• 제목/요약/키워드: Two-step Crystallization

검색결과 32건 처리시간 0.027초

Effects of Crystallization Behavior on Microwave Dielectric Properties of CaMgSi2O6 Glass-Ceramics

  • Choi, Bo Kyeong;Kim, Eung Soo
    • 한국세라믹학회지
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    • 제50권1호
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    • pp.70-74
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    • 2013
  • Dependence of microwave dielectric properties on the crystallization behaviors of $CaMgSi_2O_6$ (diopside) glass-ceramics was investigated with different heat treatment methods (one and/or two-step). The crystallization behaviors of the specimens, crystallite size and degree of crystallization, were evaluated by differential thermal analysis (DTA), scanning electron microscope (SEM) and X-ray diffraction (XRD) analysis by combined Rietveld and reference intensity ratio (RIR) methods. With an increase in heattreatment temperature, the dielectric constant (K) and the quality factor (Qf) increased due to the increase of the crystallite size and degree of crystallization. The specimens heat-treated by the two-step method had a higher degree of crystallization than the specimens heat-treated by the one-step method, which induced improvement in the quality factor (Qf) of the specimens.

Preparation and Gas Permeability of ZIF-7 Membranes Prepared via Two-step Crystallization Technique

  • Li, Fang;Li, Qiming;Bao, Xinxia;Gui, Jianzhou;Yu, Xiaofei
    • Korean Chemical Engineering Research
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    • 제52권3호
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    • pp.340-346
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    • 2014
  • Continuous and dense ZIF-7 membranes were successfully synthesized on ${\alpha}-Al_2O_3$ porous substrate via two-step crystallization technique. ZIF-7 seeding layer was first deposited on porous ${\alpha}-Al_2O_3$ substrate by in-situ low temperature crystallization, and then ZIF-7 membrane layer can be grown through the secondary high-temperature crystallization. Two synthesis solutions with different concentration were used to prepare ZIF-7 seeding layer and membrane layer on porous ${\alpha}-Al_2O_3$ substrate, respectively. As a result, a continuous and defect-free ZIF-7 membrane layer can be prepared on porous ${\alpha}-Al_2O_3$ substrate, as confirmed by scanning electron microscope. XRD characterization shows that the resulting membrane layer is composed of pure ZIF-7 phase without any impurity. A single gas permeation test of $H_2$, $O_2$, $CH_4$ or $CO_2$ was conducted based on our prepared ZIF-7 membrane. The ZIF-7 membrane exhibited excellent H2 molecular sieving properties due to its suitable pore aperture and defect-free membrane layer.

감압화학증착의 이단계 성장으로 실리콘 기판 위에 증착한 in-situ 인 도핑 다결정 실리콘 박막의 미세구조 조절 (Manipulation of Microstructures of in-situ Phosphorus-Doped Poly Silicon Films deposited on Silicon Substrate Using Two Step Growth of Reduced Pressure Chemical Vapor Deposition)

  • 김홍승;심규환;이승윤;이정용;강진영
    • 한국전기전자재료학회논문지
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    • 제13권2호
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    • pp.95-100
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    • 2000
  • For the well-controlled growing in-situ heavily phosphorus doped polycrystalline Si films directly on Si wafer by reduced pressure chemical vapor deposition, a study is made of the two step growth. When in-situ heavily phosphorus doped Si films were deposited directly on Si (100) wafer, crystal structure in the film is not unique, that is, the single crystal to polycrystalline phase transition occurs at a certain thickness. However, the well-controlled polycrtstalline Si films deposited by two step growth grew directly on Si wafers. Moreover, the two step growth, which employs crystallization of grew directly on Si wafers. Moreover, the two step growth which employs crystallization of amorphous silicon layer grown at low temperature, reveals crucial advantages in manipulating polycrystal structures of in-situ phosphorous doped silicon.

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금속 유도 측면 결정화를 이용한 박막 트랜지스터의 RTA 후속열처리 효과 (RTA Post-annealing Effect on Poly-Si Thin Film Transistors Fabricated by Metal Induced Lateral Crystallization)

  • 최진영;윤여건;주승기
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
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    • pp.274-277
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    • 2000
  • Thin Film Transistor(TFTs) were fabricated from poly-Si crystallized by a two-step annealing process on glass substrates. The combination of low-temperature(500$^{\circ}C$) Metal-Induced Lateral Crystallization(MILC) furnace annealing and high -temperature (700$^{\circ}C$) rapid thermal annealing leads to the improvement of the material quality The TFTs measured with this two-step annealing material exhibit better characteristics than those obtained by using conventional MILC furnace annealing.

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Low temperature solid phase crystallization of amorphous silicon thin film by crystalline activation

  • Kim, Hyung-Taek;Kim, Young-Kwan
    • Journal of Korean Vacuum Science & Technology
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    • 제2권2호
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    • pp.97-100
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    • 1998
  • We have investigated the effects of crystalline activation on solid phase crystallization (SPC) of amorphous silicon (a-Si) thin films. Wet blasting and self ion implantation were employed as the activation treatments to induce macro or micro crystalline damages on deposited a-Si films. Low temperature and larger grain crystallization were obtained by the applied two-step activation. High degree of crystallinity was also observed on both furnace and rapid SPC. crystalline activations showed the promotion of nucleation on the activated regions and the retardation of growth in an amorphous matrix in SPC. The observed behavior of two-step SPC was strongly dependent on the applied activation and annealing processes. It was also found that the diversified effects by macro and micro activations on the SPC were virtually diminished as the annealing temperature increased.

