk is increased using higher numerical aperture objective lens and shorter wavelength source. A wafer-scale stacked micro objective lens with a numerical aperture of 0.85 and a focal length of 0.467mm for the 405nm blue- violet laser was designed and fabricated. A diffractive optical element (DOE) was used to compensate the spherical aberration of the objective lens. Among the various fabrication methods for micro DOE, the UV-replication process is more suitable for mass-production. In this study, an 8-stepped DOE pattern as a master was fabricated by photolithography and reactive ion etching process. A flexible mold was fabricated for improving the releasing properties and shape accuracy in UV-molding process. In the replication process, the effects of exposing time and applied pressure on the replication quality were analyzed. Finally, the shapes of master, mold and molded pattern were measured by optical scanning profiler. The deviation between the master and the molded DOE was less than 0.1um. The efficiency of the molded DOE was measured by DOE efficiency measurement system which consists of laser source, sample holder, aperture and optical power meter, and the measured value was $84.5\%$.

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Preparation of ZnO Nanoparticles by Laser Ablation of Dispersed ZnO Powder in Solution (수용액에 분산된 ZnO 분말의 laser ablation에 의한 ZnO 나노입자의 생성)

  • Gang, Wi-Gyeong;Jeong, Yeong-Geun
    • Journal of the Korean Chemical Society
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    • v.50 no.6
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    • pp.440-446
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    • 2006
  • ZnO nanoparticles were prepared by laser ablation of the ZnO powder dispersed in deionized water and surfactant solutions, and characterized using UV-VIS absorption spectroscopy, X-ray diffractometer and Transmission electron microscopy(TEM). ZnO nanoparticles produced show the pure ZnO crystal state without mixed state with Zn(OH)2 or Zn, and have the band gap energy of 3.35 eV, which is comparable to that of bulk ZnO. While ZnO nanoparticles prepared in SDS solution have the average diameter of 28nm with near spherical shape, those prepared in CTAB solution have the average size of 40 nm with mainly rod-like shape. ZnO colloidal solution of CTAB is more stable than that of SDS. These difference according to surfactants can be explained by difference of electrostatic interaction between surface charge of ZnO and surfactant molecules and by solvation effect in solution.