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합성조건의 변화에 따른 FAU(Faujasite)형 제올라이트의 합성 (Synthesis of FAU(Faujasite)-type Zeolite with Variation of Synthesis Condition)

  • 임형미;김봉영;남중희;안병길;오성근;정상진
    • 한국세라믹학회지
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    • 제40권2호
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    • pp.132-138
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    • 2003
  • 출발물질의 종류와 몰비 혼합 방법, 숙성, 결정화 온도와 결정화 시간 등 제올라이트 입자를 합성하는 조건이 FAU 형 제올라이트의 입자크기에 미치는 영향을 연구하였다. 동일한 출발물질이라도 혼합 경로에 따라 생성물의 결정상이 달랐다. 일반적으로 숙성과정을 거친 경우, 특히 숙성온도가 낮은 쪽이 입자 크기가 작았다. 2단계의 혼합겔 제조 방법을 거치는 경우 결정화 기간은 크게 단축되고 입자 크기도 작아졌으나. 1단계에서 제조된 2종의 혼합겔을 모두 숙성하지 않는 경우에는 결정화 시간은 단축되지만, 입자크기는 작아지지 않았다. 액상규산나트륨과 알루민산나트륨, 수산화나트륨을 출발물질로 하여. 저농도와 고농도의 혼합겔을 1차 제조하고, 이 혼합겔을 각각 숙성하고 다시 혼합하여 숙성하는 방법으로 결정화 시간을 단축하고 평균입경 0.4$\mu$m. 비표면적 838 $m^2$/g의 우수한 특성을 가지는 FAU혈 제올라이트를 합성하였다.

Excimer Laser응용 실리콘 결정화 공정에 대한 In-Situ 광학적 연구 (An In-Situ Optical Study on Silicon Crystallization Process Using an Excimer Laser)

  • 김우진;윤창환;박승호;김형준
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.1407-1411
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    • 2003
  • Due to the heat confinement in the shallow region of the target for a short time scale, pulsed laser annealing has received increasing interest for the fabrication of poly-Si thin film transistors(TFTs) on glass as a low cost substrate in the flat panel displays. The formation and growth mechanisms of poly silicon(poly-Si) grains in thin films are investigated using an excimer laser crystallization system. To understand the crystallization mechanism, the grain formations are observed by FESEM analysis. The optical reflectance and transmittance during the crystallization process are measured using HeNe laser optics. A two-step ELC(Excimer Laser Crystallization) process is applied to enhance the grain formation uniformity.

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비정질 실리콘의 ELC 공정에 대한 광학적 연구 (An Optical Study on ELC Process of Amorphous Silicon)

  • 김우진;윤창환;박승호;김형준
    • 한국레이저가공학회지
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    • 제6권2호
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    • pp.9-17
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    • 2003
  • Due to the heat confinement in the shallow region of the target for a short time scale, pulsed laser annealing has received an increasing interest for the fabrication of poly-Si thin film transistors(TFTs) on glass as a low cost substrate in the flat panel displays. The formation and growth mechanisms of poly silicon(poly-Si) grains in thin films are investigated using an excimer laser crystallization system. To understand the crystallization mechanism, the grain formations are observed by FESEM photography. The optical reflectance and transmittance during the crystallization process are measured using HeNe laser optics. A two-step ELC(Excimer Laser Crystallization) process is applied to enhance the grain formation uniformity.

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Characterizations of Two-step Matrix Application Procedures for Imaging Mass Spectrometry

  • Shimma, Shuichi
    • Mass Spectrometry Letters
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    • 제6권1호
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    • pp.21-25
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    • 2015
  • In this paper, I describe the importance of matrix spraying conditions in imaging mass spectrometry (IMS) to obtain successful imaging results. My developed matrix application methodology, which is a "two-step matrix application" sequentially combined with matrix sublimation and spraying matrix solution can provide high reproducibility and high ion yield compared with a conventional direct spraying method. However, insufficient IMS results were obtained occasionally despite the two-step method. Therefore, I wanted to characterize the methodology to continuously provide high quality data. According to my results, the sublimation time was not a strict parameter, and the most important step was the first spraying condition. This means that the extraction conditions from the tissue section and co-crystallization of the matrix were the most important factors.

LI$_2$O-Al$_2$O$_3$-SiO$_2$계 유리의 catalytic crystallization에 미치는 열처리 효과 (The effect of heat treatment on catalytic crystallization in Li$_2$O-Al$_2$O$_3$-SiO$_2$ glass system)

  • 박원규;이채현
    • 한국결정성장학회지
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    • 제6권2호
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    • pp.275-285
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    • 1996
  • The effect of heat-treatment on catalytic crystallization in $LI_2O-Al_2O_3-SiO_2$ glass system over its glass transition temperature was investigated. Glass composition $4Li_2O{cdot}22AL_2O_3{cdot}66SiO_2{cdot}2TiO_2{cdot}2.5ZrO_2{cdot}1.5P_2O_5{cdot}1.0Na_2O{cdot}1.0As_2O_3$ (wt%) was selected and heat-treated at different heating conditions to obtain transparent glass-ceramic. Nucleation and crystallization behaviour of this composition were estimated by differential thermal analysis (DTA) and X-ray diffractometer (XRD) and its thermal expansion coefficients were measured by Dilatometer. As a result, glass transition temperature was $730^{\circ}C$ and two maximum nucleation temperatures were estimated at $730^{\circ}C$ and 82$0^{\circ}C$ using JMA(Johson-Mehl-Avrami) equation by DTA. $ZrTiO_4$ $\beta$-Quartz solid solution and $\beta$-Spodumene crystals were identified by XRD. The optimum crystallization temperature was 92$0^{\circ}C$ and three step heating schedule was expected to be useful to obtain transparent glass-ceramic.

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